Symposium TC03 : Emerging Prospects and Capabilities in Ion Beam Technology and Applications

2017-11-28   Show All Abstracts

Symposium Organizers

Alex Belianinov, Oak Ridge National Laboratory
Frances Allen, University of California, Berkeley
Shinichi Ogawa, National Institute of Advanced Industrial Science and Technology
Tom Wirtz, Luxembourg Institute of Science and Technology (LIST)

Symposium Support

Raith America, Inc.
ZEISS Microscopy
TC03.01: Gas Field Source Ion Microscopy
Session Chairs
Frances Allen
Alex Belianinov
Tuesday AM, November 28, 2017
Hynes, Level 2, Room 201

9:00 AM - *TC03.01.01
Precision Milling and Drilling with a Light Ion Beam

John Notte 1 , Deying Xia 1
1 , Carl Zeiss Microscopy, Peabody, Massachusetts, United States

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9:30 AM - *TC03.01.02
Scaling the Focused Ion Beam for Applications in Semiconductors

Shida Tan 1
1 , Intel Corporation, Santa Clara, California, United States

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10:00 AM -
BREAK

TC03.02: Ion Imaging, Milling and Shaping
Session Chairs
Frances Allen
Alex Belianinov
Tuesday AM, November 28, 2017
Hynes, Level 2, Room 201

10:30 AM - *TC03.02.01
FIB Preparation of Polymer TEM Samples

Andrew Minor 1 2
1 , University of California, Berkeley, Berkeley, California, United States, 2 , Lawrence Berkeley National Laboratory, Berkeley, California, United States

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11:00 AM - TC03.02.02
Understanding and Controlling Dynamics of Graphene Milling Process Using Helium Ion Beam

Songkil Kim 1 , Anton Ievlev 1 , Ivan Vlassiouk 1 , Matthew Burch 1 , Ondrej Dyck 1 , Xiahan Sang 1 , Raymond Unocic 1 , Alex Belianinov 1 , Sergei Kalinin 1 , Stephen Jesse 1 , Olga Ovchinnikova 1
1 , Oak Ridge National Laboratory, Oak Ridge, Tennessee, United States

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11:15 AM - TC03.02.03
Laser-Assisted Nanofabrication in the Helium Ion Microscope

Michael Stanford 1 , Kyle Mahady 1 , Brett Lewis 1 , Jason Fowlkes 1 2 , Shida Tan 3 , Richard Livengood 3 , Gregory Magel 4 , Thomas Moore 4 , Philip Rack 1
1 , Univ of Tennessee, Knoxville, Tennessee, United States, 2 Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, Tennessee, United States, 3 , Intel Corporation, Santa Clara, California, United States, 4 , Waviks Inc, Dallas, Texas, United States

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11:30 AM - TC03.02.04
Preparation of Silicon Nitride Phase Plates Using Focused Ion Beams

Alexander Müller 1 , Karen Bustillo 1 , Frances Allen 1 2 , Andrew Minor 1 2 , Colin Ophus 1
1 , Lawrence Berkeley National Laboratory, Berkeley, California, United States, 2 Department of Materials Science and Engineering, University of California, Berkeley, California, United States

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11:45 AM - TC03.02.05
Patterning Strategies for Large Area and Continuous FIB Nanofabrication Based on Precise Stage Movement

Sven Bauerdick 1 , Achim Nadzeyka 1 , Bjoern Wittmann 1 , Joel Fridmann 2 , Joe Klingfus 2 , Michael Kahl 1
1 , Raith GmbH, Dortmund Germany, 2 , Raith America Inc., Islandia, New York, United States

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TC03.03: Ion Microscopy and Secondary Ion Mass Spectrometry
Session Chairs
Shinichi Ogawa
Tom Wirtz
Tuesday PM, November 28, 2017
Hynes, Level 2, Room 201

1:30 PM - *TC03.03.01
SIMS Performed on the Helium-Ion Microscope—New Prospects for Highest Spatial Resolution Imaging and Correlative Microscopy

