Meetings & Events

MRS Fall 2009 Meeting Logo

2009 MRS Fall Meeting & Exhibit

November 30 - December 4, 2009 | Boston
Meeting Chairs
: Kristi Anseth, Li-Chyong Chen, Peter Gumbsch, Ji-Cheng Zhao

Symposium DD : Microelectromechanical Systems--Materials and Devices III

2009-11-30   Show All Abstracts

Symposium Organizers

Joerg Bagdahn Fraunhofer Center for Silicon Photovoltaics
Norman Sheppard MicroCHIPS, Inc.
Srikar Vengallatore McGill University
Kevin Turner University of Wisconsin-Madison
DD1: Resonators and High Frequency Devices
Session Chairs
Joerg Bagdahn
Monday PM, November 30, 2009
Fairfax (Sheraton)

2:30 PM - **DD1.1
Silicon micromechanical resonators for precision sensing

Ashwin Seshia 1
1 Engineering, University of Cambridge, Cambridge United Kingdom

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3:00 PM - DD1.2
MEMS Microresonators for High Temperature Sensor Applications.

Dharanipal Doppalapudi 1 , Jeremie LeClair 1 , Richard Mlcak 1 , Harry Tuller 1 2
1 , Boston MicroSystems Inc., Woburn, Massachusetts, United States, 2 Department of Materials Science and Engineering, MIT, Cambridge, Massachusetts, United States

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3:15 PM - DD1.3
A Study of Dissipation in Nanocrystalline Diamond MHz Frequency MEMS and NEMS.

Matthias Imboden 1 , Pritiraj Mohanty 1
1 Physics, Boston University, Boston, Massachusetts, United States

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3:30 PM - DD1.4
Thermo-mechanical Stability of Ultrananocrystalline Diamond Resonators.

Vivekananda Adiga 1 , Suresh Sampath 2 , Arindom Datta 2 , John Carlisle 3 , Robert Carpick 4 1
1 Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, United States, 2 , Innovative Micro Technology, Santa Barbara, California, United States, 3 , Advanced Diamond Technologies, Romeoville, Illinois, United States, 4 Mechanical Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, United States

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3:45 PM - *
Break

4:15 PM - **DD1.5
ZnO Thin Film Surface Acoustic Wave based Lab-on-a-Chip.

Jack Luo 1 , Yongqing Fu 2 , Xiaoye Du 3 , Sunglyul Maeng 4 , Daesik Lee 4 , Andrew Flewitt 3 , William Milne 3
1 Centre for Material Research & Innovation, University of Bolton, Bolton United Kingdom, 2 Department of Mechanical Engineering, School of Engineering and Physical Sciences,, Heriot Watt University,, Edinburgh United Kingdom, 3 Department of Engineering, University of Cambridge, Cambridge United Kingdom, 4 , Electronics and Telecommunications Research institute, Daejeon Korea (the Republic of)

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4:45 PM - DD1.6
A New Approach for Accurate Measurement of Internal Friction in Thin Films: Applications to Microresonators used in MEMS.

Sairam Prabhakar 1 , Guruprasad Sosale 1 , Srikar Vengallatore 1
1 Mechanical Engineering, McGill University, Montreal, Quebec, Canada

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5:00 PM - DD1.7
Micromachined Active Piezoelectric Structures for Applications above 600 °C.

Jan Sauerwald 1 , Denny Richter 1 , Erik Ansorge 2 , Bertram Schmidt 2 , Holger Fritze 1
1 Department of Physics, Metallurgy and Materials Science, Technische Universitaet Clausthal, Goslar Germany, 2 Institute of Micro and Sensor Systems, Otto-von-Guericke-Universitaet Magdeburg, Magdeburg Germany

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5:15 PM - DD1.8
Fatigue Properties of Silicon Thin Films in Harsh Environments.

Michael Budnitzki 1 , Pierre-Olivier Theillet 1 , Eva Baumert 1 , Olivier Pierron 1
1 Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States

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DD2: Poster Session: Material Characterization and Devices
Session Chairs
Joerg Bagdahn
Kevin Turner
Monday PM, November 30, 2009
Exhibit Hall D (Hynes)

9:00 PM - DD2.1
Piezoelectric Nanogenerator by Using p-type ZnO Nanowire Arrays.

Jinhui Song 1 , Ming-Pei Lu 2 , Ming-Yen Lu 1 3 , Min-Teng Chen 3 , Yifan Gao 1 , Lih-Juann Chen 3 , Zhong Lin Wang 1
1 Material Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States, 2 , National Nano Device Laboratories, Hsinchu Taiwan, 3 Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu Taiwan

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9:00 PM - DD2.10
The Effect of Ion Delivery on Polypyrrole Strain and Strain Rate under Elevated Temperature.

Yenmei Keng 1 , Priam Pillai 1 , Ian Hunter 1
1 Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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9:00 PM - DD2.11
Effect of Humidity on Dielectric Charging Process in Capacitive RF MEMS Switches Based on Kelvin Force Microscopy Surface Potential Measurements.

