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2012 MRS Fall Meeting Logo2012 MRS Fall Meeting & Exhibit

November 25-30, 2012 | Boston
Meeting Chairs: Chennupati Jagadish, Thomas Lippert, Amit Misra, Eric Stach, Ting Xu

Symposium S : Directed Self-Assembly for Nanopatterning

2012-11-26   Show All Abstracts

Symposium Organizers

August W. Bosse, ExxonMobil Research and Engineering Company
Joy Y. Cheng, IBM Almaden Research Center
Roel Gronheid, IMEC
Gila E. Stein, University of Houston
S3: Materials for DSA I
Session Chairs
Ricardo Ruiz
Sander Wuister
Monday PM, November 26, 2012
Sheraton, 2nd Floor, Back Bay D

2:30 AM - *S3.01
Blocks and Brushes: Pairing Networks and Broken Chains to Make Nanoscale Structures

Michelle Chavis 1 Rina Maeda 2 M. Elizabeth Welch 3 Christopher K Ober 1

1Cornell University Ithaca USA2Tokyo Institute of Technology Tokyo Japan3Cornell University Ithaca USA

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3:00 AM - *S3.02
Highly Asymmetric Lamellar Nanopatterns via Block Copolymer Blends Capable of Hydrogen Bonding

Seung Hyun Han 1 Dusik Bae 1 Jin Kon Kim 1

1Pohang Univ of Science and Technology Pohang Republic of Korea

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3:30 AM - S3.03
Chemical Patterns from Surface Grafted Resists for Directed Assembly of Block Copolymers

Myungwoong Kim 1 Eungnak Han 1 Padma Gopalan 1

1University of Wisconsin-Madison Madison USA

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3:45 AM - S3.04
Directed Self-assembly of Liquid Crystalline Polymers through Photo-alignment Surfaces

Michael E. McConney 1 Kyunmin Lee 1 Vincent P. Tondiglia 1 Timothy J. Bunning 1 Timothy J. White 1

1Wright Patterson Air Force Base Dayton USA

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4:00 AM - S3
BREAK

S4: DSA Processing and Control II
Session Chairs
Joe Kline
Guanyang Lin
Monday PM, November 26, 2012
Sheraton, 2nd Floor, Back Bay D

4:30 AM - *S4.01
Block Copolymers for Microlithography

C. Grant Willson 1 2 Christopher M Bates 2 Takahiri Seshimo 2 Michael Maher 2 William J Durand 1 Julia D Cushen 1 Leon M Dean 1 Gregory Blachut 1 Christopher J Ellison 1

1The University of Texas Austin USA2The University of Texas Austin USA

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5:00 AM - S4.02
Tuning Molecular Relaxation to Dynamic Thermal Gradient Soft Shear for Orthogonal Orientation in Highly-ordered Block Copolymer Films

Alamgir Karim 1 Gurpreet Singh 1 Kevin G. Yager 2 Detlef M. Smilgies 3

1The University of Akron Akron USA2Brookhaven National Laboratory Upton USA3Cornell University Ithaca USA

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5:15 AM - S4.03
Direction Control of Block Copolymer by Applying Interesting Reactivity of Functional Self-assembled Monolayer for Self-assembly Lithography

Shigeki Hattori 1 Atsushi Hieno 1 Hiroko Nakamura 1 Koji Asakawa 1 Yuriko Seino 2 Masahiro Kanno 2 Tsukasa Azuma 2

1Toshiba Corporation Kawasaki Japan2Toshiba Corporation Yokohama Japan

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5:30 AM - S4.04
Thermosolvent Annealing of Block Copolymer Thin Films for Directed Self-assembly Applications

Kevin Willy Gotrik 1 Adam Hannon 1 Caroline Ross 1

1MIT Cambridge USA

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5:45 AM - S4.05
Continuous Deposition of Ordered Block Copolymer Thin Films by Electrospray