Jean-Nicolas Audinot 1 , Florian Vollnhals 1 , Patrick Philipp 1 , Santhana Eswara 1 , David Dowsett 1 , Tom Wirtz 1
1 Material Research & Technology, Luxembourg Institute of Science and Technology, Belvaux Luxembourg

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2:00 PM - TC03.03.02
3D Chemical Analysis of Inorganic and Organic Nanostructures Using ToF-SIMS and In Situ SPM

Ewald Niehuis 1 , Rudolf Moellers 1 , Felix Kollmer 1 , Derk Rading 1 , Henrik Arlinghaus 1 , Nathan Havercroft 2 , Adi Scheidemann 3
1 , ION-TOF GmbH, Muenster Germany, 2 , ION-TOF USA Inc., Chestnut Ridge, New York, United States, 3 , Nanoscan AG, Duebendorf Switzerland

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2:15 PM - TC03.03.03
Ion Beam Based Approach for Thin Films Thinning and Cleaning

Anton Ievlev 1 , Marius Chyasnavichyus 1 , Donovan Leonard 1 , Lane Martin 2 , Sergei Kalinin 1 , Petro Maksymovych 1 , Olga Ovchinnikova 1
1 , Oak Ridge National Laboratory, Oak Ridge, Tennessee, United States, 2 , University of California, Berkeley, Berkeley, California, United States

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2:30 PM - *TC03.03.04
Multimodal Chemical Imaging of Nanoscale Interfacial Phenomena on a Combined HIM-SIMS Platform

Olga Ovchinnikova 1
1 , Oak Ridge National Laboratory, Oak Ridge, Tennessee, United States

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3:00 PM -
BREAK

TC03.04: Material Property Mapping and Ion Transmission
Session Chairs
Shinichi Ogawa
Tom Wirtz
Tuesday PM, November 28, 2017
Hynes, Level 2, Room 201

3:30 PM - *TC03.04.01
Structuring Magnetic and Electronic Materials Using GFIS Noble Gas Focused Beams

Gregor Hlawacek 1
1 , Helmholtz Zentrum Dresden Rossendorf, Dresden Germany

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4:00 PM - TC03.04.02
Scanning Transmission Helium-Ion Microscopy with a Dedicated Detector

Taylor Woehl 1 , Ryan White 2 , Robert Keller 2
1 , University of Maryland, College Park, Maryland, United States, 2 , National Institute of Standards and Technology, Boulder, Colorado, United States

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4:15 PM - TC03.04.03
Transmission Images of He Ion-Beam Milling and Channeling through Thin Si Membranes

Karen Kavanagh 1 , Christoph Herrmann 1 , Jiaming Wang 1 , Symphony Huang 1 , Shelley Scott 2 , Max Lagally 2
1 , Simon Fraser University, Burnaby, British Columbia, Canada, 2 , University of Wisconsin, Madison, Wisconsin, United States

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4:30 PM - TC03.04.04
Evidence form Low Temperature RBS-Channeling Study of Structural Phase Transition in the Incoherent Lattice Fluctuations, Lattice Distortion and Local Microstructure of Pure and Implanted SrTiO3

Kalyan Sasmal 1 , Wei-Kan Chu 1
1 Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, Texas, United States

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TC03.05: Poster Session: Imaging and Surface Modification by Ion Microscopy
Session Chairs
Alex Belianinov
Tuesday PM, November 28, 2017
Hynes, Level 1, Hall B

8:00 PM - TC03.05.01
Application Method of Sub-Images Extracted for Higher-Resolution Imaging and Images Fussion for Multi-Scale Pore Space Characterization

Yongjie Ma 1 , Xin Wang 1 , Ye Xu 2 , Chaohua Guo 3 , Zhonghai Zhou 1 , Danyong Li 4
1 , Institute of Oceanographic Instrumentation, Shandong Academy of Sciences (SDIOI), Qingdao City China, 2 , Beihang University, Beijing China, 3 , China University of Geosciences (Wuhan), Wuhan China, 4 , OLEUMTECH Co., Ltd, Beijing China

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8:00 PM - TC03.05.02
Rapid Screening of Nanoporous Structures in SiO2 Catalyst Particles via Helium Ion Microscopy

