MRS Meetings and Events


EL05.04.01 2024 MRS Spring Meeting

Chemical Vapor Deposition of One-Dimensional Van der Waals Material Nb2Se9 assisted by Liquid Precursor

When and Where

Apr 23, 2024
5:00pm - 7:00pm

Flex Hall C, Level 2, Summit



Sang Hoon Lee1,Jae-Young Choi1

Sungkyunkwan University1


Sang Hoon Lee1,Jae-Young Choi1

Sungkyunkwan University1
Nb<sub>2</sub>Se<sub>9</sub>, a one-dimensional (1D) van der Waals (vdWs) material, has been successfully synthesized using chemical vapor deposition (CVD). In the crystal structure of Nb<sub>2</sub>Se<sub>9</sub>, the atoms are interconnected in the [111] direction, forming atomic chains. These chains consist of repeating bonds between niobium and selenium groups, where one side of niobium is linked to tetra-selenium groups and the other side is connected to penta-selenium groups. Like other 1D vdWs materials, Nb<sub>2</sub>Se<sub>9</sub> tends to grow in the direction of dangling bonds, resulting in nanowires and nanoribbon morphologies. To address the challenge of controlling the length and density of Nb<sub>2</sub>Se<sub>9</sub> due to niobium's high melting point, a liquid precursor was employed for CVD synthesis process. The growth of Nb<sub>2</sub>Se<sub>9</sub> occurred horizontally, shaping into nano-ribbons on the substrate in the [100] direction, which offers the most stable bonding distance. This orientation led to a preferred alignment of the (010) plane on the out-of-plane axis. In contrast to conventional mechanical or chemical exfoliation methods, the nanoscale Nb2Se9 produced via CVD exhibited uniformity and lacked contaminants, such as dispersants, on its surface. This purity enabled effective reactions like gas adsorption and desorption. The material displayed remarkable sensitivity to NO<sub>2</sub> gas adsorption at room temperature, and this behavior was validated in a high-humidity environment. This study represents the first successful demonstration of synthesizing a 1D material based on vdWs bonding through CVD. This breakthrough holds promise for widespread applications in various low-dimensional materials and devices.


chemical vapor deposition (CVD) (deposition) | Nb | Se

Symposium Organizers

Silvija Gradecak, National University of Singapore
Lain-Jong Li, The University of Hong Kong
Iuliana Radu, TSMC Taiwan
John Sudijono, Applied Materials, Inc.

Symposium Support

Applied Materials

Session Chairs

Lain-Jong Li
John Sudijono

In this Session

Chemical Vapor Deposition of One-Dimensional Van der Waals Material Nb2Se9 assisted by Liquid Precursor

Room-Temperature Direct Growth of Transition Metal Dichalcogenide Films via Remote Plasma-Assisted Chemical Vapor Deposition

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Multi-Neuron Connection Using Multi-Terminal Floating-Gate Memristor for Unsupervised Learning

Synthesis of Te and Sb Doped Black Phosphorus Single Crystals, Oxidation-Resistance and Room-Temperature Gas Sensing Applications

Structural and Physical Properties of Two Distinct Two-Dimensional Lead Halides with Intercalated Cu(II): A Comparative Study

Van der Waals Interface Engineering for Enhancemen of Semiconductor Device Performance

Monolayer MoS2 with Controllable and Localized Micro-Scale Domains of Strain enabled by Spatially Varying Nanotopography

Semiempirical Pseudopotential Method for Low-Dimensional Materials

Berry Curvature Dipole Induced Giant Mid-Infrared Second-Harmonic Generation in 2D Weyl Semiconductor

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