2019 MRS Fall Meeting & Exhibit

Symposium MT05: Emerging Prospects and Capabilities in Focused Ion Beam Technologies and Applications

2019-12-02   Show All Abstracts

Symposium Organizers

Frances Allen, University of California, Berkeley
Alex Belianinov, Oak Ridge National Laboratory
Silke Christiansen, Helmholtz Zentrum Berlin für Materialien und Energie
Shane Cybart, University of California, Riverside

Symposium Support

Gold
Raith America, Inc.

Silver
ZEISS

Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
MT05.01: Overview of Emerging FIB-Based Research
Session Chairs
Frances Allen
Silke Christiansen
Monday AM, December 02, 2019
Hynes, Level 2, Room 204

10:30 AM - *MT05.01.01
Unravelling the Origins of Functionality through Correlative Multimodal Chemical Imaging

Olga Ovchinnikova1,Anton Ievlev1,Alex Belianinov1

Oak Ridge National Laboratory1

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11:00 AM - *MT05.01.02
Exploring a FIB-SEM Research Data Ecosystem

Keana Scott1,Alline Myers1,Peter Bajcsy1

National Institute of Standards and Technology1

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11:30 AM - *MT05.01.03
Ultra-High Precision Engineering of 2D Nanomaterials Using Energetic Focused Ion Beam Technologies

Songkil Kim1

Pusan National University1

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MT05.02: Novel FIB Sources and Nano-Fabrication
Session Chairs
Alex Belianinov
Silke Christiansen
Shane Cybart
Monday PM, December 02, 2019
Hynes, Level 2, Room 204

1:30 PM - *MT05.02.01
New Light and Heavy Ion Beams from Liquid Metal Alloy Ion Sources for Advanced Nanofabrication and Ion Implantation

Paul Mazarov1,Lars Bruchhaus1,Fabian Meyer1,Achim Nadzeyka1,Torsten Richter1,Ralf Jede1,Yang Yu2,Jason Sanabia2,Lothar Bischoff3,Wolfgang Pilz3,Nico Klinger3,Gregor Hlawacek3,Jacques Gierak4

Raith GmbH1,Raith America, Inc.2,Helmholtz-Zentrum Dresden-Rossendorf3,Centre de Nanosciences et de Nanotechnologies4

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2:00 PM - *MT05.02.02
Gas Assisted Plasma FIB—A Delayering Tool

Anne Delobbe1,2,Gregory Goupil2,Sharang Sharang3,Pascal Gounet4

Tescan Orsay Holding1,Orsay Physics2,TESCAN Brno s.r.o.3,ST Microelectronics4

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2:30 PM - MT05.02.03
Comparison of Gallium and Neon Ion Beam Milling on GaAs

Deying Xia1,John Notte1,Ying-Bing Jiang2,Brett Lewis1

Carl Zeiss1,The University of New Mexico2

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2:45 PM - MT05.02.04
Ne-FIB Fabrication of Tips for Atom Probe Tomography

John Notte3,Frances Allen1,2,Paul Blanchard4,Norman Sanford4,Ruopeng Zhang1,2,Andrew Minor1,2,Soeren Eyhusen3

University of California, Berkeley1,Lawrence Berkeley National Laboratory2,Carl Zeiss Microscopy3,National Institute of Standards and Technology4

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3:00 PM -
BREAK


3:30 PM - *MT05.02.05
Electro-Hydro Dynamic Ion Sources and Focused Ion Beam Machines

Jacques Gierak1,Paul Mazarov2,Lothar Bischoff3

Centre de Nanosciences et de Nanotechnologies1,Raith GmbH2,Helmholtz-Zentrum Dresden-Rossendorf3

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4:00 PM - MT05.02.06
Focused Ion Beam Preparation of Strain Microscopy Samples for Coherent X-Ray Imaging of 3D Nano-Scale Structure and Lattice Strain

Felix Hofmann1,Nicholas Phillips1,Gareth Hughes1,James Douglas1,Ross Harder2,Wenjun Liu2

University of Oxford1,Argonne National Laboratory2

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4:15 PM - MT05.02.07
Comparison of Several Focused Ion Beam Fabrication Methods for Quantitative In Situ Small-Scale Mechanical Testing

Yang Yang1,Frances Allen1,2,Andrew Minor1,2

Lawrence Berkeley National Laboratory1,University of California, Berkeley2

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4:30 PM - MT05.02.08
Beam Exit Cross-Sectional Polishing (BEXP) and Functional SPM—New Approach for 3D Mapping of Physical Properties of Nanostructures

