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Scientific Program

IIT 2022 School
September 21-24, 2022

IIT 2022 will be preceded by a three-day school on ion implantation and annealing with a faculty of international experts and a 600+ page textbook written for this course. School details, including schedule, abstracts and speaker information, will be available in June 2022.


IIT 2022 Conference
September 25-29, 2022

The five-day Conference will feature oral and poster presentations covering the following topics:

Advanced Implant/Doping and Annealing Equipment

Annealing Technologies and Processes

  • Rapid Thermal Processing, Laser Annealing, Flash Annealing, SPE, New Activation Annealing
  • Junction, Silicide, Contact and Dielectric Formation
  • Lattice Damage and Defects

Device Applications for Implant/Doping and Annealing Processes

  • CMOS Devices, Memory Devices, Power Devices (SiC, GaN), RF-SOI, Image Sensors, IoT Devices, Photovoltaics, III-V Devices
  • Integration with Other Fabrication Processes

Implant/Doping Technologies and Processes

  • Ion Implantation, Plasma Doping, Gas and Solid Doping
  • Junction Formation, MeV Implant, Materials Modification

Metrologies for Implant/Doping and Annealing Processes

  • Physical and Electrical Characterization of 2D and 3D Structures
  • Advanced Process Control

Modeling and Simulation of Implant/Doping and Annealing Processes


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International Conference on Ion Implantation Technology 2022

September 25-29, 2022
San Diego, California

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