Chairs
Robert Cammarata, Naval Research Laboratory
Eric Chason, Sandia National Laboratories
Theodore Einstein, University of Maryland
Ellen Williams, University of Maryland
Symposium Support
* Invited paper
SESSION Ca1: SURFACE AND STEP STRUCTURE
Chairs: Simon G. J. Mochrie and Ellen D. Williams
Monday Morning, December 2, 1996
Salon E (M)
8:30 AM *Ca1.1
MORPHOLOGICAL CHANGES ON SILICON SURFACES, Simon G. J. Mochrie, MIT, Dept of Physics, Cambridge, MA.
9:00 AM Ca1.2
STABILITY OF A HIGH-INDEX SEMICONDUCTOR SURFACE: STRESS COMPENSATION
IN Si(114), Steven C. Erwin, Naval Research Laboratory, Complex Systems Theory Branch, Washington, DC; Alison A. Baski, Lloyd J. Whitman, Naval Research Laboratory, Chemistry Div, Washington, DC.
9:15 AM Ca1.3
EVOLUTION OF SURFACE MORPHOLOGY AND STEP CONTOURS ON Si(001) BI-PERIODIC STRUCTURES, S. Tanaka, C. C. Umbach, Cornell Univ, Dept of MS&E, Ithaca , NY; R. M. Tromp, M. Mankos, IBM T.J. Watson Research Ctr, Yorktown Heights, NY; Jack Blakely, Cornell Univ, Dept of Materials Science, Ithaca, NY.
9:30 AM Ca1.4
CHARACTERIZATION OF SILICON SURFACES AFTER LOW TEMPERATURE
ANNEALING PRIOR TO LOW TEMPERATURE ATMOSPHERIC PRESSURE EPITAXAL SILICON GROWTH, Hugo Bender, IMEC VZW, ARS, Leuven, BELGIUM; Marie-Jose Mouche, IMEC VZW, Leuven, BELGIUM; Matty Caymax, IMEC VZW, VMT, Leuven, BELGIUM.
9:45 AM BREAK
10:15 AM *Ca1.5
SURFACE AND INTERFACE STRESS AT METAL SURFACES AND ITS IMPORTANCE FOR RECONSTRUCTION AND EPITAXIAL GROWTH, Harald Ibach, Alexander Grossmann, Claudia E. Bach, Margret Giesen, Forschungszentrum Julich, IGV, Julich, GERMANY.
10:45 AM Ca1.6
COMPUTER SIMULATION STUDIES OF SURFACE RECONSTRUCTIONS ON (111) ORIENTED FCC METAL SURFACES, Todd M. Trimble, Johns Hopkins Univ, Dept of MS&E, Baltimore, MD; Robert C. Cammarata, Naval Research Laboratory, Code 6863, Washington, DC; Karl Sieradzki, Arizona State Univ, Dept of Mech & Aerospace Engr, Tempe, AZ.
11:00 AM Ca1.7
FACETING AS THE ORIGIN OF THE 2
1 Ir (110) RECONSTRUCTION, AND THE ROLE OF SURFACE STRESS IN PREDICTING SURFACE RECONSTRUCTIONS, Alessio Filippetti, Vincenzo Fiorentini, Univ di Cagliari, Dept of Physics, Cagliari, ITALY.
11:15 AM Ca1.8
NANOMETER-SCALE STRIPED STEP STRUCTURES OF ADJUSTABLE SIZE AND SHAPE
ON HIGHLY B-DOPED SI(001)-(2X1) SURFACES STUDIED BY STM AND LEEM, Darrell E. Jones, Ohio State Univ, Dept of Physics, Columbus, Ohio; Ignatius S. T. Tsong, E. Bauer, Ying Hong, Arizona State Univ, Dept of Physics & Astronomy, Tempe, AZ; Jonathan P. Pelz, Charles A. Ebner, Ohio State Univ, Dept of Physics, Columbus, OH.
11:30 AM Ca1.9
STEP BUNCHING SELF-ORGANIZATION ON A STRAINED VICINAL SURFACE, Feng Liu, Univ of Wisconsin-Madison, Dept of Material Science, Madison, WI; Max G. Lagally, Univ of Wisconsin-Madison, Dept of MS&E, Madison, WI; Jerry Tersoff, IBM T.J. Watson Research Ctr, Yorktown Heights, NY.
11:45 AM Ca1.10
ELASTIC ANALYSIS AND COMPUTER SIMULATION OF SURFACE DEFECTS, Leonid Shilkrot, David J Srolovitz, Univ of Michigan, Dept of MS&E, Ann Arbor, MI.
SESSION Ca2: SURFACE KINETIC PROCESSES
Chairs: Theodore L. Einstein and Frederick H. Streitz
Monday Afternoon, December 2, 1996
Salon E (M)
1:30 PM *Ca2.1
VACANCY DIFFUSION KINETICS ON Si(111) AND (001) SURFACES STUDIED BY SCANNING
REFLECTION ELECTRON MICROSCOPY, Heiji Watanabe, Joint Res Ctr for Atom Technology, Ichikawa Research Group, Ibaraki, JAPAN; Masakazu Ichikawa, Joint Res Ctr for Atom Technology, Ichikawa Group, Ibaraki, JAPAN.
2:00 PM Ca2.2
A NEW SINGLE-CRYSTAL ADSORPTION CALORIMETER FOR DETERMINING METAL ADSORPTION AND ADHESION ENERGIES, Charles T. Campbell, John Todd Stuckless, Univ of Washington, Dept of Chemistry, Seattle, WA.
2:15 PM Ca2.3
SITES AND MOBILITY OF ISOLATED
In ATOMS AFTER LOW ENERGY DEPOSITION ON STEPPED Cu(100) SURFACES, Chris R. Laurens, Lambertus Niesen, Frits Pleiter, Monica F. Rosu, Univ of Groningen, Nuclear Solid State Physics, Groningen, NETHERLANDS.
2:30 PM BREAK
3:00 PM Ca2.4
MAGIC SIZE EFFECTS FOR HETEROEPITAXIAL ISLAND DIFFUSION, John C. Hamilton, Sandia National Laboratories, Computational Materials Science, Livermore, CA.
3:15 PM Ca2.5
STRUCTURE AND DYNAMICS OF DIAMOND AND SILICON SURFACES, Cai-Zhuang Wang, Kai-Ming Ho, Bicai Pan, Iowa State Univ, Dept of Physics, Ames, Iowa.
3:30 PM Ca2.6
INHIBITED Al DIFFUSION ON, AND ROUGH GROWTH OF Ga-COATED Al (100) , Vincenzo Fiorentini, Donatella Fois, Sabrina Oppo, Univ di Cagliari, Dept of Physics, Cagliari, ITALY.
3:45 PM Ca2.7
A MOLECULAR DYNAMICS STUDY OF SURFACE DIFFUSIVITY OF ALUMINUM, Hanchen Huang, Lawrence Livermore National Laboratory, Dept of Chemistry, Livermore, CA; George H. Gilmer, Bell Labs, Lucent Technologies, Dept of Silicon Processing, Murray Hill, NJ; Tomas Diaz de la Rubia, Lawrence Livermore National Laboratory, Dept of Chem & Matls Science, Livermore, CA.
