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MRS Fall 2009 Meeting Logo

2009 MRS Fall Meeting & Exhibit

November 30 - December 4, 2009 | Boston
Meeting Chairs
: Kristi Anseth, Li-Chyong Chen, Peter Gumbsch, Ji-Cheng Zhao

Symposium DD : Microelectromechanical Systems--Materials and Devices III

2009-11-30   Show All Abstracts

Symposium Organizers

Joerg Bagdahn Fraunhofer Center for Silicon Photovoltaics
Norman Sheppard MicroCHIPS, Inc.
Srikar Vengallatore McGill University
Kevin Turner University of Wisconsin-Madison
DD1: Resonators and High Frequency Devices
Session Chairs
Joerg Bagdahn
Monday PM, November 30, 2009
Fairfax (Sheraton)

2:30 PM - **DD1.1
Silicon micromechanical resonators for precision sensing

Ashwin Seshia 1
1 Engineering, University of Cambridge, Cambridge United Kingdom

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3:00 PM - DD1.2
MEMS Microresonators for High Temperature Sensor Applications.

Dharanipal Doppalapudi 1 , Jeremie LeClair 1 , Richard Mlcak 1 , Harry Tuller 1 2
1 , Boston MicroSystems Inc., Woburn, Massachusetts, United States, 2 Department of Materials Science and Engineering, MIT, Cambridge, Massachusetts, United States

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3:15 PM - DD1.3
A Study of Dissipation in Nanocrystalline Diamond MHz Frequency MEMS and NEMS.

Matthias Imboden 1 , Pritiraj Mohanty 1
1 Physics, Boston University, Boston, Massachusetts, United States

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3:30 PM - DD1.4
Thermo-mechanical Stability of Ultrananocrystalline Diamond Resonators.

Vivekananda Adiga 1 , Suresh Sampath 2 , Arindom Datta 2 , John Carlisle 3 , Robert Carpick 4 1
1 Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, United States, 2 , Innovative Micro Technology, Santa Barbara, California, United States, 3 , Advanced Diamond Technologies, Romeoville, Illinois, United States, 4 Mechanical Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, United States

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3:45 PM - *
Break

4:15 PM - **DD1.5
ZnO Thin Film Surface Acoustic Wave based Lab-on-a-Chip.

Jack Luo 1 , Yongqing Fu 2 , Xiaoye Du 3 , Sunglyul Maeng 4 , Daesik Lee 4 , Andrew Flewitt 3 , William Milne 3
1 Centre for Material Research & Innovation, University of Bolton, Bolton United Kingdom, 2 Department of Mechanical Engineering, School of Engineering and Physical Sciences,, Heriot Watt University,, Edinburgh United Kingdom, 3 Department of Engineering, University of Cambridge, Cambridge United Kingdom, 4 , Electronics and Telecommunications Research institute, Daejeon Korea (the Republic of)

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4:45 PM - DD1.6
A New Approach for Accurate Measurement of Internal Friction in Thin Films: Applications to Microresonators used in MEMS.

Sairam Prabhakar 1 , Guruprasad Sosale 1 , Srikar Vengallatore 1
1 Mechanical Engineering, McGill University, Montreal, Quebec, Canada

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5:00 PM - DD1.7
Micromachined Active Piezoelectric Structures for Applications above 600 °C.

Jan Sauerwald 1 , Denny Richter 1 , Erik Ansorge 2 , Bertram Schmidt 2 , Holger Fritze 1
1 Department of Physics, Metallurgy and Materials Science, Technische Universitaet Clausthal, Goslar Germany, 2 Institute of Micro and Sensor Systems, Otto-von-Guericke-Universitaet Magdeburg, Magdeburg Germany

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5:15 PM - DD1.8
Fatigue Properties of Silicon Thin Films in Harsh Environments.

Michael Budnitzki 1 , Pierre-Olivier Theillet 1 , Eva Baumert 1 , Olivier Pierron 1
1 Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States

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DD2: Poster Session: Material Characterization and Devices
Session Chairs
Joerg Bagdahn
Kevin Turner
Tuesday AM, December 01, 2009
Exhibit Hall D (Hynes)

9:00 PM - DD2.1
Piezoelectric Nanogenerator by Using p-type ZnO Nanowire Arrays.