Marta Mucientes1,Leonardo Forcieri1,Pamela Jurczak2,Mingchu Tang2,Huiyun Liu2,Yipin Gong3,Tao Wang3,Samuel Jarvis1,Kunal Lulla1,Oleg Kolosov1

Lancaster University1,University College London2,The University of Sheffield3

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4:45 PM - MT05.02.09
Transfer of Sub-10 nm Patterns to Substrate Using Helium Ion Beam Lithography and Reactive-Ion Etch

Matthew Hunt1,S. Lewis1,2,N. Lee1,H. Alty2,J. Yang1,3,A. Wertheim1,G. DeRose1,Stephen Yeates2,Richard Winpenny2,A. Scherer1

California Institute of Technology1,The University of Manchester2,Stanford University3

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2019-12-03   Show All Abstracts

Symposium Organizers

Frances Allen, University of California, Berkeley
Alex Belianinov, Oak Ridge National Laboratory
Silke Christiansen, Helmholtz Zentrum Berlin für Materialien und Energie
Shane Cybart, University of California, Riverside

Symposium Support

Gold
Raith America, Inc.

Silver
ZEISS

Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
MT05.03: FIB Property Engineering I
Session Chairs
Frances Allen
Alex Belianinov
Shane Cybart
Tuesday AM, December 03, 2019
Hynes, Level 2, Room 204

9:00 AM - *MT05.03.01
Local and Macroscale Property Control of Ferroic Thin-Film Materials with Ion Beams

Lane Martin1,2

University of California, Berkeley1,Lawrence Berkeley National Laboratory2

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9:30 AM - *MT05.03.02
Fabrication of Single Atom Devices by Direct Write Nanofabrication

Edward Bielejec1

Sandia National Laboratories1

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10:00 AM -
BREAK


10:30 AM - *MT05.03.03
Neuromorphic MoS2 Memtransistors Fabricated by Localised Helium Ion Beam Irradiation

Hongzhou Zhang1,Jakub Jadwiszczak1,Darragh Keane1,Gregor Hlawacek2

Trinity College1,Institute of Ion Beam Physics and Materials Research2

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11:00 AM - MT05.03.04
Large Scale Automated Fabrication Using a Helium Ion Microscope

Ethan Cho1,Hao Li1,Shane Cybart1

University of California, Riverside1

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11:15 AM - MT05.03.05
Open Slot - TBA


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11:30 AM - MT05.03.06
Phase Transitions in He+ FIB-Irradiated VO2 Observed with 4D-STEM Imaging

Steven Zeltmann1,Lei Jin1,Frances Allen1,Junqiao Wu1,Andrew Minor1,2

University of California, Berkeley1,Lawrence Berkeley National Laboratory2

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11:45 AM - MT05.03.07
Use of Helium-FIB to Study Helium Ion Irradiation Effects for a Tungsten Target

Mehdi Balooch1,Frances Allen1,Peter Hosemann1

University of California, Berkeley1

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MT05.04: FIB Property Engineering II
Session Chairs
Frances Allen
Shane Cybart
Tuesday PM, December 03, 2019
Hynes, Level 2, Room 204

1:30 PM - *MT05.04.01
Nanoscale Superconducting Quantum Devices Based on High Transition Temperature Superconductor Materials Fabricated by Focused Helium Ion Beam

Hao Li1,Ethan Cho1,Shane Cybart1

University of California, Riverside1

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2:00 PM - MT05.04.02
Superconducting Nanoscale Detectors Fabricated Using Precision Dislocation Engineering

Ilya Charaev1,Glenn Martinez1,Denis Bandurin1,Andrew Dane1,Reza Baghdadi1,Marco Colangelo1,Karl Berggren1

Massachusetts Institute of Technology1

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2:15 PM - MT05.04.03
Ion Beam Induced Damage in MgB2 and Co-Doped Ba(FeAs)2 Thin Films for Josephson Junctions

Leila Kasaei1,Hussein Hijazi1,Mengjun Li1,Ryan Thorpe1,Hongbin Yang1,Philip Batson1,Ke Chen2,Torgny Gustafsson1,Xiaoxing Xi2,Leonard Feldman1

Rutgers University1,Temple University2

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2:30 PM - MT05.04.04
Nanoscale Devices Fabricated by Focused Ion Beam Irradiation of YBa2Cu3O7 Thin Films

Max Karrer1

University Tübingen1

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2:45 PM - MT05.04.05
Nanocluster Formation In Silica via Microbeam-Focused MeV Ion Implantation

