Meetings & Events

 

2015 MRS Spring Meeting Logo2015 MRS Spring Meeting & Exhibit

April 6-10, 2015 | San Francisco
Meeting Chairs: Artur Braun, Hongyou Fan, Ken Haenen, Lia Stanciu, Jeremy A. Theil



Symposium BB : Innovative Interconnects/Electrodes for Advanced Devices, Flexible and Green-Energy Electronics

2015-04-07   Show All Abstracts

Symposium Organizers

Mikhail Baklanov, IMEC
Jeffery Bielefeld, Intel Corporation
Vincent Jousseaume, CEA-LETI
Eiichi Kondoh, Univ of Yamanashi

Symposium Support

Air Products
Aldrich Materials Science
Applied Materials, Inc.
CEA-LETI
Intel Corporation
Lam Research Corporation
Tokyo Electron America, Inc.
BB2: Low-K Materials II
Session Chairs
Jeffery Bielefeld
Alfred Grill
Tuesday PM, April 07, 2015
Moscone West, Level 2, Room 2014

2:30 AM - *BB2.01
Block Copolymer Packing Limits and Interfacial Reconfigurability in the Assembly of Periodic Mesoporous Organosilicas

Brett A. Helms 2 Andrew W. Wills 1 Peter Ercius 2 Ethan R. Rosenberg 2 Rory Runser 2

1Lawrence Berkeley National Lab Berkeley United States2The Molecular Foundry, LBNL Berkeley United States

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3:00 AM - BB2.02
Asymmetric Elastic Behavior in ULK Nanoporous Dielectric Glasses

Joseph Burg 1 Reinhold Dauskardt 1

1Stanford University Stanford United States

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3:15 AM - BB2.03
Adsorption Isobars of Fluorocarbon Compounds Selected for Cryogenic Plasma Etching of Low-K Dielectrics

Askar Rezvanov 2 3 Konstantin P Mogilnikov 1 Oleg P. Gutshin 2 Evgeny S. Gornev 2 3 Gennady Y. Krasnikov 2 3 Liping Zhang 4 Christian Dussarrat 5 Jean-Francois de Marneffe 4 Mikhail R. Baklanov 4

1Rzhanov Institute of Semiconductor Physics Novosibirsk Russian Federation2Molecular Electronics Research Institute Zelenograd, Moscow Russian Federation3Moscow Institute of Physics and Technology Dolgoprudny Russian Federation4IMEC Leuven Belgium5Air Liquide Tokyo Japan

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3:30 AM - BB2.04
Enhancing Mechanical and Fracture Properties of ULK Materials with Filled Pores

Scott G. Isaacson 1 Krystelle Lionti 2 Willi Volksen 2 Teddie Magbitang 2 Yusuke Matsuda 1 Reinhold H. Dauskardt 1 Geraud Dubois 2 1

1Stanford University Stanford United States2IBM Almaden Research Center San Jose United States

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3:45 AM -
BREAK

BB3: Metallization and Emerging Technologies
Session Chairs
Vincent Jousseaume
Zsolt Tokei
Tuesday PM, April 07, 2015
Moscone West, Level 2, Room 2014

4:15 AM - *BB3.01
Nanomolecularly Tailored Heterointerfaces for Electronics Device Metallization and Packaging

Ganpati Ramanath 1

1Rensselaer Polytechnic Institute Troy United States

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4:45 AM - BB3.02
Contact Metallization for Carbon Nanotube Interconnect Vias

Yusuke Abe 1 Anshul Ashok Vyas 1 Changjian Zhou 2 Richard Senegor 1 Patrick Wilhite 1 Cary Y. Yang 1

1Santa Clara University Santa Clara United States2Hong Kong University of Science and Technology Hong Kong Hong Kong

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5:00 AM - BB3.03
All-Carbon Interconnects: Fabrication and Integration

Yihan Chen 1 Changjian Zhou 1 Anshul A. Vyas 2 Mansun Chan 1 Cary Y. Yang 2

1The Hong Kong University of Science and Technology Hong Kong Hong Kong2Santa Clara University Santa Clara United States