Jinhui Song 1 , Ming-Pei Lu 2 , Ming-Yen Lu 1 3 , Min-Teng Chen 3 , Yifan Gao 1 , Lih-Juann Chen 3 , Zhong Lin Wang 1
1 Material Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States, 2 , National Nano Device Laboratories, Hsinchu Taiwan, 3 Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu Taiwan

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9:00 PM - DD2.10
The Effect of Ion Delivery on Polypyrrole Strain and Strain Rate under Elevated Temperature.

Yenmei Keng 1 , Priam Pillai 1 , Ian Hunter 1
1 Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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9:00 PM - DD2.11
Effect of Humidity on Dielectric Charging Process in Capacitive RF MEMS Switches Based on Kelvin Force Microscopy Surface Potential Measurements.

U. Zaghloul 1 2 , G. Papaioannou 3 1 , F. Coccetti 1 , P. Pons 1 , R. Plana 1 2
1 MINC, LAAS/CNRS, Toulouse France, 2 UPS, University of Toulouse, Toulouse France, 3 Solid State Physics Section, University of Athens , Athens Greece

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9:00 PM - DD2.12
Improved Characterization of ECD and PVD MEMS Processes by X-ray Methods.

Emmanuel Nolot 1 , Agathe Andre 1 , Assunta Vigliante 2 , Nikolai Vyshatko 2 , John Pointet 1
1 , CEA-LETI-MINATEC, Grenoble France, 2 , BRUKER AXS GmbH, Karlrsruhe Germany

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9:00 PM - DD2.13
Functionalized Nanocrystalline Diamond for Resonator Gas Sensors.

Frank Mendoza 1 2 , Nelson Sepulveda 1 3 , Brad Weiner 1 4 , Gerardo Morell 1 2
1 Institute for Functional Nanomaterials, University of Puerto Rico, San Juan, Puerto Rico, United States, 2 Physics, University of Puerto Rico, San Juan, Puerto Rico, United States, 3 Electrical Engineering , University of Puerto Rico, Mayaguez, Puerto Rico, United States, 4 Chemistry, University of Puerto Rico, San Juan, Puerto Rico, United States

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9:00 PM - DD2.14
Mechanical Characterization of Atomic Layer Deposited (ALD) Alumina for Applications in Corrosive Environments.

Kuang-Shun Ou 1 , I-Kuan Lin 2 , Ping-Hsin Wu 1 , Kuo-Shen Chen 1
1 Mechanical Engineering, National Cheng-Kung University, Tainan Taiwan, 2 Mechanical Engineering, Boston University, Boston, Massachusetts, United States

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9:00 PM - DD2.17
Laser Induced Spatial Non-Uniformities in the Shape Memory Response of NiTi Thin Films.

Andrew Birnbaum 1 , Gen Satoh 2 , Y. Lawrence Yao 2
1 Materials Science and Technology, Naval Research Lab, Washington, District of Columbia, United States, 2 Mechanical Engineering Dept., Columbia University, New York, New York, United States

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9:00 PM - DD2.18
Thin Film Bulk Acoustic Wave Resonators for Continuous Monitoring in the Physical, Chemical and Biological Realms.

Greg Ashley 1 , Paul Kirby 2
1 CMRI, Bolton Univeristy, Bolton United Kingdom, 2 , Cranfield University, Cranfield United Kingdom

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9:00 PM - DD2.19
Suppression and Modeling of Inelastic Deformation in Multilayer Microcantilevers with Nanoscale Coating.

I-Kuan Lin 1 , Xin Zhang 1 , Yanhang Zhang 1 2
1 Mechanical Engineering, Boston University, Boston, Massachusetts, United States, 2 Biomedical Engineering, Boston University , Boston, Massachusetts, United States

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9:00 PM - DD2.2
Modeling of a Circularly Interdigitated Piezoelectric Microactuator.

