Meetings & Events

 

2013 MRS Fall Meeting Logo2013 MRS Fall Meeting & Exhibit

December 1-6, 2013 | Boston
Meeting Chairs: Charles Black, Elisabetta Comini, Gitti Frey, Kristi Kiick, Loucas Tsakalakos

Symposium XX : Microelectromechanical Systems---Materials and Devices

2013-12-02   Show All Abstracts

Symposium Organizers

Chris Keimel, GE Global Research
Helena Silva, University of Connecticut
Robert N. Candler, University of California, Los Angeles
Frank W. DelRio, National Institute of Standards and Technology

Symposium Support

Tousimis Research Corp.
Zurich Instruments Ltd.
XX3: Fluidic Systems and Surface Interactions
Session Chairs
Robert N. Candler
Monday PM, December 02, 2013
Sheraton, 3rd Floor, Fairfax A

2:30 AM - *XX3.01
Low Temperature Fabrication and Surface Modification Methods for Fused Silica Micro- and Nanochannels

Sumita Pennathur 1

1UCSB Santa Barbara USA

Show Abstract

3:00 AM - XX3.02
Flexible Surface Acoustic Wave Devices and Its Applications in Microfluidics

Jian Zhou 1 Xingli He 1 Wenbo Wang 1 Nana Hu 1 Weipeng Xuan 1 Hao Jin 1 Shurong Dong 1 Demiao Wang 1 Jikui (Jack) Luo 1 2

1Zhejiang University Hang Zhou China2Bolton University Bolton United Kingdom

Show Abstract

3:15 AM - XX3.03
Modeling of a MEMS Floating Element Shear Sensor

Nikolas Kastor 1 Zhengxin Zhao 1 Robert White 1

1Tufts University Medford USA

Show Abstract

3:30 AM - XX3.04
Submicron Displacement Measurements of MEMS Using Optical Microphotographs in Aqueous Media: Enhancement Using Color Image Processing

Stephan Warnat 1 Hunter King 1 Rachael Schwartz 1 Marek Kujath 1 Ted Hubbard 1

1Dalhousie University Halifax Canada

Show Abstract

3:45 AM - XX3.05
Detections of Fast Single-Particle Translocation through a Micro-Fluidic Channel via Combined Optical and Electrical Sensing

Shoji Tanaka 1 2 Makusu Tsutsui 2 Kentaro Doi 1 Satoyuki Kawano 1 Tomoji Kawai 2 Masateru Taniguchi 2

1Osaka University Toyonaka Japan2Osaka University Ibaraki Japan

Show Abstract

4:00 AM -
BREAK

XX4: Energy Generation and Conversion
Session Chairs
Helena Silva
Monday PM, December 02, 2013
Sheraton, 3rd Floor, Fairfax A

4:30 AM - *XX4.01
Capacitive Energy Storage Based on Mesoporous Oxide Films

Veronica Augustyn 1 Iris Rauda 2 Sarah Tolbert 2 Bruce Dunn 1

1UCLA Los Angeles USA2UCLA Los Angeles USA

Show Abstract

5:00 AM - XX4.02
Textured K0.5Na0.5NbO3 for Micro Electromechanical Systems: Processing-Structure-Property Relationships

Maria Elizabete Costa 1 Muhammad Asif Rafiq 1 Paula Vilarinho 1

1University of Aveiro/CICECO Aveiro Portugal

Show Abstract

5:15 AM - XX4.03
Sliding-Triboelectric Nanogenerators Based on In-Plane Charge-Separation Mechanism for Mechanical Energy Harvesting and Active Sensing

Sihong Wang 1 Long Lin 1 Yannan Xie 1 Qingshen Jing 1 Simiao Niu 1 Zhong Lin Wang 1

1Georgia Institute of Technology Atlanta USA

Show Abstract

5:30 AM - XX4.04
Piezoelectric Energy Harvesting Using Lead-Free (K,Na)NbO3 Films on Flexible Metal Foil