Hanqiong Hu 1 Sofia Rangou 2 3 Volkan Filiz 3 Apostolos Avergopoulos 2 Chinedum Osuji 1

1Yale Univ. New Haven USA2University of Ioannina Ioannina Greece3Helmholtz-Zentrum Geesthacht, Institute of Polymer Research Geesthacht Germany

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S5: Poster Session
Session Chairs
Roel Gronheid
Gila Stein
Monday PM, November 26, 2012
Hynes, Level 2, Hall D

9:00 AM - S5.01
Mechanically Induced Cracking as a Form of Self-assembly

Scott C Warren 1 Qiang Zhuang 1 Bilge Baytekin 1 Ahmet F Demiroers 1 Pramod Pillai 1 Tarik Baytekin 1 Jared Incorvati 1 Bartosz A Grzybowski 1

1Northwestern University Evanston USA

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9:00 AM - S5.02
Ion Assisted Aerosol Lithography (IAAL) for Multiscale Multidimensional Patterning of Nanoparticles

Hoseop Choi 1 2 Kyungyeon Ha 1 2 Peter Pikhitsa 2 Mansoo Choi 1 2

1Seoul National University Seoul Republic of Korea2Global Frontier Center for Multiscale Energy Systems Seoul Republic of Korea

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9:00 AM - S5.03
Superlattices of Superparamagnetic Nanoparticles via Solution Self-assembly

Sara Mehdizadeh Taheri 1 Sabine Rosenfeldt 1 Markus Drechsler 1 Beate Foerster 1 Peter Boesecke 2 Markus Retsch 1 Stephan Foerster 1

1University of Bayreuth Bayreuth Germany2ESRF Beamline ID2 Grenoble Cedex France

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9:00 AM - S5.04
Site-selective Surface Platforms of Organosilanes for Molecular Level Investigations of Proteins: Fibrinogen Nanopatterns Prepared by Particle Lithography

Lauren Englade-Franklin 1 Jayne C. Garno 1 ChaMarra K. Saner 1

1Louisiana State University Baton Rouge USA

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9:00 AM - S5.05
Template Assisted Self-assembly of Multiscale Nanoparticle Cluster Arrays

Bjoern Reinhard 1 Bo Yan 1 Tianhong Chen 1 Yan Hong 1

1Boston University: The BU Department of Chemistry Boston USA

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9:00 AM - S5.06
Three-dimensional Self-assembling of Gold Nanorods with Controlled Macroscopic Shape and Local Smectic B Order

Cyrille Hamon 1 Marie Postic 2 Elsa Mazari 3 Bizien Thomas 1 2 Christophe Dupuis 3 Pascale Even-Hernandez 1 Angela Jimenez 2 Laurent Courbin 2 Charlie Gosse 3 Franck Artzner 2 Valerie Marchi-Artzner 1

1Rennes 1 University Rennes France2Rennes 1 University Rennes France3Laboratoire de Photonique et de Nanostructures Marcoussis France

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9:00 AM - S5.07
Highly Ordered Metal Oxide Nanorod Array with High Aspect-ratio via Block Copolymer Templating Process

Nanae Yamashita 1 Motonori Komura 1 Keiji Nagai 1 Tomokazu Iyoda 1

1Tokyo Institute of Technology Yokohama Japan

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9:00 AM - S5.08
Large-area, Highly Aligned Lamellar Block Copolymer Directed by Graphoepitaxially Assembled Cylinder Nanopatterns

Hyoung-Seok Moon 1 Dong Ok Shin 1 Bong Hoon Kim 1 Hyeong Min Jin 1 Sang Ouk Kim 1

1KAIST Daejeon Republic of Korea

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9:00 AM - S5.10
Solvent Vapour Induced Self-assembly of PS-b-P4VP Block Copolymer for Sub-20 nm Nanofabrication

Atul Chaudhari 1 2 Cian Cummins 1 2 Dipu Borah 1 2 3 Tandra Ghoshal 1 3 Benjamin Oamp;#8217;Driscoll 1 3 Parvaneh Mokarian 1 2 Justin Holmes 1 2 3 Michael Morris 1 2 3