4:00 PM Ca2.8
ANISOTROPIC DIFFUSION ON HEXAGONALLY RECONSTRUCTED AU(100): A SIMULATION STUDY, Miki Nomura, Xiao-Qian Wang, Clark Atlanta Univ, Ctr for Theo Physics, Atlanta, GA; Ron Hickson, Clark Atlanta Univ, Dept of Physics, Atlanta, GA.
4:15 PM Ca2.9
BROWNIAN MOTION OF SINGLE-LAYER ADATOM AND VACANCY CLUSTERS ON SURFACES:
LANGEVIN THEORY AND MONTE CARLO SIMULATIONS, Theodore L. Einstein, Sanjay V. Khare, Univ of Maryland, Dept of Physics, College Park, MD.
4:30 PM Ca2.10
SIMULATION OF SURFACE DIFFUSION USING EMBEDDED ATOMPOTENTIALS IN FCC METALS, Masao Doyama, Yoshiaki Kogure, Jun-ichiro Tankano, Teikyo Univ of Science & Tech, Dept of Materials, Yamanashi, JAPAN; N. Tajima, Teikyo Univ of Science & Tech, Yamanasi, JAPAN; K. Hoshi, S. Matsuo, D. Murai, Teikyo Univ of Science & Tech, Dept of Materials, Yamanashi, JAPAN.
4:45 PM Ca2.11
INITIAL STAGES OF OXIDATION IN ALUMINUM, Frederick H. Streitz, Auburn Univ, Dept of Physics, Auburn, AL.
SESSION Ca3: POSTER SESSION I
Chairs: Robert C. Cammarata Eric H. Chason Theodore L. Einstein and Ellen D. Williams
Monday Evening, December 2, 1996
8:00 P.M.
Grand Ballroom/Constitution (S)
Ca3.1
ON THE RELIABILITY OF IMAGES OF NANOSCALE THREE-DIMENSIONAL FEATURES OBTAINED VIA STM, C-AFM AND NC-AFM, T. R. Ramachandran, N. P. Kobayashi, P. Chen, A. Madhukar, Univ of Southern California, Dept of Matls Science & Physics, Los Angeles, CA.
Ca3.3
ATOMISTIC STRUCTURE OF HIGH INDEX SURFACES, Diana Farkas, Batsirai Mutasa, Virginia Tech, Dept of MS&E, Blacksburg, VA.
Ca3.4
OFF-SPECULAR X-RAY REFLECTIVITY FOR SURFACE CHARACTERIZATION, Wen-li Wu, NIST, Polymers Div, Gaithersburg, MD.
Ca3.5
CALCULATION PROCEDURE TO DETERMINE THE POTENTIAL-ENERGY-FIELD ABOVE LARGE ATOMICALLY SMOOTH AND STEPPED SURFACES - GaAs(001) AS AN EXAMPLE, Sandor Kunsagi-Mate, Nandor Marek, Janus Pannonius Univ, Res Group for Theoretical Chem, Pecs, HUNGARY; Tamas Marek, Univ Erlangen-Nurnberg, Erlangen, GERMANY; Horst P. Strunk, Univ Erlangen-Nurnberg, Inst Materials Science, Erlangen, GERMANY.
Ca3.6
THE ROLE OF ROUGHNESS IN TEXTURE DEVELOPMENT, Jay F. Whitacre, J. C. Bilello, Oleh P. Karpenko, Univ of Michigan, Dept of MS&E, Ann Arbor, MI; Ashwani K. Malhotra, IBM Microelectronics, Hopewell Junction, NY; S. M. Yalisove, Univ of Michigan, Dept of MS&E, Ann Arbor, MI.
Ca3.7
EXACT RESULTS FOR ISLAND SIZE DISTRIBUTIONS IN SUBMONOLAYER EPITAXIAL GROWTH, Maria C. Bartelt, James Evans, Iowa State Univ, IPRT, Ames, IA.
Ca3.8
SCALING PROPERTIES OF SUBMONOLAYER GROWTH INCLUDING EVAPORATION AND DEFECTS, Hernan Larralde, UNAM, Inst de Fisica Lab de Cuernavaca, Cuernavaca, MEXICO; Pablo Jensen, Univ de Lyon, Dept of Physic Materials, Villeurbanne, FRANCE; M. Meunier, Ecole Polytechnique , Dept de genie physique, Montreal, CANADA; A. Pimpinelli, Inst Laue-Langevin, Grenoble 9, FRANCE.
Ca3.9
STEP COVERAGE MORPHOLOGIES OF SiH
-WSi
AND DCS-WSi
FILMS FOR SUB 0.5 MICRON TECHNOLOGIES, Cengiz S. Ozkan, Stanford Univ, Dept of MS&E, Stanford, CA; Mansour Moinpour, Intel Corp, Thin Films Group, Santa Clara, CA.
Ca3.10
MONTE CARLO SIMULATIONS OF THE GaAs(001) SURFACE DURING OMCVD GROWTH, Rajesh Venkataramani, Klavs F. Jensen, MIT, Dept of Chemical Engr, Cambridge, MA; David W. Kisker, P. H. Fuoss, G. Brian Stephenson, S. Brennan, IBM T.J. Watson Research Ctr, Yorktown Heights, NY.
Ca3.11
GROWTH TRANSIENTS DURING THE NUCLEATION OF GaInAs ON InP BY ORGANOMETALLIC VAPOR PHASE EPITAXY, David T Emerson, Cornell Univ, Dept of Elecrical Engr, Ithaca, NY; Eduardo M. Chumbes, Cornell Univ, Dept of Electrical Engr, Ithaca, NY; James R. Shealy, Cornell Univ, Dept of Electrical Engr, Ithaca, NY.
Ca3.12
SURFACE REACTIONS IN THE NUCLEATION OF GROUP III
NITRIDES BETWEEN 300K AND 600K, Michael E. Bartram, J. Randall Creighton, Sandia National Laboratories, Chemical Processing Sciences, Albuquerque, NM.
Ca3.13
GROWTH MECHANISM OF HYDROTHERMAL BATIO
FILMS ON TIO
(001) SURFACES, Judit G. Lisoni, Victor M Fuenzalida, Univ de Chile, Dept de Fisica, Santiago, CHILE; Juan C. Acquadro, Univ de Sao Paulo, Dept de Fisica Nuclear, Sao Paulo, BRAZIL.
Ca3.14
INITIAL GROWTH AND INTERFACE STRUCTURE OF CdTe THIN FILMS GROWN BY MBE ON 4
MISCUT Si SUBSTRATES, Shu-Chen Y. Tsen, Arizona State Univ, Ctr for Solid State Science, Tempe, AZ; David J. Smith, Arizona State Univ, Dept of Physics & Astronomy, Tempe, AZ; S. Rujirawat, S. Sivananthan, Univ of Illinois-Chicago, Dept of Physics, Chicago, IL.
Ca3.15
LATTICE MISMATCH EFFECT IN SURFACE INDUCED FREEZING, Aharon Weinstein, Weizmann Inst of Science, Dept of Materials & Interfaces, Rehovot, ISRAEL; Samuel A. Safran, Weizmann Inst of Science, Dept of Materials & Interfaces, Rehovot, ISRAEL.
Ca3.16
VICINAL SURFACES OF
- A KEY TO THE GROWTH OF NANOSCALE ENGINEERED
THIN FILMS, Tristan Haage, J. Q. Li, M. Cardona, Hanns-Ullrich Habermeier, J. Zegenhagen, Max-Planck-Inst, IFF, Stuttgart, GERMANY.
