Symposium J
Micro- and Nanosystems—Materials and Devices
MRS Proceedings Volume 872 (Buy this Book)
Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie, Somuri Prasad
Below are the published proceedings papers from Symposium J from the 2005 MRS Spring Meeting.
- All visitors have access to the article abstracts.
- MRS Members (login for access) and those with institutional access may view the complete article by selecting the "View Paper" button beneath each article. (NOTE: "View Paper" will only appear for logged-in users with the appropriate access.)
- Non-Members can purchase individual articles by selecting the "Purchase Paper" button beneath each article.
Suggested format for citation of papers in this volume: List all author names: Title of article, in Micro- and Nanosystems—Materials and Devices, edited by Cengiz S. Ozkan, David A. LaVan, Mark McNie, and Somuri Prasad (Mater. Res. Soc. Symp. Proc. 872, Warrendale, PA, 2005), insert paper number.
-
Modification of Deposition Process of Piezoelectric Polycrystalline Film by Hydrothermal Method - Improvement of the Deposition Process by Pre-Treatment Using Hydrogen Peroxide. J1.3
Authors: Akito Endo, Norimichi Kawashima, Shinichi Takeuchi, Mutsuo Ishikawa, Minoru Kurosawa
-
Micromirror Arrays for High Temperature Operation J1.4
Authors: Mahmoud F. Almasri, Bruno A. Frazier
-
Anchoring of Organic Molecules on Cu(001) Surface through S-Headgroup J2.2
Authors: P. Monachesi, L. Chiodo, F. Bussolotti, M.G. Betti, C. Mariani
-
In-Situ Pretreament Approach for Surface Deterioration Alleviation Amidst Thermal Desorption of Si (100) J2.3
Authors: A.F. Pun, X. Wang, J.B. Meeks, S.M Durbin, J.P. Zheng
-
Significance of Surface Topography on Performance and Lifetime of MEMS Switches and Relays J2.4
Authors: Lior Kogut, Kyriakos Komvopoulos
-
Effects of Hydrogen Annealing Process Conditions on Nano Scale Silicon (011) Fins J3.1
Authors: Rownak J. Zaman, Weize Xiong, Rudy Quintanilla, Thomas Schulz, C. Rinn Cleavelin, Rick Wise, Mike Pas, Paul Patruno, Klaus Schruefer, Sanjay K. Banerjee
-
Detection of Residual Stress in Silicon Carbide MEMS by μ-Raman Spectroscopy J3.4
Authors: John C. Zingarelli, Michael A. Marciniak, Jason R. Foley
-
Strain Transduction in Conductor-Modified Polymers J3.6
Authors: Eerik T. Hantsoo, Vanessa B. Chial, Yanan Zhao, Kevin C. Chan, Klint A. Rose, Kenneth S. Wu, Beth L. Pruitt
-
Characterization of Ti/TiN and TiN Conductive Layers for High Temperature MEMS Devices J4.2
Authors: Peter Lange, Birger Ohlsen, Sebastian Puls, Joerg Syre
-
Exchange Spring Type Magnet Realized in FePt/Fe Multilayers Deposited by Magnetron Sputtering J4.3
Authors: Yousong Gu, Dayong Zhang, Xiaoyuan Zhan, Zhen Ji, Xiaolan Zhen, Yue Zhang
-
Fabrication of Electrical Nanocontacts to Nanometer-Sized Materials and Structures using a Focused Ion Beam J5.2
Authors: F. Hernández-Ramírez, O. Casals, J. Rodríguez, A. Vilà, A. Romano-Rodríguez, J.R. Morante, M. Abid, S. Valizadeh
-
Through-Wafer Polysilicon Interconnect Fabrication with In-Situ Boron Doping J5.5
Authors: Ismo Luusua, Kimmo Henttinen, Panu Pekko, Tapani Vehmas, Hannu Luoto
-
Low Temperature MEMS Manufacturing Processes: Plasma Activated Wafer Bonding. J7.1
Authors: Viorel Dragoi, Sharon Farrens, Paul Lindner
-
Spontaneous Growth of Nickel Silicide Nanowires and Formation of Self-Assembled Nanobridges by the Metal Induced Growth Method J7.2
Authors: Joondong Kim, Wayne A. Anderson, Young-Joo Song
-
Self Assembled Monolayer methods in the fabrication of High-Tc Superconductor SNS Junction Nano-Devices J7.4
