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2010 MRS Fall Meeting & Exhibit

November 29-December 3, 2010 | Boston
Meeting Chairs
: Ana Claudia Arias, Robert F. Cook, Clemens Heske, Shu Yang

Symposium S : Microelectromechanical Systems---Materials and Devices IV

2010-11-29   Show All Abstracts

Symposium Organizers

Frank W. DelRio National Institute of Standards and Technology
Maarten P. de Boer Carnegie Mellon University
Christoph Eberl Karlsruhe Institute of Technology (KIT)
Evgeni P. Gusev Qualcomm MEMS Technologies
S1: Fabrication Methods
Session Chairs
Christoph Eberl
Monday AM, November 29, 2010
Room 207 (Hynes)

9:30 AM - **S1.1
Transfer Printing With Advanced Stamps For Applications in MEMS and Other Areas.

John Rogers 1
1 , University of Illinois, Urbana, Illinois, United States

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10:00 AM - S1.2
Fabrication and Replication of Hierarchically Textured Polymer Microstructures Using Carbon Nanotube Master Molds.

Davor Copic 1 , Sameh Tawfick 1 , Sei Jin Park 1 , Michael De Volder 1 2 , A. John Hart 1
1 Mechanical Engineering, University of Michigan, Ann Arbor, Michigan, United States, 2 , IMEC, Leuven Belgium

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10:15 AM - S1.3
Carbon Nanotube Based NEMS Actuators.

Michael Forney 1 , Jordan Poler 2
1 Nanoscale Science, UNC Charlotte, Charlotte, North Carolina, United States, 2 Chemistry, UNC Charlotte, Charlotte, North Carolina, United States

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10:30 AM - S1.4
Environmental Effects on the Elasticity of Cross-linked Poly(methyl methacrylate) Nano-wires Produced by Two-photon Lithography.

Satoru Shoji 1 , Tomoki Hamano 1 , Shota Kuwahara 1 , Thomas Rodgers 1 , Satoshi Kawata 1
1 Department of Applied Physics, Osaka University, Suita, Osaka Japan

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10:45 AM - S1.5
Xenon Difluoride Etching of Germanium for Free-standing III-V Heterostructures.

Garrett Cole 1 , Yu Bai 2 , Markus Aspelmeyer 1 , Eugene Fitzgerald 2
1 Physics, University of Vienna, Vienna, Vienna, Austria, 2 Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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11:00 AM -
BREAK

11:30 AM - **S1.6
Production and Characterization of Molded Micro-parts Made of Metals and Ceramics.

Oliver Kraft 1
1 izbs, Karlsruhe Institute of Technology, Karlsruhe Germany

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12:00 PM - S1.7
All-Oxide MEMS Devices Based on Free-standing Structures of Epitaxial Transition Metal Oxides.

Luca Pellegrino 1 , Michele Biasotti 1 2 , Renato Buzio 1 , Emilio Bellingeri 1 , Nicola Manca 2 , Cristina Bernini 1 , Antonio Sergio Siri 2 1 , Daniele Marre 2 1 , Teruo Kanki 3 , Hidekazu Tanaka 3
1 , CNR SPIN , Genova Italy, 2 Physics Department, University of Genova, Genova Italy, 3 Institute of Scientific and Industrial Research, Osaka University, Osaka Japan

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12:15 PM - S1.8
A New Route To Fabricating PDMS-Based Microfluidic Components.

Roger Diebold 1 2 , David Clarke 2
1 Materials Department, UC Santa Barbara, Santa Barbara, California, United States, 2 School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts, United States

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12:30 PM - S1.9
Integrating Nanomaterials with Micromachined Structures Using Electron-beam Lithography.

Kaushik Das 1 , Pascal Hubert 1 , Srikar Vengallatore 1
1 Mechanical Engineering, McGill University, Montreal, Quebec, Canada

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12:45 PM - S1.10
C-MEMS Structures as Three Dimensional Current Collectors for Micro-supercapacitors.

Majid Beidaghi 1 , Wei Chen 1 , Chunlei Wang 1
1 Mechanical & Materials Engineering, Florida International University, Miami, Florida, United States

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S2: Materials Development and Optimization
Session Chairs
Evgeni Gousev
Monday PM, November 29, 2010
Room 207 (Hynes)

2:30 PM - **S2.1
Towards the Development of Ni-base Superalloys as High Temperature MEMS Materials.