Shiraishi Takahisa 1 Kaneko Noriyuki 1 Kurosawa Minoru 1 Uchida Hiroshi 2 Kobayashi Takeshi 3 Funakubo Hiroshi 1

1Tokyo Institute of Technology Yokohama Japan2Sophia University Kioi-cho Japan3National Institute of Advanced Industrial Science and Technology Tsukuba Japan

Show Abstract

5:45 AM - XX4.05
High Power Primary Lithium Ion Micro Batteries

James H. Pikul 1 Paul V. Braun 2 1 William P. King 1 2

1University of Illinois at Urbana - Champaign Urbana USA2University of Illinois at Urbana-Champaign Urban USA

Show Abstract

XX1: Metrology and Reliability
Session Chairs
Frank W. DelRio
Monday AM, December 02, 2013
Sheraton, 3rd Floor, Fairfax A

9:30 AM - *XX1.01
MEMS Motion Metrology by Super-Resolution Fluorescence Microscopy

Craig McGray 1

1Modern Microsystems, Inc. Silver Spring USA

Show Abstract

10:00 AM - XX1.02
Design and Operation of a Microfabricated Phonon Spectrometer

Obafemi Otelaja 1 Jared Hertzberg 2 3 Mahmut Aksit 2 Richard Robinson 2

1Cornell University ithaca USA2Cornell University ithaca USA3University of Maryland College Park USA

Show Abstract

10:15 AM - XX1.03
Nucleation Rate of Capillary Bridges between Multi-Asperity Surfaces

Emrecan Soylemez 1 Maarten P. de Boer 1 W. Robert Ashurst 2

1Carnegie Mellon University Pittsburgh USA2Auburn University Auburn USA

Show Abstract

10:30 AM - XX1.04
MEMS Reliability as a Function of Loading Spectrum and Component Geometry

Robert Cook 1 Frank DelRio 1 Michael Gaither 1 Rebecca Kirkpatrick 1 William Osborn 1 Richard Gates 1

1National Institute of Standards and Technology Gaithersburg USA

Show Abstract

10:45 AM - XX1.05
On-Chip Testing and Characterization of Polysilicon Thin Films Fracture Mechanisms

Renaud Vayrette 1 2 Montserrat Galceran 3 4 Stephane Godet 3 Jean-Pierre Raskin 2 5 Thomas Pardoen 1 5

1Universitamp;#233; catholique de Louvain Louvain-la-Neuve Belgium2Universitamp;#233; catholique de Louvain Louvain-la-Neuve Belgium3Universitamp;#233; Libre de Bruxelles Brussels Belgium4CIC Energigune Minano Spain5Universitamp;#233; catholique de Louvain Louvain-la-Neuve Belgium

Show Abstract

11:00 AM -
BREAK

XX2: Chemical and Biological Systems
Session Chairs
Chris Keimel
Monday AM, December 02, 2013
Sheraton, 3rd Floor, Fairfax A

11:30 AM - *XX2.01
Microscale Manipulation of Cells and Their Environment for Cell Sorting and Stem Cell Biology

Joel Voldman 1

1MIT Cambridge USA

Show Abstract

12:00 PM - XX2.02
Solvent Immersion Lithography Based on Directed Polymer Disolution for Prototyping Microfluidics and Optofluidics

Andreas E. Vasdekis 1 Michael J Wilkins 1 Jay W Grate 1 Alan E. Konopka 1 Sotiris S. Xantheas 1 Tsun Mei Chang 2

1Pacific Northwest National Laboratory Richland USA2University of Wisconsin-Parkside 2000, Kenosha USA

Show Abstract

12:15 PM - XX2.03
Blood Plasma Biomarker Separation Using a MEMS Device Integrated with a Vertically Aligned Carbon Nanotube Membrane

Yin-Ting Yeh 1 Nestor Perea-Lopez 2 Archi Dasgupta 3 Ramdane Harouaka 1 Mauricio Terrones 2 4 5 Siyang Zheng 1 5