Authors: Sungwook Kim, In Soon Chang, Fannyben Patel, John T. McDevitt
-
Electrical and Optical Properties of Self-Assembled, Ordered Gold Nanocrystal/Silica Thin Films Prepared by Sol-Gel Processing J7.5
Authors: Kai Yang, Hongyou Fan, Michael J. O’Brien, Sima La Fontaine, Gabriel P. Lopez, Kevin J. Malloy, C. Jeffrey Brinker, Thomas W. Sigmon
-
Micro-Molded High Q Polymer Resonators for Optical Loss Determination J8.1
Authors: Andrea L. Martin, Akil Srinivasan, Deniz K. Armani, Bumki Min, Kerry J. Vahala
-
Fine-Tuning of the Spectral Collection Efficiency in a Multilayer Junction through the LSP Technique J8.3
Authors: M. Fernandes, A. Fantoni, M. Niehus, P. Louro, G. Lavareda, C. N. Carvalho, M. Vieira
-
Mechanically Tunable Nanophotonic Devices J8.6
Authors: W. Park, E. Schonbrun, M. Tinker, Q. Wu, J.-B. Lee
-
Micrometer Scale Silicon Dioxide Tunnels for On-chip Fluidic Sample Delivery to Nanometer-scale Chemical Sensors J9.1
Authors: Ali Gokirmak, Sandip Tiwari
-
A Fabrication of a Novel Microfluidic Reactor Microsynthesis of MIP's Particles J9.4
Authors: Kyung M. Choi, John A. Rogers, Kenneth J. Shea
-
Oligonucleotide metallization for conductive bio-inorganic interfaces in self assembled nanoelectronics and nanosystems J10.2
Authors: Xu Wang, Krishna Singh, Chris Tsai, Roger Lake, Alexander Balandin, Mihri Ozkan, Cengiz Ozkan
-
Efficient Atomization Using MHz MEMS-Based Ultrasonic Nozzles J10.6
Authors: Shirley C. Tsai, Yu L. Song, Yuan F. Chou, J.H Cheng, Chen S. Tsai
-
Thin Film Silicon Microbridges for DNA Detection. J11.2
Authors: T. Adrega, J. Gaspar, F. Fixe, V. Chu, D.M.F. Prazeres, J.P. Conde
-
Fabrication and Electromechanical Properties of Conductive Polymer Microbridge Actuators J11.3
Authors: Guandong Zhang, Joao Gaspar, Virginia Chu, Joao Pedro Conde
-
Low-cost and Chemical Resistant Microfluidic Devices based on Thermoplastic Elastomers for a Novel Biosensor System J11.4
Authors: I. Stoyanov, M. Tewes, S. Glass, M. Koch, M. Löhndorf
-
Multi-Layer Photopolymer Micromachining J11.5
Authors: J.R. Huang, B. Bai, J. Shaw, T.N. Jackson, C.Y. Wei, V. Manivannan, K. Durocher
-
A Novel Latching Relay Fabricated using a Oxide Molded Tungsten Process J11.6
Authors: J.G. Fleming, Michael Baker, David Luck
-
Hot Embossing Lithography: Release Layer Characterization by Chemical Force Microscopy J12.2
Authors: Neil S. Cameron, Arnaud Ott, Hélène Roberge, Teodor Veres
-
Carbohydrate-Carbohydrate Recognition Promotes Cell Adhesion J12.4
Authors: Christine Gourier, Eric Perez, Yongmin Zhang, Pierre Sinaÿ
-
Fabrication and Evaluation of Conducting Polymer Nanowire Heterostructures J13.4
Authors: Yevgeny Berdichevsky, Y.-H. Lo
-
Composition Influence on the Properties of Titanium-Doped Gamma Iron Oxides Nanoparticles Prepared by Laser Pyrolysis Method J13.5
Authors: Ion Morjan, Rodica Alexandrescu, Florian Dumitrache, Ion Sandu1, Monica Scarisoreanu, Lavinia Albu, Iuliana Soare, Ion Voicu, Bohumil David, Oldrich Schneeweiss, Claudiu Fleaca, Ernest Popovici, Victor Ciupina
-
A Systematic Study of the Formation of Nano-Tips on Silicon Thin Films by Excimer Laser Irradiation J13.6
Authors: D.G. Georgiev, R.J. Baird, I. Avrutsky, G. Auner, G. Newaz, N. Tokranova
-
Functionally Engineered Carbon Nanotubes-Peptide Nucleic Acid Nanocomponents J13.7
Authors: Krishna V. Singh, Xu Wang, Rajeev R. Pandey, Roger Lake, Cengiz S. Ozkan, Mihrimah Ozkan
-
Investigation of Electric Characteristics of Nanoscale Composite A1B5C6 Semiconductors: Experiment and Numerical Simulation J13.8
Authors: H. Khlyap, V. Bilozertseva, L. Panchenko, P. Shkumbatiuk, M. Andrukhiv
-