Oliver Myers 1 , M. Anjanappa 2 , Carl Freidhoff 3
1 Mechanical Engineering, Mississippi State University, Mississippi State, Mississippi, United States, 2 Mechanical Engineering, University of Maryland Baltimore County, Baltimore, Maryland, United States, 3 , Northrop Grumman Corporation, Baltimore, Maryland, United States

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9:00 PM - DD2.20
The Tunability in Mechanical Properties and Fracture Toughness of Sputtered Silicon Oxynitride Thin Films for MEMS-based Infrared Detectors.

I-Kuan Lin 1 , Ping-Hsin Wu 2 , Kuang-Shun Ou 2 , Kuo-Shen Chen 2 , Xin Zhang 1
1 Mechanical Engineering, Boston University, Boston, Massachusetts, United States, 2 Mechanical Engineering , National Cheng Kung University, Tainan Taiwan

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9:00 PM - DD2.21
Electrical Characterization of Aluminum Nitride (AlN) Metal-Insulator-Metal (MIM) Mesa Structures.

Jonathan Thornton 2 , Sarah Caprio 3 , Sridhar Kuchibhatla 1 , Richard Farrell 1 , Dimitris Korakakis 1 4
2 Department of Mechanical and Aerospace Engineering, West Virginia University, Morgantown, West Virginia, United States, 3 Deparment of Chemical Engineering, West Virginia University, Morgantown, West Virginia, United States, 1 Lane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, West Virginia, United States, 4 National Energy Technology Laboratory, West Virginia University, Morgantown, West Virginia, United States

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9:00 PM - DD2.22
Mechanical and Optical Properties of Reactively Sputtered Silicon-rich Silicon Nitride Films.

Xiaoning Wang 1 , Selcuk Yerci 2 , I-Kuan Lin 1 , Luca Dal Negro 2 , Xin Zhang 1
1 Mechanical Engineering, Boston University, Boston, Massachusetts, United States, 2 Electrical and Computer Engineering, Boston University, Boston, Massachusetts, United States

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9:00 PM - DD2.23
Effect of Controllable Surface Roughness on the Durability of MEMS Contacts.

John Kelley 1 , Michael Jespersen 1 , Steven Patton 1 , Richard Vaia 1 , Andrey Voevodin 1
1 Materials and Manufacturing Directorate, Air Force Research Laboratory, WPAFB, Ohio, United States

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9:00 PM - DD2.24
Impact of Time and Temperature on the Restoring Force in RF MEMS Capacitive Switches.

Mark McLean 1 , Walter Brown 1 , Rick Vinci 1 , John Papapolymerou 2 , Yuan Li 2
1 , Lehigh University, Bethlehem, Pennsylvania, United States, 2 , Georgia Institute of Technology, Atlanta, Georgia, United States

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9:00 PM - DD2.26
Adhesion Enhancement and Structure Stabilization of Piezoelectric MEMS Devices by Oxygen-controlled Conductive Oxide Electrodes.

Seung-Hyun Kim 1 , Chang Young Koo 2 , Miso Kim 3 , Wenyan Jiang 1 , Scott Hoffmann 1 , Brian Wardle 3 , Angus Kingon 1
1 Division of Engineering, Brown University, Providence, Rhode Island, United States, 2 R&D Center, INOSTEK Inc., Ansan, Gyeonggi, Korea (the Republic of), 3 Dept. of Aeronautics and Astronautics, MIT, Cambridge, Massachusetts, United States

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9:00 PM - DD2.27
Tribological Properties of Phenyl-terminated Thiols in Adhesive and Non-adhesive Contacts.

Yutao Yang 1 , Andrew Jamison 2 , T. Randall Lee 2 , Marina Ruths 1
1 Chemistry, University of Massachusetts Lowell, Lowell, Massachusetts, United States, 2 Chemistry, University of Houston, Houston, Texas, United States

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9:00 PM - DD2.28
Characterization of Aluminum Nitride (AlN) Thin Films through Micro Infrared Spectroscopy.

Sridhar Kuchibhatla 1 , Lee Rodak 1 , Dimitris Korakakis 1 2
1 Lane Department of Computer Science and Electrical ENgineering, West Virginia University, Morgantown, West Virginia, United States, 2 , National Energy Technology Laboratory, Morgantown, West Virginia, United States

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9:00 PM - DD2.29
A New Approach to Tailoring the Electrical Properties of Silicon at Room Temperature.