1The Pennsylvania State University University Park USA2The Pennsylvania State University University Park USA3The Pennsylvania State University University Park USA4The Pennsylvania State University University Park USA5The Pennsylvania State University University Park USA

Show Abstract

12:30 PM - XX2.04
Ultrahigh Speed Rotary Nanomotors Assembled from Nanoscale Building Blocks

Kwanoh Kim 1 Donglei Fan 1 2

1the University of Texas at Austin Austin USA2the University of Texas at Austin Austin USA

Show Abstract

12:45 PM - XX2.05
High Resolution Position Monitoring of Suspended MEMS towards Biological and Chemical Sensors

G. Putrino 1 Mariusz Martyniuk 1 A. Keating 2 J. M. Dell 1 L. Faraone 1

1The University of Western Australia Crawley Australia2The University of Western Australia Crawley Australia

Show Abstract

2013-12-03   Show All Abstracts

Symposium Organizers

Chris Keimel, GE Global Research
Helena Silva, University of Connecticut
Robert N. Candler, University of California, Los Angeles
Frank W. DelRio, National Institute of Standards and Technology

Symposium Support

Tousimis Research Corp.
Zurich Instruments Ltd.
XX7: Devices and Integration
Session Chairs
Frank W. DelRio
Tuesday PM, December 03, 2013
Sheraton, 3rd Floor, Fairfax A

2:30 AM - *XX7.01
MEMS Development and Applications at MIT Lincoln Laboratory

Jeremy Muldavin 1 Shaun Berry 2 Carl Bozler 2 Robert Reich 2 Noyan Kinayman 2 Raoul Ouedgraogo 1

1MIT Lincoln Laboratory Lexington USA2MIT Lincoln Laboratory Lexington USA

Show Abstract

3:00 AM - XX7.02
Dielectric and Piezoelectric Properties Upon Lateral Scaling of PMN-PT Films for Logic

Ryan Keech 1 Smitha Shetty 1 Susan Trolier-McKinstry 1 Dennis Newns 2 Matt Copel 2 Glenn Martyna 2 Thomas Shaw 2 Thomas Theis 2

1Pennsylvania State University University Park USA2T.J. Watson Research Center Yorktown Heights USA

Show Abstract

3:15 AM - XX7.03
Controlling Environment and Contact Materials to Optimize Ohmic Microrelay Lifetimes

Vitali Brand 1 Michael S Baker 2 Maarten P de Boer 1

1Carnegie Mellon University Pittsburgh USA2Sandia National Labs Albuquerque USA

Show Abstract

3:30 AM - XX7.04
Integrated Electronics on Piezoelectrics

Margeaux Wallace 1 J. Israel Ramirez 2 S. Trolier-McKinstry 1 T. N. Jackson 2

1The Pennsylvania State University University Park USA2The Pennsylvania State University University Park USA

Show Abstract

3:45 AM -
BREAK

4:15 AM - XX7.05
GaN Nanobelts Based Strain-Gated Piezotronic Logic Devices and Computation(1)

Ruomeng Yu 1 Wenzhuo Wu 1 Yong Ding 1 Zhong Lin Wang 1 2

1Georgia Tech Atlanta USA2Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences Beijing China

Show Abstract

4:30 AM - XX7.06
Developing Metallic MEMS Materials for Elevated Temperature Applications

Jessica Krogstad 1 Kevin J Hemker 1

1Johns Hopkins University Baltimore USA

Show Abstract

4:45 AM - XX7.07
Nanoarchitectured Ni(OH)2 Nanotube Arrays for High Power and High Energy Asymmetric Supercapacitors

Qiang Li 1 Yuanbing Mao 1 Lozano Karen 1

1university of Texas-Pan American Edinburg USA

Show Abstract

5:00 AM - XX7.08
Programmable VO2-Based Microcantilevers through Localized Joule Heating

