Symposium A
Amorphous and Nanocrystalline Silicon Science and Technology2004
MRS Proceedings Volume 808 (Buy this Book)
Editors: Gautam Ganguly, Michio Kondo, Eric A. Schiff, Reinhard Carius, Rana Biswas
Below are the published proceedings from Symposium A from the 2004 MRS Spring Meeting.
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Suggested format for citation of papers in this volume: List all author names: Title of article, in Amorphous and Nanocrystalline Silicon Science and Technology2004, edited by Gautam Ganguly, Michio Kondo, Eric A. Schiff, Reinhard Carius, and Rana Biswas (Mater. Res. Soc. Symp. Proc. 808, Warrendale, PA, 2004), insert paper number.
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Low Temperature (75 oC) Hydrogenated Nanocrystalline Silicon Films grown by Conventional Plasma Enhanced Chemical Vapor Deposition for Thin Film Transistors
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Reel-to- Reel Cassette Cluster Tool System for Thin Film Transistor and Four Terminal Solar Cell Fabrication
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Temperature Dependent Carrier Transport in Single-Crystalline Si TFTs inside a Location-Controlled Grain
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Fabrication and Characterization of a Germanium Quantum-dot Transistor Formed by Selective Oxidation of SiGe/Si-on-Insulator
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100-nm Channel Length a-Si:H Vertical Thin Film Transistors
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A SIMPLE EXPLANATION ON THE CRYSTALLIZATION KINETICS OF A CW LASER CRYSTALLIZATION OF AMORPHOUS SILICON
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METASTABLE DEFECTS IN a-Si:H and a-Ge:H: THE ROLE OF HYDROGEN
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UNTITLED - [A1_1-H1_1.pdf]
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Absence of enhanced stability in deuterated amorphous silicon thin film transistors A2.2
Authors: Shufan Lin, Andrew J. Flewitt, William I. Milne, Ralf B. Wehrspohn, Martin J. Powell
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Study of 3-MeV Electron Radiation Damage in Amorphous Silicon with TRMC A2.3
Authors: A. Klaver, J. M. Warman, M. P. de-Haas, J. W. Metselaar, R. A. C. M. van-Swaaij
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Tritium Induced Defects in Amorphous Silicon A2.4
Authors: J. Whitaker, J. Viner, S. Zukotynski, E. Johnson, P. C. Taylor, P. Stradins
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Evolution of D0 and non-D0 Light Induced Defect States in a-Si:H Materials and Their Respective Contribution to Carrier Recombination A2.5
Authors: J. M. Pearce, J. Deng, V. Vlahos, R. W. Collins, C. R. Wronski, J. Whitaker, P. C. Taylor
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H evolution from nano-crystalline silicon- comparison of simulation and experiment A2.6
Authors: R. Biswas, B. C. Pan
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Gate Overlapped Lightly Doped Drain Poly-Si TFTs With 45 ° Tilt Implant For Source and Drain A4.1
Authors: Jae-Hoon Lee, Moon-Young Shin, HeeSun Shin, Woo-Jin Nam, Min-Koo Han
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Location Control of Crystal Grains in Excimer Laser Crystallization of Silicon Thin Films for Single-Grain TFTs A4.2
Authors: Hideya Kumomi, Hiroaki Wakiyama, Gou Nakagawa, Kenji Makihira, Tanemasa Asano
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Silicon-Hydrogen Bonds in Boron and Phosphorous Doped Polycrystalline Silicon Thin Films A4.4
Authors: R. Saleh, N. H. Nickel
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CW Argon-ion laser initiated aluminum induced crystallization of amorphous silicon thin films A4.5
Authors: Sampath K. Paduru, Husam H. Abu-safe, Hameed A. Naseem, Adnan Al-Shariah, William D. Brown
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Monolithically Integrated p- and n- Channel Thin Film Transistors of Nanocrystalline Silicon on Plastic Substrates A4.6
Authors: I-Chun Cheng, Sigurd Wagner