Simon Ruffell 1 , Kallista Sears 1 , Andrew Knights 2 , Jodie Bradby 1 , Jim Williams 1
1 , Australian National University, Canberra, Australian Capital Territory, Australia, 2 Department of Engineering Physics, McMaster University, Hamilton, Ontario, Canada

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9:00 PM - DD2.3
Nanoindentation Characterization and Finite Element Modeling of The Viscoelastic Behavior for PDMS Micropillars.

Ping Du 1 , I-Kuan Lin 1 , Hongbing Lu 2 , Xin Zhang 1
1 Mechanical Engineering, Boston University, Boston, Massachusetts, United States, 2 Mechanical and Energy Engineering, University of North Texas, Denton, Texas, United States

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9:00 PM - DD2.30
Nonlinear Piezoresistance of Polysilicon Films.

Joao Gaspar 1 , Marek Schmidt 1 , Oliver Paul 1
1 Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg, BW, Germany

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9:00 PM - DD2.31
Characterization of the Elastic Properties of SU-8 Microposts and Their Adhesion Strength to Silicon Substrates.

Joao Gaspar 1 , Chiemi Ishiyama 2 , Masato Sone 2 , Yakichi Higo 2 , Oliver Paul 1
1 Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg, BW, Germany, 2 Precision & Intelligence Laboratory, Tokyo Institute of Technology, Yokohama Japan

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9:00 PM - DD2.32
Characteristics of the QVGA IRFPAs using Sputtered Silicon Antimony Thin Film as a Detection Layer.

Hojun Ryu 1 , Dong-Keun Lee 2 , Seong Mok Cho 1 , Sang-Hoon Cheon 1 , Woo Seok Yang 1 , Chang Auck Choi 1
1 , ETRI, Daejeon Korea (the Republic of), 2 Dept. of Electronics Enginnering, Dankook University, Cheonan Korea (the Republic of)

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9:00 PM - DD2.33
Thickness-Dependant Electrical Characteristics of Nitrogen-Doped Polycrystalline 3C-SiC Thin Film Deposited by LPCVD.

Man I Lei 1 , Te-Hao Lee 1 , Mehran Mehregany 2
1 Department of Materials Science and Engineering, Case Western Reserve University, Cleveland, Ohio, United States, 2 Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, Ohio, United States

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9:00 PM - DD2.34
Identification of Optimized Ti-Ni-X Shape Memory Alloy Compositions for Thin Film Actuator Applications.

Robert Zarnetta 2 1 , Alan Savan 1 , Michael Ehmann 1 , Alfred Ludwig 1 2
2 Research Department “Integrity of Small-Scale Systems and High-Temperature Materials (IS3/HTM), Ruhr-University Bochum, Bochum Germany, 1 Institute for Materials, Ruhr-University Bochum, Bochum Germany

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9:00 PM - DD2.6
Characteristics of Output Voltage and Current of Integrated Piezoelectric Nanogenerators.

Rusen Yang 1 , Yong Qin 1 , Cheng Li 1 , Liming Dai 2 , Zhong Lin Wang 1
1 School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States, 2 Department of Chemical and Materials Engineering, University of Dayton, Dayton, Ohio, United States

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9:00 PM - DD2.7
Polymeric Azobenzene Wire Actuators.

Jianxia Zhang 1 , John Wiley 1
1 Chemistry/Advanced Materials Research Institute, University of New Orleans, New Orleans, Louisiana, United States

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9:00 PM - DD2.8
Material Sensitive MEMS Resonator Optimization.

Ambarish Roy 1 , Bradley Barber 2 , Kanti Prasad 1
1 Electrical and Computer Engineering, University of Massachusetts Lowell, Lowell, Massachusetts, United States, 2 , Skyworks Solutions, Woburn, Massachusetts, United States

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9:00 PM - DD2.9
Fabrication,Transport and Raman Studies of Pulsed Laser Deposited Al/Ga Doped PBCO Thin Films.