Devin Burns 1 , Michael Teutsch 2 , S. Suresha 1 3 , Klaus Bade 4 , Jarir Aktaa 2 , Sara Johnson 5 , Tresa Pollock 6 , Kevin Hemker 1
1 Mechanical Engineering, Johns Hopkins University, Baltimore, Maryland, United States, 2 Institute for Material Research II, Karlsruhe Institute of Technology, Karlsruhe Germany, 3 National Center For Electron Microscopy, Lawrence Berkeley National Laboratory, Berkeley, California, United States, 4 Institue for Microstructure Technology, Karlsruhe Institute of Technology, Karlsruhe Germany, 5 Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan, United States, 6 Materials, University of California Santa Barbara, Santa Barbara, California, United States

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3:00 PM - S2.2
Mechanical and Piezoelectric Behavior of Thin Film PZT Composites for MEMS.

Ioannis Chasiotis 1 , Sivakumar Yagnamurthy 1
1 Aerospace Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States

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3:15 PM - S2.3
Nanomechanical Characterization of Thin, Compliant Coatings.

Michelle Oyen 1
1 Engineering Dept. , Cambridge University, Cambridge, 0, United Kingdom

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3:30 PM - S2.4
Pt/TiO2 Growth Templates for PZT Films and Quality MEMS Devices.

Daniel Potrepka 1 , Glen Fox 2 , Luz Sanchez 1 3 , Ronald Polcawich 1
1 RDRL-SER-L, U.S. Army Research Laboratory, Adelphi, Maryland, United States, 2 , Fox Materials Consulting, LLC, Colorado Springs, Colorado, United States, 3 Materials Science, University of Maryland, College Park, Maryland, United States

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3:45 PM - S2.5
Contact Resistivity of Laser Annealed SiGe for MEMS Structural Layers Deposited at 210°C.

Joumana El Rifai 1 2 3 , Sherif Sedky 2 4 , Ahmed Abdel Aziz 2 , Robert Puers 1 3 , Chris Van Hoof 1 3 , Ann Witvrouw 1
1 , IMEC, Leuven Belgium, 2 Youssef Jameel Science and Technology Research Center, The American University in Cairo, Cairo Egypt, 3 , Katholieke Universiteit Leuven, Leuven Belgium, 4 Physics Department, The American University in Cairo, Cairo Egypt

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4:00 PM -
BREAK

S3: Strength Characterization
Session Chairs
Evgeni Gousev
Monday PM, November 29, 2010
Room 207 (Hynes)

4:30 PM - **S3.1
Making Silicon Stronger.

Brad Boyce 1
1 , Sandia National Laboratories, Albuquerque, New Mexico, United States

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5:00 PM - S3.2
Mechanical and Electromechanical On-chip Testing of Mono- and Poly-crystalline Silicon Nanobeams.

Jean-Pierre Raskin 2 3 , Vikram Passi 2 , Umesh Bhaskar 2 , Azeem Zulfiqar 1 2 , Thomas Pardoen 1
2 ICTEAM, université catholique de Louvain, Louvain-la-Neuve Belgium, 3 CERMIN, Université catholique de Louvain, Louvain-la-Neuve Belgium, 1 IMMC, Université catholique de Louvain, Louvain-la-Neuve Belgium

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5:15 PM - S3.3
Electron Back Scatter Diffraction and Confocal Raman Microscopy in situ Studies of Stress Applied to Polysilicon Grains.

Siddharth Hazra 1 , Ryan Koseski 2 , Frank DelRio 2 , Jack Beuth 1 , Mark Vaudin 2 , Robert Cook 2 , Maarten de Boer 1
1 Mechanical Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, United States, 2 Ceramics Division, National Institute of Standards and Technology, Gaithersburgh, Maryland, United States

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5:30 PM - S3.4
Characterizing the Effect of Uniaxial Strain on the Surface Roughness of Si Nanowire MEMS-based Microstructures.

Enrique Escobedo-Cousin 1 , Sarah Olsen 1 , Thomas Pardoen 2 , Umesh Bhaskar 2 , Jean-Pierre Raskin 2
1 , Newcastle University, Newcastle upon Tyne United Kingdom, 2 , Universite catholique de Louvain, Louvain-la-Neuve Belgium

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5:45 PM - S3.5
Effects of Plasma-etched Silicon Surfaces on the Strength of Theta-like Micromechanical Test Structures.

Michael Gaither 1 , Frank DelRio 1 , Richard Gates 1 , Robert Cook 1
1 Ceramics Division, National Institute of Standards and Technology, Gaithersburg, Maryland, United States

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S4: Poster Session: Devices and Fabrication
Session Chairs
Evgeni Gousev
Monday PM, November 29, 2010
Exhibition Hall D (Hynes)

9:00 PM - S4.1
Hydrothermal Potassium Sodium Niobate Lead-free Piezoelectric Ceramics.

