September 9-11, 2021
San Diego, California USA
A three-day school on fundamental and practical aspects of ion implantation and annealing operations in research and IC production environments will be held prior to the 23rd International Conference on Ion Implantation Technology in San Diego, California, USA, in September 2021.
This school, which has preceded IIT meetings since 1982, will be taught by an expert group of instructors with many years of hands-on experience in the design, construction and operation of ion implantation and annealing tools as well as practical experience in process development and metrology.
All attendees of the school will receive a hardbound, ≈600 page book containing tutorial chapters written by the instructors for follow-on study.
Topics covered in the course include:
Detailed registration information will be posted as it becomes available.