Nicola Manca 1 2 Luca Pellegrino 2 Teruo Kanki 3 Syouta Yamasaki 3 Hidekazu Tanaka 3 Antonio Sergio Siri 1 2 Daniele Marre 1 2

1University of Genoa Genoa Italy2CNR-SPIN Genoa Italy3Osaka University Osaka Japan

Show Abstract

5:15 AM - XX7.09
Stretchable Silicon Fabric - Mechanics and Mechanism

Aftab M Hussain 1 Salman Inayat 1 Jhonathan P Rojas 1 Galo A Torres Sevilla 1 Muhammad Mustafa Hussain 1

1King Abdullah University of Science and Technology Thuwal Saudi Arabia

Show Abstract

XX8: Poster Session: Microelectromechanical Systems
Session Chairs
Robert N. Candler
Tuesday PM, December 03, 2013
Hynes, Level 1, Hall B

9:00 AM - XX8.01
Development of a Photoresponsive and Electrostrictive Material from P(VDF-TrFE-CFE) and TiOPc Composite

Wen Chi Chang 1 Po-Han Chen 2 Chih-Ting Lin 2 An-Bang Wang 1 Chih-Kung Lee 1 3

1National Taiwan University Taipei Taiwan2National Taiwan University Taipei Taiwan3National Taiwan University Taipei Taiwan

Show Abstract

9:00 AM - XX8.03
Cylindrical Rotating Triboelectric Nanogenerator

Peng Bai 1 2 Guang Zhu 1 Ying Liu 1 Jun Chen 1 Qingshen Jing 1 Weiqing Yang 1 Jusheng Ma 2 Gong Zhang 2 Zhong Lin Wang 1 3

1Georgia Institute of Technology Atlanta USA2Tsinghua University Beijing China3Beijing Institute of Nanoenergy and Nanosystems Beijing China

Show Abstract

9:00 AM - XX8.04
Theory of Sliding-Mode Triboelectric Nanogenerators

Simiao Niu 1 Ying Liu 1 Sihong Wang 1 Long Lin 1 Youfan Hu 1 Yusheng Zhou 1 Zhong Lin Wang 1 2

1Georgia Institute of Technology Atlanta USA2Beijing Institute of Nanoenergy and Nanosystems Beijing China

Show Abstract

9:00 AM - XX8.05
Flexible Surface Acoustic Wave Based Temperature and Humidity Sensors

Xingli He 1 Jian Zhou 1 Wenbo Wang 1 Weipeng Xuan 1 Dajian Li 2 Shurong Dong 1 Hao Jin 1 Jikui(Jack) Luo 1 2

1Zhejiang University Hangzhou China2Bolton University Bolton United Kingdom

Show Abstract

9:00 AM - XX8.06
A New ATR-IR Microreactor to Study Electrical Field Driven Processes

Arturo Susarrey Arce 1 2 Roald M. Tiggelaar 1 Engin Karabudak 1 Remco G. P. Sanders 3 Bert Geerdink 2 Stefan Schlautmann 1 Leon Lefferts 2 Arie van Houselt 2 Han Gardeniers 1

1University of Twente Enschede Netherlands2University of Twente Enschede Netherlands3University of Twente Enschede Netherlands

Show Abstract

9:00 AM - XX8.07
Operation and Failure Analyses of a MEMS-Based Pb(Zr,Ti)O3 Micro Cantilever Using Micro-Raman Spectroscopy

Ken Nishida 1 Masamichi Nishide 1 Masashi Matsuoka 1 Hiromi Shima 1 Ayumi Wada 2 Hiroshi Funakubo 2 Tkashi Yamamoto 1

1National Defense Academy Yokosuka Japan2Dept. of Innov. and Eng. Mat. Yokohama Japan