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Fabrication and Characterization of Hydrogenated Amorphous Silicon Bipolar Thin Film Transistor (B-TFT) A4.7
Authors: Yue Kuo, Yu Lei, Helinda Nominanda
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Bottom-Gate TFTs with Channel Layer Grown by Pulsed PECVD Technique A4.8
Authors: David J. Grant, Czang-Ho Lee, Arokia Nathan, Ujjwal K. Das, Arun Madan
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Accelerated Stress Testing of a-Si:H TFTs for AMOLED Displays A4.11
Authors: Kapil Sakariya, Clement K. M. Ng, I-Heng Huang, Afrin Sultana, Sheng Tao, Arokia Nathan
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The p-channel a-Si:H Thin Film Transistor with Plasma Etched Copper Electrodes A4.12
Authors: Helinda Nominanda, Guojun Liu, Hyun Ho Lee, Yue Kuo
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Statistical Modeling of Grain-Enhanced Polysilicon Thin-Film Transistor in Consideration of Grain Boundary Distribution A4.13
Authors: C. F. Cheng, M. C. Poon, C. W. Kok, M. Chan
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Intrinsic and Doped μc-Si:H TFT Layers using 13.56 MHz PECVD at 250 oC A4.14
Authors: Czang-Ho Lee, Denis Striakhilev, Arokia Nathan
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Low-Temperature (<150°C) Doping Techniques for Polysilicon TFT's A4.15
Authors: W. S. Hong, J. M. Kim, S. H. Han, Y. H. Lee, Y. W. Kim, S. H. Lee, D. Y. Kim
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Low Temperature a-Si:H TFTs with a SiO2 Gate Insulator Deposited by Liquid Phase Deposition A4.18
Authors: Richard B. M. Cross, David P. Oxley, Meenakshi Manhas, Ekkanath M. Sankara Narayanan
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Metal induced crystallization of SiGe at 370°C for monolithically integrated MEMS applications A4.19
Authors: Sherif Sedky, Kris Baert, Chris Van-Hoof, Yi Wang, Omer Van-Der-Biest, Ann Witvrouw
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Aluminum-Induced Crystallization of PECVD Amorphous Silicon. A4.20
Authors: Kenneth Jenq, Shawn S. Chang, Yaguang Lian, Grant Z. Pan, Yahya Rahmat-Samii
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Solar Cells on Foreign Substrates Using Poly-Si Thin Films by Metal-Induced Growth A4.21
Authors: Chunhai Ji, Wayne A. Anderson
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The effect of substrate temperature and interface oxide layer on aluminum induced crystallization of sputtered amorphous silicon A4.22
Authors: Maruf Hossain, Husam Abu-Safe, Marwan Barghouti, Hameed Naseem, William D. Brown
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Initial Interaction of Crystalline Al /Amorphous Si Bilayer during Annealing A4.23
Authors: Yonghao Zhao, Jiangyong Wang, Eric J. Mittemeijer
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In-situ Aluminum-Induced Crystallization of Si Thin-Films on Glass Substrates above the Eutectic Temperature using HW-CVD A4.24
Authors: Ozgenc Ebil, Roger Aparicio, Robert Birkmire
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Increase of temperature and crystallinity during electrical switching in microcrystalline silicon A4.25
Authors: Jian Hu, Paul Stradins, Howard M. Branz, Qi Wang, J. R. Weinberg-Wolf, E. C. T. Harley, Chris Lawyer, Brittany Huie, Daxing Han
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Modeling of Aluminum Induced Lateral Crystallization of Hydrogenated Amorphous Silicon A4.26
Authors: Mohammad Saad Abbasi, Husam Abu-Safe, Hameed Naseem, W. D. Brown
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Development of a Porous Silicon Product for Small Molecule Mass Spectrometry A4.28
Authors: Grace Credo, Hillary Hewitson, Christopher Benevides, Edouard S. P. Bouvier
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Amorphous Si1-YGeY:H,F films obtained by Low Frequency PECVD for uncooled microbolometers A4.29
Authors: R. Ambrosio, A. Torres, A. Kosarev, A. S. Abramov, A. Heredia, M. Landa, M. Garcia
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High Current Density in μc-Si PECVD Diodes for Low Temperature Applications A4.30
