2021 MRS Spring Meeting

Tutorial ASM-02—The Fundamentals of Nanoprobe Analysis

Saturday, April 17, 2021
5:00 pm - 6:30 pm

Randy Mulder, Silicon Labs

As semiconductor technologies continue to decrease in size and the number or metallization layers increase, traditional methods for localizing the failure mechanism in failing semiconductor circuits such as micro-probing or light emission are severely limited if not impossible to perform. In response to this situation, nano-probe technologies have been developed to overcome this obstacle. In this tutorial, both AFM based and in-situ beam tool based (FIB/SEM) nano-probe technologies will be reviewed. Techniques for the characterization and identification of common semiconductor defects will be presented. Case studies for several types of defects will also be presented.

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