Daryush Ila2,John D. Demaree1

CCDC Army Research Laboratory1,FSU2

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3:00 PM -
BREAK


MT05.05: FIB In Situ Stages and Nanotomography
Session Chairs
Frances Allen
Silke Christiansen
Tuesday PM, December 03, 2019
Hynes, Level 2, Room 204

3:30 PM - *MT05.05.01
Expanding the FIB/SEM Toolkit—Taking a Look at Various In Situ Sample Processing and Characterization Possibilities

Andrew Smith1,Andreas Rummel1,Klaus Schock1,Matthias Kemmler1,Stephan Kleindiek1

Kleindiek Nanotechnik1

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4:00 PM - *MT05.05.02
Advances in FIB Nanotomography—Towards 1 nm3 Voxels

Michael Phaneuf1,Alexandre Laquerre1,Ken Lagarec1

Fibics Incorporated1

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4:30 PM - MT05.05.03
In-Situ Correlative Analysis of Ion-Beam Treated Nanostructures by Combination of AFM and FIB

Christian Schwalb1,Stefan Hummel1,Robert Winkler2,Jurgen Sattelkow2,Pinar Frank1,Gregor Hlawacek3,Peter Hosemann4,Georg Fantner5,Harald Plank2

GETec Microscopy1,Technical University Graz2,Helmholtz-Zentrum Dresden-Rossendorf3,University of California, Berkeley4,EPFL5

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4:45 PM - MT05.05.04
Focused Ion Beam Processing for Practical 3D Analysis of Hard and Soft Biomaterials

Meltem Sezen1,Busra Tugba Camic1

Sabanci University1

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2019-12-04   Show All Abstracts

Symposium Organizers

Frances Allen, University of California, Berkeley
Alex Belianinov, Oak Ridge National Laboratory
Silke Christiansen, Helmholtz Zentrum Berlin für Materialien und Energie
Shane Cybart, University of California, Riverside

Symposium Support

Gold
Raith America, Inc.

Silver
ZEISS

Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
MT05.06: Theory and Simulations
Session Chairs
Frances Allen
Shane Cybart
Wednesday AM, December 04, 2019
Hynes, Level 2, Room 204

9:00 AM - *MT05.06.01
Free-Standing and Supported Two-Dimensional Materials under Ion Irradiation

Arkady Krasheninnikov1

Helmholtz-Zentrum Dresden-Rossendorf1

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9:30 AM - MT05.06.02
First-Principles Study of Charge Equilibration and Electronic Stopping in Self-Irradiated Silicon

Cheng-Wei Lee1,Andre Schleife1

University of Illinois at Urbana-Champaign1

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9:45 AM - MT05.06.03
Interrogation of the Nano-Beam and Nano-Target Effects in Ion Radiation Using IM3D

Yang Yang1,2,Yong Gang Li3,Michael Short1,Ju Li1

Massachusetts Institute of Technology1,Lawrence Berkeley National Laboratory2,Institute of Solid State Physics, Chinese Academy of Sciences3

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10:00 AM -
BREAK


MT05.07: FIB-SIMS I
Session Chairs
Alex Belianinov
Silke Christiansen
Wednesday AM, December 04, 2019
Hynes, Level 2, Room 204

10:30 AM - *MT05.07.01
FIB-SIMS—Recent Advances in Secondary Ion Mass Spectrometry for Analytical Dual Beam Focussed Ion Beam Instruments

Johann Michler1,Lex Pillatsch1,Agnieszka Priebe1

Empa–Swiss Federal Laboratories for Materials Science and Technology1

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11:00 AM - *MT05.07.02
NanoFab-SIMS—A Promising Tool for the Characterization of Nanofeatures

Christelle Guillermier1,Brett Lewis1,Fouzia Khanom1

Carl Zeiss SMT, Inc.1

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11:30 AM - MT05.07.03
Enhancing Sensitivity with NeFIB-SIMS—A Material and Parameter Study

Brett Lewis1,Fouzia Khanom1,Christelle Guillermier1

Carl Zeiss SMT Inc1

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11:45 AM - MT05.07.04
High-Resolution Cs+ Ion Beam for FIB and SIMS Applications

Brenton Knuffman1,Andrew Schwarzkopf1,Adam Steele1

Zerok Nanotech Corporation1

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MT05.08: FIB-SIMS II
Session Chairs
Silke Christiansen
Shane Cybart
Wednesday PM, December 04, 2019
Hynes, Level 2, Room 204

1:30 PM - *MT05.08.01
Analytical Capabilities on FIB Instruments Using SIMS—Applications, Current Developments and Prospects