Ca3.17
INITIAL STAGES OF Yb-Si(111) INTERFACE FORMATION:
PHASE TRANSITIONS AND DOMAIN STRUCTURES, Mikhail V. Kuz'min, A.F. Ioffe Phys-Technical Inst, Surface Science Lab, Saint Petersburg, RUSSIA; Mikhail V. Loginov, Mikhail A. Mittsev, A.F. Ioffe Phys-Technical Inst, Surface Sciences Lab, Saint Petersburg, RUSSIA.
Ca3.18
SITE-SPECIFIC CARBON DOPING BY MOVPE, Robert F. Hicks, Haihua Qi, Univ of California-Los Angeles, Dept of Chemical Engr, Los Angeles, CA.
Ca3.19
STRUCTURAL AND MORPHOLOGICAL CHARACTERIZATION OF ULTRATHIN ASYMMETRIC POLYDIACETYLENE FILMS, Hsing-Chia Wang, Dong-Wook Cheong, Venkataramani Shivshankar, Univ of Massachusetts, Dept of Chemistry, Lowell, MA; Changmo Sung, Univ of Massachusetts, Center for Advanced Materials, Lowell, MA; Jayant Kumar, Univ of Massachusetts, Dept of Physics, Lowell, MA; Sukant K. Tripathy, Univ of Massachusetts, Dept of Chemistry, Lowell, MA.
Ca3.20
THE CHEMISTRY OF CHEMICAL VAPOR CLEANING OF Fe AND Cu WITH CHELATING LIGANDS: REACTIONS AND MECHANISMS OF CVC OF IRON AND COPPER FROM WAFER SURFACES BY L,L,L,5,5,5,-HEXAFLUORO-2,4-PENTANEDIONE (
), Mark A. George, Scott E. Beck, Daniel A. Moniot, Kristine M. Young, David A. Bohling, Air Products & Chemicals Inc, Allentown, PA; D. W. Hess, Lehigh Univ, Dept of Chemical Engr, Bethlehem, PA.
Ca3.21
ARSINE DECOMPOSITION ON Ge(100) SURFACE, Shupan Gan, Robert F. Hicks, Trinh Nguyen, Lian Li, Univ of California-Los Angeles, Dept of Chemical Engr, Los Angeles, CA.
Ca3.22
THE FORMATION OF ULTRATHIN CERAMIC FILMS AT ROOM TEMPERATURE AND PRESSURE: AN IN SITU STUDY, Richard J Muisener, Jeffrey T. Koberstein, Univ of Connecticut, Polymer Science Program, Storrs, CT.
Ca3.23
THERMAL DESORPTION MEASURE OF ORGANIC MOLECULAR FILMS BY OPTICAL DETECTION, Toshihiro Shimada, Hirotoshi Taira, Atsushi Koma, Univ of Tokyo, Dept of Chemistry, Tokyo, JAPAN.
Ca3.24
CHARACTERIZATION OF VARIOUS ORGANIC COATINGS ON GLASSES, Donghun Lee, Alfred Univ, NY State College of Ceramics, Alfred, NY; Robert A. Condrate, NYS College of Ceramics, Alfred Univ, Alfred, NY.
SESSION Ca4: SELF-ASSEMBLED AND LANGMUIR-BLODGETT FILMS
Chairs: Laura Smilowitz and P. S. Weiss
Tuesday Morning, December 3, 1996
Salon E (M)
9:00 AM *Ca4.1
GROWTH, MODIFICATION, AND CONTROL OF THE STRUCTURES OF MIXED COMPOSITION ORGANIC MONOLAYERS, L. Bumm, J. J. Arnold, M. Cygan, T. Dunbar, Pennsylvania State Univ, Dept of Chemistry, University Park, PA; T. Burgin, L. Jones , Univ of South Carolina, Dept of Chemistry & Biochem, Columbia , SC; David L. Allara, Pennsylvania State Univ, Dept of Chemistry, University Park, PA; J. Tour, Univ of South Carolina, Dept of Chemistry & Biochem, Columbia , SC; P. S. Weiss, Pennsylvania State Univ, Dept of Chemistry, University Park, PA.
9:30 AM Ca4.2
NONLINEAR OPTICAL MICROSCOPY FOR IMAGING PATTERNED SELF-
ASSEMBLED MONOLAYERS, Laura Smilowitz, Los Alamos National Laboratory, Los Alamos, NM; Jeanne M. Robinson, Los Alamos National Laboratory, CST-6, Los Alamos, NM; DeQuan Li, Los Alamos National Laboratory, CST-4, Los Alamos, NM; Xiaoguang Yang, Los Alamos National Laboratory, CST-1, Los Alamos, NM; Duncan McBranch, Los Alamos National Laboratory, Dept of Chemical Sci & Tech, Los Alamos, NM; Atul Parikh, Los Alamos National Laboratory, CST-1, Los Alamos, NM.
9:45 AM Ca4.3
SOLVENT AND SUBSTRATE EFFECTS ON THE GROWTH AND STRUCTURE
OF SELF-ASSEMBLED MONOLAYERS, John Taylor Woodward, Chad Lee Meyer, Daniel K. Schwartz, Tulane Univ, Dept of Chemistry, New Orleans, LA.
10:00 AM BREAK
10:30 AM Ca4.4
THE STRUCTURE OF ANTIGEN-ANTIBODY LAYERS ADSORBED ON SILICA SURFACES: A SCANNING ANGLE REFLECTOMETRY STUDY, Elizabeth K. Mann, L. Heinrich, Inst Charles Sadron, CNRS, Strasbourg, FRANCE; J. C. Voegel, Unite INSERM 424, Centre de Recherche Odontologique, Strasbourg, FRANCE; P. Schaaf, Inst Charles Sadron, CNRS, Strasbourg, FRANCE.
10:45 AM Ca4.5
LATERAL CONDUCTANCE IN LANGMUIR MONOLAYERS FROM POLYANILINE, Antonio Riul, Univ of Sao Paulo, Dept of Physics & Matls Science, San Paulo, BRAZIL; Ailton Cavalli, Osvaldo Novais Olveira, Univ de Sao Paulo, Inst de Fisica de Sao Carlos, Sao Paulo, BRAZIL.
11:00 AM Ca4.6
PHOTO- AND WET CHEMICAL TRANSFORMATIONS OF SELF-ASSEMBLED FILMS FROM ARYLALKYLTRICHLOROSILANES, Andrienne C. Friedli, Rachel D. Roberts, Douglas B. Tatham, Middle Tennessee State Univ, Dept of Chemistry, Murfreesboro, TN; Andro R. Hsu, Naval Research Laboratory, Mio/Molecular Science & Engrg, Washington , DC; Charles S. Dulcey, Stephen W. McElvany, Jeffrey M. Calvert, Naval Research Laboratory, Bio/Molecular Science & Engrg, Washington, DC.
11:15 AM Ca4.7
A NEW PROCEDURE FOR PRODUCING LANGMUIR-BLODGETT (LB) FILMS FROM LIGNINS, Carlos J.L. Costantino, Univ of Sao Paulo, Dept of Physics & Matls Science, San Paulo, BRAZIL; Laura Patelli Juliani, Univ de Sao Paulo, Inst de Quimica de Sao Carlos, Sao Paulo, BRAZIL; Osvaldo Novais Olveira, Univ de Sao Paulo, Inst de Fisica de Sao Carlos, Sao Paulo, BRAZIL; Antonio Aprigio da Silva Curvelo, Univ de Sao Paulo, Inst de Quimica de Sao Carlos, Sao Paulo, BRAZIL.