Authors: Patricia A. Beck, Janice H. Nickel, Peter G. Hartwell
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Si Wire Light Emission Changes During Si/SiOx Interface Formation A4.35
Authors: F. G. Becerril-Espinoza, T. V. Torchynska, M. Morales Rodrķguez, L. Khomenkova, L. V. Scherbina
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About the luminescence mechanisms of composite a-Si:nc-Si system obtained by ion-beam amorphization in the wide dose region A4.36
Authors: David I. Tetelbaum, Alexander A. Ezhevskii, Alexey N. Mikhaylov, Mikhail Yu. Lebedev, Yuliya A. Mendeleva, Roman G. Ershov, Sergey V. Morozov
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Correlation Between Surface Charge Accumulation and Excitation Intensity Dependent Red-Shifted Micro-Photoluminescence of Si-Implanted Quartz With Embedded Si Nanocrystals A4.37
Authors: Chun-Jung Lin, Kuo-Cheng Yu, Hao-Chung Kuo, Miao-Jia Ou-yang, Gong-Ru Lin
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Buffer-layer Effect on Mixed-Phase Cells Studied by Micro-Raman and Photoluminescence Spectroscopy A4.38
Authors: Andrea Hilchey, Chris Lawyer, Keda Wang, Daxing Han, Baojie Yan, Guozhen Yue, Jeffrey Yang, Subhendu Guha
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Reversible Ordering of a-Si1-xGex by the Combined Effect of Light and Temperature A4.39
Authors: P. Martķn, A. Torres, J. Jiménez, A. Rodrķguez, J. Sangrador, T. Rodrķguez
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Evaluation of an alternative technique for the fabrication of direct detector X-ray imagers: spray pyrolysis of lead iodide and mercury iodide A4.40
Authors: J. F. Condeles, J. C. Ugucioni, M. Mulato
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Are the Current Models Helpful to Understanding Staebler-Wronski Degradation? A4.41
Authors: Bolko von-Roedern
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Two terminal large area single and double p-i-n devices for image and color recognition A4.43
Authors: P. Louro, M. Vieira, A. Fantoni, M. Fernandes, C. Nunes-de-Carvalho, G. Lavareda
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A real-time optical signal and image processing p-i-n/p-i-n device A4.44
Authors: M. Vieira, P. Louro, M. Fernandes, A. Fantoni, C. Mendes, J. Martins
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Detection Limits of a nip a-Si:H Linear Array Position Sensitive Detector A4.45
Authors: R. Martins, D. Costa, H. Įguas, F. Soares, A. Marques, I. Ferreira, P. Borges, E. Fortunato
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Performance Analysis of a-Si:H Detectors Deposited on CMOS Chips. A4.46
Authors: C. Miazza, S. Dunand, N. Wyrsch, A. Shah, N. Blanc, R. Kaufmann, L. Cavalier
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In situ observation of silicon epitaxy breakdown with real-time spectroscopic ellipsometry A5.1
Authors: Charles W. Teplin, Dean H. Levi, Qi Wang, Eugene Iwaniczko, Kim M. Jones, Howard M. Branz
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Comparison of Phase Diagrams for vhf and rf Plasma-Enhanced Chemical Vapor Deposition of Si:H Films A5.2
Authors: G. M. Ferreira, A. S. Ferlauto, J. M. Pearce, C. R. Wronski, C. Ross, R. W. Collins
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Phase diagram and microstructure of microcrystalline and amorphous silicon: a numerical growth simulation A5.3
Authors: Julien Bailat, Evelyne Vallat-Sauvain, André Vallat, Arvind Shah
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Surface Processes During Growth of Hydrogenated Amorphous Silicon A5.5
Authors: Eray S. Aydil, Sumit Agarwal, Mayur Valipa, Saravanapriyan Sriraman, Dimitrios Maroudas
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Influence of the Distribution of Tail States in a-Si:H on the Field Dependence of Carrier Drift Mobilities A5.6
Authors: Monica Brinza, Evguenia V. Emelianova, André Stesmans, Guy J. Adriaenssens
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Interpretation of Transient Photocurrents in Coplanar and Sandwich PIN Microcrystalline Silicon Structures A5.7