1University College Cork Cork Ireland2Trinity College Dublin Dublin Ireland3University College Cork Cork Ireland

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9:00 AM - S5.11
Hierarchical Assemblies of PS-b-P4VP Block Copolymer for Nanofabrication

Cian Cummins 1 Atul Chaudhari 1 Dipu Borah 1 2 3 Benjamin O'Driscoll 1 3 Tandra Ghoshal 1 2 Parvaneh Mokarian-Tabari 1 2 Justin Holmes 1 2 3 Michael Morris 1 2 3

1University College Cork Cork Ireland2Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin Dublin Ireland3Tyndall National Institute, University College Cork Cork Ireland

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9:00 AM - S5.12
Rapid-prototype Pit Patterning for Directed Self-assembly of Ge Heteroepitaxial Quantum Dots

Chris Duska 1 Jerrold A Floro 1

1University of Virginia Charlottesville USA

Show Abstract

9:00 AM - S5.13
Magnetically Aligned Block Copolymer Membranes for Nanoporous Templates

Manesh Gopinadhan 1 Pawel Majewski 1 Prashant Deshmukh 2 Rajeswari Kasi 2 Chinedum O Osuji 1

1Yale University New Haven USA2University of Connecticut Storrs USA

Show Abstract

9:00 AM - S5.14
The Microdomain Structure of Triblock Type-urethane Oligomer Thin Films

Ken Kojio 1 Yuko Ishikuma 1 Suguru Motokusho 1 Kohji Yoshinaga 1

1Nagasaki University Nagasaki Japan

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9:00 AM - S5.15
Ordered Nanopores by Metal Assisted Etching and Diblock Copolymers

Luca Boarino 1 Natascia De Leo 1 Matteo Fretto 1 Michele Perego 2 Michele Laus 3 Katia Sparnacci 3

1INRiM Torino Italy2IMM-CNR Agrate Brianza (MB) Italy3Universitamp;#224; del Piemonte Orientale Amedeo Avogadro Alessandria Italy

Show Abstract

9:00 AM - S5.16
Controlling Directed Self-assembly and Metal-oxide Templating by Confinement

Avigail Keller 1 Tamar Segal-Perez 1 Gitti Frey 1

1Technion Haifa Israel

Show Abstract

9:00 AM - S5.17
Novel Thin Film Morphologies from an ABC Miktoarm Star Terpolymer

Hong Kyoon Choi 1 Adam Nunns 2 Ian Manners 2 Caroline Ross 1

1MIT Cambridge USA2University of Bristol Bristol United Kingdom

Show Abstract

9:00 AM - S5.18
Reusable Damascene Templates for High-rate Directed Assembly and Transfer of Nanoelements

Hanchul Cho 2 1 Sivasubramanian Somu 2 1 Huang Jun 2 1 Jungho Seo 2 1 Ahmed Busnaina 2 1

1Northeastern University Boston USA2Center for High-rate Nanomanufacturing Boston USA

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9:00 AM - S5.19
Controlled Solvent Vapor Annealing of Polystyrene-b-Polyethylene Oxide Thin Films in Water and Toluene Atmospheres

Brian Stahl 1 Edward J. Kramer 1 Craig J. Hawker 1

1University of California, Santa Barbara Santa Barbara USA

Show Abstract

9:00 AM - S5.20
Self-assembly of Block Copolymers in Noisy Graphoepitaxial Templates

Hsieh Chen 1 Kevin Gotrik 1 Adam Floyd Hannon 1 Caroline Ross 1 Alfredo Alexander-Katz 1

1MIT Cambridge USA

Show Abstract

9:00 AM - S5.21
Directed Assembly of 1- and 2-Dimensional Nanoparticle Arrays by Pulsed Laser Induced Dewetting of Simple Geometric Patterns