11:30 AM Ca4.8
THE STRUCTURE EVOLUTION OF AROMATICS-DERIVATIZED THIOLATE MONOLAYER ON EVAPORATED GOLD, Yu-Tai Tao, Inst of Chemistry, Academica Sinica, Taipei, Taiwan; Chien-Chin Wu, Ji-Yang Eu, Wen-Ling Lin, Inst of Chemistry, Academia Sinica, Taipei, TAIWAN.
11:45 AM Ca4.9
COMPOSITE LANGMUIR-BLODGETT FILMS BASED ON CALIXARENE MATRIX, Alexei V. Nabok, Inst of Semiconductor Physics, Molecular Electronics Lab, Kiev, UKRAINE; Valeriy Bliznyuk, West Michigan Univ, Dept of Engr, Kalamazoo, Michigan.
SESSION Ca5: NUCLEATION ON SURFACES AND INTERFACES
Chairs: Eric H. Chason and John A. Venables
Tuesday Afternoon, December 3, 1996
Salon E (M)
1:30 PM *Ca5.1
NUCLEATION ON DEFECTS IN HETEROEPITAXY, John A. Venables, Arizona State Univ, Dept of Physics & Astronomy, Tempe, AZ.
2:00 PM Ca5.2
EFFECTS OF HYDROGEN ON NUCLEATION OF ISLANDS DURING Si(001) MBE GROWTH, Kazuki Mizushima, Mitsubishi Materials Corp, Adv Technology Research Lab
, Omiya Saitama, JAPAN; Pavel Smilauer, KFA Julich GmbH, HRLZ, Julich, GERMANY; Dimitri D. Vvedensky, Imperial College, Blackett Lab, London, UNITED KINGDOM.
2:15 PM Ca5.3
THE AS-GROWN MICROTOPOLOGIES OF MODIFIED-LELY SiC(0001) TERRACED VICINAL SURFACES, Tamas Marek, Univ Erlangen-Nurnberg, Erlangen, GERMANY; Horst P. Strunk, Univ Erlangen-Nurnberg, Inst Materials Science, Erlangen, GERMANY; Robert Eckstein, Stefan G. Muller, Dieter Hofmann, Univ Erlangen-Nurnberg, Dept of Elektrotechnik, Erlangen, GERMANY.
2:30 PM BREAK
3:00 PM *Ca5.4
REAL-TIME X-RAY ANALYSIS OF GaN EPITAXIAL GROWTH, Randall L. Headrick, Cornell Univ, Cornell High Energy Synchotron Source, Ithaca, NY; Stefan Kycia, Cornell Univ, High Energy Synchrotron Source , Ithaca, NY; Arthur R. Woll, Cornell Univ, Dept of Applied & Engr Physics, Ithaca, NY; Joel D. Brock, Cornell Univ, Ithaca, NY.
3:30 PM Ca5.5
MORPHOLOGICAL EVOLUTION OF STRAINED FILMS BY COOPERATIVE NUCLEATION, D. E. Jesson, K. M. Chen, S. J. Pennycook, Oak Ridge National Laboratory, Solid State Div, Oak Ridge, TN; Thomas G. Thundat, R. J. Warmack, Oak Ridge National Laboratory, Health Science Research Div, Oak Ridge, TN.
3:45 PM Ca5.6
THE EARLY STAGES OF NIOBIUM THIN FILM GROWTH ON SAPPHIRE AT HIGH TEMPERATURES, Thomas Wagner, Max-Planck-Inst, Inst Werkstoffwissenschaft, Stuttgart, GERMANY.
4:00 PM Ca5.7
EFFECT OF NUCLEATION RATE ON SURFACE ROUGHNESS EVOLUTION DURING CVD, Eric H. Chason, Sandia National Laboratories, Org 1112 , Albuquerque, NM; T. M. Mayer, D. P. Adams, Sandia National Laboratories, Albuquerque, NM; B. K. Kellerman, MEMC Electronic Materials, St. Peters, MO.
4:15 PM Ca5.8
HOW NUCLEATION AND GROWTH PROCESSES CONTROL MICROSTRUCTURAL EVOLUTION IN
CUBIC
BORON NITRIDE FILMS, Kevin F. McCarty, Douglas L. Medlin, Paul B Mirkarimi, Gregory F. Cardinale, Sandia National Laboratories, Livermore, CA.
4:30 PM Ca5.9
HETEROGENEOUS BOUNDARY NUCLEATION: TRANSFORMATION KINETICS AND MICROSTRUCTURE IN THIN FILMS, Jeffrey Rickman, William Scott Tong, Katy Barmak, Lehigh Univ, Dept of MS&E, Bethlehem, PA.
4:45 PM Ca5.10
IMPROVEMENT OF THE NUCLEATION AND GROWTH OF THIN FILM PHOSPHORS FOR ELECTROLUMINESCENT FLAT PANEL DISPLAYS, Thomas S. Moss, Los Alamos National Laboratory, Los Alamos, NM; Brent F. Espinoza, Robert C. Dye, Los Alamos National Laboratory, MST-7, Los Alamos, NM.
5:00 PM *Ca5.11
MRS MEDAL AWARD
STRAIN RELAXATION AND THE MORPHOLOGY OF THIN FILMS, Jerry Tersoff, IBM T.J. Watson Research Ctr, Yorktown Heights, NY.
SESSION Ca6: MECHANICS OF SURFACES AND INTERFACES
Chairs: Vijay Gupta and Jack E. Houston
Wednesday Morning, December 4, 1996
Salon E (M)
8:30 AM *Ca6.1
THE AFFECT OF STRESS ON THE NANOMECHANICAL PROPERTIES OF Au SURFACES, Jack E. Houston, Sandia National Laboratories, Albuquerque, NM.
9:00 AM Ca6.2
THIN FILM CHARACTERIZATION VIA INDENTATION: A MOLECULAR DYNAMICS STUDY, Judith A. Harrison, U.S. Naval Academy, Dept of Chemistry, Annapolis, MD; Susan B. Sinnott, Univ of Kentucky, Dept of Chem & Matls Engr, Lexington, KY; Richard J. Colton, Carter W. White, Naval Research Laboratory, Chemistry Div, Washington, DC; Donald W. Brenner, Olga A. Shenderova, North Carolina State Univ, Dept of MS&E, Raleigh, NC.
9:15 AM Ca6.3
MICROMECHANICAL DEFORMATION OF SINGLE-CRYSTAL ALUMINA SURFACES, Andrey Zagrebelny, Univ of Minnesota, Dept of Chemical Engr & Materials Science, Minneapolis, MN; John C. Nelson, Sundar Ramamurthy, Univ of Minnesota, Dept of Chemical Engr & Matls Science, Minneapolis, MN; C. Barry Carter, Univ of Minnesota, Dept of CE&MS, Minneapolis, MN.
9:30 AM Ca6.4
MEASUREMENT OF INTERFACIAL ADHESION IN MULTILAYER DEVICES, Vijay Gupta, Univ of California-Los Angeles, Dept of Mech & Aerospace Engr, Los Angeles, CA; Victor Almgren, Univ of California-Los Angeles, Dept of Mechanical & Aerospace Engr, Los Angeles, CA; Jianxin Wu, Univ of California-Los Angeles, Dept of M&AE, Los Angeles, CA.
