Meetings & Events

Fall 2006 logo2006 MRS Fall Meeting & Exhibit

November 27 - December 1, 2006 | Boston
Meeting Chairs:
 Babu R. Chalamala, Louis J. Terminello, Helena Van Swygenhoven

 

Symposium LL : Focused Ion Beams for Analysis and Processing

2006-11-27   Show All Abstracts

Symposium Organizers

Warren MoberlyChan Lawrence Livermore National Laboratory
Hendrik Colijn The Ohio State University
Richard Langford University of Manchester
Ann Marshall Stanford University
LL1: Processing & Fabrication of Devices I
Session Chairs
Richard Langford
Monday AM, November 27, 2006
Fairfax B (Sheraton)

11:00 AM - **LL1.1
FIB for Device Fabrication.

John Melngailis 1
1 Electrical and Computer Engineering, Univ. Maryland, College Park, Maryland, United States

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11:30 AM - **LL1.2
Ion Beam Lithography & Resist Processing for Nanofabrication.

Khalil Arshak 1
1 ECE, University of Limerick, Limerick, Ireland, Ireland

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12:00 PM - LL1.3
Focused Ion Beam Milling for Nanophotonics and Optoelectronics.

Marko Loncar 1 , Federico Capasso 1
1 , Harvard University, Cambridge, Massachusetts, United States

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12:15 PM - LL1.4
FIB-based Fabrication of Active Organic Devices on Scanning Probe Cantilevers.

Kwang Hyup An 1 , Yiying Zhao 2 , Brendan O’Connor 1 , Kevin Pipe 1 , Max Shtein 2
1 Mechanical Engineering, University of Michigan, Ann Arbor, Michigan, United States, 2 Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan, United States

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12:30 PM - LL1.5
Ordered Arrays of Colloidal Gold Nanoparticles Fabricated by Focused Ion Beam Techniques.

Todd Simpson 1 , Ian Mitchell 1
1 Physics & Astronomy, University of Western Ontario, London, Ontario, Canada

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LL2: Processing & Fabrication of Devices II
Session Chairs
Khalil Arshak
Warren MoberlyChan
Monday PM, November 27, 2006
Fairfax B (Sheraton)

2:30 PM - **LL2.1
FIB for Surface Plasmon Photonics.

Thomas Ebbesen 1
1 ISIS, Universite Louis Pasteur, Strasbourg France

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3:00 PM - **LL2.2
Focused-Ion-Beam Fabrication of Surface-Wave Activated Nanophotonic Devices.

Henri Lezec 1 2
1 , California Institute of Technology, Pasadena, California, United States, 2 , CNRS, Paris France

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3:30 PM -
break

5:00 PM - LL2.4
Beam-assisted CVD and Feedback Control Realized via a Multiple-Source Gas Injection System.

Thomas Moore 1 , Rocky Kruger 1 , Aaron Smith 1 , Lyudmila Zaykova-Feldman 1 , J. Mark Anthony 2
1 , Omniprobe, Inc., Dallas, Texas, United States, 2 , Elion Systems, Austin, Texas, United States

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5:15 PM - LL2.5
Chemically Enhanced Focused Ion Beam Selective Patterning of Titanium, Titanium Oxide and Nitride Thin Films.

Andrei Stanishevsky 1 , John Melngailis 2
1 , University of Alabama at Birmingham, Birmingham, Alabama, United States, 2 , University of Maryland, College Park, Maryland, United States

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2006-11-28   Show All Abstracts

Symposium Organizers

Warren MoberlyChan Lawrence Livermore National Laboratory
Hendrik Colijn The Ohio State University
Richard Langford University of Manchester
Ann Marshall Stanford University
LL3: Biological & Soft Materials Processing & Characterization
Session Chairs
Ann Marshall
Peter Stark
Tuesday AM, November 28, 2006
Fairfax B (Sheraton)

9:30 AM - **LL3.1
High Resolution Investigation Biological Cell Tissue using CrossBeam Technology.

Peter Gnauck 1
1 Nano Technology Systems, Carl Zeiss SMT, Oberkochen Germany

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10:00 AM - LL3.2
Focused Ion Beam Techniques for Butterfly Wing Scales Analysis and 3-D Reconstruction.

Katharine Dovidenko 1 , Radislav Potyrailo 1 , Laurie Le Tarte 1
1 , GE Global Research, Niskayuna, New York, United States

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10:15 AM - LL3.3
Investigation of the Cell Adhesion on Cell-sensor Hybrid Structures by Focused Ion Beam Technology.