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5:15 AM - BB3.04
Time Resolved Observation of Rapid Microstructural Transformation in Narrow Copper Lines

Brendan B OBrien 1 Luke Prestowitz 1 Kathleen A Dunn 1

1State University of New York Polytechnic Institute Albany United States

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5:30 AM - BB3.05
Low Temperature Interdiffusion of Cu/Ni in Supercritical Fluid Carbon Dioxide Using a New Cu(I) Amidinate Precursor

Md Rasadujjaman 1 Mitsuhiro Watanabe 1 Hiroshi Sudoh 2 Hideaki Machida 2 Eiichi Kondoh 1

1University of Yamanashi Kofu-shi, Yamanashi-ken Japan2Gas-Phase Growth Ltd. Tokyo Japan

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5:45 AM - BB3.06
Tailoring Electrical Contact Resistivity Across Metal-Thermoelectric Interfaces Using a Nanomolecular Monolayer

Thomas John Cardinal 1 . Devender 1 Theo Tasciuc 2 Ganpati Ramanath 1

1Rensselaer Polytechnic Institute Troy United States2Rensselaer Polytechnic Institute Troy United States

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BB1: Low-K Materials I
Session Chairs
Eiichi Kondoh
Mikhail Baklanov
Tuesday AM, April 07, 2015
Moscone West, Level 2, Room 2014

9:30 AM - *BB1.01
Material Innovations Driving Interconnect Scaling

Zsolt Tokei 1

1IMEC Leuven Belgium

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10:00 AM - *BB1.02
Dielectric Material Strategies for Interconnect Layers

David Michalak 1 James Blackwell 1 Arkaprabha Sengupta 2 Jessica Torres 1 Jeffery D. Bielefeld 1 Alan M Myers 1 James S Clarke 1 Daniel Pantuso 2

1Intel Corporation Hillsboro United States2Intel Corporation Hillsboro United States

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10:30 AM - *BB1.03
MOFs as Low-K Candidates for Future Technology Nodes

Christof Woell 1

1Karlsruhe Institute of Technology Karlsruhe Germany

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11:00 AM -
BREAK

11:30 AM - BB1.04
Nanoscale Measurements of Processing-Induced Changes in the Mechanical Properties of PorousLow-K Dielectric Thin Films and Patterns

Gheorghe Stan 1 2 Richard Gates 1 Jessica Torres 3 David Michalak 3 Canay Ege 3 Jeffery D. Bielefeld 3 Ebony Mays 3 Sean King 3

1National Institute of Standards and Technology Gaithersburg United States2University of Maryland College Park United States3Intel Corporation Hillsboro United States

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11:45 AM - BB1.05
Post-Porosity Plasma Protection: A Promising Strategy Against v-UV Damage in Porous, Low-K Materials

Krystelle Lionti 2 Willi Volksen 2 Teddie Magbitang 2 Maxime Darnon 1 Geraud Dubois 2

1CNRS Grenoble France2IBM Almaden Research Center San Jose United States

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12:00 PM - BB1.06
Atomic Scale Study of Trap States in Low-K Dielectric Films Studied by Dynamic Tunneling Force Microscopy

Ruiyao Wang 1 Sean King 2 Clayton Williams 1

1Department of Physics and Astronomy, University of Utah Salt Lake City United States2Intel Hillsboro United States

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12:15 PM - BB1.07
Atomic Scale Study of the Effect of Electrical Stress in a Low-K Dielectric Film

Ruiyao Wang 1 Sean King 2 Clayton Williams 1

1Department of Physics and Astronomy, University of Utah Salt Lake City United States2Intel Corporation Hillsboro United States

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12:30 PM - BB1.08
Porous SiOCH Thin Films Obtained by Foaming

Julien El Sabahy 1 Gael Castellan 1 Christophe Licitra 1 Florence Ricoul 1 Vincent Jousseaume 1

1CEA Leti Grenoble France

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12:45 PM - BB1.09
Can Boron Overturn Silicon in the Search for Low-k Dielectric Materials?

