Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography
MRS Proceedings Volume 1179E (Electronic Content Only - No Book Published)
Editors: S.M. Kuebler, V.T. Milam
The volume is not available in print book form from MRS. Readers may access individual documents on line (see details below) or purchase an on-demand print collection from Curran Associates, Inc.
Below are the published proceedings articles from Symposium BB from the 2009 MRS Spring Meeting.
Suggested format for citation of papers in this volume: List all author names: Title of article, in Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography, edited by S.M. Kuebler and V.T. Milam (Mater. Res. Soc. Symp. Proc. Volume 1179E, Warrendale, PA, 2009), insert paper number.