Andreas Heilmann 1 , Frank Altmann 1 , Andreas Cismak 1 , Werner Baumann 3 , Mirko Lehmann 2
1 , Fraunhofer-Institute for Mechanics of Materials, Halle (Saale) Germany, 3 Department of Bioscience and Biophysics, University Rostock, Freiburg Germany, 2 , Micronas GmbH, Freiburg Germany

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10:30 AM - **LL3.4
FIB Processing of Apertures for Subwavelength Ultramicroscopy and Biosensing.

Peter Stark 1 , Allison Halleck 1 , Dale Larson 1
1 Biochemistry and Molecular Pharmacology, Harvard University, Boston, Massachusetts, United States

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11:00 AM - *
break

11:30 AM - **LL3.5
Focused Ion Beam Assisted Microfabrication of Multifunctional Scanning Probes and Biosensors.

Boris Mizaikoff 1 , Christine Kranz 1
1 School of Chemistry and Biochemistry, Georgia Institute of Technology, Atlanta, Georgia, United States

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12:00 PM - **LL3.6
``Coincidentia oppositorum": Philosophy and Technology in FIB/SEM Applications to Life Sciences.

Marziale Milani 1
1 Materials Science, University Milano Bicocca, Milano, Milano, Italy

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12:30 PM - LL3.7
Modification of Polymer Based Optoelectronic Devices by Electron and Ion Beams.

Meltem Sezen 1 , Evelin Fisslthaler 2 , Boril Chernev 1 , Peter Poelt 1 , Elena Tchernychova 1 , Werner Grogger 1 , Emil J.W. List 2
1 Institute for Electron Microscopy, Graz University of Technology, Graz Austria, 2 Institute of Solid State Physics, Graz University of Technology, Graz Austria

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12:45 PM - LL3.8
Focused Ion Beam Characterization Techniques: From MEMS Thin Films to Biological Cells and Dental Multilayers.

Yong Yang 1 2 , Nan Yao 2 , Jianbo Chen 1 2 , Xinrui Niu 1 2 , Nima Rahbar 3 2 , Winston Soboyejo 1 2
1 The department of mechanical and aerospace engineering, Princeton University, Princeton, New Jersey, United States, 2 Princeton institute for the science and technoglogy of materials, Princeton University, Princeton, New Jersey, United States, 3 The department of civil and environmental engineering, Princeton University, Princeton, New Jersey, United States

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LL4/KK4: Joint Session: TEM Sample Preparation
Session Chairs
Lucille Giannuzzi
Andrew Minor
Tuesday PM, November 28, 2006
Fairfax (Sheraton)

2:30 PM - **LL4.1/KK4.1
Development of a Sample Preparation Method for Three-dimensional Structural and Elemental Analyses of a Specific Site and its Application.

Toshie Yaguchi 1 , Yasushi Kuroda 1 , Mitsuru Konno 1 , Takeo Kamino 1 , Kazutoshi Kaji 2 , Masashi Watanabe 3
1 Naka Application Center, Hitahi High-Technologies Corporation, Hitachinaka-shi, Ibaraki, Japan, 2 Advanced Microscope systems design dept., Hitahi High-Technologies Corporation, Hitachinaka-shi, Ibaraki, Japan, 3 Dept. of Materials Science & Engineering, Lehigh University, Bethlehem, Pennsylvania, United States

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3:00 PM - **LL4.2/KK4.2
Improving Localization and Sample Quality for S/TEM Analysis of Semiconductor Devices.

Richard Young 1
1 , FEI Company, Hillsboro, Oregon, United States

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3:30 PM - LL4.3/KK4.3
Site-Specific Investigation of Electrical Failure in Multilayer Ceramic Capacitors by FIB and TEM.

Gai-Ying Yang 1 , Paul Moses 1 , Clive A. Randall 1 , Elizabeth C. Dickey 1
1 , The Pennsylvania State University, University Park, Pennsylvania, United States

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3:45 PM - LL4.4/KK4.4
Focused Ion Beam Study of Ni5Al Single Splat Microstructure.

Yuhong Wu 1 , Meng Qu 1 , Lucille Gianuzzi 2 , Sanjay Sampath 1 , Andrew Gouldstone 1
1 Materials Science and Engineering, Stony Brook University, Stony Brook, New York, United States, 2 , FEI Corp, Hillsboro, Oregon, United States

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4:00 PM - *
Break

4:30 PM - **LL4.5/KK4.5
A Comparison of Quantification of Microstructural Features in α/β-Ti alloys using Stereologically-based and Direct Three-dimensional Characterization Techniques.