Michelle M Paquette 1 Bradley J Nordell 1 Thuong Dang Nguyen 1 Anthony N Caruso 1 Sudhaunshu Purohit 2 William A Lanford 3 Patrick Henry 4 Sean W King 4

1University of Missouri-Kansas City Kansas City United States2University of Missouri-Kansas City Kansas City United States3University at Albany Albany United States4Intel Corporation Hillsboro United States

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2015-04-08   Show All Abstracts

Symposium Organizers

Mikhail Baklanov, IMEC
Jeffery Bielefeld, Intel Corporation
Vincent Jousseaume, CEA-LETI
Eiichi Kondoh, Univ of Yamanashi

Symposium Support

Air Products
Aldrich Materials Science
Applied Materials, Inc.
CEA-LETI
Intel Corporation
Lam Research Corporation
Tokyo Electron America, Inc.
BB6: Barriers, Sealing and CMP
Session Chairs
Mikhail Baklanov
Alfred Grill
Wednesday PM, April 08, 2015
Moscone West, Level 2, Room 2014

2:30 AM - *BB6.01
Chemically Vapor Deposited (CVD) Polymers for Device Fabrication

Karen K. Gleason 1

1MIT Cambridge United States

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3:00 AM - BB6.02
Formation of Ultra-Thin Pore Seal Layer on Porous Low-K Films

Shoko Sugiyama Ono 1 Yasuhisa Kayaba 1 Hirofumi Tanaka 1 Hiroko Wachi 1 Koji Inoue 1

1Mitsui Chemicals, Inc. Chiba Japan

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3:15 AM - BB6.03
Transparent Barrier Films with Optimized Adhesion Through Nanoscale Interface Engineering

Can Cai 1 Reinhold H. Dauskardt 1

1Stanford University Stanford United States

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3:30 AM - BB6.04
Graphene-Based Diffusion Barrier and Its Defect-Dependent Properties

Sooyeoun Oh 1 Janghyuk Kim 1 Jihyun Kim 1

1Korea University Seoul Korea (the Republic of)

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3:45 AM -
OPEN DISCUSSION

4:00 AM -
BREAK

BB7: Electrodes and Energy
Session Chairs
Eiichi Kondoh
Jeffery Bielefeld
Wednesday PM, April 08, 2015
Moscone West, Level 2, Room 2014

4:30 AM - *BB7.01
Innovation of BEOL Devices for Energy Efficient Computing

M. Tada 1

1Low-Power Electronics Association amp; Project (LEAP) Tsukuba Japan

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5:00 AM - BB7.02
Role of Indium-Tin-Oxide Interlayer on Ag Reflector in Flexible Top-Illuminated Polymer Solar Cells: Absorption Spectra Tuning by Microcavity Structure

Wan Jae Dong 1 Jong-Lam Lee 1

1POSTECH Pohang Korea (the Republic of)

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5:15 AM - BB7.03
Transfer Printing of Electrodes for Organic Solar Cells - Nanoscale Versus Macroscale Continuity

Timo Jakob 1 Andreas Polywka 1 Luca Stegers 1 Engin Akdeniz 1 Stephan Kropp 1 Michael Frorath 1 Sara Trost 1 Tobias Schneider 1 Thomas Riedl 1 Patrick Goerrn 1

1University of Wuppertal Wuppertal Germany

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5:30 AM - BB7.04
InN/InGaN Quantum Dot Photoelectrode: An Advanced Energy Material for Efficient Water Splitting and Hydrogen Generation at Zero Voltage

Naveed Ul Hassan Alvi 1 Pavel Aseev 1 Soto Rodriguez Paul 1 Gomez Hernandez Jesus Victor 1 Magnus Willander 2 Richard Notzel 3 Calleja Pardo Enrique 1

1Universidad Politeacute;cnica de Madrid Madrid Spain2Linkouml;ping University Sweden Norrkouml;ping Sweden3Universitaacute; di Milano-Bicocca, Milan Italy