9:45 AM Ca6.5
ANISOTROPY OF STRESS AND MICROSTRUCTURE IN NANOSCALE MULTILAYERS OF CARBIDES, METALS, AND METAL DISULFIDE FILMS, J. G. Hershberger, Univ of Michigan, Dept of MS&E, Ann Arbor, MI; F. Kustas, L. Fehrenbacher, Technology Assessment & Transfer Inc, Annapolis, MD; S. M. Yalisove, J. C. Bilello, Univ of Michigan, Dept of MS&E, Ann Arbor, MI.
10:00 AM BREAK
SESSION Ca7: SURFACE MORPHOLOGY AND INSTABILITY
Chairs: Jonah D Erlebacher and Donald L. Woodraska
Wednesday Morning, December 4, 1996
Salon E (M)
10:30 AM Ca7.1
MORPHOLOGICAL EQUILIBRATION OF RIPPLED AND DIMPLED CRYSTAL SURFACES, Jonah D Erlebacher, Harvard Univ, Applied Sciences Div, Cambridge, MA; Michael J. Aziz, Harvard Univ, Engr & Applied Science Div, Cambridge, MA.
10:45 AM Ca7.2
HRLEED STUDY OF THE ROUGHENING TRANSITIONS IN Cu(110), Ni(110) and Ag(110) SURFACES, Kemei Wang, Univ of Illinois-Chicago, Dept of Physics, Chicago, IL; Pedro A. Montano, Argonne National Laboratory, Argonne, IL.
11:00 AM Ca7.3
ROUGHENING AND PREROUGHENING OF DIAMOND-CUBIC 111} SURFACES., Donald L. Woodraska, John A. Jaszczak, Michigan Technological Univ, Dept of Physics, Houghton, MI.
11:15 AM Ca7.4
SURFACE MORPHOLOGIES GENERATED BY OFF-NORMAL INCIDENCE ION SPUTTERING WITH SAMPLE ROTATION, R. Mark Bradley, Colorado State Univ, Dept of Physics, Fort Collins, CO.
11:30 AM Ca7.5
IMAGING OF SURFACE UNDULATIONS USING DIFFUSELY SCATTERED ELECTRONS IN THE
SCANNING ELECTRON MICROSCOPE, Karim Z. Baba-Kishi, Hong Kong Polytechnic Univ, Dept of Applied Physics, Kowloon, HONG KONG.
11:45 AM Ca7.6
DEVELOPMENT OF Si(100) SURFACE ROUGHNESS AT THE INITIAL STAGE OF ETCHING IN
and
GASES - ELLIPSOMETTRIC STUDY, Vladimir S. Aliev, Inst of Semiconductor Physics, Physical Chemistry Lab, Novosibirsk, RUSSIA; Vladimir N. Kruchinin, Inst of Semiconductor Physics, Physical-Chemistry Lab, Novosibirsk, RUSSIA.
SESSION Ca8: THIN FILM SURFACES: MORPHOLOGY AND ROUGHENING I
Chairs: Jacques G. Amar and Toh-Ming Lu
Wednesday Afternoon, December 4, 1996
Salon E (M)
1:30 PM *Ca8.1
NOISE-INDUCED GROWTH FRONT ROUGHENING: IS IT REAL?, Toh-Ming Lu, Rensselaer Polytechnic Inst, Dept of Physics, Troy, NY.
2:00 PM Ca8.2
SKEWED HEIGHT DISTRIBUTIONS OF KINETICALLY ROUGHENED FILMS, Peter Kleban, Univ of Maine, Dept of Physics & Astronomy, Orono, ME; Jacqueline Krim, Northeastern Univ, Dept of Physics, Boston, MA; Curt Ruffing, Univ of Maine, Dept of Physics & Astronomy, Orono, ME.
2:15 PM Ca8.3
MOLECULAR DYNAMICS SIMULATION OF FILM GROWTH AT OBLIQUE DEPOSITION ANGLES: A MOLECULAR DYNAMICS STUDY, Liang Dong, Richard W. Smith, David J. Srolovitz, Univ of Michigan, Dept of MS&E, Ann Arbor, MI.
2:30 PM BREAK
3:00 PM *Ca8.4
MOUND FORMATION AND INSTABILITIES IN
EPITAXIAL GROWTH, Jacques G. Amar, Fereydoon Family, Emory Univ, Dept of Physics, Atlanta, GA.
3:30 PM Ca8.5
LOW TEMPERATURE SMOOTHING KINETICS OF THREE-DIMENSIONAL SURFACE FEATURES OF Rh (111), Frank Tsui, Univ of North Carolina, Dept of Physics & Astronomy , Chapel Hill, NC; Joanne Wellman, Roy Clarke, Univ of Michigan, Dept of Physics, Ann Arbor, MI.
3:45 PM Ca8.6
STUDIES OF MORPHOLOGICAL INSTABILITY AND DISLOCATION FORMATION IN HETEROEPITAXIAL 
THIN FILMS VIA CONTROLLED ANNEALING EXPERIMENTS, Cengiz S. Ozkan, William D. Nix, Stanford Univ, Dept of MS&E, Stanford, CA; Huajian Gao, Stanford Univ, Dept of Mechanical Engr, Stanford, CA.
4:00 PM Ca8.7
EVOLUTION OF SURFACE MORPHOLOGY OF NIOBIUM FILMS BY ION ASSISTED DEPOSITION, Hong Ji, Univ of Michigan, Dept of Physics, Ann Arbor, MI; Gary S. Was, Univ of Michigan, Dept of Nuclear Engr, Ann Arbor, MI; J. Wayne Jones, Univ of Michigan, Dept of MS&E, Ann Arbor, MI; N. R. Moody, Sandia National Laboratories, Livermore, CA.
4:15 PM Ca8.8
MORPHOLOGICAL INSTABILITY OF A STRAINED FILM ON A COMPLIANT SUBSTRATE, Cheng-hsin Chiu, L. B. Freund, Brown Univ, Engineering Div, Providence, RI.
4:30 PM Ca8.9
THE MORPHOLOGICAL STABILITY OF STRAINED EPITAXIAL LAYERS, Bruce W. Wessels, Northwestern Univ, Dept of MS&E, Evanston, IL.
4:45 PM Ca8.10
ROUGHNESS CHARACTERIZATION BY OPTICAL SPECTROSCOPY OF 
THIN FILMS, S. Bocelli, G. Guizzetti, Univ di Pavia, Dip di Fiscia "Volta", Pavia, ITALY; Franco Marabelli, Univ di Pavia, Dip di Fisica "A.Volta", Pavia, ITALY; S. Hatzikonstantinidou, C. S. Petersson, Royal Inst of Technology, Dept of Solid State Electronics, Stockholm, SWEDEN.
SESSION Ca9: POSTER SESSION II
Chairs: Robert C. Cammarata Eric H. Chason and Ellen D. Williams
Wednesday Evening, December 4, 1996
8:00 P.M.
Grand Ballroom/Constitution (S)
Ca9.1
SURFACE MORPHOLOGY OF
EPITAXIAL FILMS DEPOSITED BY LOW TEMPERATURE UVH-CVD, John Soji, S. K. Banerjee, Samit K. Ray, Univ of Texas-Austin, Microelectronics Research Ctr, Austin, TX; E. J. Quinones, Univ of Texas-Austin, Dept of Electrical Engr, Austin, TX; B. A. Ferguson, Univ of Texas-Austin, Microelectronics Research Ctr, Austin, TX; C. B. Mullins, Univ of Texas-Austin, Dept of Chemical Engr, Austin, TX.