Hamish Fraser 1
1 , Ohio State University, Columbus, Ohio, United States

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5:00 PM - LL4.6/KK4.6
FIB Specimen Preparation for TEM Studies of Diamond-SiC Interface Structure.

Joon Seok Park 1 , Robert Sinclair 1 , David Rowcliffe 2 , Margaret Stern 3 , Howard Davidson 4
1 Materials Science and Engineering, Stanford University, Stanford, California, United States, 2 , Skeleton Technologies, Los Osos, California, United States, 3 , Sun Microsystems, San Diego, California, United States, 4 , Isothermal Research Systems, Mountain View, California, United States

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5:15 PM - LL4.7/KK4.7
Focused Ion Beam Processing of Nanocomposite and 3-D Nanostructured Soft Materials.

Steven Kooi 1 , Vahik Krikorian 1 2 , Ji-Hyun Jang 1 2 , Cheong Koh 1 , Edwin Thomas 1 2
1 Institute for Soldier Nanotechnologies, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States, 2 Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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5:30 PM - LL4.8/KK4.8
Insights on Nano-oxidation Kinetics by Combined High Resolution Spatial and Spectral Electron Microscopy of the Dynamically Formed Cu2O /Cu Interfaces.

Xuetian Han 1 , Ana Hungria 2 , Jon Barnard 2 , Paul Midgley 2 , Judith Yang 1
1 Materials Science and Engineering, University of Pittsburgh, Pittsburgh, Pennsylvania, United States, 2 Department of Materials Science and Metallurgy, University of Cambridge, Cambridge United Kingdom

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LL5: Poster Session: FIB Processing and Characterization
Session Chairs
Ann Marshall
Warren MoberlyChan
Tuesday PM, November 28, 2006
Exhibition Hall D (Hynes)

9:00 PM - LL5.1
Reactive Deposition of Dielectrics by Ion Beam Assisted E-beam Evaporation.

Joshua Nightingale 1 , Timothy Cornell 1 , Pavan Samudrala 1 , Praneeta Poloju 1 , Lawrence Hornak 1 , Dimitris Korakakis 1
1 Lane Dept. of Computer Science and Electrical Engineering, West Virginia University, Morgantown, West Virginia, United States

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9:00 PM - LL5.2
Discharge Properties of a Micro Plasma Cell with a MgO-NiO Protecting Layer.

Akihiro Nakao 1 , Yoshikazu Tanaka 2 1 , Ari Ide-Ektessabi 3
1 Graduate School of Engineering, Kyoto University, Kyoto-city Japan, 2 Kyoto Thin-Film Materials Institute, Design and Development Center, Sanwa Kenma, Ltd., Uji-city, Kyoto, Japan, 3 International Innovation Center, Kyoto University, Kyoto-city Japan

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9:00 PM - LL5.3
The Effect on AFM Image Resolution by Focus-Ion-Beam Tip Fabrication and Modification.

Chien-Ying Su 1 , S. Cheng 1 , Y. Lin 1 , M. Shiao 1 , J. Chen 1 , J. Kao 1
1 , Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu City Taiwan

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9:00 PM - LL5.4
Near-Field Optical Probe Encircled with Sub-Wavelength Patterns.

Eun-Kyoung Kim 1 , Sung-Q Lee 1 , Seung Eon Moon 1 , Kang-Ho Park 1
1 IT Convergence & Components Laboratory, Electronics and Telecommunications Research Institute, Daejeon Korea (the Republic of)

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9:00 PM - LL5.5
Direct Focused Ion Beam Drilling of Nanopores.

Nick Patterson 1 , V. Hodges 1 , Michael Vasile 1 , Zhu Chen 2 , David Adams 1 , Jeff Brinker 1 2
1 , Sandia National Labs, Albuquerque, New Mexico, United States, 2 , University of New Mexico, Albuquerque, New Mexico, United States

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9:00 PM - LL5.6
Fabrication of Sub-250nm High Aspect Ratio Apertures by Focused Ion Beam Lithography.

Todd Simpson 1 , Ian Mitchell 1
1 Physics & Astronomy, University of Western Ontario, London, Ontario, Canada

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9:00 PM - LL5.7
Probe Tip Replacement System inside the FIB.

