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Author(s):
Steffen Schmidt, Young-Woo Ok, Dmitri O. Klenov, Jiwei Lu, Sean P. Keane, Susanne Stemmer

The microstructure and orientation relationships of epitaxial (111)-oriented SrTiO₃ thin films grown by radio frequency magnetron sputtering on epitaxial (111)-oriented Pt/Ti electrodes on sapphire were investigated using x-ray diffraction, conventional and scanning transmission electron microscopy. We show that the epitaxial growth of (111)-oriented SrTiO₃ films was promoted by thin Ti adhesion layers underneath the Pt electrode. The SrTiO₃ films nucleated with two twin-related orientation variants, rotated by 180° about the <111> surface normal. The twin boundaries were oriented approximately normal to the film plane, but no strong preference for a specific boundary plane was observed. Growth mechanisms and the relationships to the dielectric properties are discussed.

Member Price: $25.00; Non-Member Price: $25.00
Volume: 20
#: 9
Pages: 2261-2265
DOI: 10.1557/JMR.2005.0282