Meetings & Events

2012 MRS Spring Meeting Logo

2012 MRS Spring Meeting & Exhibit

April 9-13, 2012 | San Francisco
Meeting Chairs: Lara A. Estroff, Jun Liu, Kornelius Nielsch, Kazumi Wada

Symposium B : Heterogeneous Integration Challenges of MEMS, Sensor, and CMOS LSI

2012-04-11   Show All Abstracts

Symposium Organizers

Kazuya Masu, Tokyo Institute of Technology
Kazuaki Sawada, Toyohashi University of Technology
Hiroshi Toshiyoshi, The University of Tokyo Institute of Industrial Science
Benoit Charlot, Université Monptellier II Institute d'Electronique de Sud
Albert P. Pisano, University of California, Berkeley

Symposium Support

Japan Society of Applied Physics
B1: RF
Session Chairs
Kazuya Masu
Wednesday PM, April 11, 2012
Moscone West, Level 2, Room 2000

2:30 AM - *B1.1
A Creep-Immune RF-MEMS Tunable Capacitor with Quadruple Series Capacitor Structure

Yoshiaki Shimooka 1 Hiroaki Yamazaki 1 Etsuji Ogawa 1 Tomohiro Saito 1 Tamio Ikehashi 1 Yoshiaki Sugizaki 1 Hideki Shibata 1

1Toshiba Corporation Yokohama Japan

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3:00 AM - B1.2
An Electromechanically Driven, Fast, Low Power Switch: The Piezotronic Transistor

Glenn J Martyna 1 Dennis M Newns 1 Bruce G Elmegreen 1

1IBM Watson Reseach Center Yorktown Heights USA

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3:15 AM - B1.3
The Integration of the Ferromagnetic Inductors into the Standard CMOS Chip

Oleg Nizhnik 1 Olinver Vinluan 1 Koji Sonoda 1 Masatoshi Ishii 1 Kohei Higuchi 1 Kazusuke Maenaka 1

1ERATO Maenaka Human-sensing Fusion Project Himeji Japan

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3:30 AM - B1.4
Electromechanical Properties of Al0.9Sc0.1N Thin Films Evaluated at 2.2 GHz Film Bulk Acoustic Resonators

Ramin Matloub Aghdam 1 Evgeny Milyutin 1 Alvaro Artieda 1 Silviu Cosmin Sandu 1 Paul Muralt 1

1Eacute;cole Polytechnique Feacute;deacute;rale de Lausanne Lausanne Switzerland

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3:45 AM - B1.5
3D Heterogeneous Integration Using MEMS Devices for RF Applications

Fumihiko Nakazawa 2 1 Xiaoyu Mi 2 1 Tadashi Nakatani 2 1 Takeaki Shimanouchi 2 1 Osamu Toyoda 2 1 Satoshi Ueda 2 1

1Fujitsu Laboratories Akashi Japan2Association of Super-Advanced Electronics Technologies Akashi Japan

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4:00 AM -
BREAK

B2: Device
Session Chairs
Hiromu Ishii
Wednesday PM, April 11, 2012
Moscone West, Level 2, Room 2000

4:30 AM - *B2.1
Overview of MEMS / NEMS Application to Hard-disk Drives (HDDs)

Toshiki Hirano 1

1Hitachi Global Storage Technologies San Jose USA

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5:00 AM - B2.2
Narrow Gap Structure for Nanoampere-level Current Generation in a Millimeter-sized Vibrational MEMS Electrostatic Energy Harvester

Kazuyoshi Ono 1 Norio Sato 1 Toshishige Shimamura 1 Mamoru Ugajin 1 Tomomi Sakata 1 Shin'ichiro Mutoh 1 Junichi Kodate 1 Yoshito Jin 1 Yasuhiro Sato 1

1Nippon Telegraph and Telephone Atugi-shi Japan

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5:15 AM - B2.3
Quantum Size Effects on the Performance of Chemical Sensors