Matthew Burch 1 , Anton Ievlev 1 , Holland Hysmith 1 , Kyle Mahady 2 , Philip Rack 2 , Lubin Luo 3 , Alex Belianinov 1 , Sergey Yakovlev 3 , Olga Ovchinnikova 1
1 , Oak Ridge National Laboratory, Oak Ridge, Tennessee, United States, 2 , University of Tennessee, Knoxville, Knoxville, Tennessee, United States, 3 , ExxonMobil Chemical Company, Baytown, Texas, United States

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8:00 PM - TC03.05.03
Two-Dimensional Circuitry Achieved by Defect Engineering of Transition Metal Dichalcogenides with the Helium Ion Microscope

Michael Stanford 1 , Pushpa Pudasaini 1 , Anna Hoffman 1 , Philip Rack 1
1 , Univ of Tennessee, Knoxville, Tennessee, United States

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8:00 PM - TC03.05.04
Luminescence Tuning in BiFeO3 (BFO) Thin Films by Swift Heavy Ion Irradiation

Balram Tripathi 1 2 , Manoj Kumar 3 , Rajesh Katiyar 1 , F Singh 4 , K.B. Sharma 2 , Ram S Katiyar 1
1 Physics, University of Puerto Rico, San Juan, Puerto Rico, United States, 2 Physics, S S Jain Subodh PG (Autonomous) College, Jaipur, Rajasthan, India, 3 Physics, Malviya National Institute of Technology, Jaipur, Rajasthan, India, 4 Material Science, Inter University Accelerator Centre Aruna Asaf Ali Marg, New Delhi India

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8:00 PM - TC03.05.05
Ion Beam Induced Current Measurements with Helium Ion Microscopy

Alex Belianinov 1 , Songkil Kim 1 , Ryan Buechley 1 , Matthew Burch 1 , Olga Ovchinnikova 1 , Stephen Jesse 1
1 , Oak Ridge National Laboratory, Oak Ridge, Tennessee, United States

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2017-11-29   Show All Abstracts

Symposium Organizers

Alex Belianinov, Oak Ridge National Laboratory
Frances Allen, University of California, Berkeley
Shinichi Ogawa, National Institute of Advanced Industrial Science and Technology
Tom Wirtz, Luxembourg Institute of Science and Technology (LIST)

Symposium Support

Raith America, Inc.
ZEISS Microscopy
TC03.06: Electron and Ion Induced Deposition
Session Chairs
Frances Allen
Alex Belianinov
Wednesday AM, November 29, 2017
Hynes, Level 2, Room 201

9:00 AM - *TC03.06.01
Mechanism-Based Design of Precursors for FEBID

Lisa McElwee-White 1
1 , University of Florida, Gainesville, Florida, United States

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9:30 AM - *TC03.06.02
Characteristics of Beam Induced Depositions Made with Electrons and H, He, Ga, O or Xe Ions

Johannes Mulders 1
1 , ThermoFisher Scientific, Eindhoven Netherlands

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10:00 AM -
BREAK

TC03.07: 3D Structure Fabrication
Session Chairs
Frances Allen
Alex Belianinov
Wednesday AM, November 29, 2017
Hynes, Level 2, Room 201

10:30 AM - *TC03.07.01
The Three-Dimensional Nano- and Microstructure Fabrications by Using Focused Ion Beam

Reo Kometani 1
1 Graduate School of Frontier Sciences, The University of Tokyo, Chiba Japan

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11:00 AM - TC03.07.02
Focused Ion Beam Induced Deposition of Complex Nanoscale 3D-Structures via Helium Ion Beam Irradiation

Matthew Burch 1 , Anton Ievlev 1 , Michael Stanford 2 , Brett Lewis 2 , Xiahan Sang 1 , Songkil Kim 1 , Jason Fowlkes 1 , Philip Rack 2 , Raymond Unocic 1 , Alex Belianinov 1 , Olga Ovchinnikova 1
1 , Oak Ridge National Laboratory, Oak Ridge, Tennessee, United States, 2 , University of Tennessee, Knoxville, Knoxville, Tennessee, United States

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11:15 AM - TC03.07.03
Growing Nanostructures with Focused Ion Beams