Etching Silicon through an Effective Nanomask: An Electrochemical way to Nanomachining J13.9
Authors: Stefano Borini, Andrea M. Rossi, Luca Boarino, Giampiero Amato
-
An Optical Diffraction Microphone with Active Grating Diaphragm J13.11
Authors: Kazuhiro Suzuki, Hideyuki Funaki, Yujiro Naruse
-
Fabrication of a Bimodal Ferromagnetic Nanosystem in an Etched Silicon Structure and its Magnetic and Magneto-Optic Characterization J13.13
Authors: P. Granitzer, K. Rumpf, P. Pölt, A. Reichmann, S. Surnev, H. Krenn
-
Nanocomposite Thin Film Coatings for Protection of Materials Surfaces J13.14
Authors: R. Asmatulu, R.O. Claus, J.B. Mecham, S.G. Corcoran, Y.X. Wang
-
Embedded Piezoresistive Microcantilever Sensors: Materials for Sensing Chemical and Biological Analytes J13.18
Authors: Timothy L. Porter, William Delinger, Robert L. Gunter
-
Interpretation of the Phonon Frequency Shifts in ZnO Quantum Dots J13.21
Authors: Khan A. Alim, Vladimir A. Fonoberov, Alexander A. Balandin
-
In Vivo Biostability of CVD Silicon Oxide and Silicon Nitride Films J14.3
Authors: John M. Maloney, Sara A. Lipka, Samuel P. Baldwin
-
In-Situ Pretreament Approach for Surface Deterioration Alleviation Amidst Thermal Desorption of GaAs (100) J14.4
Authors: A.F. Pun, X. Wang, J.B. Meeks, S.M Durbin, J.P. Zheng
-
Effect of Dopants on the Band Structure of Barium Strontium Titanate Thin Films J14.5
Authors: Yuebing Zheng, Shijie Wang, Cheng Hon A. Huan
-
Multi-band Terahertz Imaging System Design J15.3
Authors: Liviu Popa-Simil
-
A Wide Band Gap Boron-doped Microcrystalline Silicon Film Obtained with VHF Glow Discharge Method. J15.5
Authors: Feng Zhu, Ying Zhao, Changcun Wei, Xiaodan Zhang, Yantao Gao, Jian Sun, Xinhua Geng
-
Diode Laser Bonding of Planar MEMS, MOEMS, & Microfluidic Devices J15.6
Authors: Jie-Wei Chen, Jerry Zybko, James Clements
-
Investigating Narrow Plasmons in Nanoparticle Arrays Fabricated Using Electron Beam Lithography. J16.1
Authors: Erin M. Hicks, Linda Gunnarrsson, Tomas Rindevicius, Shengli Zou, Bengt Kasemo, Mikael Käll, Goerge C. Schatz, Kenneth G. Spears, Richard P. Van
-
Microchannel Arrays in Borophosphosilicate Glass for Photonic Device and Optical Sensor Applications J16.3
Authors: Claire L. Callender, Patrick Dumais, Chantal Blanchetière, Christopher J. Ledderhof, Julian P. Noad
-
Development of Humidity Sensors using Layer-by-Layer nanoAssembly of Polypyrrole J16.4
Authors: R. Nohria, Y. Su, R.K. Khillan, R. Dikshit, Y. Lvov, K. Varahramyan
-
Stabilized Pd-Alloy/AlN/Si Hydrogen Sensors J16.5
Authors: Linfeng Zhang, Ibrahim Al-Homoudi, Md.H. Rahman, Erik F. McCullen, Lajos Rimai, Ronald J. Baird, Ratna Naik, Golam Newaz, Gregory W. Auner, K.Y. Simon Ng
-
Multi-Technology Measurements of Amorphous Carbon Films J17.5
Authors: Jingmin Leng, Jon Opsal, Heath Pois, Osman Sorkhabi, Xiaoping Liu, Stephen J. Morris
-
Towards Novel Light-Activated Shape Memory Polymer: Thermomechanical Properties of Photo-Responsive Polymers J18.6
Authors: Emily A. Snyder, Tat H. Tong
-
Surface Modification and Neural Tissue Culture of Thin Film Electrode Materials J18.8
Authors: Sachin Thanawala, Saida. P. Khan, Olena Palyvoda, Daniel. G. Georgiev, Ibrahim A. Al-Homoudi, Golam Newaz, Gregory Auner
-
Atomic Force Microscopy Probe with Integrated Loop and Shielded Leads for Micromagnetic Sensing J18.9
Authors: D.P. Lagally, A. Karbassi, Y. Wang, C.A. Paulson, D.W. van der Weide
-
Functionalisation of Microfluidic Channels with In Situ Grown Carbon Nanotubes J18.10
Authors: K. Gjerde, T. Schurmann, K.B.K. Teo, M. Aono, W.I. Milne, P. Bøggild
-