Hom Kandel 1 2 , Tar Pin Chen 2 , Hye Won Seo 2 , Milko Iliev 4 , Fumiya Watanabe 3 , Zhongrui Li 3 , Lixi Yuan 2 , Dever Norman 1 2
1 Applied Science Department, University of Arkansas at Little rock, Little rock, Arkansas, United States, 2 Physics Department, University of Arkansas at Little rock, Little rock, Arkansas, United States, 4 Texas Center for Superconductivity and Physics Department, University of Houston, University of Houston, Houston, Texas, United States, 3 Nanotechnology Center, University of Arkansas at Little Rock, Little Rock, Arkansas, United States

Show Abstract

2009-12-01   Show All Abstracts

Symposium Organizers

Joerg Bagdahn Fraunhofer Center for Silicon Photovoltaics
Norman Sheppard MicroCHIPS, Inc.
Srikar Vengallatore McGill University
Kevin Turner University of Wisconsin-Madison
DD3: Devices and Materials
Session Chairs
Srikar Vengallatore
Tuesday AM, December 01, 2009
Fairfax (Sheraton)

9:30 AM - **DD3.1
CMOS Nanowire FET Biosensors.

Mark Reed 1
1 , Yale, New Haven, Connecticut, United States

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10:00 AM - DD3.2
In-situ Measurement of Actuation in Thin Films of Conducting Polymers.

Lauren Montemayor 1 , Priam Pillai 2 3 , Ian Hunter 2 3
1 Aeronautics and Astronautics, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States, 2 Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States, 3 , Institute of Soldier Nanotechnologies, Cambridge, Massachusetts, United States

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10:15 AM - DD3.3
Microfabricated Large-area Freestanding Nanostructured Solid-Oxide Fuel Cell Membranes for Portable and Clean Energy.

Bo-Kuai Lai 1 , Alex Johnson 1 , Shriram Ramanathan 1
1 , Harvard School of Engineering and Applied Science, Cambridge, Massachusetts, United States

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10:30 AM - DD3.4
Phase Transformation Behavior of Patterned Lines of NiTi Shape Memory Thin Films.

Xu Huang 1 , Ainissa Ramirez 1 2
1 Mechanical Engineering, Yale University, New Haven, Connecticut, United States, 2 Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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10:45 AM - DD3.5
Thick Films of the TiO2 – TeO2 System for Integrated Functional Electronic Devices.

Paula Vilarinho 1 , Su Xinming 1 , Aiying Wu 1
1 Dep. of Ceramics and Glass Engineering, University of Aveiro, Aveiro Portugal

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11:00 AM - *
Break

11:30 AM - **DD3.6
Piezoresistive Force Sensing Optimization and Applications.

Beth Pruitt 1
1 mechanical engineering, Stanford, Stanford, California, United States

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12:00 PM - **DD3.7
Materials Issues in MEMS Thermomechanical Actuators.

S. Spearing 1 , Prasanna Srinivasan 1
1 , University of Southampton, Southampton United Kingdom

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12:30 PM - DD3.8
Processes for Integration of Piezoelectric/Diamond Hybrid Films and Fabrication of Device Structures for High Performance MEMS/NEMS.

Orlando Auciello 1 2 , David Czaplewski 2 , Anirudha Sumant 2 , Bernd Kabius 3 , Jon Hiller 3 , Derrick Mancini 2
1 Materials Science Division, Argonne National Laboratory, Argonne, Illinois, United States, 2 Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois, United States, 3 Center for Electron Microscopy, Argonne National Laboratory, Argonne, Illinois, United States

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12:45 PM - DD3.9
Control of the Crystallographic Orientation of PZT Thin Films on Silicon Substrates by a Single Process Step.

Minh Nguyen 1 , Ruud Steenwelle 1 , Matthijn Dekkers 1 , Dave HA Blank 1 , Guus Rijnders 1
1 , University of Twente, Enschede Netherlands

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DD4: 3D Integration and Assembly
Session Chairs
Norm Sheppard
Tuesday PM, December 01, 2009
Fairfax (Sheraton)

2:30 PM - **DD4.1
MEMS Assembly Using AlGe Eutectic and Reactive Multilayer Wafer Bonding.