Takafumi Maeda 1 , Norihito Takiguchi 1 , Peter Bornmann 2 , Tobias Hemsel 2 , Takeshi Morita 1
1 Graduate School of Frontier sciences, The University of Tokyo, Kashiwa, Chiba, Japan, 2 Mechatronics and Dynamics, University of Paderborn, Paderborn, North Rhine-Westphalia, Germany

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9:00 PM - S4.10
Fabrication of an Ultrathin Microfluidic Membrane Bilayer Tissue Engineering Construct.

Alla Epshteyn 1 2 , Jeff Borenstein 1 , John Adams 2 , Steven Maher 2 1 , Angela Holton 1 , Shekhar Bhansali 2 , Amy Taylor 1 , Joseph Cuiffi 1
1 , Draper Laboratory, Tampa, Florida, United States, 2 , University of South Florida, Tampa, Florida, United States

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9:00 PM - S4.11
SU8/ Na-AHA modified MWNT Composite for Piezoresistive Sensor Application.

Prasenjit Ray 1 , V. Seena 1 , Rupesh Khare 2 , Arup Bhattacharyya 2 , Prakash Apte 1 , Ramgopal Rao 1
1 Centre for excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India, 2 Department of Metallurgical Engineering & Materials Science, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India

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9:00 PM - S4.12
High Yield Polymer MEMS Process for CMOS/MEMS Integration.

Prasenjit Ray 1 , V. Seena 1 , Prakash Apte 1 , Ramgopal Rao 1
1 Centre for Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India

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9:00 PM - S4.13
Mechanical and Material Characterization of Bilayer Microcantilever-based IR detectors.

I-Kuan Lin 1 , Ping Du 1 , Yanhang Zhang 1 , Xin Zhang 1
1 Mechanical Engineering, Boston University, Boston, Massachusetts, United States

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9:00 PM - S4.16
Enhanced Piezoelectric Properties of Low Temperature-processed PZT Thick Films by Hybrid Deposition Technique with Chemical Solution Infiltration Process.

Seung-Hyun Kim 1 , Wenyan Jiang 1 , Chang Young Koo 2 , Angus Kingon 1
1 Division of Engineering, Brown University, Providence, Rhode Island, United States, 2 Research Center, INOSTEK Inc., Ansan, Gyeonggi, Korea (the Republic of)

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9:00 PM - S4.17
The Performance and the Reliability of Micromachined PZT-based Vibration Energy Harvesting Devices.

Jung-Hyun Park 1 , Hosang Ahn 1 , Seon-Bae Kim 1 , Dan Liu 1 , Dong-Joo Kim 1
1 Materials Engineering, Auburn University, Auburn, Alabama, United States

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9:00 PM - S4.18
Parallelized Microfluidic Separations for Large-scale Dewatering of Biofuel Algae.

Kevin Loutherback 1 , Joseph D'Silva 1 , Jost Goettert 3 , Jeff Bargiel 2 , Christopher Lane 2 , Robert Austin 4 , James Sturm 1
1 Electrical Engineering, Princeton University, Princeton, New Jersey, United States, 3 , Lousiana State University, Baton Rouge, Louisiana, United States, 2 , Phycal, LLC, Highland Heights, Ohio, United States, 4 Physics, Princeton University, Princeton, New Jersey, United States

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9:00 PM - S4.19
Development of Ni-Al Superalloys for High Temperature LIGA MEMS Materials.

Devin Burns 1 , Michael Teutsch 2 , Klaus Bade 3 , Jarir Aktaa 2 , Kevin Hemker 1
1 Mechanical Engineering, Johns Hopkins University, Baltimore, Maryland, United States, 2 Institute for Material Research II (IMF II), Karlsruhe Institute of Technology, Karlsruhe Germany, 3 Institute for Microstructure Technology (IMT), Karlsruhe Institute of Technology, Karlsruhe Germany

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9:00 PM - S4.2
PZT Thick Films for 100 MHz Ultrasonic Transducers Fabricated Using Chemical Solution Deposition Process.

Naoto Kochi 1 2 , Takashi Iijima 2 , Takashi Nakajima 1 , Soichiro Okamura 1
1 , Tokyo University of Science, Shinjuku-ku Japan, 2 , National Institute of Advanced Industrial Science and Technology, Tsukuba Japan

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9:00 PM - S4.21
Silicon Bonding Using SU-8 and Polyimide.

Aleksander Jonca 1 , Bradley Kaanta 1 , Xin Zhang 1
1 Mechanical Engineering, Boston University College of Engineering, Boston, Massachusetts, United States

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