Junghyo Nah 1 Bala Kumar 2 Fang Hui 1 Ali Javey 1 Jing Guo 2

1University of California, Berkeley Berkeley USA2University of Florida Gainesville USA

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5:30 AM - B2.4
A Low-voltage and High Uniformity NEMS Tunable Color Filter Based on Subwavelength Grating

Hiroaki Honma 1 Kazuhiro Takahashi 1 Makoto Ishida 1 Kazuaki Sawada 1

1Toyohashi University of Technology Toyohashi Japan

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2012-04-12   Show All Abstracts

Symposium Organizers

Kazuya Masu, Tokyo Institute of Technology
Kazuaki Sawada, Toyohashi University of Technology
Hiroshi Toshiyoshi, The University of Tokyo Institute of Industrial Science
Benoit Charlot, Université Monptellier II Institute d'Electronique de Sud
Albert P. Pisano, University of California, Berkeley

Symposium Support

Japan Society of Applied Physics
B5: Bio II
Session Chairs
Albert Pisano
Thursday PM, April 12, 2012
Moscone West, Level 2, Room 2000

2:30 AM - *B5.1
MEMS on LSI by Adhesive Bonding and Wafer Level Packaging

Masayoshi Esashi 1 Shuji Tanaka 2

1Tohoku University Sendai Japan2Tohoku University Sendai Japan

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3:00 AM - *B5.2
Integrated Circuit and MEMS Self Powering Applications Based on Organic Polymer Solar Cells and Hybrid Polymer Super-Capacitors

Bernard Courtois 2 Clinton K Landrock 1 Gregory Di Pendina 2 Badr Omrane 3 Jeydmer Aristizabal 3 Bozena Kaminska 3 1

1IDME Vancouver Canada2CMP Grenoble France3Simon Fraser University Burnaby Canada

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3:30 AM - B5.3
Fabrication of Bio-MEMS Device for on-chip Testing of the Bacteria Behavior

Youngshik Shin 1 Kyohei Katsube 1 Kazuaki Sawada 1 Makoto Ishida 1 Hiromu Ishii 1 Katsuyuki Machida 2 3 Kazuya Masu 2 Ken-ichiro Iida 4 Mistumasa Saito 4 Shin-ichi Yoshida 4

1Toyohashi Univ. of Tech. Toyohashi Japan2Tokyo Institute of Tech. Tokyo Japan3NTT-AT Atsugi Japan4Kyushu Univ. Fukuoka Japan

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3:45 AM - B5.4
An Optimized ICP Etching Process of V-Grooves in GaAs for Pyramidal C-QWIP FPAs

Jason Sun 1 Kwong-Kit Choi 1

1US Army Research Lab Adelphi USA

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4:00 AM -
BREAK

B6: Package
Session Chairs
Benoit Charlot
Thursday PM, April 12, 2012
Moscone West, Level 2, Room 2000

4:30 AM - *B6.1
Heterogeneous Integration over Scale, Material and Process

Hiroyuki Fujita 1 Hiroshi Toshiyoshi 1

1University of Tokyo Tokyo Japan

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5:00 AM - *B6.2
MEMS Digital Micro Shutter Technology Leverages Existing LCD Fabrication Capability for Low-power Transflective Displays

J. Lodewyk Steyn 1 Timothy Brosnihan 1 John Fijol 1 Jignesh Gandhi 1 Nesbitt Hagood 1 Steve Lewis 1 Richard Payne 1 Joyce H Wu 1

1Pixtronix Inc. Andover USA

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5:30 AM - B6.3
Graphene-based Composites as Efficient Thermal Interface Materials

Khan M F Shahil 1 Alexander A Balandin 1 2

1University of California, Riverside (UCR) Riverside USA2University of California, Riverside (UCR) Riverside USA

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5:45 AM - B6.4
A 3-dB Quadrature WLP Coupler for 60 GHz Applications