Nick Roberts 1 2 Jason D. Fowlkes 3 Philip D. Rack 2 3

1Omniprobe, Inc. Dallas USA2University of Tennessee Knoxville USA3Oak Ridge National Laboratory Oak Ridge USA

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9:00 AM - S5.22
Bottom-up Nanoengineering by Combining Directed Self-assembly and Inkjet Printing

Enrico Sowade 1 Christian Belgardt 2 Thomas Blaudeck 3 4 Reinhard R. Baumann 1 5

1Chemnitz Univ Tech Chemnitz Germany2Chemnitz Univ Tech Chemnitz Germany3Chemnitz Univ Tech Chemnitz Germany4Linkamp;#246;ping Univ Norrkamp;#246;ping Sweden5Fraunhofer ENAS Chemnitz Germany

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9:00 AM - S5.23
Fabrication of Nanostructured Films through Combination of Self-assembling Materials

Jin Wook Lee 1 Su Yeon Choi 1 Won Ho Kim 1 Seung Hyun Kim 1 Ji Ho Youk 1

1Inha Univ Incheon Republic of Korea

Show Abstract

9:00 AM - S5.24
Unique Magnetic Interaction for Precision Assembling of Arrays of Nanoelectromechanical (NEMS) Devices

Kwanoh Kim 1 Donglei Fan 2 1

1University of Texas at Austin Austin USA2University of Texas at Austin Austin USA

Show Abstract

9:00 AM - S5.26
Anisotropic DNA Conjugated Nanoparticles: Facile Synthesis and Directed Self-assembly

Li Huey Tan 1 Yi Lu 1

1University of Illinois at Urbana-Champaign Urbana USA

Show Abstract

9:00 AM - S5.27
Self-organization of Linearly-arranged Cell-like Patterns on Sol-gel Dip-coating Films Induced by Beacute;nard-Marangoni Convection

Hiroaki Uchiyama 1 Yuto Mantani 1 Hiromitsu Kozuka 1

1Kansai University Osaka Japan

Show Abstract

9:00 AM - S5.28
Large Scale Micro- and Nano-structuring of Azobenzene-containing Polymer Films

Antonio Ambrosio 1 Pasqualino Maddalena 1 Andrea Camposeo 2 Dario Pisignano 2 Fabio Borbone 3 Antonio Roviello 3

1CNR-SPIN and Dipartimento di Scienze Fisiche, Universitamp;#224; degli studi di Napoli Federico II Napoli Italy2NNL, Istituto Nanoscienze-CNR and Dipartimento di Ingegneria dellamp;#8217;Innovazione, Universitamp;#224; del Salento, via Arnesano, I- 73100 Lecce Italy3Dipartimento di Scienze Chimiche, Universitamp;#224; degli Studi di Napoli Federico II, Complesso Universitario di Monte Santamp;#8217;Angelo, Via Cintia, I-80126 Napoli Italy

Show Abstract

9:00 AM - S5.29
Atomistic Modeling of the Directed-assembly of Metal Nanoclusters on Ru(0001)-supported Graphene

Yong Han 1 Lyle D. Roelofs 2 Albert K. Engstfeld 3 R. Juergen Behm 3 James W Evans 1

1Iowa State University Ames USA2Berea College Berea USA3Ulm University Ulm Germany

Show Abstract

9:00 AM - S5.30
Molecular-level Studies of Cobaltacarborane Porphyrin Nanostructures Investigated with Atomic Force Microscopy

Venetia D Lyles 1 Wilson K Serem 1 Erhong Hao 1 M. Graca H Vicente 1 Jayne C Garno 1

1Louisiana State University Baton Rouge USA

Show Abstract

9:00 AM - S5.31
Surface-directed Self-polymerization of Chloromethylphenyl Trichlorosilanes Studied Using Scanning Probe Microscopy and Particle Lithography

