Symposium EP04—Reliability and Materials Issues of Semiconductor Optical and Electron Devices and Materials
Achieving high reliability is a key issue for semiconductor optical and electron devices and is as important as device performance for commercial application. Degradation of both the optical and electronic properties of semiconductor devices is strongly related to materials issues including defects, stress and quality of passivation. Many of these issues can occur during the device fabrication processes, i.e., crystal growth, impurity diffusion, ion-implantation, wet/dry etching, metallization, bonding, packaging, etc.
This symposium will review the current status of reliability and degradation of various semiconductor optical and electron devices as well as their materials issues in thin film growth, wafer processing, and device fabrication processes. It will also focus on defect engineering in semiconductors, control and application of defects for novel devices. It will also provide a forum for discussion on development of future research approaches.