Tutorial CH03—Atomic Force Microscopy and Correlative Microscopy in Materials Research

Instructors: Umberto Celano, Arizona State University; Harald Plank, Graz University of Technology; Christian Schwalb, Quantum Design Microscopy GmbH; Stefano Spagna, Quantum Design International

In this tutorial, we will explore recent advancements in the emerging field of 3D-nanoprobe fabrication techniques, nonoptical sensing technologies, and their use in different atomic force microscopy (AFM) modes and applications. Participants will also learn practical correlative microscopy workflows, with an emphasis on the integration of AFM, scanning electron microscopy (SEM) and energy-dispersive x-ray spectroscopy (EDS) for materials characterizations. In the first part of the tutorial, we will introduce techniques to create multifunctional 3D nanoprobes for applications in different operation modes of AFM and correlative microscopy. The second part addresses challenges and opportunities in nonoptical sensing cantilevers for electrical AFM, focusing on their integration with focused ion beam (FIB) and SEM for semiconductor research, including industrially relevant goals in failure analysis. Participants will gain insights into the design, fabrication and application of advanced AFM probes and technologies to address applications in magnetic structures, nano-plasmonics and materials failure analysis.

Learning Objectives include:

• Learn about the design and application of multifunctional nanoprobes for various AFM techniques.
• Learn about nonoptical sensing technologies for semiconductor research and how to integrate with correlative microscopy.
• Discover the potential of integrating AFM with SEM and EDS technologies for materials characterization.
• Equip the participants with the skills in using correlative AFM-SEM-EDS characterizations.

Tutorial Schedule

8:30 am

Novel 3D Nanoprobes for Advanced Correlative Analysis of Nanostructures

Harald Plank, Graz University of Technology, Austria; Stefano Spagna, Quantum Design International, United States

10:00 am BREAK

10:30 am

Electrical Atomic Force Microscopy Enabled by Nonoptical Sensing Systems for Nanoelectronics

Umberto Celano, Arizona State University, United States; Christian Schwalb, Quantum Design Microscopy GmbH, Germany