Tian Tian 1 Zorabel LeJeune 1 Jayne Garno 1

1Louisiana State University Baton Rouge USA

Show Abstract

9:00 AM - S5.32
Dielectrophoresis in Preparing Functional Polymer Composites with Assembled Nanoparticles

Matti Knaapila 1 Henrik Hoeyer 1 Gorm Krogh Johnsen 1 Marit Ulset Sandsaunet 1 2 Jakob Kjelstrup-Hansen 3 Geir Helgesen 1 4

1Institute for Energy Technology Kjeller Norway2Norwegian University of Science and Technology Trondheim Norway3University of Southern Denmark Samp;#248;nderborg Denmark4University of Oslo Oslo Norway

Show Abstract

9:00 AM - S5.33
Fabrication and Characterization of Self assembled Metallodielectric Photonic Crystals for Biosensing

Shobha Shukla 1

1Indian Institute of Technology Bombay Mumbai India

Show Abstract

9:00 AM - S5.34
3D Nano-seedig Assembly of Well Ordered Ferromagnetic Fe/LaSrFeO4 Nano-hetero Dot Array

Hidekazu Tanaka 1 Koichi Okada 1 Takuya Sakamoto 1 Kohei Fujiwara 1 Azusa Nakamoto Hattori 1 Teruo Kanki 1

1Osaka University Ibaraki Japan

Show Abstract

9:00 AM - S5.36
Self-assembly of Lamellar Silver Alkanethiolates with Functionalized Terminal Groups

Zichao Ye 1 Lito de la Rama 1 Liang Hu 1 Yiran Yan 1 Mikhail Efremov 2 Leslie Allen 1

1University of Illinois at Urbana-Champaign Urbana USA2University of Wisconsin - Madison Madison USA

Show Abstract

9:00 AM - S5.37
Melanin Self-assembly, Structure, and Mechanical Properties

Chun-Teh Chen 1 Vincent Ball 2 Jose J. Gracio 3 Valerie Toniazzo 2 David Ruch 2 Markus J. Buehler 1 4 5

1Massachusetts Institute of Technology Cambridge USA2Centre de Recherche Public Henri Tudor Luxembourg Luxembourg3University of Aveiro Aveiro Portugal4Massachusetts Institute of Technology Cambridge USA5Massachusetts Institute of Technology Cambridge USA

Show Abstract

9:00 AM - S5.38
Nanopatterning Au Nanocrystals on the Surface of Ion-sensitive Field-effect Transistors by Using Ultrathin Porous Alumina Masks

Alexandre Kisner 1 4 Marc Heggen 2 Andreas Offenhaeusser 1 4 Lauro Tatsuo Kubota 3 Yulia Mourzina 1 4

1Forschungszentrum Jamp;#252;lich Jamp;#252;lich Germany2Forschungszentrum Jamp;#252;lich Jamp;#252;lich Germany3State University of Campinas Campinas Brazil4Jamp;#252;lich Aachen Research Alliance-Fundamentals of Future Information Technology Jamp;#252;lich Germany

Show Abstract

9:00 AM - S5.39
Directed Self-assembly of Aluminum Oxide Nanostamps and 10nm-diameter, Low Resisitivity Interconnects

Sang-Yeob Sung 1 Mazin Maqableh 1 Anirudh Sharma 1 Andrew Block 1 Eliot Estrine 1 Matthew Hein 1 Bethanie Stadler 1

1U Minnesota Minneapolis USA

Show Abstract

9:00 AM - S5.40
Electronic Control over Attachment and Self-assembly of Alkyne Groups on Gold

Qing Li 1 ChengBo Han 2 Miguel Fuentes-Cabrera 1 Humberto Terrones Terrones 1 Bobby G. Sumpter Sumpter 1 Wenchang Lu 2 Jerry Bernholc 2 Jieyu Yi 1 Zheng Gai 1 Arthur P Baddorf 1 Petro Maksymovych 1 Minghu Pan 1

1Oak Ridge National laboratory Oak Ridge USA2North Carolina State University Raleigh USA