Ca9.2
PROCESSING TEMPERATURE DEPENDENCE ON SURFACE MORPHOLOGY AND MICROSTRUCTURE OF GOLD FILMS, Lili He, Joan E. Siewenie, Northern Illinois Univ, Dept of Electrical Engr, DeKalb, IL; Zhiqing (Jack) Shi, NASA Goddard Space Flight Ctr, Greenbelt, MD.
Ca9.3
SURFACE MORPHOLOGY OF InGaP IN THE Al-FREE PUMP LD, Ahn Goo Choo, Samsung Advanced Inst of Tech, Photonics Semiconductor Lab, Suwon, KOREA; Seong Heon Kim, Nam Heon Kim, Samsung Advanced Inst of Tech, Materials & Devices Research Ctr, Suwon, KOREA; Joon Sang Yu, Samsung Advanced Inst of Tech, Photonics Semiconductor Lab, Suwon, SOUTH KOREA; Oleg A. Laboutine, Tae II Kim, Samsung Advanced Inst of Tech, Materials & Devices Research Ctr, Suwon, SOUTH KOREA.
Ca9.4
SURFACE ROUGHENING DURING TITANIUM SILICIDE FORMATION: A COMPARISON BETWEEN Si(100) AND POLY-Si SUBSTRATES, Christian Lavoie, Cyril Cabral, Larry A. Clevenger, R. Martel, James M.E. Harper, IBM T.J. Watson Research Ctr, Yorktown Heights, NY.
Ca9.5
STUDIES OF INTERFACE AND SURFACE STRUCTURES OF
THIN FILMS GROWN ON
(001) SUBSTRATES BY MBE, Hisashi Shigetani, Taiyo Yuden Co Ltd, Dept of Basic Research, Gunma, JAPAN; Junzo Tanaka, Natl Inst for Research in Inorganic Matls, 10th Research Group, Ibaraki, JAPAN; Yoshio Matsui, Natl Inst for Research in Inorganic Matls, 4th Research Group, Ibaraki, JAPAN; Wataru Sugimura, Waseda Univ, School of Science & Engr, Tokyo, JAPAN; Masayuki Fujimoto, Kazuyoshi Kobayashi, Taiyo Yuden Co Ltd, Dept of Basic Research, Gunma, JAPAN.
Ca9.6
STRUCTURAL AND ELECTRICAL PROPERTIES OF Ni/Co SUPERLATTICES USING Pb AS A SURFACTANT, Mizuki Iwanami, Univ of Tokyo, Inst of Industrial Science, Tokyo, JAPAN; Ryuzo Furukawa, Univ of Tokyo, Tokyo, JAPAN; Tatsuhiko Matsumoto, Masao Kamiko, Ryoichi Yamamoto, Univ of Tokyo, Inst of Industrial Science, Minato-ku Tokyo, JAPAN.
Ca9.7
ATOMISTIC STUDY OF SURFACE POLARIZATION OF SUPERCONDUCTING PEROVSKITES, Eugene Heifets, Univ of Latvia, Inst of Chemical Physics, Riga, LATVIA; Eugene Kotomin, Inst of Solid State Physics, Riga, LATVIA; David Fuks, Ben-Gurion Univ, Dept of Materials Engr, Beer Sheva, ISRAEL; Simon Dorfman, Technion-Israel Inst of Tech, Dept of Physics, Haifa, ISRAEL; Alex Gordon, Haifa Univ, Dept of Mathematics & Physics, Tivon, ISRAEL.
Ca9.8
HIGH RATE ECR ETCHING OF Cu AT ROOM TEMPERATURE IN
/Ar, Steve J. Pearton, Kee-Bum Jung, J. W. Lee, Y. Park, J. R. Childress, Univ of Florida, Dept of MS&E, Gainesville, FL; Fan Ren, Bell Labs, Lucent Technologies, Murray Hill, NJ.
Ca9.9
SURFACE MORPHOLOGY MODIFICATION OF INDIUM INDUCED BY PULSED UV LASER IRRADIATION: INFLUENCE OF AMBIENT PRESSURE, Alexander Demchuk, Tulane Univ, Dept of Chemistry, New Orleans, LA.
Ca9.10
SURFACE STRUCTURE AND MORPHOLOGY OF SrBi
Ta
O
(SBT) THIN FILMS, Tingkai Li, Emcore Corp, Somerset, NJ; R. A. Stall, Emcore Corp, Emcore Research Lab, Somerset, NJ; Chien-Hsiung Peng, Sharp Microelectronics Tech, Process Technology, Camas, WA; Yongfei Zhu, Seshu B. Desu, Virginia Tech, Dept of MS&E, Blacksburg, VA.
Ca9.12
ION SPUTTERING-INDUCED RIPPLING OF SILICON SURFACES, Jonah D Erlebacher, Harvard Univ, Applied Sciences Div, Cambridge, MA; Michael J. Aziz, Harvard Univ, Engr & Applied Science Div, Cambridge, MA.
Ca9.13
RELATING POLYMER IDENTIFICATION BEHAVIOR TO ELASTIC MODULUS USING ATOMIC FORCE MICROSCOPY, M. R. VanLandingham, Univ of Delaware, Newark, DE; S. H. McKnight, U.S. Army Research Laboratory, Materials Directorate, Newark, DE; G. R. Palmese, Univ of Delaware, Newark, DE; R. F. Eduljee, J. W. Gillespie, R. L. McCullough, Univ of Delaware, Newark, DE.
Ca9.14
DEFORMATION OF POLYMER FILMS BY BENDING FORCES, Dieter W. Heermann, Andreas Linke, Gerald Paetzold, Univ of Heidelberg, Inst for Theoretical Physics, Heidelberg, GERMANY; Thorsten Hapke, Univ Heidelberg, Inst fur Theoretische Physik, Heidelberg, GERMANY.
Ca9.15
MICROELECTRONIC THIN FILM THICKNESS DETERMINATION USING A LASER-BASED ULTRASONIC TECHNIQUE, Randy J. Logan, Keith A. Nelson, Alex A. Maznev, MIT, Dept of Chemistry, Cambridge, MA.
Ca9.16
CO-SEGREGATION AT THE SURFACE OF A Pb-Bi-Ni ALLOY, Alex Landa, Carnegie Mellon Univ, Dept of MS&E, Pittsburgh, PA; Andrei Ruban, Technical Univ of Denmark, Dept of Physics, Lyngby, DENMARK; Igor Abrikosov, Univ of Uppsala, Dept of Physics, Uppsala, SWEDEN; Paul Wynblatt, Carnegie Mellon Univ, Dept of MS&E, Pittsburgh, PA; Hans Skriver, Technical Univ of Denmark, Dept of Physics, Lyngby, DENMARK.
Ca9.17
STRUCTURE OF KCN MONOLAYER FILMS VAPOR-DEPOSITED ONTO CLEAVED KBr(001) BY HELIUM ATOM DIFFRACTION, Sanford A. Safron, Florida State Univ, Dept of Chemistry, Tallahassee, FL; Jeffrey R. Baker, Jaime A. Li, Elshan A. Akhadov, Thomas W. Trelenberg, James G. Skofronick, Florida State Univ, Dept of Physics, Tallahassee, FL.