Show Abstract

9:00 AM - XX8.09
Single-Particle Detections Using Low-Aspect Nanopores

Akihide Arima 1 Makusu Tsutsui 1 Masateru Taniguchi 1

1The Institute of Scientific and Industrial Research, Osaka University Ibaraki Japan

Show Abstract

9:00 AM - XX8.10
MicroElectroMechanical Systems with Crystalline Oxide Materials

Nicola Manca 1 2 Luca Pellegrino 2 Michele Biasotti 1 Valentina Ceriale 1 Renato Buzio 2 Emilio Bellingeri 2 Antonio Sergio Siri 1 2 Daniele Marre 1 2

1University of Genoa Genoa Italy2CNR-SPIN Genoa Italy

Show Abstract

9:00 AM - XX8.11
Investigating the Interface of Microelectronic Wiring for Stretchable Electronics

Naser Naserifar 1 Gary K. Fedder 2 3 Philip R. LeDuc 1

1Carnegie Mellon University Pittsburgh USA2Carnegie Mellon university Pittsburgh USA3Carnegie Mellon University Pittsburgh USA

Show Abstract

9:00 AM - XX8.12
Energy Loss and Internal Frictions Study of Nanocrystalline Metal Thin Films

C.-Jia Tong 1 Fang-Jui Kuo 1 Yu-Ting Wang 1 Ming-Tzer Lin 1

1National Chung Hsing University Taichung Taiwan

Show Abstract

9:00 AM - XX8.13
Elaboration of a New Sensor Combining Molecularly Imprinted Polymers and Opal Technologies

Severine Vignoud-Despond 1 Hamp;#233;lamp;#232;ne Marie 1 Olivier Dellea 2 Pierre R. Marcoux 1 Karsten Haupt 3 Gilles Marchand 1

1CEA - LETI MINATEC Grenoble France2CEA Grenoble Grenoble France3UTC-UMR CNRS 6022 Compiamp;#232;gne France

Show Abstract

9:00 AM - XX8.14
Dielectric and Ferroelectric Properties of Lead-Free Ba(Ti0.8Zr0.2)O3-(Ba0.7Ca0.3)TiO3 Thin Films Processed by Chemical Solution Deposition Method

Baris Celtikci 1 Ahmet M. Ozenbas 1

1Middle East Technical University Ankara Turkey

Show Abstract

9:00 AM - XX8.15
Nonlinear Dynamics in a Torsional Microresonator Produced by the Casimir Force

Jessica Morrison 1 Matthias Imboden 2 David J. Bishop 1 2 3 Pritiraj Mohanty 1

1Boston University Boston USA2Boston University Boston USA3Boston University Boston USA

Show Abstract

9:00 AM - XX8.16
Thickness Dependency of Electrical Properties in Epitaxial Pb(Mg1/3Nb2/3)O3 and 0.6Pb(Mg1/3Nb2/3)O3-0.4 PbTiO3 Films Grown by Metal Organic Chemical Vapor Deposition

Funakubo Hiroshi 1 Okamoto Satoshi 1 Yokoyama Shintaro 1 Uchida Hiroshi 2 Koda Seichiro 2 Saito Keisuke 3 Nishida Ken 4 Yamamoto Takashi 4

1Tokyo Institute of Technology Yokohama Japan2Sophia University Chiyoda Japan3Rigaku Europe SE Ettlingen Germany4National Defense Academy Yokosuka-shi Japan

Show Abstract

9:00 AM - XX8.17
Studies of (Pb,La)(Zr,Sn,Ti)O3 Antiferroelectric Single Crystal with High Electrostriction

Qiang Li 1 Jinghan Gao 1 Yiling Zhang 2 Yuanyuan Li 1 Qingfeng Yan 1 Xiaoqing Xi 2 Xiangcheng Chu 2

1Tsinghua University Beijing China2Tsinghua University Beijing China

Show Abstract

9:00 AM - XX8.18
Electric-Field-Induced Pnma-to-R3c Phase Transition in Sm-Doped Bifeo3 System: Thermodynamic Theory and Phase Field Simulation

