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2010 MRS Fall Meeting & Exhibit

November 29-December 3, 2010 | Boston
Meeting Chairs
: Ana Claudia Arias, Robert F. Cook, Clemens Heske, Shu Yang

Symposium S : Microelectromechanical Systems---Materials and Devices IV

2010-11-29   Show All Abstracts

Symposium Organizers

Frank W. DelRio National Institute of Standards and Technology
Maarten P. de Boer Carnegie Mellon University
Christoph Eberl Karlsruhe Institute of Technology (KIT)
Evgeni P. Gusev Qualcomm MEMS Technologies
S1: Fabrication Methods
Session Chairs
Christoph Eberl
Monday PM, November 29, 2010
Room 207 (Hynes)

9:30 AM - **S1.1
Transfer Printing With Advanced Stamps For Applications in MEMS and Other Areas.

John Rogers 1
1 , University of Illinois, Urbana, Illinois, United States

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10:00 AM - S1.2
Fabrication and Replication of Hierarchically Textured Polymer Microstructures Using Carbon Nanotube Master Molds.

Davor Copic 1 , Sameh Tawfick 1 , Sei Jin Park 1 , Michael De Volder 1 2 , A. John Hart 1
1 Mechanical Engineering, University of Michigan, Ann Arbor, Michigan, United States, 2 , IMEC, Leuven Belgium

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10:15 AM - S1.3
Carbon Nanotube Based NEMS Actuators.

Michael Forney 1 , Jordan Poler 2
1 Nanoscale Science, UNC Charlotte, Charlotte, North Carolina, United States, 2 Chemistry, UNC Charlotte, Charlotte, North Carolina, United States

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10:30 AM - S1.4
Environmental Effects on the Elasticity of Cross-linked Poly(methyl methacrylate) Nano-wires Produced by Two-photon Lithography.

Satoru Shoji 1 , Tomoki Hamano 1 , Shota Kuwahara 1 , Thomas Rodgers 1 , Satoshi Kawata 1
1 Department of Applied Physics, Osaka University, Suita, Osaka Japan

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10:45 AM - S1.5
Xenon Difluoride Etching of Germanium for Free-standing III-V Heterostructures.

Garrett Cole 1 , Yu Bai 2 , Markus Aspelmeyer 1 , Eugene Fitzgerald 2
1 Physics, University of Vienna, Vienna, Vienna, Austria, 2 Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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11:00 AM - S1: Fab
BREAK

11:30 AM - **S1.6
Production and Characterization of Molded Micro-parts Made of Metals and Ceramics.

Oliver Kraft 1
1 izbs, Karlsruhe Institute of Technology, Karlsruhe Germany

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12:00 PM - S1.7
All-Oxide MEMS Devices Based on Free-standing Structures of Epitaxial Transition Metal Oxides.

Luca Pellegrino 1 , Michele Biasotti 1 2 , Renato Buzio 1 , Emilio Bellingeri 1 , Nicola Manca 2 , Cristina Bernini 1 , Antonio Sergio Siri 2 1 , Daniele Marre 2 1 , Teruo Kanki 3 , Hidekazu Tanaka 3
1 , CNR SPIN , Genova Italy, 2 Physics Department, University of Genova, Genova Italy, 3 Institute of Scientific and Industrial Research, Osaka University, Osaka Japan

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12:15 PM - S1.8
A New Route To Fabricating PDMS-Based Microfluidic Components.

Roger Diebold 1 2 , David Clarke 2
1 Materials Department, UC Santa Barbara, Santa Barbara, California, United States, 2 School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts, United States

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12:30 PM - S1.9
Integrating Nanomaterials with Micromachined Structures Using Electron-beam Lithography.

Kaushik Das 1 , Pascal Hubert 1 , Srikar Vengallatore 1
1 Mechanical Engineering, McGill University, Montreal, Quebec, Canada

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12:45 PM - S1.10
C-MEMS Structures as Three Dimensional Current Collectors for Micro-supercapacitors.

Majid Beidaghi 1 , Wei Chen 1 , Chunlei Wang 1
1 Mechanical & Materials Engineering, Florida International University, Miami, Florida, United States

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S2: Materials Development and Optimization
Session Chairs
Evgeni Gousev
Monday PM, November 29, 2010
Room 207 (Hynes)

2:30 PM - **S2.1
Towards the Development of Ni-base Superalloys as High Temperature MEMS Materials.

Devin Burns 1 , Michael Teutsch 2 , S. Suresha 1 3 , Klaus Bade 4 , Jarir Aktaa 2 , Sara Johnson 5 , Tresa Pollock 6 , Kevin Hemker 1
1 Mechanical Engineering, Johns Hopkins University, Baltimore, Maryland, United States, 2 Institute for Material Research II, Karlsruhe Institute of Technology, Karlsruhe Germany, 3 National Center For Electron Microscopy, Lawrence Berkeley National Laboratory, Berkeley, California, United States, 4 Institue for Microstructure Technology, Karlsruhe Institute of Technology, Karlsruhe Germany, 5 Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan, United States, 6 Materials, University of California Santa Barbara, Santa Barbara, California, United States

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3:00 PM - S2.2
Mechanical and Piezoelectric Behavior of Thin Film PZT Composites for MEMS.

Ioannis Chasiotis 1 , Sivakumar Yagnamurthy 1
1 Aerospace Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States

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3:15 PM - S2.3
Nanomechanical Characterization of Thin, Compliant Coatings.

Michelle Oyen 1
1 Engineering Dept. , Cambridge University, Cambridge, 0, United Kingdom

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3:30 PM - S2.4
Pt/TiO2 Growth Templates for PZT Films and Quality MEMS Devices.

Daniel Potrepka 1 , Glen Fox 2 , Luz Sanchez 1 3 , Ronald Polcawich 1
1 RDRL-SER-L, U.S. Army Research Laboratory, Adelphi, Maryland, United States, 2 , Fox Materials Consulting, LLC, Colorado Springs, Colorado, United States, 3 Materials Science, University of Maryland, College Park, Maryland, United States

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3:45 PM - S2.5
Contact Resistivity of Laser Annealed SiGe for MEMS Structural Layers Deposited at 210°C.

Joumana El Rifai 1 2 3 , Sherif Sedky 2 4 , Ahmed Abdel Aziz 2 , Robert Puers 1 3 , Chris Van Hoof 1 3 , Ann Witvrouw 1
1 , IMEC, Leuven Belgium, 2 Youssef Jameel Science and Technology Research Center, The American University in Cairo, Cairo Egypt, 3 , Katholieke Universiteit Leuven, Leuven Belgium, 4 Physics Department, The American University in Cairo, Cairo Egypt

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4:00 PM - S2: MDO
BREAK

S3: Strength Characterization
Session Chairs
Evgeni Gousev
Monday PM, November 29, 2010
Room 207 (Hynes)

4:30 PM - **S3.1
Making Silicon Stronger.

Brad Boyce 1
1 , Sandia National Laboratories, Albuquerque, New Mexico, United States

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5:00 PM - S3.2
Mechanical and Electromechanical On-chip Testing of Mono- and Poly-crystalline Silicon Nanobeams.

Jean-Pierre Raskin 2 3 , Vikram Passi 2 , Umesh Bhaskar 2 , Azeem Zulfiqar 1 2 , Thomas Pardoen 1
2 ICTEAM, université catholique de Louvain, Louvain-la-Neuve Belgium, 3 CERMIN, Université catholique de Louvain, Louvain-la-Neuve Belgium, 1 IMMC, Université catholique de Louvain, Louvain-la-Neuve Belgium

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