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5:45 AM - BB7.05
Flexible Lithium Ion Rechargeable Battery with Large Scale Interdigitated Electrodes

Tae-Hyung Kang 1 2 Ki-Bum Kim 1 2 Avelino Da Costa 2 Kyu Hwan Oh 1 Woong-Ryeol Yu 1 Nam-In Kim 3 In-Suk Choi 4

1Seoul National University Seoul Korea (the Republic of)2Korea Institute of Science and Technology Seoul Korea (the Republic of)3Rocket Electronic Cooperation, LTD. Gwangjoo Korea (the Republic of)4KIST Seoul Korea (the Republic of)

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BB8: Poster Session
Session Chairs
Jeffery Bielefeld
Vincent Jousseaume
Wednesday PM, April 08, 2015
Marriott Marquis, Yerba Buena Level, Salon 7/8/9

9:00 AM - BB8.01
Low-Temperature Curable Conductive Pastes for Electronic Devices

Ho Sun Lim 1 Seong-Dae Park 1

1Korea Electronics Technology Institute Seongnamsi Korea (the Republic of)

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9:00 AM - BB8.02
Effects of Titanic Oxide Nanofibers on Electrical and Thermal Properties of Silver Nanowires

Ming-Chih Tsai 1 2 Shang-Jung Yang 2 3 Yu-Hsuan Ho 2 Kai-Yu Peng 2 Wei-Cheng Tian 1 Pei-Kuen Wei 2 3

1Graduate Institute of Biomedical Electronicsamp; Bioinformatics Taipei Taiwan2Research Center for Applied Sciences Taipei Taiwan3Insititue of Optoelectronic Sciences Keelung Taiwan

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9:00 AM - BB8.03
Crystal Growth of Co Film Fabricated by Electrodeposition with Supercritical Carbon Dioxide Emulsion

Xun Luo 1 Tso-Fu Mark Chang 1 Hideki Hosoda 1 Tatsuo Sato 1 Masato Sone 1

1Tokyo Institute of Technology Yokohama Japan

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9:00 AM - BB8.04
Metallization on Textile by Pd Catalyzation and Ni Electroless Deposition Using Supercritical Carbon Dioxide

Mitsuo Sano 1 Tso-Fu Mark Chang 1 Tatsuo Sato 1 Masato Sone 1 Yuma Tahara 2 Tomoko Hashimoto 2 Hiromichi Kurosu 2

1Tokyo Institute of Technology Yokohama Japan2Nara Women's University Nara Japan

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9:00 AM - BB8.05
Fabrication of Silver Nanowire Based Transparent and Conducting Films through Optimization of Synthesis Protocol

Hyunjin Moon 1 Jinhwan Lee 1

1Seoul National University Seoul Korea (the Republic of)

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9:00 AM - BB8.06
Development of Electro-Deposited Fe-Ni Alloy Sheets for PCB Applications

Jin-Wan Jeon 1 Moon-Sick Hwang 1 Sunyong Kim 1 Dong Jin Lee 1 Yoo Jin Lee 1 Jae Hak Lee 1

1Tgo Tech. Corporation Hwaseong-si Korea (the Republic of)

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9:00 AM - BB8.07
Electronic Properties of Various B-doped Diamond(111)// Dye Molecule Interfaces

Karin Larsson 1

1Chemistry-Angstrom Laboratory Uppsala Sweden

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9:00 AM - BB8.08
Nitrogen Doped Graphene/Au Nanoparticle Composite Counter Electrode for Dye Sensitized Solar Cells

Sung Ryong Kim 1 Ye-Suel Song 1 Won-Kook Choi 2

1Korea National University of Transportation Chungju Korea (the Republic of)2Korea Institute of Science and Technology Seoul Korea (the Republic of)

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9:00 AM - BB8.09
Highly Transparent and Stretchable Electrodes using Solvolysis and Anneal Free Silver Nanowires Percolation Network

Jin Hwan Lee 1 Sukjoon Hong 1 Seung Yong Han 1 Jinhyeong Kwon 1 Hyunjin Moon 1 Seung Hwan Ko 1

