December 1 - 6, 2024
Boston, Massachusetts
Symposium Supporters
2024 MRS Fall Meeting & Exhibit
NM05.17.07

Chemically Tailored and Phase-Selective Growth of 2D Semiconductors via Hybrid Metal-Organic Chemical Vapor Deposition

When and Where

Dec 6, 2024
3:30pm - 3:45pm
Hynes, Level 2, Room 207

Presenter(s)

Co-Author(s)

Zhepeng Zhang1,2,Lauren Hoang1,Marisa Hocking1,2,Zhenghan Peng1,2,Jenny Hu1,Mihir Pendharkar1,2,Elijah Courtney1,2,Gregory Zaborski Jr.1,Pooja Reddy1,Johnny Dollard1,Marc Kastner1,2,3,David Goldhaber-Gordon1,2,Tony Heinz1,2,Eric Pop1,Andrew Mannix1,2

Stanford University1,SLAC National Accelerator Laboratory2,Massachusetts Institute of Technology3

Abstract

Zhepeng Zhang1,2,Lauren Hoang1,Marisa Hocking1,2,Zhenghan Peng1,2,Jenny Hu1,Mihir Pendharkar1,2,Elijah Courtney1,2,Gregory Zaborski Jr.1,Pooja Reddy1,Johnny Dollard1,Marc Kastner1,2,3,David Goldhaber-Gordon1,2,Tony Heinz1,2,Eric Pop1,Andrew Mannix1,2

Stanford University1,SLAC National Accelerator Laboratory2,Massachusetts Institute of Technology3
Two-dimensional (2D) semiconducting transition-metal dichalcogenides (TMDCs) are a leading platform for excitonic physics and next-generation electronics, creating a strong demand to understand their growth, doping, heterostructures and polytypes. Despite significant progress in solid-source (SS-) and metal-organic chemical vapor deposition (MOCVD), further optimization is necessary to grow highly crystalline 2D TMDCs with controlled doping and heterostructures. Here, we report a hybrid MOCVD (Hy-MOCVD) growth method that combines liquid-phase metal precursor deposition and vapor-phase organo-chalcogen delivery to leverage the advantages of both MOCVD and SS-CVD.<sup>1</sup> Using our hybrid approach, we demonstrate WS<sub>2</sub> growth with tunable morphologies – from separated single-crystal domains to continuous monolayer films – on a variety of substrates, including sapphire, SiO<sub>2</sub>, and Au. These WS<sub>2</sub> films exhibit narrow neutral exciton photoluminescence linewidths down to 27 – 28 meV and mobility up to 34 – 36 cm<sup>2</sup>V<sup>-1</sup>s<sup>-1</sup> at room-temperature. Through simple modifications to the liquid precursor composition, we demonstrate the growth of V-doped WS<sub>2</sub>, Mo<sub>x</sub>W<sub>1-x</sub>S<sub>2</sub> alloys, and in-plane WS<sub>2</sub>-MoS<sub>2</sub> heterostructures.<br/>Moreover, rhombohedral polytype (3R) TMDC multilayers exhibit non-centrosymmetric interlayer stacking, which yields intriguing properties such as ferroelectricity, a large second-order susceptibility coefficient χ<sup>(2)</sup> for nonlinear optics, valley coherence, and a bulk photovoltaic effect. However, phase-selective growth strategies for 3R TMDCs are still underdeveloped and are especially lacking for multilayer films which strongly exhibit the desired optoelectronic characteristics. We facilitate multilayer growth of WS<sub>2</sub> by introducing a confined space into the Hy-MOCVD process.<sup>2</sup> The confined-space Hy-MOCVD method preferentially grows 3R multilayer WS<sub>2</sub> films with thickness up to 130 nm. We confirm the 3R stacking structure <i>via</i> polarization-resolved second harmonic generation characterization and <i>via</i> the threefold symmetry revealed by anisotropic H<sub>2</sub>O<sub>2</sub> etching. The multilayer 3R WS<sub>2 </sub>shows a dendritic morphology which is indicative of diffusion-limited growth. Multilayer regions with large, stepped terraces enable layer-resolved evaluation of the optical properties of 3R-WS<sub>2</sub> <i>via</i> Raman, photoluminescence, and differential reflectance spectroscopy. These measurements confirm the interfacial quality and suggest ferroelectric modification of the exciton energies.<br/>References<br/>[1] Z. Zhang<sup>#</sup>, L. Hoang<sup>#</sup>, M. Hocking, Z. Peng, J. Hu, G. Zaborski Jr., P. Reddy, J. Dollard, D. Goldhaber-Gordon, T. F. Heinz, E. Pop and A. J. Mannix*<i>.</i> “Chemically Tailored Growth of 2D Semiconductors via Hybrid Metal-Organic Chemical Vapor Deposition” arXiv:2403.03482 (2024). #These authors contributed equally to this work (Z.Z., L.H.).<br/>[2] Z. Zhang, M. Hocking, Z. Peng, M. Pendharkar, E. D. S. Courtney, J. Hu, M. A. Kastner, D. Goldhaber-Gordon, T. F. Heinz, and A. J. Mannix* “Phase-Selective Synthesis of Rhombohedral WS<sub>2</sub> Multilayers by Confined-Space Hybrid Metal-Organic Chemical Vapor Deposition” <i>under review </i>(2024)

Keywords

2D materials | chemical vapor deposition (CVD) (deposition)

Symposium Organizers

Andras Kis, Ecole Polytechnique Federale de Lausanne
Li Lain-Jong, University of Hong Kong
Ying Wang, University of Wisconsin, Madison
Hanyu Zhu, Rice University

Session Chairs

Yi Cui

In this Session