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S1: DSA Processing and Control I
Session Chairs
Gila Stein
Joy Cheng
Monday AM, November 26, 2012
Sheraton, 2nd Floor, Back Bay D

9:30 AM - *S1.01
Directed Self-assembly of Block Copolymers on Chemically Pre-patterned Surfaces

Paul F Nealey 1

1University of Wisconsin Madison USA

Show Abstract

10:00 AM - *S1.02
Templating Block Copolymers Using Topographical Features

Caroline Ross 1

1Massachusetts Institute of Technology Cambridge USA

Show Abstract

10:30 AM - S1.03
Customization of Directed Self-assembly Patterns

Gregory Stephen Doerk 1 Joy Cheng 1 Charles Rettner 1 Srinivasan Balakrishnan 1 Noel Arellano 1 Daniel Sanders 1

1IBM Almaden Research Center San Jose USA

Show Abstract

10:45 AM - S1.04
A New Scheme of Nanolithography via Controlled Assembly of Block Copolymer/Homopolymer Blends

Weihua Li 1 Nan Xie 1 An-Chang Shi 2

1Fudan University Shanghai China2McMaster University Hamilton Canada

Show Abstract

11:00 AM - S1
BREAK

S2: DSA Applications I
Session Chairs
Roel Gronheid
Michele Perego
Monday AM, November 26, 2012
Sheraton, 2nd Floor, Back Bay D

11:30 AM - *S2.01
Complementary Lithography - Broad Brush Approach

Yan Borodovsky 1

1Intel Corporation Hillsboro USA

Show Abstract

12:00 PM - *S2.02
Practical Modeling of Directed Self-assembly for Lithography

Jed Pitera 1

1IBM Research San Jose USA

Show Abstract

12:30 PM - *S2.03
Three-Dimensional Characterization of Block Copolymer Lithography Patterns Using X-Ray Scattering

Joseph Kline 1 Daniel F. Sunday 1 Chengqing Wang 1 Wenli Wu 1

1National Institute of Standards and Technology Gaithersburg USA

Show Abstract

2012-11-27   Show All Abstracts

Symposium Organizers

August W. Bosse, ExxonMobil Research and Engineering Company
Joy Y. Cheng, IBM Almaden Research Center
Roel Gronheid, IMEC
Gila E. Stein, University of Houston
S8: DSA Processing and Control III
Session Chairs
Jed Pitera
Daniel Sunday
Tuesday PM, November 27, 2012
Sheraton, 2nd Floor, Back Bay D

2:30 AM - *S8.01
Prediction and Analysis of Block Polymer Directed Self-assembly for Nanopatterning

Juan de Pablo 1 Paul Nealey 1

1University of Chicago Chicago USA

Show Abstract

3:00 AM - S8.02
Inverse Design of Directed Self-assembly Templates for Block Copolymer Thin Films

Adam Floyd Hannon 1 YongJoo Kim 1 Kevin Willy Gotrik 1 Alfredo Alexander-Katz 1 Caroline Anne Ross 1

1MIT Cambridge USA

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3:15 AM - S8.03
Collective Behavior of Block Copolymers Thin-film within Periodic Topographical Structures

Michele Perego 1 Andrea Andreozzi 1 Antonio Vellei 1 Manuel Morgano 1 Gabriele Seguini 1

1Laboratorio MDM, IMM-CNR Agrate Brianza Italy

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3:30 AM - S8.04
Self-annihilation of Defects in Block Copolymers Thin Films induced by Corrugated Substrates

Guillaume Fleury 1 Karim Aissou 1 Jonah Shaver 2 Gilles Pecastaings 1 Cyril Brochon 1 Christophe Navarro 3 Stephane Grauby 2 Jean-Michel Rampnoux 2 Stefan Dilhaire 2 Georges Hadziioannou 1

1University of Bordeaux Talence France2University of Bordeaux Talence France3Arkema Lacq France