Frances Allen 1 , Alexander Müller 2 , Andrew Minor 1 2
1 Department of Materials Science and Engineering, University of California, Berkeley, Berkeley, California, United States, 2 , Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California, United States

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11:30 AM - TC03.07.04
Focused Electron- and Focused-Ion Beam Fabrication of Ultra-Low Power Gas Nanosensors Based on Single Metal-Oxide Nanowires

Jordi Sama 1 2 , Guillem Domènech-Gil 1 2 , J. Daniel Prades 1 2 , Olga Casals Guillen 1 2 , Francisco Hernandez-Ramirez 1 2 , Mauricio Moreno 1 2 , Sven Barth 3 , Albert Romano-Rodriguez 1 2
1 Institute of Nanoscience and Nanotechnology (IN2UB), Universitat de Barcelona (UB), Barcelona Spain, 2 MIND-Department of Electronics, Universitat de Barcelona, Barcelona Spain, 3 Department of Materials Chemistry, Vienna University of Technology (TUW), Vienna Austria

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TC03.08: Ion Implantation and Defect Engineering
Session Chairs
Shinichi Ogawa
Tom Wirtz
Wednesday PM, November 29, 2017
Hynes, Level 2, Room 201

1:30 PM - *TC03.08.01
Helium-Ion Beam Induced Deposition—Combining the Best of Two*?

Paul Alkemade 1
1 , Delft University of Technology, Delft Netherlands

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2:00 PM - *TC03.08.02
Modification of High-Transition Temperature Superconductors with Focused Helium Ion Irradiation

Shane Cybart 1
1 , University of California, Riverside, Riverside, California, United States

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2:30 PM - TC03.08.03
Utilizing the Helium Ion Beam Microscope for Implantation Studies

David Frazer 1 , Yun Yang 1 , Mehdi Balooch 1 , Frances Allen 1 , Peter Hosemann 1
1 , University of California, Berkeley, Berkeley, California, United States

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2:45 PM - TC03.08.04
In Situ Ion-Beam Microscopy Capabilities at the Sandia Ion-Beam Laboratory

Samuel Briggs 1 , Christopher Barr 1 , Patrick Price 1 , Caitlin Taylor 1 , Brittany Muntifering 1 , Daniel Bufford 1 , Khalid Hattar 1
1 , Sandia National Laboratories, Albuquerque, New Mexico, United States

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3:00 PM -
BREAK

TC03.09: Ion Microscopy Imaging and Resolution
Session Chairs
Shinichi Ogawa
Tom Wirtz
Wednesday PM, November 29, 2017
Hynes, Level 2, Room 201

3:30 PM - *TC03.09.01
Secondary Electron Hyperspectral Imaging—High Resolution Chemical Characterization by Helium Ions

Cornelia Rodenburg 1 , Robert Masters 1 , Kerry Abrams 1 , Nicola Stehling 1 , Jan Schäfer 4 , Katja Fricke 4 , Robert O'Connell 2 , Yangbo Zhou 2 3 , Hongzhou Zhang 2
1 , University of Sheffield, Sheffield United Kingdom, 4 , Leibniz Institute for Plasma Science and Technology, Greifswald Germany, 2 , Trinity College Dublin, Dublin Ireland, 3 , Nanchang University, Nanchang China

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4:00 PM - TC03.09.02
Contrast Differences Between Nitrogen and Helium Ion Induced Secondary Electron Images beyond Instrument Effects

Marek Schmidt 1 , Shinichi Ogawa 2 , Hiroshi Mizuta 1
1 , Japan Advanced Institute of Science and Technology, Nomi Japan, 2 , National Institute of Advanced Industrial Science and Technology, Tsukuba Japan

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4:15 PM - TC03.09.03
Simulation Based Investigation of Gas Assisted Focused Ion Beam Etching— Elucidating Resolution Effects

Kyle Mahady 1 , Philip Rack 1 2 , Shida Tan 3 , Yuval Greenzweig 4 , Richard Livengood 3 , Amir Raveh 4
1 , University of Tennessee, Knoxville, Tennessee, United States, 2 Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, Tennessee, United States, 3 , Intel Corporation, Santa Clara, California, United States, 4 , Intel Israel, Haifa Israel