Authors: Steve Reynolds, Vladimir Smirnov, Charlie Main, Friedhelm Finger, Reinhard Carius
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The Role of Charged Gap States in Light-Induced Degradation of Single Junction a-Si:H Solar Cells A5.8
Authors: M. Zeman, V. Nįdady, J. W. Metselaar
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Femtosecond Far-Infrared Studies of Photoconductivity in a-Si:H and a-SiGe:H A5.9
Authors: A. V. V. Nampoothiri, S. L. Dexheimer
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Excimer-laser growth of Si large-grain arrays A6.2
Authors: Masakiyo Matsumura
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Amorphous and Microcrystalline Silicon based Photovoltaic A6.4
Authors: Subhendu Guha
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Amorphous Silicon based Solar Cell Technologies: Status, Challenges, and Opportunities A7.5
Authors: Rajeewa R. Arya
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The status of and challenges in CdTe thin-film solar-cell technology A7.6
Authors: Alvin D. Compaan
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High-Rate Plasma Process for Microcrystalline Silicon: Over 9% Efficiency Single Junction Solar Cells A8.1
Authors: Takuya Matsui, Akihisa Matsuda, Michio Kondo
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Defect Densities, Diffusion Lengths and Device Physics in Nanocrystalline Si:H Solar Cells A8.2
Authors: Vikram L. Dalal, Puneet Sharma, David Staab, Max Noack, Keqin Han
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Materials and Interface Optimization of Heterojunction Silicon (HIT) Solar Cells Using In-Situ Real-Time Spectroscopic Ellipsometry A8.3
Authors: D. H. Levi, C. W. Teplin, E. Iwaniczko, R. K. Ahrenkiel, H. M. Branz, M. R. Page, Y. Yan, Q. Wang, T. H. Wang
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Protocrystalline Silicon at High Rate from Undiluted Silane A8.4
Authors: R. E. I. Schropp, M. K. van-Veen, C. H. M. van-der-Werf, D. L. Williamson, A. H. Mahan
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Microstructure Evolution with Thickness and Hydrogen Dilution Profile in Microcrystalline Silicon Solar Cells A8.5
Authors: Baojie Yan, Guozhen Yue, Jeffrey Yang, Subhendu Guha, D. L. Williamson, Daxing Han, Chun-Sheng Jiang
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Understanding the structure of Si nanoclusters in a/nc-Si:H films using spherical aberration-corrected transmission electron microscopy A8.7
Authors: Christopher R. Perrey, Siri S. Thompson, Markus Lentzen, Uwe Kortshagen, C. Barry Carter
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Characterization of the Bulk Recombination in Hydrogenated Amorphous Silicon Solar Cells A8.8
Authors: J. Deng, J. M. Pearce, V. Vlahos, R. W. Collins, C. R. Wronski
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Electronic Properties of RF Glow Discharge Intrinsic Microcrystalline Silicon near the Amorphous Silicon Phase Boundary A8.9
Authors: James J. Gutierrez, Adam F. Halverson, Eric D. Tweeten, J. David Cohen, Baojie Yan, Jeffrey C. Yang, Subhendu Guha
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Hole Drift-Mobility Measurements and Multiple Trapping in Microcrystalline Silicon A8.10
Authors: T. Dylla, F. Finger, E. A. Schiff
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A Phase Diagram for Morphology and Properties of Low Temperature-Deposited Polycrystalline Silicon Grown by Hot Wire Chemical Vapor Deposition A8.11
Authors: Christine E. Richardson, Maribeth S. Mason, Harry A. Atwater
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Identification of Possible Bonding Sites for Post Deposition Oxygen Absorption in Microcrystalline Silicon A9.2
Authors: L. M. Gedvilas, A. H. Mahan
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Optical and Electronic Characterization of a-SiGe:H Thin Films Prepared by a Novel Hollow Cathode Deposition Technique A9.4
Authors: R. J. Soukup, N. J. Ianno, Scott A. Darveau, Christopher L. Exstrom