1Seoul National University Seoul Korea (the Republic of)

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9:00 AM - BB8.10
Solution Printed, Aligned Silver Nanowire Arrays for High Performance Transparent Electrodes

Saewon Kang 1 Seungse Cho 1 Hyunhyub Ko 1

1UNIST Ulsan Korea (the Republic of)

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9:00 AM - BB8.11
Stretchable and Transparent Electrodes Based on Carbon Nanotube Rhombic Networks

Ayoung Choe 2 Sehee Ahn 2 Jonghwa Park 2 Heesuk Kim 1 Jeong Gon Son 1 Sang-Soo Lee 1 Min Park 1 Hyunhyub Ko 2

1Korea Institute of Science and Technology Seoul Korea (the Republic of)2UNIST Ulsan Korea (the Republic of)

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9:00 AM - BB8.12
Room Temperature Processed Electrochromic Smart Windows with Flexible Film

Haekyoung Kim 1 So Hee Lee 1 Jong Deok Park 1

1Yeungnam University Gyeungsan Korea (the Republic of)

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9:00 AM - BB8.13
Breaking Off the Low-K Death Curve Using a-BxC:Hy and Topological Constraint Theory

Bradley J Nordell 1 Christopher L Keck 1 Thuong Dang Nguyen 1 William A Landford 2 Sudhaunshu Purohit 3 Patrick Henry 4 Sean W King 4 Anthony N Caruso 1 Michelle M Paquette 1

1University of Missouri-Kansas City Kansas City United States2University of Albany Albany United States3University of Missouri-Kansas City Kansas City United States4Intel Corporation Hillsboro United States

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9:00 AM - BB8.14
High Performance Organic Transistors Using a Metallic Network as Transparent Gate Electrodes

Ke Pei 1 Paddy K. L. Chan 1

1The University of Hong Kong Hong Kong Hong Kong

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9:00 AM - BB8.15
A Novel Concept for Double-Sided Printing of Silver Electrodes for Advanced Printed Electronic Applications

Janghoon Park 1 Sungsik Park 1 Jongsu Lee 1 Dongil Nam 1 Yoonki Min 1 Youngwook Noh 1 Hakyung Jeong 1 Kee-Hyun Shin 1 Dongjin Lee 1

1Konkuk University Seoul Korea (the Republic of)

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9:00 AM - BB8.16
Performance Enhancement of Metal Nanowire Transparent Conducting Electrodes by Mesoscale Metal Wires

Po-Chun Hsu 1 Shuang Wang 2 Hui Wu 1 Vijay Narasimhan 1 Desheng Kong 1 Hye Ryoung Lee 2 Yi Cui 1 3

1Stanford University Stanford United States2Stanford University Stanford United States3SLAC National Accelerator Laboratory Menlo Park United States

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9:00 AM - BB8.17
Passivation Coating on Electrospun Copper Nanofibers for Stable Transparent Electrodes

Po-Chun Hsu 2 Hui Wu 2 Thomas Carney 2 Matthew T McDowell 2 Yuan Yang 2 Erik C. Garnett 2 Michael Li 2 Liangbing Hu 2 Yi Cui 2 1

1SLAC National Accelerator Laboratory Menlo Park United States2Stanford University Stanford United States

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9:00 AM - BB8.18
Flexure-Based Roll-to-Roll Platform: A Practical Solution for Realizing Large-Area Nanometer-Resolution Microcontact Printing

Xi Zhou 1 Huihua Xu 1 Jiyi Cheng 1 Ni Zhao 1 Shih-Chi Chen 1

1The Chinese University of Hong Kong Shatin Hong Kong

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9:00 AM - BB8.19
High Performance Magnetic Sensorics for Printable and Flexible Electronics

Daniil Karnaushenko 1 Denys Makarov 1 Max Stoeber 1 Dmitriy Karnaushenko 1 Stefan Baunack 1 Oliver G. Schmidt 1

1IFW-Dresden Dresden Germany

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