The International Conference on Ion Implantation Technology 2022 (IIT 2022) is the 23rd Conference in the biannual series focused on discussion of major challenges in current and emerging technologies related to implant/doping and annealing processes, device applications, equipment, metrology and modeling. 

The Conference offers an excellent opportunity for engineers and researchers in industry, research institutes and universities to present new results and to discuss ideas of new applications of ion implantation and annealing.

The organizers welcome contributions from a wide range of topics, from fundamental research to industrial applications and equipment. 

Manuscripts will be published in a special issue of MRS Advances. Please select “Ion Implantation Technology 2022” as the manuscript type.

 

A three-day school on fundamental and practical aspects of ion implantation and annealing operations in research and IC production environments will be held prior to the 23rd International Conference on Ion Implantation Technology in San Diego, California, USA, in September 2022.

This school, which has preceded IIT meetings since 1982, will be taught by an expert group of a dozen instructors with many years of hands-on experience in the design, construction and operation of ion implantation and annealing tools as well as practical experience in process development and metrology.

All attendees of the school will receive a hardbound ≈600 page book containing tutorial chapters written by the instructors for follow-on study.

For more information, including topics and speaker information, please visit https://www.mrs.org/iit2022/school.

Conference Chair

We commemorate Mitch Taylor,
who left us before the conference could take place.

Conference Co-Chair

Susan Felch, Susan Felch Consulting

Technical Program Co-Chairs

Susan Felch, Susan Felch Consulting
    Larry Larson, Texas State University

Sponsorships Chair

Aaron Vanderpool, Intel Corporation

Annealing Program Chair

Wilfried Lerch, SkyLark Solutions

Publications Chair

Larry Larson, Texas State University

San Diego, California

Boats in the harbor in San DiegoSan Diego, California, is often referred to as “America’s Finest City” and for good reason! Known for its beautiful weather, pristine beaches, friendly people and plethora of entertainment, San Diego is a favorite travel destination for visitors across the globe.

This great city has a huge variety of attractions. From famous destinations like the San Diego Zoo, Sea World and Coronado Beach, to the 17 diverse museums of Balboa Park and the historic Gaslamp Quarter, San Diego has many dimensions to satisfy every traveler.

A perfect blend of nature, city, suburbia and tourism make San Diego an ideal Conference and vacation destination.

Sponsorships & Exhibit

The 23rd International Conference on Ion Implantation Technology will focus on the discussion of major challenges in current and emerging technologies related to implant/doping and annealing processes, device applications, equipment, metrology and modeling.

Support of IIT 2022 serves as visible evidence of your organization’s commitment to the ion implantation and annealing communities. Sponsorship and exhibit opportunities are available to boost visibility, create brand awareness and maximize the impact of your message.

Learn More

 

Man demonstrating a product to two women

 

Special Thanks

 

IIT_Entegris_Silver  Plansee 

AIBT Logo  Applied Materials 

  Nissin Ion Equipment  SMIT Logo

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Code of Conduct

As an event organized by MRS Conference Services, participants in IIT 2022 are bound by the MRS Code of Conduct. Learn more about the Code of Conduct or Report a Concern » 

 

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