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Extension of the Constant Photocurrent Method to Determine Densities of Occupied and Unoccupied Localised States A9.5
Authors: Charlie Main, Steve Reynolds, Ivica Zrincak, Amar Merazga
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Electric-Field Dependence of Photocarrier Properties in the Steady-State Photocarrier Grating Experiment A9.7
Authors: R. Brüggemann, R. I. Badran
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Transient and Modulated Photoconductivity in Microcrystalline Silicon A9.8
Authors: R. Brüggemann, C. Longeaud, J.P. Kleider
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Metastability in Undoped Microcrystalline Silicon Thin Films Deposited by HWCVD A9.10
Authors: S. K. Persheyev, K. A. ONeill, S. Anthony, M. J. Rose, V. Smirnov, S. Reynolds
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The Influence of Light-Soaking and Atmospheric Adsorption on Microcrystalline Silicon Films studied by Coplanar Transient Photoconductivity A9.11
Authors: V. Smirnov, S. Reynolds, F. Finger, C. Main, R. Carius
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Surface Potential and Surface Photovoltage of Oxide and Nitride coated multicrystalline Silicon Solar Cells using a Scanning Kelvin Probe A9.12
Authors: Iain D. Baikie
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External rf substrate biasing during a-Si:H film growth using the expanding thermal plasma technique A9.21
Authors: A. H. M. Smets, W. M. M. Kessels, M. C. M. van-de-Sanden
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High-quality hydrogen diluted SiNx films deposited by hot-wire chemical vapor deposition A9.23
Authors: Fengzhen Liu, Lynn Gedvilas, Brian Keyes, Errol Sanchez, Shulin Wang, Qi Wang
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New ultrahigh vacuum setup and advanced diagnostic techniques for studying a-Si:H film growth by radical beams A9.24
Authors: J. P. M. Hoefnagels, E. Langereis, M. C. M. van-de-Sanden, W. M. M. Kessels
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Structural and Electronic Properties of SiCl4-based Microcrystalline Silicon Films A9.26
Authors: Wolfhard Beyer, Reinhard Carius, Michael Lejeune, Uwe Zastrow
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Growth and Characterization of Poly-SiGe prepared by Reactive Thermal CVD A9.28
Authors: Jianjun Zhang, Kousaku Shimizu, Jun-ichi Hanna
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Effects of Facet Growth and Nucleation on Microcrystalline Silicon by Numerical Model A9.29
Authors: Yasuyuki Kobayashi, Koji Satake
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Growth of Hydrogenated Microcrystalline Silicon (µc-Si:H) Films by HWCVD Using a Graphite Catalyzer A9.30
Authors: D. M. Bhusari, P. Kumar, M. Kupich, B. Schroeder
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Formation of periodic grain boundary in an Si thin film crystallized by a linearly polarized Nd:YAG pulse laser with an ultra sonic oscillator A9.32
Authors: Hirokazu Kaki, Takehiko Ootani, Susumu Horita
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Enhanced Surface Diffusion in Low-temperature a-Si:H Processing A9.33
Authors: George T. Dalakos, Joel L. Plawsky, Peter D. Persans
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An Investigation of Silicon Oxide Thin Film by Atomic Layer Deposition A9.34
Authors: Joo-Hyeon Lee, Chang-Hee Han, Un-Jung Kim, Chong-Ook Park, Sa-Kyun Rha, Won-Jun Lee
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Roughness evolution of high-rate deposited a-SiNx:H films studied by atomic force microscopy and real time spectroscopic ellipsometry A9.35
Authors: P. J. van-den-Oever, M. C. M. van-de-Sanden, W. M. M. Kessels
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Development of Top-Gate Nanocrystalline Si:H Thin Film Transistors A9.37
Authors: Jarrod McDonald, Vikram L. Dalal, Max Noack
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Low-Temperature Silicon Films Deposition by Pulsed Cathodic Arc Process for Microsystem Technologies A9.38