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3:45 AM - S8.05
Complex Self-assembled Patterns from a Square Grid Template with Restricted Geometry

Jae-Byum Chang 1 Hong Kyoon Choi 1 Adam F. Hannon 1 Caroline A. Ross 1 Karl K. Berggren 2

1MIT Cambridge USA2MIT Cambridge USA

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4:00 AM - S8
BREAK

S9: DSA Applications III
Session Chairs
Hiroshi Yoshida
Weihua Li
Tuesday PM, November 27, 2012
Sheraton, 2nd Floor, Back Bay D

4:30 AM - *S9.01
Field-based Simulations of Directed Block Copolymer Assembly

Glenn Fredrickson 1

1University of California, Santa Barbara Santa Barbara USA

Show Abstract

5:00 AM - S9.02
Contact Hole CD Uniformity Repair through Directed Self-assembly of Cylindrical Phase Block Copolymers

Roel Gronheid 1 Paulina Rincon Delgadillo 1 2 Todd Younkin 3 Ainhoa Romo Negreira 4 Mark Somervell 4 Kathleen Nafus 4 Paul Nealey 2

1imec Leuven Belgium2University of Wisconsin Madison USA3Intel Corporation Hillsboro USA4Tokyo Electron America Austin USA

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5:15 AM - S9.03
Trapping Nanoparticle with Various Block Copolymer Defect Patterns

YongJoo Kim 1 Alfredo Alexander-Katz 1

1MIT Cambridge USA

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5:30 AM - S9.04
Process and Simulation Studies of Contact Holes Fabricated Using Directed Self-assembly Lithography

Hiroki Yonemitsu 1 Hironobu Sato 1 Yuriko Seino 1 Hirokazu Kato 1 Masahiro Kanno 1 Katsutoshi Kobayashi 1 Ayako Kawanishi 1 Katsuyoshi Kodera 1 Tsukasa Azuma 1

1Toshiba Corporation Yokohama Japan

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5:45 AM - S9.05
Thermodynamic Pitch Broadening of Self-assembled Block Copolymers and Its Impact on Placement

Henk Boots 1 Tamara Druzhinina 2 Eddy van der Heijden 2 Jessica de Ruiter 3 Joanne Klein-Wolterink 4 Jo Finders 2 Sander F Wuister 2 Hans Fraaije 3 4

1Philips Research Europe Eindhoven Netherlands2ASML Netherlands B.V. Veldhoven Netherlands3Leiden University Leiden Netherlands4Culgi BV Leiden Netherlands

Show Abstract

S6: Materials for DSA II
Session Chairs
Roel Gronheid
Guillaume Fleury
Tuesday AM, November 27, 2012
Sheraton, 2nd Floor, Back Bay D

9:30 AM - *S6.01
Developing New Materials and Process for Directed Self Assembly Applications

Phillip D Hustad 1 Shih-wei Chang 3 Vivian Chuang 3 Jessica P Evans 1 Valeriy Ginzburg 2 John Kramer 2 Greg F Meyers 2 Dan J Murray 2 Jong Park 3 Rahul Sharma 1 Jeffrey D Weinhold 1 Jieqian Zhang 3 Peter Trefonas 3

1Dow Freeport USA2Dow Midland USA3Dow Marlborough USA

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10:00 AM - *S6.02
Self-assembly of Narrowly Dispersed Brush Diblock Copolymers with Very Large Domain Spacings

Thomas Paul Russell 1 Weiyin Gu 1 Huh June 3 Cheomlin Park 3 Sung Woo Hong 1 Brian Sveinbjornsson 2 Robert Grubbs 2

1University of Massachusetts Amherst USA2California Institute of Technology Pasadena USA3Yonsei University Seoul Republic of Korea

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10:30 AM - S6.03
Material and Process Enabling Block Co-polymer for Lithographic Application

Guanyang Lin 1 Yi Cao 1 Hengpeng Wu 1 Jian Yin 1 Sungeun Hong 1 Margareta Paunescu 1 Jane Wan 1 Orest Polishchunk 1