U. Zaghloul 1 2 , G. Papaioannou 3 1 , F. Coccetti 1 , P. Pons 1 , R. Plana 1 2
1 MINC, LAAS/CNRS, Toulouse France, 2 UPS, University of Toulouse, Toulouse France, 3 Solid State Physics Section, University of Athens , Athens Greece

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9:00 PM - DD2.12
Improved Characterization of ECD and PVD MEMS Processes by X-ray Methods.

Emmanuel Nolot 1 , Agathe Andre 1 , Assunta Vigliante 2 , Nikolai Vyshatko 2 , John Pointet 1
1 , CEA-LETI-MINATEC, Grenoble France, 2 , BRUKER AXS GmbH, Karlrsruhe Germany

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9:00 PM - DD2.13
Functionalized Nanocrystalline Diamond for Resonator Gas Sensors.

Frank Mendoza 1 2 , Nelson Sepulveda 1 3 , Brad Weiner 1 4 , Gerardo Morell 1 2
1 Institute for Functional Nanomaterials, University of Puerto Rico, San Juan, Puerto Rico, United States, 2 Physics, University of Puerto Rico, San Juan, Puerto Rico, United States, 3 Electrical Engineering , University of Puerto Rico, Mayaguez, Puerto Rico, United States, 4 Chemistry, University of Puerto Rico, San Juan, Puerto Rico, United States

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9:00 PM - DD2.14
Mechanical Characterization of Atomic Layer Deposited (ALD) Alumina for Applications in Corrosive Environments.

Kuang-Shun Ou 1 , I-Kuan Lin 2 , Ping-Hsin Wu 1 , Kuo-Shen Chen 1
1 Mechanical Engineering, National Cheng-Kung University, Tainan Taiwan, 2 Mechanical Engineering, Boston University, Boston, Massachusetts, United States

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9:00 PM - DD2.17
Laser Induced Spatial Non-Uniformities in the Shape Memory Response of NiTi Thin Films.

Andrew Birnbaum 1 , Gen Satoh 2 , Y. Lawrence Yao 2
1 Materials Science and Technology, Naval Research Lab, Washington, District of Columbia, United States, 2 Mechanical Engineering Dept., Columbia University, New York, New York, United States

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9:00 PM - DD2.18
Thin Film Bulk Acoustic Wave Resonators for Continuous Monitoring in the Physical, Chemical and Biological Realms.

Greg Ashley 1 , Paul Kirby 2
1 CMRI, Bolton Univeristy, Bolton United Kingdom, 2 , Cranfield University, Cranfield United Kingdom

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9:00 PM - DD2.19
Suppression and Modeling of Inelastic Deformation in Multilayer Microcantilevers with Nanoscale Coating.

I-Kuan Lin 1 , Xin Zhang 1 , Yanhang Zhang 1 2
1 Mechanical Engineering, Boston University, Boston, Massachusetts, United States, 2 Biomedical Engineering, Boston University , Boston, Massachusetts, United States

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9:00 PM - DD2.2
Modeling of a Circularly Interdigitated Piezoelectric Microactuator.

Oliver Myers 1 , M. Anjanappa 2 , Carl Freidhoff 3
1 Mechanical Engineering, Mississippi State University, Mississippi State, Mississippi, United States, 2 Mechanical Engineering, University of Maryland Baltimore County, Baltimore, Maryland, United States, 3 , Northrop Grumman Corporation, Baltimore, Maryland, United States

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9:00 PM - DD2.20
The Tunability in Mechanical Properties and Fracture Toughness of Sputtered Silicon Oxynitride Thin Films for MEMS-based Infrared Detectors.

I-Kuan Lin 1 , Ping-Hsin Wu 2 , Kuang-Shun Ou 2 , Kuo-Shen Chen 2 , Xin Zhang 1
1 Mechanical Engineering, Boston University, Boston, Massachusetts, United States, 2 Mechanical Engineering , National Cheng Kung University, Tainan Taiwan

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9:00 PM - DD2.21
Electrical Characterization of Aluminum Nitride (AlN) Metal-Insulator-Metal (MIM) Mesa Structures.

Jonathan Thornton 2 , Sarah Caprio 3 , Sridhar Kuchibhatla 1 , Richard Farrell 1 , Dimitris Korakakis 1 4
2 Department of Mechanical and Aerospace Engineering, West Virginia University, Morgantown, West Virginia, United States, 3 Deparment of Chemical Engineering, West Virginia University, Morgantown, West Virginia, United States, 1 Lane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, West Virginia, United States, 4 National Energy Technology Laboratory, West Virginia University, Morgantown, West Virginia, United States

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9:00 PM - DD2.22
Mechanical and Optical Properties of Reactively Sputtered Silicon-rich Silicon Nitride Films.