Authors: Hui Xia, Yan Yang, Paul L. Bergstrom
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Influence of catalyzer area and design on the growth of intrinsic hot-wire CVD thin-film silicon for photovoltaic applications A9.39
Authors: Markus Kupich, Dmitry Grunsky, Bernd Hofferberth, Bernd Schröder
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Large-Area Hydrogenated Amorphous and Microcrystalline Silicon Double-Junction Solar Cells A9.41
Authors: Baojie Yan, Guozhen Yue, Arindam Banerjee, Jeffrey Yang, Subhendu Guha
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Measurement of the Electrical Potential on Amorphous Silicon and Amorphous Silicon Germanium Alloy Thin-Film Solar Cells by Scanning Kelvin Probe Microscopy A9.42
Authors: C. S. Jiang, H. R. Moutinho, Q. Wang, M. M. Al-Jassim, B. Yan, J. Yang, S. Guha
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Microcrystalline Silicon Solar Cells Deposited Using Modified Very-high-frequency Glow Discharge and Its Application in Multi-junction Structures A9.43
Authors: Guozhen Yue, Baojie Yan, Jessica M. Owens, Jeffrey Yang, Subhendu Guha
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Development of transparent conductive oxide materials for improved back reflector performance for amorphous silicon based solar cells A9.44
Authors: Scott J. Jones, David Tsu, Tongyu Liu, Jeff Steele, Rey Capangpangan, Masat Izu
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Dominant effect of p/i interface on dark J-V characteristics in p-i-n nano-crystalline Si solar cells A9.45
Authors: U. Das, A. Bozsa, A. Madan
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Evaluation of Ar-Diluted Silane PECVD for Thin Film Si:H Based Solar Cells A9.46
Authors: J. A. Anna Selvan, Yuan-Min Li, Liwei Li, Alan E. Delahoy
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Deposition of Optimal a-Si:H and a-SiGe:H by HWCVD Using the Same Filament Temperature and Substrate Temperature A9.48
Authors: A. H. Mahan, Y. Xu, L. M. Gedvilas
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Devices Fabrication With Narrow-Bandgap a-SiGe:H Alloys Deposited by HWCVD A9.51
Authors: Yueqin Xu, Baojie Yan, Brent P. Nelson, Eugene Iwaniczko, Robert C. Reedy, A. H. Mahan, Howard Branz
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Correlation of Hydrogenated Nanocrystalline Silicon Microstructure and Solar Cell Performance A9.53
Authors: Keda Wang, Anthony Canning, J. R. Weinberg-Wolf, E. C. T. Harley, Daxing Han, Baojie Yan, Guozhen Yue, Jeffrey Yang, Subhendu Guha
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Hydrogen Injection in ETP Plasma Jet for Fast-Deposition of High-Quality a-Si:H A9.54
Authors: A. M. H. N. Petit, R. A. C. M. van-Swaaij, M. C. M. van-de-Sanden
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Fabrication and Characterization of a Germanium Quantum-dot Transistor Formed by Selective Oxidation of SiGe/Si-on-Insulator A10.2
Authors: W. M. Liao, S. W. Lin, S. S. Tseng, C. K. Lin, M. T. Kuo, P. W. Li
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Suppression of Staebler-Wronski Effect Induced Electrical Crosstalk in a Si:H-Based Image Sensors A10.6
Authors: Jeremy A. Theil
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Vertically integrated amorphous silicon particle sensors A10.7
Authors: N. Wyrsch, C. Miazza, S. Dunand, A. Shah, D. Moraes, G. Anelli, M. Despeisse, P. Jarron, G. Dissertori, G. Viertel
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Amorphous silicon backplane with polymer MEMS structures for electrophoretic displays A10.8
Authors: J. H. Daniel, B. S. Krusor, N. Chopra, R. A. Street, P. M. Kazmaier, S. E. Ready, J. H. Ho
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MEMS Microresonators Based on Nanocrystalline Silicon A10.9
Authors: J. Gaspar, T. Adrega, V. Chu, J. P. Conde
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Threshold Voltage and Field for Metal Filament Formation in Hydrogenated Amorphous Silicon A10.10
Authors: P. Stradins, H. M. Branz, W. B. Jackson, R. S. Crandall, J. Hu, Q. Wang