Gonzalo Amador 1 , Lyudmila Zaykova-Feldman 1 , Thomas Moore 1
1 , Omniprobe, Inc., Dallas, Texas, United States

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9:00 PM - LL5.8
The Cluster Sputtering of Low Temperature B Doped SiC under Cesium Ion Bombardment.

Bakhtiyar Atabaev 1 , Ruzmat Djabbarganov 1 , Nilufar Saidkhanova 1 , Firuza Yuzikaeva 1 , Ilkham Atabaev 2 , Tojiddin Soliev 2 , Nuriddin Matchanov 2 , Tin Chin-Che 3
1 Laboratory of Electron and Ion Processes on Surface, Arifov Institute of Electronics, Uzbek Academy of Sciences, Tashkent Uzbekistan, 2 , Physical-technical Institute, Uzbek Academy of Sciences, Tashkent Uzbekistan, 3 , Auburn University, Auburn, Florida, United States

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9:00 PM - LL5.9
In-situ Manipulation and Characterization of Single Nanowire and Nanotube by Using Focused Ion Beam Equipped with Nanomanipulator.

Dongkyu Cha 1 , Bongki Lee 1 , Robert Wallace 1 , Bruce Gnade 1 , Moon Kim 1 , Jiyoung Kim 1
1 MSE, university of texas at dallas, Richardson, Texas, United States

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2006-11-29   Show All Abstracts

Symposium Organizers

Warren MoberlyChan Lawrence Livermore National Laboratory
Hendrik Colijn The Ohio State University
Richard Langford University of Manchester
Ann Marshall Stanford University
LL6/N10: Joint Session: Nanoscale Self Assembly by FIB: Theory and Applications
Session Chairs
Harley Johnson
Richard Langford
Wednesday AM, November 29, 2006
Room 209 (Hynes)

9:30 AM - **LL6.1/N10.1
Nanoscale Morphology Control Using Ion Beams.

Michael Aziz 1
1 Div. Engrg. & Appl. Sci., Harvard University, Cambridge, Massachusetts, United States

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10:00 AM - LL6.2/N10.2
Surface Modification Energized by FIB: The Influence of Etch Rates & Aspect Ratio on Ripple Wavelengths.

Warren MoberlyChan 1
1 Chemistry and Materials Science, Lawrence Livermore National Laboratory, Livermore, California, United States

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10:15 AM - **LL6.3/N10.3
FIB Precise Prototyping and Simulation.

Philipp Nellen 1 , Victor Callegari 1 , Jurgen Hofmann 1 , Elmar Platzgummer 2 , Samuel Kvasnica 2
1 Electronics/Metrology, EMPA, Duebendorf Switzerland, 2 , IMS Nanofabrication GmbH, Vienna Austria

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10:45 AM - LL6.4/N10.4
Formation and Ordering of Ga Droplet Arrays using Focused Ion Beam Irradiation.

Benjamin Cardozo 1 , Weifeng Ye 1 , John Mansfield 2 , Rachel Goldman 1
1 Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan, United States, 2 Electron Microbeam Analysis Laboratory, University of Michigan, Ann Arbor, Michigan, United States

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11:00 AM -
BREAK

11:30 AM - **LL6.5/N10.5
Focused Ion Beam Templating Of Epitaxial Growth.

Robert Hull 1 , Jennifer Gray 1 , Alain Portavoce 2 , Martin Kammler 3 , Frances Ross 4 , Jerry Floro 5
1 Materials Science, University of Virginia, Charlottesville, Virginia, United States, 2 , L2MP-CNRS, Marseille France, 3 , Infineon Technologies, Dresden Germany, 4 , IBM Research, Yorktown Heights, New York, United States, 5 , Sandia National Laboratories, Albuquerque, New Mexico, United States

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12:00 PM - LL6.6/N10.6
Growth Mechanism of Indium Nanowire Induced by Focused Ion Beam Irradiation.

Do Hyun Kim 1 , Seung Soo Oh 1 , Hee-Suk Chung 1 , Euijoon Yoon 1 , Kyu Hwan Oh 1
1 School of Materials Science and Engineering, Seoul National University, Seoul Korea (the Republic of)

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12:15 PM - LL6.7/N10.7
Self-Assembled Wrinkling on Polymer Substrates Induced by Focused Ion Beam Irradiation.

