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2007 MRS Fall Meeting & Exhibit

November 26 - 30, 2007  | Boston
Meeting Chairs:
 Duane Dimos, Mary Galvin, David Mooney, Konrad Samwer

Symposium DD : Microelectromechanical Systems--Materials and Devices

2007-11-26   Show All Abstracts

Symposium Organizers

David La Van Yale University
Mark Spearing University of Southampton
Srikar Vengallatore McGill University
Mark da Silva Exponent Inc.
DD1: Micromechanics I
Session Chairs
Mark Spearing
Monday PM, November 26, 2007
Room 313 (Hynes)

9:30 AM - **DD1.1
A Review of Tension Test Methods for Thin Films.

William Sharpe 1
1 Mechanical Engineering, Johns Hopkins University, Baltimore, Maryland, United States

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10:00 AM - DD1.2
Reliability of MEMS Materials: Mechanical Characterization of Thin-Films using the Wafer Scale Bulge Test and Improved Microtensile Techniques.

Joao Gaspar 1 , Marek Schmidt 1 , Jochen Held 1 , Oliver Paul 1
1 Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg, BW, Germany

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10:15 AM - DD1.3
Multipurpose on-chip Nanomechanical Laboratory for Testing Thin Films.

Thomas Pardoen 1 2 , Raskin Jean-Pierre 1 3 , Coulombier Michael 1 2 , Sebastien Gravier 2 , Nicolas Andre 1 3 , Asmahan Safi 2 , Thomas Gets 2 , Vincent Delongueville 3 , Stanislas Sobieski 3 , Samer Houri 3
1 Research Center in Micro and Nanoscopic Materials and Electronic, Université catholique de Louvain, Louvain-la-Neuve Belgium, 2 Department of Materials Science and Processes, Université catholique de Louvain, Louvain-la-Neuve Belgium, 3 Department of Electricity, Université catholique de Louvain, Louvain-la-Neuve Belgium

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10:30 AM - DD1.4
Fatigue of Nanostructured Ni MEMS Thin Films.

Yong Yang 1 , Guojiang Fan 2 , Benjamin Imasogie 3 , Brad Boyce 4 , Peter Liaw 2 , Winston Soboyejo 1
1 Princeton Institute for the Science and Technology of Materials (PRISM) and The Department of Mechanical and Aerospace Engineering, Princeton University, Princeton, New Jersey, United States, 2 Department of Materials Science and Engineering, The University of Tennessee, Knoxville, Tennessee, United States, 3 Department of Materials Science and Engineering, Obafemi Awolowo University, Ile-Ife Nigeria, 4 Materials Science and Engineering Center, Sandia National Laboratories, Albuquerque, New Mexico, United States

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10:45 AM - DD1.5
Fatigue of Al Thin Films at ultra-high Frequencies: Discrete Dislocations and Damage Behavior.

Diana Courty 1 , Chris Eberl 1 2 , Werner Ruile 3 , Oliver Kraft 1 2
1 izbs, University of Karlsruhe, Karlsruhe Germany, 2 Institute for Materials Research II, Forschungszentrum Karlsruhe, Karlsruhe Germany, 3 , EPCOS AG, München Germany

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11:00 AM - *
Break

11:30 AM - **DD1.6
Strategies for Testing of Material and Geometrical Properties of MEMS.

Joerg Bagdahn 1 , Matthias Ebert 1 , Ronny Gerbach 1 , Falk Naumann 1 , Ralf Schaefer 1 , Jan Schischka 1
1 Microsystems, Fraunhofer Inst for Mechanics of Materials, Halle/Saale Germany

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12:00 PM - **DD1.7
Adhesion of Microstructures in Dry and Humid Ambients.

Maarten deBoer 1 , Frank DelRio 2 , Martin Dunn 3
1 MEMS Core Technologies, Sandia National Labs, Albuquerque, New Mexico, United States, 2 Chemical Engineering, UC Berkeley, Berkeley, California, United States, 3 Mechanical Engineering, Univ. of Colorado at Boulder, Boulder, Colorado, United States

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12:30 PM - DD1.8
Vapor Phase Lubrication of Silicon MEMS.