Fei Xue 1 Yijia Gu 1 Anbusathaiah Varatharajan 2 Amit Kumar 3 Peter Maksymovych 3 Stephen Jesse 3 Sergei V Kalinin 3 Shintaro Yasui 2 Ichiro Takeuchi 2 Long-Qing Chen 1

1Pennsylvania State University State College USA2University of Maryland College Park USA3Oak Ridge National Laboratory Oak Ridge USA

Show Abstract

9:00 AM - XX8.19
All-Thin-Film PZT/FeGa Multiferroic Cantilevers and Their Applications in Switching Devices and Parametric Amplification

Yi Wang 1 Tiberiu-Dan Onuta 2 Chris J. Long 1 Samuel Lofland 3 Ichiro Takeuchi 2

1University of Maryland-College Park College Park USA2University of Maryland-College Park College Park USA3Rowan University Glassboro USA

Show Abstract

9:00 AM - XX8.20
The Application of Au, Au-Pd Nanoparticle Films to Hydrogen Sensing

Devika Sil 1 Kyle Gilroy 2 Svetlana Neretina 2 Eric Borguet 1

1Temple University Philadelphia USA2Temple University Philadelphia USA

Show Abstract

9:00 AM - XX8.21
Electro-Optic Liquid Crystal-Carbon Nanotube Microelectromechanical Devices Experiment and Simulation

Matthew Eakle 1 Timothy Atherton 1 Peggy Cebe 1 Georgi Georgiev 2 1

1Tufts University Medford USA2Assumption College Worcester USA

Show Abstract

9:00 AM - XX8.22
Enhanced Piezoresponse in (Bi,Sm)FeO3 Films at a Morphotropic Phase Boundary for Piezo-MEMS Devices

Shintaro Yasui 1 2 Yoshitaka Ehara 3 Takahisa Shiraishi 3 Takao Shimizu 4 Hiroshi Funakubo 3 Mitsuru Itoh 2 Yasuhiko Imai 5 Hiroo Tajiri 5 Osami Sakata 3 6 Ichiro Takeuchi 1

1University of Maryland Collage Park USA2Tokyo Institute of Technology Yokohama Japan3Tokyo Institute of Technology Yokohama Japan4Tokyo Institute of Technology Yokohama Japan5Japan Synchrotron Radiation Research Institute/SPring-8 Hyogo Japan6National Institute for Materials Science/SPring-8 Hyogo Japan

Show Abstract

XX5: Materials and Manufacturing
Session Chairs
Chris Keimel
Tuesday AM, December 03, 2013
Sheraton, 3rd Floor, Fairfax A

9:30 AM - *XX5.01
Solar Photovoltaic Cell, Module, and System Performance and Functionality Enhancement through MEMS Technologies

Gregory N. Nielson 1

1Sandia National Laboratories Albuquerque USA

Show Abstract

10:00 AM - XX5.02
Dimensionally Controlled Submicron 3D Microstructure Fabrication by Dual Diffuser Lithography (DDL)

Hassan Hafeez 1 Si-Hyeong Cho 2 Heon-Yul Ryu 2 Dong-Ho Han 1 Jin-Goo Park 1 2

1Hanyang University, South Korea Ansan Republic of Korea2Hanyang University, South Korea Ansan Republic of Korea

Show Abstract

10:15 AM - XX5.03
High Power Density Pyroelectric Energy Conversion Using a MEMS Platform

Bikram Bhatia 1 Hanna Cho 1 Karthik Jambunathan 2 Jangho Choi 1 David G. Cahill 1 2 Lane W. Martin 2 William P. King 1 2

1University of Illinois at Urbana Champaign Urbana USA2University of Illinois at Urbana Champaign Urbana USA

Show Abstract

10:30 AM - XX5.04
Nanoporous BiFeO3 Crystallites towards Optimised Smart Materials