1AZ Electronic Materials USA Corp. Somerville USA

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10:45 AM - S6.04
Self-assembly of Miktoarm Star Terpolymer Thin Films for Microelectronic Applications

Karim Aissou 1 Hong Kyoon Choi 1 Adam Nunns 2 Ian Manners 2 Caroline A. Ross 1

1MIT Cambridge USA Minor Outlying Islands2University of Bristol, BS8 1TS Bristol United Kingdom

Show Abstract

11:00 AM - S6
BREAK

S7: DSA Applications II
Session Chairs
Joy Cheng
Phillip Hustad
Tuesday AM, November 27, 2012
Sheraton, 2nd Floor, Back Bay D

11:30 AM - *S7.01
Image Quality and Pattern Transfer in sub-15nm Block Copolymer Lithography

Ricardo Ruiz 1 Lei Wan 1 Kanaiyalal C Patel 1 Jeffrey Lille 1 Elizabeth Dobisz 1 He Gao 1 Thomas R Albrecht 1

1HGST, a Western Digital Company San Jose USA

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12:00 PM - S7.02
Measuring the Impact of BCP/Pre-pattern Mismatch in DSA Systems through X-Ray Scattering

Daniel Sunday 1 Elizabeth Ashley 1 R. Joseph Kline 1 Wen-Li Wu 1 Ricardo Ruiz 2 Lei Wan 2 Kaniyalal Patel 2

1NIST North Bethesda USA2Hitachi Global Storage San Jose USA

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12:15 PM - S7.03
Kinetics in Block Copolymers Directed Self Assembly: An In-situ GISAX Study

Raluca Tiron 1 Xavier Chevalier 2 Patrice Gergaud 1 Mireille Maret 3 Judicael Dubray 1 Ahmed Gharbi 1 Celyne Lapeyre 1 Jonathan Pradelles 1 Vincent Jousseaume 1 Guillaume Fleury 4 Georges Hadziioannou 4 Nathalie Boudet 5 Christophe Navarro 2

1CEA-LETI Grenoble France2ARKEMA Lacq France3CNRS-UJF Grenoble France4LCPO-UMR 5629 Bordeaux France5ESRF Grenoble France

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12:30 PM - S7.04
Multi-functional Self-assembled Silicon Oxide Nanostructures for Nonvolatile Memory Device Applications

Woon Ik Park 1 Kyungho Kim 1 Jong Min Kim 1 Jae Won Jeong 1 Byoung Kuk You 1 Jungdae Kwon 2 Keon Jae Lee 1 Yeon Sik Jung 1

1KAIST Daejeon Republic of Korea2Korea Institute of Materials Science Changwon Republic of Korea

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12:45 PM - S7.05
Self-assembly-enhanced Nanotransfer Printing with Sub-10 nm Resolution

Jae Won Jeong 1 Woon Ik Park 1 Yeon Sik Jung 1

1Korea Advanced Institute of Science and Technology Daejeon Republic of Korea

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2012-11-28   Show All Abstracts

Symposium Organizers

August W. Bosse, ExxonMobil Research and Engineering Company
Joy Y. Cheng, IBM Almaden Research Center
Roel Gronheid, IMEC
Gila E. Stein, University of Houston
S10: DSA Applications IV
Session Chairs
Gila Stein
Gregory Doerk
Wednesday AM, November 28, 2012
Sheraton, 2nd Floor, Back Bay D

9:30 AM - S10.01
Sequential Infiltration Synthesis (SIS) for Lithography

Yu-Chih Tseng 1 Anil U. Mane 3 Qing Peng 3 Leonidas E. Ocola 1 David A. Czaplewski 1 Jeffrey W. Elam 3 Seth B. Darling 1 2

1Argonne National Laboratory Argonne USA2The University of Chicago Chicago USA3Argonne National Laboratory Argonne USA

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