Tom Wirtz1,Jean-Nicolas Audinot1,Jelena Lovric1,Alexander Ost1,Olivier De Castro1

Luxembourg Institute of Science and Technology1

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2:00 PM - MT05.08.02
Development of an In Situ Cryo High Resolution Instrument for Multimodal Analysis in Nano-Toxicology

Olivier De Castro1,Jelena Lovric1,Rachid Barrahma1,Olivier Bouton1,Eduardo Serralta2,Nico Klinger2,Gregor Hlawacek2,Peter Gnauck3,Serge Duarte Pinto4,Falk Lucas5,Tom Wirtz1

Luxembourg Institute of Science and Technology1,Helmholtz-Zentrum Dresden-Rossendorf2,Carl Zeiss Microscopy GmbH3,Photonis Netherlands B.V.4,ETH Zürich5

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2:15 PM - MT05.08.03
Unveiling Photoinduced Ion Dynamics in Hybrid Organic-Inorganic Perovskites Using Time-Resolved Time-of-Flight Secondary Ion Mass Spectrometry

Yongtao Liu1,2,Anton Ievlev1,Liam Collins1,Nikolay Borodinov1,Alex Belianinov1,Matthias Lorenz1,Stephen Jesse1,Kai Xiao1,Mahshid Ahmadi2,Bin Hu2,Sergei Kalinin1,Olga Ovchinnikova1

Oak Ridge National Laboratory1,The University of Tennessee, Knoxville2

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2:30 PM -
BREAK


2019-12-05   Show All Abstracts

Symposium Organizers

Frances Allen, University of California, Berkeley
Alex Belianinov, Oak Ridge National Laboratory
Silke Christiansen, Helmholtz Zentrum Berlin für Materialien und Energie
Shane Cybart, University of California, Riverside

Symposium Support

Gold
Raith America, Inc.

Silver
ZEISS

Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
MT05.09: Biological Applications of FIB
Session Chairs
Alex Belianinov
Silke Christiansen
Thursday AM, December 05, 2019
Hynes, Level 2, Room 204

9:00 AM - *MT05.09.01
Cryo-FIB Sample Preparation Methods for Tissue and Cells in Structure Biology Studies at Molecular Resolution

Miroslava Schaffer1,Stephan Kleindiek2,Benjamin Engel1,Stefan Pfeffer1,Michael Heymann1,Tim Laugks1,Julia Mahamid1,Andrew Smith2,Juergen Plitzko1,Wolfgang Baumeister1

Max Planck Institute of Biochemistry1,Kleindiek Nanotechnik GmbH2

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9:30 AM - *MT05.09.02
Multimodal Analysis of Calcified Biological Materials

Lasse Kling1

Helmholtz-Zentrum Berlin für Materialien und Energie1

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MT05.10: FIB Nano-Fabrication by Deposition and Self-Fold Processes
Session Chairs
Frances Allen
Alex Belianinov
Thursday AM, December 05, 2019
Hynes, Level 2, Room 204

10:30 AM - *MT05.10.01
3D Nanoprinting Using Electron and Ion Beams

Jason Fowlkes1,Eva Mutunga2,Robert Winkler3,Jurgen Sattelkow3,Grace Pakeltis2,Philip Rack2,Alex Belianinov1,Olga Ovchinnikova1,Harald Plank3

Oak Ridge National Laboratory1,The University of Tennessee, Knoxville2,Graz University of Technology3

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11:00 AM - *MT05.10.02
Direct-Writing Nanofabrication of Complex 3D Superconducting Nanostructures

Rosa Córdoba1,2,Alfonso Ibarra3,Dominique Mailly4,Jose De Teresa2,3

Molecular Science Institute (ICMol)1,Aragon Material Science Institute (ICMA)2,University of Zaragoza, INA, LMA3,University Paris Saclay, Univ Paris Sud, CNRS, Ctr Nanosci & Nanotechnol4

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11:30 AM - MT05.10.03
Ultra-Fast Growth of Metal Layers and Nanowires by Focused Ion Beam Induced Deposition under Cryogenic Conditions

Jose De Teresa1,2,Rosa Córdoba1,2,Pablo Orús1,2,Stefan Strohauer1,Teobaldo Torres1

University of Zaragoza1,CSIC-University of Zaragoza2

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11:45 AM - MT05.10.04
Atomistic Insights into Self-Fold Process of Nanostructures Induced by Focused Ion Beam

Chun-Wei Pao1,Cheng-Lun Wu1

Academia Sinica1

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