Paula Vilarinho 1 Xiaoli Zhu 1 Paula Ferreira 1

1University of Aveiro Aveiro Portugal

Show Abstract

10:45 AM - XX5.05
Microtransfer Printing for Manufacturing MEMS

Kevin T. Turner 1 Helen K. Minsky 1 Hitesh Sahoo 1 Jiahan Zhuang 1

1University of Pennsylvania Philadelphia USA

Show Abstract

11:00 AM -
BREAK

XX6: Optical and Mechanical Microsystems
Session Chairs
Helena Silva
Tuesday AM, December 03, 2013
Sheraton, 3rd Floor, Fairfax A

11:30 AM - *XX6.01
Silicon Monolithic MEMS + Photonic Systems

Sunil Bhave 1

1Cornell University Ithaca USA

Show Abstract

12:00 PM - XX6.02
Self-Tensioning Support Post Design to Control Residual Stress in MEMS Fixed-Fixed Beams

Ryan Pocratsky 1 Maarten P. de Boer 1

1Carnegie Mellon University Pittsburgh USA

Show Abstract

12:15 PM - XX6.03
Control of the Mechanical Total Stress in the Structural Layer of Thin Film Silicon Microresonators for Enhanced MEMS Performance

Joao Mouro 1 Alexandra Gualdino 1 Luca Luschi 1 Virginia Chu 1 Joao Pedro Conde 1 2

1INESC Microsistemas e Nanotechnologias and IN- Institute of Nanoscience and Nanotechnology Lisbon Portugal2Instituto Superior Tamp;#233;cnico Lisbon Portugal

Show Abstract

12:30 PM - XX6.04
Self-Biased 215MHz Magnetoelectric NEMS Resonator for Ultra-Sensitive DC Magnetic Field Detection

Tianxiang Nan 1 Yu Hui 1 Matteo Rinaldi 1 Nian Sun 1

1Northeastern University Boston USA

Show Abstract

12:45 PM - XX6.05
Nano-Scale Silicon Oscillators and Pulse Generators through Solid-Liquid Phase Switching

Adam Cywar 1 Helena Silva 1 Ali Gokirmak 1

1University of Connecticut Storrs USA

Show Abstract

2013-12-04   Show All Abstracts

Symposium Organizers

Chris Keimel, GE Global Research
Helena Silva, University of Connecticut
Robert N. Candler, University of California, Los Angeles
Frank W. DelRio, National Institute of Standards and Technology

Symposium Support

Tousimis Research Corp.
Zurich Instruments Ltd.
XX10: Sensors and Devices
Session Chairs
Frank W. DelRio
Wednesday PM, December 04, 2013
Sheraton, 3rd Floor, Fairfax A

2:30 AM - *XX10.01
Nanometer Thickness Pt-ALD Based IR Bolometer Pixel Utilizing an Enhanced Serpentine Shape

Gary O'Brien 1 Fabian Purkl 1 3 Tim English 2 Ando Feyh 1 Gary Yama 1 Thomas Kenny 2

1Bosch, LLC Palo Alto USA2Stanford University Stanford USA3University of Freiburg Freiburg Germany

Show Abstract

3:00 AM - XX10.02
Solid State MEMS Devices on Flexible and Semi-Transparent Silicon Platform

Sally M Ahmed 1 Aftab M Hussain 1 Jhonathan P Rojas 1 Muhammad Mustafa Hussain 1

1King Abdullah University of Science and Technology Thuwal Saudi Arabia

Show Abstract

3:15 AM - XX10.03
Texturing Graphene toward 3-Dimensional Electromechanical Sensors

SungWoo Nam 1 Cai Mike Wang 1 Jonghyun Choi 1

1University of Illinois, Urbana-Champaign Urbana USA

Show Abstract

3:30 AM -
BREAK

4:00 AM - XX10.04
First Order Transition of Ferroelectric Thin Film Domain Morphology and Its Effect on Ferroelectric Switching