Xiaoning Wang 1 , Selcuk Yerci 2 , I-Kuan Lin 1 , Luca Dal Negro 2 , Xin Zhang 1
1 Mechanical Engineering, Boston University, Boston, Massachusetts, United States, 2 Electrical and Computer Engineering, Boston University, Boston, Massachusetts, United States

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9:00 PM - DD2.23
Effect of Controllable Surface Roughness on the Durability of MEMS Contacts.

John Kelley 1 , Michael Jespersen 1 , Steven Patton 1 , Richard Vaia 1 , Andrey Voevodin 1
1 Materials and Manufacturing Directorate, Air Force Research Laboratory, WPAFB, Ohio, United States

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9:00 PM - DD2.24
Impact of Time and Temperature on the Restoring Force in RF MEMS Capacitive Switches.

Mark McLean 1 , Walter Brown 1 , Rick Vinci 1 , John Papapolymerou 2 , Yuan Li 2
1 , Lehigh University, Bethlehem, Pennsylvania, United States, 2 , Georgia Institute of Technology, Atlanta, Georgia, United States

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9:00 PM - DD2.26
Adhesion Enhancement and Structure Stabilization of Piezoelectric MEMS Devices by Oxygen-controlled Conductive Oxide Electrodes.

Seung-Hyun Kim 1 , Chang Young Koo 2 , Miso Kim 3 , Wenyan Jiang 1 , Scott Hoffmann 1 , Brian Wardle 3 , Angus Kingon 1
1 Division of Engineering, Brown University, Providence, Rhode Island, United States, 2 R&D Center, INOSTEK Inc., Ansan, Gyeonggi, Korea (the Republic of), 3 Dept. of Aeronautics and Astronautics, MIT, Cambridge, Massachusetts, United States

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9:00 PM - DD2.27
Tribological Properties of Phenyl-terminated Thiols in Adhesive and Non-adhesive Contacts.

Yutao Yang 1 , Andrew Jamison 2 , T. Randall Lee 2 , Marina Ruths 1
1 Chemistry, University of Massachusetts Lowell, Lowell, Massachusetts, United States, 2 Chemistry, University of Houston, Houston, Texas, United States

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9:00 PM - DD2.28
Characterization of Aluminum Nitride (AlN) Thin Films through Micro Infrared Spectroscopy.

Sridhar Kuchibhatla 1 , Lee Rodak 1 , Dimitris Korakakis 1 2
1 Lane Department of Computer Science and Electrical ENgineering, West Virginia University, Morgantown, West Virginia, United States, 2 , National Energy Technology Laboratory, Morgantown, West Virginia, United States

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9:00 PM - DD2.29
A New Approach to Tailoring the Electrical Properties of Silicon at Room Temperature.

Simon Ruffell 1 , Kallista Sears 1 , Andrew Knights 2 , Jodie Bradby 1 , Jim Williams 1
1 , Australian National University, Canberra, Australian Capital Territory, Australia, 2 Department of Engineering Physics, McMaster University, Hamilton, Ontario, Canada

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9:00 PM - DD2.3
Nanoindentation Characterization and Finite Element Modeling of The Viscoelastic Behavior for PDMS Micropillars.

Ping Du 1 , I-Kuan Lin 1 , Hongbing Lu 2 , Xin Zhang 1
1 Mechanical Engineering, Boston University, Boston, Massachusetts, United States, 2 Mechanical and Energy Engineering, University of North Texas, Denton, Texas, United States

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9:00 PM - DD2.30
Nonlinear Piezoresistance of Polysilicon Films.

Joao Gaspar 1 , Marek Schmidt 1 , Oliver Paul 1
1 Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg, BW, Germany

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9:00 PM - DD2.31
Characterization of the Elastic Properties of SU-8 Microposts and Their Adhesion Strength to Silicon Substrates.

Joao Gaspar 1 , Chiemi Ishiyama 2 , Masato Sone 2 , Yakichi Higo 2 , Oliver Paul 1
1 Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg, BW, Germany, 2 Precision & Intelligence Laboratory, Tokyo Institute of Technology, Yokohama Japan

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9:00 PM - DD2.32
Characteristics of the QVGA IRFPAs using Sputtered Silicon Antimony Thin Film as a Detection Layer.

Hojun Ryu 1 , Dong-Keun Lee 2 , Seong Mok Cho 1 , Sang-Hoon Cheon 1 , Woo Seok Yang 1 , Chang Auck Choi 1
1 , ETRI, Daejeon Korea (the Republic of), 2 Dept. of Electronics Enginnering, Dankook University, Cheonan Korea (the Republic of)

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9:00 PM - DD2.33
Thickness-Dependant Electrical Characteristics of Nitrogen-Doped Polycrystalline 3C-SiC Thin Film Deposited by LPCVD.

Man I Lei 1 , Te-Hao Lee 1 , Mehran Mehregany 2
1 Department of Materials Science and Engineering, Case Western Reserve University, Cleveland, Ohio, United States, 2 Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, Ohio, United States

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