Hamid Kiumarsi 1 Hiroyuki Ito 1 Noboru Ishihara 1 Kenichi Okada 1 Yusuke Uemichi 2 Yasuto Chiba 2 Kazuya Masu 1

1Tokyo Institute of Technology Yokohama Japan2Electron Device Laboratory, Fujikura Ltd. Sakura Japan

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B3: Sensor
Session Chairs
Kazuaki Sawada
Thursday AM, April 12, 2012
Moscone West, Level 2, Room 2000

9:30 AM - *B3.1
Laminate MEMS for Heterogeneous Integrated Systems

Gp Li 1 Mark Bachman 1

1UC Irvine Irivne USA

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10:00 AM - B3.2
MEMS-CMOS Integrated Tactile Sensor with Digital Signal Processing for Robot Application

Mitsutoshi Makihata 1 Masanori Muroyama 1 Shuji Tanaka 1 Hitoshi Yamada 2 Takahiro Nakayama 2 Ui Yamaguchi 2 Yutaka Nonomura 3 Motohiro Fujiyoshi 3 Masayoshi Esashi 1

1Tohoku University Sendai Japan2Toyota Motor Corporation Toyota Japan3Toyota Central Ramp;D Labs., Inc Toyota Japan

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10:15 AM - B3.3
Heterogeneous Integration of LSI Amplifier and the Tactile Sensor Using Stacking and through-Si-via Techniques

Masayuki Sohgawa 1 Hokuto Yokoyama 1 Takeshi Kanashima 1 Masanori Okuyama 1 Haruo Noma 2

1Osaka University Toyonaka Japan2Advanced Telecommunications Research Institute International Seika, Soraku Japan

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10:30 AM - B3.4
A New Type pH Sensor with Super High Sensitivity

Fumihiro Dasai 1 Ryota Otake 1 Daiki Suzuki 1 Masato Futagawa 1 Makoto Ishida 1 Kazuaki Sawada 1

1Toyohashi University of Technology Toyohashi Japan

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10:45 AM - B3.5
AlGaN/GaN Heterojunction Field Effect Transistors (HFETs) for DNA Hybridization Detection

Resham Thapa 1 Siddharth Alur 1 Kyusang Kim Kim 1 Fei Tong 1 Yogesh Sharma 1 Jing Dai 2 Moonil Kim 3 Claude Ahyi 1 Jong W Hong 2 Michael Bozack 1 John Williams 1 Ahjeong Son 4 Amir Dabiran 5 Andrew Wowchak 5 Minseo Park 1

1Auburn University Auburn USA2Auburn University Auburn USA3Tuskegee University Tuskegee USA4Auburn University Auburn USA5SVT Associates, Inc. Eden Prairie USA

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11:00 AM -
BREAK

B4: Bio I
Session Chairs
Kazuya Masu
Thursday AM, April 12, 2012
Moscone West, Level 2, Room 2000

11:30 AM - *B4.1
Samrt Micro Sensing Chips for Life Innovation

Makoto Ishida 1 2 Kazuaki Sawada 1 2 Takeshi Kawano 1 Daisuke Akai 2

1Toyohashi Univ. of Tech. Toyohashi Japan2Toyohashi Univ. of Tech. Toyohashi Japan

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12:00 PM - *B4.2
Integration of Nanostructures with Microsystems

Liwei Lin 1

1UC Berkeley Berkeley USA

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12:30 PM - B4.3
High Sensitive Dual-gate SOI Based Ion-sensitive Field-effect Transistor beyond Nernst Limit of 59 mV/pH for Biosensor Application

Hyun-June Jang 1 Won-Ju Cho 1 Jin Yong Oh 2 Saif Islam 2

1University of Kwangwoon Seoul Republic of Korea2University of California Davis Davis USA

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12:45 PM - B4.4
Nanoprobe Array for Gene Transfer into Individual Cells

Akihiro Goryu 1 Rika Numano 1 Makoto Ishida 1 Takeshi Kawano 1

1Toyohashi University of Technology Toyohashi Japan

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