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2008 MRS Spring Meeting & Exhibit

March 24-28, 2008 | San Francisco
Meeting Chairs: Jeffrey C. Gelpey, Robert J. Hamers, Paul Muralt, Christine A. Orme

Symposium Y : Focused Ion Beams for Materials Characterization and Micromachining

2008-03-26   Show All Abstracts

Symposium Organizers

Lorenz Holzer EMPA Materials Science and Technology
Michael D. Uchic Air Force Research Laboratory
Cynthia Volkert Forschungszentrum Karlsruhe
Andrew Minor Lawrence Berkeley National Laboratory

Symposium Support

Lawrence Livermore National Laboratory
Y1: Nanolithography and Nanostructuring with Focused Ion Beam (Optical Devices and Membranes)
Session Chairs
Cynthia Volkert
Wednesday PM, March 26, 2008
Room 3011 (Moscone West)

3:00 PM - **Y1.1
Prototyping Research with a DualBeam FIB/SEM: Cut-&-Paste, See-&-Do, and Presto Picostructures.

Warren MoberlyChan 1
1 Dept. of Materials Technology, Lawrence Livermore National Laboratory, Livermore, California, United States

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3:30 PM - Y1.2
Nanometer Accuracy Grating Fabrication using Focused Ion Beam Etching Method.

Wei Zhou 1 , Kevin Roberts 2 , James Leger 1
1 Dept. of Electrical and Computer Engineering, University of Minnesota, Minneapolis, Minnesota, United States, 2 Nanofabrication Center, University of Minnesota, Minneapolis, Minnesota, United States

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3:45 PM - Y1.3
Surface Plasmon Components on Single-crystal Au Fabricated using Focused Ion Beam.

Ernst Jan Vesseur 1 , Rene de Waele 1 , Henri Lezec 2 3 , Harry Atwater 2 , F. Garcia de Abajo 4 , Albert Polman 1
1 , FOM Institute AMOLF, Amsterdam Netherlands, 2 , California Institute of Technology, Pasadena, California, United States, 3 Center for Nanoscale Science and Technology, NIST, Gaithersburg, Maryland, United States, 4 , Instituto de Optica - CSIC, Madrid Spain

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4:00 PM - Y1.4
Controlled Fabrication of Nanopores using a Direct Focused Ion Beam Approach.

David Adams 1 , Nick Patterson 1 , Carter Hodges 1 , Michael Vasile 1 , Joseph Michael 1 , Paul Kotula 1
1 Thin Film, Sandia National Labs, Albuquerque, New Mexico, United States

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4:15 PM - Y1:FIB-nanolitho