Ca9.18
COMPARING THE SURFACE ACTIVITY OF COMPOUNDS USING AN ELEMENTAL ADSORBATE , Sharmila M Mukhopadhyay, Polytechnic Univ, Brooklyn, NY.
Ca9.19
FLUORESCENCE IMAGING OF KINETICS OF OXIDE TRANSFORMATION ON SURFACE OF SINGLE CRYSTAL (111) NiAl, Howard E Schaffer, Instruments SA Inc, Edison, NJ; Don M. Lipkin, Univ of California-S Barbara, Dept of Materials, Santa Barbara, CA; Fran Adar, Instruments SA Inc, Edison, NJ; David R. Clarke, Univ of California-S Barbara, Dept of Materials, Santa Barbara, CA.
Ca9.20
INITIAL INTERFACIAL ROUGHNESS CORRELATIONS OF Fe/Au FILMS GROWN ON MgO(001) SUBSTRATES, R. Paniago, P. C. Chow, Univ of Houston, Dept of Physics, Houston, TX; R. Forrest, S. C. Moss, Univ of Houston, Houston, TX; S.S.P. Parkin, IBM Almaden Research Center, San Jose, CA; D. Cookson, ANSTO ARAP, Menai, AUSTRALIA.
Ca9.21
INFLUENCE OF CHEMICAL COMPOSITION ON THE EPITAXY AND INTERFACIAL QUALITY OF Fe/Au AND Fe/Ag MULTILAYERS, R. Paniago, P. C. Chow, Univ of Houston, Dept of Physics, Houston, TX; R. Forrest, S. C. Moss, Univ of Houston, Houston, TX; S.S.P. Parkin, IBM Almaden Research Center, San Jose, CA; D. Cookson, ANSTO ARAP, Menai, AUSTRALIA.
Ca9.22
THE CHEMICAL REACTIONS OF OXYGEN ATOMS WITH GRAPHITE SURFACE: DETAIL OF DIAMOND GROWTH MECHANISM IN CVD METHOD, Michael N. Petukhov, RRC Kurchatov Inst, IRTM, Moscow, RUSSIA.
Ca9.23
THIN POLYMERIC FILMS BY PVD, Clelio Thaumaturgo, Departamento de engenharia Mec’nica e de Materiais, Rio de Janeiro, BRASIL.
Ca9.24
SURFACE STRUCTURE DETERMINATION OF c(2x2)N2/Ni(100) AND LOW AND INTERMEDIATE COVERAGES OF CO/Cu(111) BY ANGLE-RESOLVED PHOTOEMISSION EXTENDED FINE STRUCTURE (ARPEFS) USING SYNCHROTRON RADIATION, Edward John Moler, R. A. Huff, Lawrence Berkeley National Laboratory, AFRD, Berkeley, CA; YuFeng Chen, Pennsylvania State Univ, Dept of Chemistry & Physics, Berkeley , CA; Scot A. Kellar, Lawrence Berkeley National Laboratory, AFRD, Berkeley, CA; David A. Shirley, Pennsylvania State Univ, Dept of Chemistry & Physics, University Park, PA; Zahid Hussain, Lawrence Berkeley National Laboratory, AFRD, Berkeley, CA.
Ca9.25
A STUDY OF THE KINETICS OF THE AMORPHOUS TO CRYSTLLINE TRANSFORMATION IN DC MAGNETRON SPUTTER DEPOSITED INDIUM TIN OXIDE (ITO), Cleva W. Ow-Yang, D. Spinner, Brown Univ, Engineering Div, Providence, RI; Y. Shigesato, Univ of Tokyo, Inst of Industrial Science, Tokyo, JAPAN; David C. Paine, Brown Univ, Engineering Div, Providence, RI.
Ca9.26
MICROSTRUCTURAL DEVELOPMENT DURING LOW TEMPERATURE (200
C) EPITAXIAL GROWTH OF
ALLOYS ON Si (100), Mohan Krishnamurthy, Michigan Technological Univ, Dept of M&ME, Houghton, MI; Bi-Ke Yang, Michigan Technological Univ, Dept of Metallurgical & Materials Engr, Houghton, MI.
Ca9.27
PATTERN FORMATION OF COHERENT ISLANDS DURING EPITAXIAL GROWTH OF Ge ON Si (110) SURFACES, Mohan Krishnamurthy, Michigan Technological Univ, Dept of M&ME, Houghton, MI; Bi-Ke Yang, J. D. Weil, Michigan Technological Univ, Dept of Metallurgical & Materials Engr, Houghton, MI; C. G. Slough, Ford Motor Co, SRL, Dearborn, MI.
Ca9.28
EVOLUTION OF STRESS DURING DEPOSITION O
FILMS, Reinhard Abermann, Dietmar Stubenvoll, Univ Innsbruck, Dept of Physical Chemistry, Innsbruck, AUSTRIA.
Ca9.29
GROWTH AND EPITAXY OF Au ON
(110), Frederic Cosandey, Rutgers Univ, Dept of Ceramics, Piscataway, NJ; R. Persaud, L. Zhang, T. E. Madey, Rutgers Univ, Surface Modification Lab, Piscataway, NJ.
SESSION Ca10/M11: METAL/SEMICONDUCTOR INTERFACES: STRUCTURAL ASPECTS
Chairs: Victor M. Bermudez and Steven K. Brierley
Thursday Morning, December 5, 1996
Salon E (M)
8:30 AM *Ca10.1/M11.1
CHEMICAL AND STRUCTURAL PHENOMENA AT METAL-SiC AND METAL-GaN INTERFACES, Victor M. Bermudez, Naval Research Laboratory, Code 6862, Washington, DC.
9:00 AM Ca10.2/M11.2
INTERFACE AND DEFECT STRUCTURE OF EPITAXIAL Pb FILMS GROWN ON Si(111) AND Si(001), David Loretto, Harvard Univ, Applied Sciences Div, Cambridge, MA; C. A. Lucas, Lawrence Berkeley National Laboratory, Materials Science Div, Berkeley, CA; S. Q. Xiao, Lawrence Berkeley National Laboratory, Natl Ctr for Electron Microscopy, Berkeley, CA; Uli Dahmen, Lawrence Berkeley National Laboratory, Berkeley, CA.
9:15 AM Ca10.3/M11.3
HRLEED AND STM STUDY OF MISORIENTED Si (100) WITH AND WITHOUT A Te OVERLAYER, Salima Yala, Univ of Illinois-Chicago, Dept of Physics, Chicago, IL; Pedro A. Montano, Argonne National Laboratory, Argonne, IL.
9:30 AM Ca10.4/M11.4
SELECTIVE DEPOSITION OF Al ON H/Si(100) SURFACES, T. -C. Shen, Univ of Illinois-Urbana, Beckman Inst, Urbana, IL; J. R. Tucker, C. Wang, Univ of Illinois-Urbana, Dept of Electrical & Computer Engr, Urbana, IL.
9:45 AM BREAK
10:15 AM Ca10.5/M11.5
INTERACTION OF METALS WITH SiGeC AND GeC ALLOYS: THE ROLE OF CARBON ON THERMAL AND ELECTRICAL STABILITY, Guohua Qiu, Univ of Delaware, Dept of Electrical Engr, Neward, DE; J. Olufemi Olowalafe, Univ of Delaware, Newark, DE; James Kolodzey, Univ of Delaware, Dept of Electrical Engr, Newark, DE; Bradley A. Orner, Univ of Delaware, Electrical Engineering, Newark, DE.
