headerlink
MRS
Menu
Menu
  • Abstract Submission
  • Committees
  • Hotel
  • Program
  • School
  • Speakers
  • Sponsorships
  • Visa

Speakers

Plenary Speakers

Fred Roozeboom, Technische Universiteit Eindhoven & TNO - Holst Centre
Technical Developments of Thermal Annealing in the Past Half-Century, and Future Perspectives

Hitoshi Wakabayashi, Tokyo Institute of Technology
Novel Processes and Devices including 2D Materials

Invited Speakers

Temel Buyuklimanli, EAG Laboratories
Overview of Implantation Metrology

Fuccio Cristiano, Laboratory for Analysis and Architecture of Systems
Implant/Anneal Simulation and Defect Evolution in Si, Ge and SiGe

Ray Duffy, Tyndall National Institute
Deposited Layers as Doping Sources for 3D Conformal Applications 

Oleg Gluschenkov, IBM Research/Albany Nanotech
Doping and Laser Annealing Applications for FinFETs, Contacts, and Materials Modification

Jack Hwang, Intel Corporation
Flash Annealing

Lubek Jastrzebski, Semilab
DPLI (Defect Photoluminescence Imaging) to Monitor Defect Formation During Ion Implantation and Annealing

Didier Landru, Soitec
Smart Cut, FD-SOI and Integration Challenges 

Roberta Nipoti, Consiglio Nazonale delle Ricerche Institute for Microelectronics and Microsystems (CNR-IMM Bologna)
SiC Implant and Anneal

Alexander Scheit, IHP Solutions GmbH
Flash Annealing for the Worldwide Fastest SiGe HBT

Kyoichi Suguro, Carlit Holdings
Annealing Overview 

Toshiyuki Tabata, Laser Systems & Solutions of Europe
Activation of Dopants in Si/SiGe using Laser Annealing

Hao Yu, imec
Advanced Contacts for CMOS 


AIBT Logo

SMIT Logo


International Conference on Ion Implantation Technology 2022

September 25-29, 2022
San Diego, California

Contact Us

  • Abstract Submission
  • Committees
  • Hotel
  • Program
  • School
  • Speakers
  • Sponsorships
  • Visa

Materials Research Society

MRS Conference Services Logo

ADA Compliance Statement

Privacy Policy | Terms of Use  | Sitemap  | Contact Us

©2021

Close Menu ×
  • Abstract Submission
  • Committees
  • Hotel
  • Program
  • School
  • Speakers
  • Sponsorships
  • Visa