Scientific Program

2022 IIT Technical Program Guide (PDF)

Guidelines

IIT 2022 School
September 21-24, 2022

IIT 2022 will be preceded by a three-day school on ion implantation and annealing with a faculty of international experts and a 600+ page textbook written for this course. School details, including schedule, abstracts and speaker information are available here.

2022 IIT Conference Daily Schedule of Events (PDF)

IIT 2022 Conference
September 25-29, 2022

The five-day Conference will feature oral and poster presentations covering the following topics:

Advanced Implant/Doping and Annealing Equipment

Annealing Technologies and Processes

• Rapid Thermal Processing, Laser Annealing, Flash Annealing, SPE, New Activation Annealing
• Junction, Silicide, Contact and Dielectric Formation
• Lattice Damage and Defects

Device Applications for Implant/Doping and Annealing Processes

• CMOS Devices, Memory Devices, Power Devices (SiC, GaN), RF-SOI, Image Sensors, IoT Devices, Photovoltaics, III-V Devices
• Integration with Other Fabrication Processes

Implant/Doping Technologies and Processes

• Ion Implantation, Plasma Doping, Gas and Solid Doping
• Junction Formation, MeV Implant, Materials Modification

Metrologies for Implant/Doping and Annealing Processes

• Physical and Electrical Characterization of 2D and 3D Structures
• Advanced Process Control

Modeling and Simulation of Implant/Doping and Annealing Processes