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4:30 PM - TC03.09.04
Investigation of Gas-Assisted Etching, Deposition and Substrate Damage by Primary Ions, within the Single Beam Width of FIB Systems with Ga LMI and Xe ICP Sources

Valery Ray 1 2 , Ali Hadjikhani 1 , Sina Shahbazmohamadi 1
1 Reverse Engineering, Fabrication, Inspection, and Nondestructive Evaluation Center, University of Connecticut, Storrs, Connecticut, United States, 2 , PBS&T, MEO Engineering Company Inc, Methuen, Massachusetts, United States

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2017-11-30   Show All Abstracts

Symposium Organizers

Alex Belianinov, Oak Ridge National Laboratory
Frances Allen, University of California, Berkeley
Shinichi Ogawa, National Institute of Advanced Industrial Science and Technology
Tom Wirtz, Luxembourg Institute of Science and Technology (LIST)

Symposium Support

Raith America, Inc.
ZEISS Microscopy
TC03.10: Novel Ion Sources
Session Chairs
Frances Allen
Alex Belianinov
Thursday AM, November 30, 2017
Hynes, Level 2, Room 201

9:15 AM - *TC03.10.01
Cold-Atom Focused Ion Beams—New Species, Low Energies and High Brightness

Jabez McClelland 1 , William McGehee 1 , Jamie Gardner 1 2 , Evgheni Strelcov 1 2 , Vladimir Oleshko 1 , Saya Takeuchi 3 1 , Thomas Michels 1 4 , Vladimir Aksyuk 1 , Christopher Soles 1 , Andrew Schwarzkopf 5 , Brenton Knuffman 5 , Adam Steele 5
1 , National Institute of Standards and Technology, Gaithersburg, Maryland, United States, 2 Maryland Nanocenter, University of Maryland, College Park, Maryland, United States, 3 , Theiss Research, La Jolla, California, United States, 4 , Ilmenau University of Technology, Ilmenau Germany, 5 , zeroK NanoTech, Gaithersburg, Maryland, United States

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9:45 AM - TC03.10.02
FIB with Ion Species for Advanced Nanofabrication and Ion Implantation—Achievements and Challenges of the Ion Source

Sven Bauerdick 1 , Lothar Bischoff 2 , Lars Bruchhaus 1 , Paul Mazarov 1 , Ralf Jede 1
1 , Raith GmbH, Dortmund Germany, 2 , HZDR, Dresden Germany

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10:00 AM -
BREAK

TC03.11: Impacts of Novel Ion Source Technology
Session Chairs
Frances Allen
Alex Belianinov
Thursday AM, November 30, 2017
Hynes, Level 2, Room 201

10:30 AM - *TC03.11.01
Mask Repair Technology Using Gas Field Ion Source

Anto Yasaka 1 , Fumio Aramaki 1 , Tomokazu Kozakai 1 , Osamu Matsuda 1 , Kensuke Shiina 1 , Koji Nagahara 1
1 , Hitachi High-Tech Science Center, Tokyo Japan

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11:00 AM - TC03.11.02
Coldfib—The New FIB Source from Laser Cooled Atoms

Matthieu Viteau 1 , Arnaud Houel 1 , Anne Delobbe 1 , Morgan Reveillard 1 , Daniel Comparat 2
1 , Orsay Physics, Fuveau France, 2 91, Centre National de la Recherche Scientifique (CNRS), Orsay France

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11:15 AM - TC03.11.03
Novel Atomic Layer Etching Using Gas Cluster Ion Beam Irradiation

Noriaki Toyoda 1
1 , University of Hyogo, Himeji Japan

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11:30 AM - *TC03.11.04
Improving the Study of Bone Diseases by Correlative Electron-, Ion- and X-Ray Microscopy including their Spectroscopic Techniques

Silke Christiansen 1 2 3
1 Christiansen Research Group, Helmholtz Zentrum Berlin für Materialien und Energie, Berlin Germany, 2 Physics Department, Free University, Berlin Germany, 3 Christiansen Research Group, Max Planck Institute for the Science of Light, Erlangen Germany

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