Growth, characterization and processing of VO2 thin films for micro-switching devices J18.11
Authors: Mohamed Soltani, Luc Stafford, Mohamed Chaker, Joëlle Margot
-
Effects of Substrate Materials on the Electrical Behavior of Pd/AlN/Semiconductor Based Hydrogen Sensors J18.12
Authors: Md. H. Rahman, L. Zhang, L. Rimai, R.J. Baird, R. Naik, K.Y.S. Ng, G. Auner, G. Newaz
-
Ultra-Fine ZnO Nanobelts and their Photoluminescence emission J18.16
Authors: Aurangzeb Khan, Martin E. Kordesch
-
Synthesis of Nanoscale Devices for Neural Electrophysiological Imaging J18.17
Authors: Ludovico M. Dell’Acqua-Bellavitis, Jake D. Ballard, Rena Bizios, Richard W. Siegel
-
Anomalous Temperature Dependence of Fermi-Edge Singularity in Modulation-Doped AlGaAs/InGaAs/GaAs Hetero-structures J18.18
Authors: K. Gopalakrishna Naik, K.S.R.K. Rao, T. Srinivasan, R. Muralidharan, S.K. Mehta
-
Composite Contacts in Microsystems: Fabrication of Metal-Nanostructured Titania Nanocomposites J18.21
Authors: Abu Samah Zuruzi, Marcus S. Ward, Chang Song Ding, Noel C. MacDonald
-
Thermally Stimulated Electron Emission from Scratched Metal Surfaces J18.24
Authors: Keiji Nakayama, Hitoshi Matamura
-
Fabrication Methods for Improved Electromechanical Behavior in Piezoelectric Membranes J18.26
Authors: M.C. Robinson, P.D. Hayenga, J.H. Cho, C.D. Richards, R.F. Richards, D.F. Bahr
-
Quantum Sizing of Power Electronics: A Trend Towards Miniaturization of Power Electronic Systems and Equipments J18.28
Authors: Arindam Chakraborty, Ali Emadi
-
In Search of Metallic Nanowires on Si(001) J18.29
Authors: Inder P. Batra, Bikash C. Gupta, Aakanksha A. Panjwani
-
Space Charge Limited Current in Porous Silicon with Traces of Nitrogen Dioxide J18.30
Authors: Stefano Borini, Andrea M. Rossi, Luca Boarino, Giampiero Amato
-
Functional Carbon Nanotube Substrates for Tissue Engineering Applications J18.32
Authors: X. Zhang, C. Ozkan, S. Prasad, M. Ozkan, S. Niyogi
-
Influence of Growth Parameters and Annealing on the Properties of MBE Grown GaAsSbN SQWs J18.34
Authors: Liangjin Wu, Shanthi Iyer, Kalyan Nunna, Sudhakar Bharatan, Jia Li, Ward J. Collis
-
Critical Process Issues in the Fabrication of A Lateral, Self-Cleaning, MEMS Switch. J19.3
Authors: Yong Shi, Sang-Gook Kim
-
Self Organized InAs Quantum Dots on Patterned GaAs Substrates J19.4
Authors: M. Schramboeck, W. Schrenk, A. M. Andrews, T. Roch, G. Fasching, W. Brezna, A. Lugstein, G. Strasser
-
Colloid Crystal Wires from Directed Assembly J20.3
Authors: Feng Li, Xavier Bade, Jan Linnros, John B. Wiley
-
The Performance of the Gate Electrode using Co Thin Films Selectively Deposited on SAMs Patterns for a-Si TFT J20.4
Authors: H.J. Yang, J.G. Lee, B.S. Cho, J.H. Lee, C.O. Jeong, K.H. Chung
-
Surface Electronic States and Electrostatic Attractive Forces between Metals or Semiconductor and Tribocharged Polymers J21.1
Authors: Yoshihiro Momose, Masahiro Umeki, Daisuke Suzuki, Keiji Nakayama
-
Chirality Characterization of Dispersed Single Wall Carbon Nanotubes J21.2
Authors: Min Namkung, Phillip A. Williams, Candis D. Mayweather, Buzz Wincheski, Cheol Park, Juock S. Namkung
-
Energetic Neutral Atom Beam Lithography/Epitaxy for Nanoscale Device Fabrication J21.3
Authors: Elshan A. Akhadov, Alexander H. Mueller, Mark A. Hoffbauer
-
TiN/GaN Metal/Semiconductor Multilayer Nanocomposites Grown by Reactive Pulsed Laser Deposition. J21.4
Authors: Vijay Rawat, Timothy D. Sands
-
Zinc Powder Evaporation: an Efficient Way of Synthesizing a Wide Range of High-Quality ZnO Nanostructures at Lower Temperature J21.6
Authors: Yue Zhang, Jian He, Yunhua Huang, Yousong Gu, Zhen Ji, Cheng Zhou