10:30 AM Ca10.6/M11.6
MICROSTRUCTURAL STUDIES OF Co SILICIDE LAYER FORMED ON SiGe AND SiGeC, Hugo Bender, Sing Jin, IMEC VZW, ARS, Leuven, BELGIUM; Ricardo Donaton, IMEC VZW, VMT, Leuven, BELGIUM; Karen Maex, IMEC VZW, Leuven, BELGIUM.
10:45 AM Ca10.7/M11.7
THIN FILMS OF CoSi
CO-DEPOSITED ONTO Si
Ge
ALLOYS, Peter T. Goeller, North Carolina State Univ, Dept of Materials Science, Raleigh, NC; Robert J. Nemanich, Dale E. Sayers, Boyan I. Boyanov, North Carolina State Univ, Dept of Physics, Raleigh, NC.
11:00 AM Ca10.8/M11.8
EPITAXIAL COBALT SILICIDE FORMATION USING HIGH-TEMPERATURE SPUTTERING AND VACUUM ANNEALING, Ken Inoue, Karou Mikagi, Takamaro Kikkawa, NEC Corporation, ULSI Device Development Lab, Kanagawa, JAPAN; Raymond T. Tung, Bell Labs, Lucent Technologies, Murray Hill, NJ; Shinichi Chikaki, NEC Corporation, ULSI Device Development Lab, Kanagawa, JAPAN.
11:15 AM Ca10.9/M11.9
SEGREGATION OF COPPER TO CLEAN AND OXIDIZED (100) AND (111) SILICON SURFACES FROM INTERNAL
PRECIPITATES, W. R. Wampler, Sandia National Laboratories, Albuquerque, NM.
11:30 AM Ca10.10/M11.10
SURFACE AND INTERFACE ANALYSIS OF THIN-FILM/Si (SUBSTRATE) CONTACTS BY SXES, H. Watabe, Okayama Univ, Okayama, JAPAN; Matohiro Iwami, Okayama Univ, Faculty of Sciences, Okayama, JAPAN; M. Kusaka, M. Hirai, Okayama Univ, Okayama, JAPAN; H. Nakamura, Osaka Electro-Communication Univ, Neyagawa, JAPAN.
11:45 AM Ca10.11/M11.11
NUCLEATION AND GROWTH OF EPITAXIAL CoGa ON GaAs, Brian E. Ishaug, Amir M. Dabiran, Univ of Minnesota, Dept of Electrical Engr, Minneapolis, MN; Chris J. Palmstrom, Univ of Minnesota, Dept of CE&MS, Minneapolis, MN; Philip I. Cohen, Univ of Minnesota, Dept of Electrical Engr, Minneapolis, MN.
SESSION Ca11: THIN FILM SURFACES: MORPHOLOGY AND ROUGHENING II
Chairs: George H. Gilmer and Menachem Nathan
Thursday Afternoon, December 5, 1996
Salon E (M)
1:30 PM *Ca11.1
ATOMIC-SCALE SIMULATIONS OF THIN FILM DEPOSITION: STEP COVERAGE AND THE SHADOWING INSTABILITY, George H. Gilmer, Bell Labs, Lucent Technologies, Dept of Silicon Processing, Murray Hill, NJ; Frieder H. Baumann, Bell Labs, Lucent Technologies, Murray Hill, NJ; Hanchen Huang, Tomas Diaz de la Rubia, Lawrence Livermore National Laboratory, Dept of Chemistry, Livermore, CA.
2:00 PM Ca11.2
SURFACE ROUGHNESS CHARACTERIZATION OF Au THIN FILMS BY SPECTROSCOPIC ELLIPSOMETRY, GRAZING X-RAY REFLECTANCE AND SCANNING TUNNELING MICROSCOPY, Pierre Boher, Jean Louis Stehle, SOPRA, Bois Colombes, FRANCE.
2:15 PM Ca11.3
KINETIC MONTE CARLO SIMULATION OF THIN FILM GROWTH OF Si ON Si(100), Steven W. Levine, Paulette Clancy, James R. Engstrom, Cornell Univ, Dept of Chemical Engr, Ithaca, NY.
2:30 PM Ca11.4
TIME EVOLUTION OF THE MORPHOLOGY OF InAs/InAs, J. J. Zinck, M. F. Gyure, Hughes Research Laboratories, Malibu, CA.
2:45 PM Ca11.5
SURFACE INSTABILITIES IN STRAINED SiGe FILMS GROWN AT LOW TEMPERATURE USING A COMMERCIAL UHV-CVD REACTOR, Hugues Lafontaine, D. C. Houghton, National Research Council, Inst for Microstructural Sciences, Ottawa, CANADA; B. Bahierathan, Univ of Toronto, Toronto, CANADA; Douglas D. Perovic, Univ of Toronto, Dept of MMS, Toronto, CANADA; Jean-Marc Baribeau, National Research Council, Inst for Microstructural Sciences, Ottawa, CANADA.
3:00 PM BREAK
3:30 PM Ca11.6
SURFACE INSTABILITIES AND ELECTROMIGRATION IN COPPER THIN FILM INTERCONNECTS, Menachem Nathan, Tel Aviv Univ, Dept of EE&PE, Tel Aviv, ISRAEL; Evgeny E. Glickman, Tel Aviv Univ, Dept of EE&Ep, Tel Aviv, ISRAEL.
3:45 PM Ca11.7
GROWTH DYNAMICS OF Zr-BASED AMORPHOUS THIN FILMS: EXPERIMENT AND THEORY, Michael A. Moske, Univ Augsburg, Inst of Physik, Augsburg, GERMANY; B. Reinker, K. Samwer, Univ Augsburg, Inst fur Physik, Augsburg, GERMANY.
4:00 PM Ca11.8
THE EFFECT OF INTERFACIAL ROUGHNESS AND STRAIN ON
MAGNETIC ANISOTROPIES OF FCC Co(100) THIN FILMS, Rosa A. Lukaszew, Ratna Naik, Wayne State Univ, Dept of Physics & Astronomy, Detroit, MI; Vaman Naik, Univ of Michigan, Dept of Natural Sciences, Dearborn, MI; Dankun Yang, Wayne State Univ, Dept of Physics, Detroit, MI; Gregory W. Auner, Wayne State Univ, Dept of ECE, Detroit, MI; Gerald L. Dunifer, Wayne State Univ, Dept of Physics, Detroit, MI.
4:15 PM Ca11.9
SURFACE STRUCTURE AND MORPHOLOGY OF
(SBT) THIN FILMS, Tingkai Li, Emcore Corp, Somerset, NJ; R. A. Stall, Emcore Corp, Emcore Research Lab, Somerset, NJ; Yongfei Zhu, Seshu B. Desu, Virginia Tech, Dept of MS&E, Blacksburg, VA; Chien-Hsiung Peng, Sharp Microelectronics Tech, Process Technology, Camas, WA.
4:30 PM Ca11.10
AFM METHODOLOGY FOR THE MEASUREMENT OF SILICON WAFER MICROROUGHNESS, Andrew G. Gilicinski, Scott E. Beck, Rebecca M. Rynders, Daniel A. Moniot, Air Products & Chemicals Inc, Allentown, PA.
4:45 PM Ca11.11
AUTOCORRELATION FUNCTION AND ROUGHNESS SPECTRUM OF A GROWING FILM SURFACE, Vladimir I. Trofimov, Inst of Radio Engr & Electronics , Moscow, RUSSIA.