Myoung-Woon Moon 1 , SangHoon Lee 2 , Jeong-Yun Sun 2 , Kyu Hwan Oh 2 , Ashkan Vaziri 1 , John Hutchinson 1
1 Division of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts, United States, 2 School of Material Sci & Eng, Seoul Natl Univ, Seoul Korea (the Republic of)

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12:30 PM - LL6.8/N10.8
Ion Beam Projection Techniques For Locally Modifying Phase Transformation Properties In Shape Memory Alloys.

Yves Bellouard 1 , Yogesh Karade 1 , Andreas Dietzel 1 , Wilhelm Bruenger 2 , Xi Wang 3 , Joost Vlassak 3
1 Mechanical Engineering, Eindhoven University of Technology, Eindhoven Netherlands, 2 ISIT, Fraunhofer Institute , Itzehoe Germany, 3 Division of Engineering and Applied Science, Harvard University, Boston, Massachusetts, United States

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12:45 PM - LL6.9/N10.9
Fabrication of Sub-micron thick Solid Oxide Fuel Cells using a Focused Ion Beam.

Jeremy Cheng 1 , Hong Huang 2 , Fritz Prinz 2 1
1 Materials Science and Engineering, Stanford University, Stanford, California, United States, 2 Mechanical Engineering, Stanford University, Stanford, California, United States

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LL7: 3D Characterization of Materials
Session Chairs
Hendrik Colijn
Joseph Michael
Wednesday PM, November 29, 2006
Fairfax B (Sheraton)

2:30 PM - **LL7.1
FIB Sample Preparation: How to Get the Most Data from the Smallest Amount of Sample.

Joseph Michael 1 , Joseph Goldstein 2 , Paul Kotula 1
1 Materials Characterization, Sandia National Laboratories, Albuquerque, New Mexico, United States, 2 Mechanical and Industrial Eng, University of Massachusetts, Amherst, Massachusetts, United States

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3:00 PM - LL7.2
An Introduction to the Helium Ion Microscope.

John Notte 1 , Nick Economou 1 , Raymond Hill 1 , Bill Ward 1
1 , ALIS Corporation, Peabody, Massachusetts, United States

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3:15 PM - LL7.3
Focused-Ion Beam Induced Lattice Damage in Structured InGaN/GaN Layers on Sapphire Substrate.

Rozaliya Barabash 1 2 , G. Ice 1 , W. Liu 3 , R. Kröger 4 , H. Lohmeyer 4 , K. Sebald 4 , J. Gutowski 4 , T. Böttcher 4 , D. Hommel 4
1 Materials Science and Technology Div., Oak Ridge National Laboratory, Oak Ridge , Tennessee, United States, 2 Center for Materials Processing, University of Tennessee, Knoxville, Tennessee, United States, 3 , Advanced Photon Source, Argonne, Illinois, United States, 4 Institute of Solid State Physics, University of Bremen, Bremen Germany

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3:30 PM - **LL7.4
Contrast Mechanisms and Three Dimensional Imaging Associated with Dual Focused Ion and Electron Beam Instrumentation.

Eric Lifshin 1 , J. Evertsen 1
1 Nanoscale Science & Engineering, University at Albany, Albany, New York, United States

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4:00 PM - *
break

4:30 PM - **LL7.5
Some Applications of the FIB to Probe the Structure and Properties of Materials.

Robert Sinclair 1 , Kyunghoon Min 2 , Joon Seok Park 1
1 Materials Science and Engineering, Stanford University, Stanford, California, United States, 2 , Spansion Inc., Stanford, California, United States

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5:00 PM - LL7.6
3D EBSD Characterization of a Nanocrystalline NiCo Alloy by use of a High-resolution Field Emission SEM-EBSD Coupled with Serial Sectioning in a Focused Ion Beam Microscope (FIB).

Alice Bastos 1 , Stefan Zaefferer 1 , Dierk Raabe 1
1 , Max-Planck-Institut, Duesseldorf Germany

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5:15 PM - **LL7.7
Shadow FIBing -- Using Geometry to Improve Efficiency and Prepare Difficult Samples.

Andrew Minor 1
1 NCEM, Lawrence Berkeley National Laboratory, Berkeley, California, United States

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2006-11-30   Show All Abstracts

Symposium Organizers

Warren MoberlyChan Lawrence Livermore National Laboratory
Hendrik Colijn The Ohio State University
Richard Langford University of Manchester
Ann Marshall Stanford University
LL8: Mechanical Properties and MEMS
Session Chairs
Hendrik Colijn
Julia Greer
Thursday AM, November 30, 2006
Fairfax B (Sheraton)

9:30 AM - **LL8.1
Mechanical Property Evaluation at the Micro-scale Using FIB Fabrication Methods.