Michael Dugger 1 , David Asay 2 , James Ohlhausen 1 , Seong Kim 2
1 , Sandia National Laboratories, Albuquerque, New Mexico, United States, 2 , Pennsylvania State University, University Park, Pennsylvania, United States

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12:45 PM - DD1.9
MEMS Lubrication: An Atomistic Perspective of a Bound + Mobile Lubricant.

Douglas Irving 1 , Donald Brenner 1
1 Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina, United States

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DD2: Micromechanics II
Session Chairs
David LaVan
Monday PM, November 26, 2007
Room 313 (Hynes)

2:30 PM - **DD2.1
Fracture of Brittle Polycrystalline and Amorphous Materials for MEMS.

Ioannis Chasiotis 1 , Krishna Jonnalagadda 1
1 Aerospace Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States

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3:00 PM - **DD2.2
On-chip Microscale Mechanical Properties Measurements.

H Kahn 1 , R. Ballarini 2 , A. Heuer 1 , S. Eppell 3
1 Materials Science and Engineering, Case Western Reserve University, Cleveland, Ohio, United States, 2 Civil Engineering, University of Minnesota, Minneapolis, Minnesota, United States, 3 Biomedical Engineering, Case Western Reserve University, Cleveland, Ohio, United States

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3:30 PM - DD2.3
Effect of Surface Oxide Layer on Mechanical Properties of Single Crystalline Silicon.

Kenji Miyamoto 1 , Koji Sugano 1 , Toshiyuki Tsuchiya 1 , Osamu Tabata 1
1 Microengineering, Kyoto University, Kyoto-shi, Kyoto, Japan

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3:45 PM - DD2.4
A Comparison of the Strength of Poly- and Single-Crystalline Silicon Subject to Galvanic Corrosion in Hydrofluoric Acid.

David Miller 1 , Collin Becker 1 , Brad Boyce 2 , Conrad Stoldt 1
1 Mechanical Engineering, University of Colorado, Boulder, Colorado, United States, 2 Microsystem Materials, Sandia National Laboratories, Albuquerque, New Mexico, United States

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4:00 PM - *
Break

4:30 PM - DD2.5
MEMS Stress Camera for High-Throughput Materials Characterization.

Noble Woo 1 , Jonathan Petrie 2 , R. van Dover 2
1 Chemistry and Chemical Biology, Cornell University, Ithaca, New York, United States, 2 Materials Science and Engineering, Cornell University, Ithaca, New York, United States

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4:45 PM - DD2.6
Indentation Characterization of Fracture Toughness and Interfacial Strength of PECVD Nitrides after Rapid Thermal Annealing.

Hong-Yi Yan 1 , Kuang-Shun Ou 1 , Kuo-Shen Chen 1
1 Mechanical Engineering, National Cheng-Kung University, Tainan Taiwan

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5:00 PM - DD2.7
Incomplete Martensitic Transformations of NiTi Shape Memory Alloy Thin Films.

Xu Huang 1 , Hoo-Jeong Lee 2 , Ainissa Ramirez 1 3
1 Mechanical Engineering, Yale University, New Haven, Connecticut, United States, 2 School of Advanced Materials Science and Engineering, Sungkyunkwan University, Kyongki-Do Korea (the Republic of), 3 Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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5:15 PM - DD2.8
A Novel Micro Tensile Testing Instrument with Replaceable Testing Specimen by Parylene Passivation Technique.

Yung-Dong Lau 1 , Tso-Chi Chang 1 , Hong Hocheng 1 , Rongshun Chen 1 2 , Weileun Fang 1 2
1 Power Mechanical Engineering, National Tsing Hua University, Hsinchu Taiwan, 2 Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu Taiwan

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5:30 PM - DD2.9
Atomistic+Continuum Multi-scale Modeling of Single Asperity Gold-Gold Contact in an RF MEMS Device.

Wes Crill 1 , D. Irving 1 , C. Padgett 3 , O. Rezvanian 2 , M. Zikry 2 , D. Brenner 1
1 Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina, United States, 3 Department of Chemistry and Physics, Armstrong-Atlantic State University, Savannah, Georgia, United States, 2 Mechanical and Aerospace Engineering , North Carolina State University, Raleigh, North Carolina, United States

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5:45 PM - DD2.10
Microscopic Motion and Deflection Quantifying Chip