Jason Britson 1 Chris Nelson 2 Xiaoqing Pan 2 Long-Qing Chen 1

1The Pennsylvania State University University Park USA2University of Michigan Ann Arbor USA

Show Abstract

4:15 AM - XX10.05
Fatigue Properties of Atomic-Layered-Deposited Alumina and Titania Ultrathin Coatings

Farzad Sadeghi-Tohidi 1 Eva Baumert 1 Olivier Pierron 1

1Georgia Tech Atlanta USA

Show Abstract

4:30 AM - XX10.06
Recording Nanoscale Thermal Transport in Materials Using Carbon SThM Nanoprobes

Dagou Zeze 1 Mark Rosamond 1 3 Peter Tovee 2 Manuel Pumarol 2 Oleg Kolosov 2 Andrew Gallant 1 Michael Petty 1

1Durham University Durham United Kingdom2Lancaster University Lancaster United Kingdom3Leeds University Leeds United Kingdom

Show Abstract

4:45 AM - XX10.07
Micro-Electro-Mechanical Testing of Freestanding Ultrathin Aluminum Oxide Films

Astrid van der Rest 1 Quentin Van Overmeere 1 Frederic Henry 1 Joris Proost 1 Thomas Pardoen 1

1UCL Louvain la Neuve Belgium

Show Abstract

XX9: Nanofabrication
Session Chairs
Robert N. Candler
Wednesday AM, December 04, 2013
Sheraton, 3rd Floor, Fairfax A

10:15 AM - *XX9.01
Atomically Stabilized Tip-Based Nanofabrication and Sensors

Amit Lal 1

1Cornell University Ithaca USA

Show Abstract

10:45 AM - XX9.02
The Effect of Multi-Layer Metal Catalysts on the Performance and Lifetime of MEMS-Based Carbon Nanotube Field Emission Cathodes

Erich J. Radauscher 1 Jeff R. Piascik 2 Kristin H. Gilchrist 2 Jason J. Amsden 1 Ryan M. Danell 3 Stephen M. Ubnoske 1 Charles B. Parker 1 Jeff T. Glass 1 Brian R. Stoner 2 1

1Duke University Morrisville USA2RTI International Durham USA3Danell Consulting, Inc. Greenville USA

Show Abstract

11:00 AM -
BREAK

11:30 AM - XX9.03
Multi-Modal Characterization of Nanogram Amounts of Polymeric Materials Using a Microcantilever Sensor

Seonghwan (Sam) Kim 1 Dongkyu Lee 2 Sangmin Jeon 3 Thomas Thundat 2

1University of Calgary Calgary Canada2University of Alberta Edmonton Canada3POSTECH Pohang Republic of Korea

Show Abstract

11:45 AM - XX9.04
Roughness Scaling and Fracture Strength of Deep Reactive Ion Etched Silicon Surfaces

Frank W DelRio 1 Lawrence Friedman 1 Michael Gaither 1 William Osborn 1 Robert Cook 1

1National Institute of Standards and Technology Gaithersburg USA

Show Abstract

12:00 PM - XX9.05
MEMS Based ``Fab on a Chiprdquo;

Matthias Imboden 1 Han Han 2 Jackson Chang 1 Cristian Bolle 4 Flavio Pardo 4 Evan Lowell 3 David Bishop 1 2 5

1Boston University Boston USA2Boston University Boston USA3Boston University Boston USA4Bell Labs, Alcatel-Lucent Murray Hill USA5Boston University Brookline USA

Show Abstract

12:15 PM - XX9.06
Using MEMS-Based Adaptive Optics towards X-Ray Applications

Evan Lowell 1 Matthias Imboden 2 Karl Ludwig 3 Ronald Pindak 4 Kenneth Evans-Lutterodt 4 David Bishop 2 3 5

1Boston University Boston USA2Boston University Boston USA3Boston University Boston USA4Brookhaven National Labratory Brookhaven USA5Boston University Boston USA

Show Abstract