Michael Uchic 1 , Dennis Dimiduk 1 , Robert Wheeler 2 , Paul Shade 3 , Hamish Fraser 3
1 , Air Force Research Laboratory, Wright Patterson AFB, Ohio, United States, 2 , UES, Inc., Dayton, Ohio, United States, 3 , The Ohio State University, Columbus, Ohio, United States

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10:00 AM - LL8.2
Indentation-induced Damage Mechanisms in Germanium.

David Oliver 1 , Jodie Bradby 1 , Jim Williams 1 , Michael Swain 2 , Damien McGrouther 3 , Paul Munroe 3
1 Electronic Materials Engineering, Research School of Physical Sciences and Engineering, Australian National University, Canberra, Australian Capital Territory, Australia, 2 Oral Science Department, Faculty of Dentistry, University of Otago, Dunedin New Zealand, 3 Electron Microscope Unit, University of New South Wales, Sydney, New South Wales, Australia

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10:15 AM - LL8.3
Effective Use of Focused Ion Beam (FIB) in Investigating Fundamental Mechanical Properties of Metals at the Sub-Micron Scale.

Julia Greer 1 2 , William Nix 2
1 Electronic Materials and Devices Laboratory, Palo Alto Research Center, Palo Alto, California, United States, 2 Department of Materials Science and Engineering, Stanford University, Stanford, California, United States

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10:30 AM - LL8.4
Evaluation of Local Hardness on Single Phase and Precipitation of API Sour X65 and X120 Steel Using in-situ Nano-indentation in the FIB/SEM system.

SangHoon Lee 1 , Do Hyun Kim 1 , Kwang Kyun Kim 2 , Ki Bong Kang 2 , Myoung-Woon Moon 3 , Heung Nam Han 1 , Kyu Hwan Oh 1
1 school of materials science & engineering, Seoul National University, Seoul Korea (the Republic of), 2 Technical Research Lab, POSCO, Pohang Korea (the Republic of), 3 Div. of Engineering and Applied sciences, Harvard Universuty, cambridge, Massachusetts, United States

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10:45 AM - LL8.5
Microscale Mechanical Behavior of Bulk Metallic Glasses.

Ashwini Bharathula 1 , Katherine Flores 1 , Michael Uchic 2
1 Materials Science and Engineering, Ohio State University, Columbus, Ohio, United States, 2 Air Force Research Laboratory, Wright Patterson AFB, Dayton, Ohio, United States

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11:00 AM - *
Break

11:30 AM - LL8.6
Characterization of Fatigue Mechanisms in Ni-Based Superalloys using Selectively Extracted TEM Foils.

Clarissa Yablinsky 1 , Raymond Unocic 1 , James Williams 1 , Katharine Flores 1 , Michael Mills 1
1 Materials Science and Engineering, The Ohio State University, Columbus, Ohio, United States

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11:45 AM - LL8.7
Micromechanical testing of FIB-machined Cantilever Beams.

David Armstrong 1 , Abdul Haseeb 2 , Steve Roberts 1 , Angus Wilkinson 1 , Klaus Bade 2
1 Department Of Materials, Oxford University, Oxford United Kingdom, 2 Institute of Micro-Technology, Karlsruhe Research Centre, Karlsruhe Germany

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12:00 PM - **LL8.8
MEMS by FIB Milling and Deposition

Toshiaki Fujii 1 , Koji Iwasaki 1 , Masanao Munekane 1 , Yo Yamamoto 1 , Toshitada Takeuchi 1 , Masakatsu Hasuda 1 , Yutaka Ikku 1 , Hiromi Tashiro 1 , Tatsuya Asahata 1 , Masahiro Kiyohara 1 , Takashi Kaito 1
1 , SII NanoTechnology Inc., Oyama-cho, Sunto-gun, Shizuoka, Japan

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12:30 PM - LL8.9
Development of Hybrid MEMS/FIB Processes and Applications of Three-pronged Active Nanotweezers For Manipulation of Nano Objects.

Shifeng Li 1 , Chang Liu 1
1 Micro and Nanotechnology Lab, University of Illinois, Urbana, Illinois, United States

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12:45 PM - LL8.10
Challenges Associated with Accurate Focused Ion Beam Sculpting of Curved Shape Features in Metals and Amorphizable Solids.

David Adams 1 , Michael Vasile 1 , Kim Archuleta 1
1 , Sandia National Labs, Albuquerque, New Mexico, United States

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