Matthias Petzold 1 , Bianca Boettge 1 , Joerg Bagdahn 2 , Maik Wiemer 3 , Arnold Schneider 4 , Holger Rank 4 , Roland Mueller-Fiedler 4
1 , Fraunhofer Institute for Mechanics of Materials, Halle Germany, 2 , Fraunhofer Center for Silicon Photovoltaics, Halle Germany, 3 , Fraunhofer Research Institution for Electronic Nano Systems , Chemnitz Germany, 4 Microsystem Technologies (CR/ARY) , Robert Bosch GmbH, Stuttgart Germany

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3:00 PM - DD4.2
Aluminum Thermo Compression Bonding Characterization.

Erkan Cakmak 1 , Viorel Dragoi 2 , Eric Pabo 1 , Thorsten Matthias 1
1 Technology, EV Group Inc., Tempe, Arizona, United States, 2 Technology Development & IP, EV Group, St. Florian/Inn Austria

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3:15 PM - DD4.3
Polycrystalline Silicon-Germanium Electrode Contact Technology Improvement for MEMS Applications.

Gert Claes 1 2 , Simone Severi 1 , Stefaan Decoutere 1 , Jean-Pierre Celis 2 , Ann Witvrouw 1
1 CTI, IMEC, Leuven Belgium, 2 MTM, K.U.Leuven, Leuven Belgium

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3:30 PM - DD4.4
Three-dimensional Vertical Self-assembly of Heterogeneous Microstructures using Railed Microfluidics.

Su Eun Chung 1 , Yoonseok Jung 1 , Sunghoon Kwon 1
1 , Seoul National University, Seoul Korea (the Republic of)

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3:45 PM - *
Break

4:15 PM - DD4.5
Electrowetting-Controlled Liquid Mirrors Based on Self-Assembled Janus Tiles.

Michael Bucaro 1 , Paul Kolodner 2 , J. Ashley Taylor 3 , Alex Sidorenko 4 , Joanna Aizenberg 1 , Tom Krupenkin 3
1 School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts, United States, 2 , Bell Laboratories, Murray Hill, New Jersey, United States, 3 Mechanical Engineering, University of Wisconsin-Madison, Madison, Wisconsin, United States, 4 Chemistry & Biochemistry, University of the Sciences in Philadelphia, Philadelphia, Pennsylvania, United States

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4:30 PM - DD4.6
Self-Sealed and Self-Limited Nanochannels by E-Beam Lithography and Atomic Layer Deposition.

Sung-Wook Nam 1 , Min-Hyun Lee 1 , Seung-Hyun Lee 1 , Do-Joong Lee 1 , Stephen Rossnagel 2 , Ki-Bum Kim 1
1 Department of Materials Science and Engineering, Seoul National University, Seoul Korea (the Republic of), 2 , IBM. T. J. Watson Research Center, Yorktown Heights, New York, United States

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4:45 PM - DD4.7
Layer-by-Layer Assembly in Nanofluidic Devices.

Jonathan DeRocher 1 , Pan Mao 2 , Jun Young Kim 3 , Jongyoon Han 4 5 , Michael Rubner 3 , Robert Cohen 1
1 Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States, 2 Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States, 3 Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States, 4 Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States, 5 Biological Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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DD5: Poster Session: Devices and Fabrication
Session Chairs
Norm Sheppard
Srikar Vengallatore
Wednesday AM, December 02, 2009
Exhibit Hall D (Hynes)

9:00 PM - DD5.10
Fabrication of Microstructures with High Aspect Ratios by Anisotropic Electrochemical Etching of Al.

Tatsuro Fukushima 1 , Kazuyuki Nishio 1 , Hideki Masuda 1
1 Applied Chemistry, Tokyo Metropolitan Univ., Tokyo Japan

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9:00 PM - DD5.11
Breast Cancer Detection Through Breath Analysis by Porous SnO2 Based Gas Sensors.

Kevin Bechtold 1 , Sean Chislett 1 , Chunlei Wang 2
1 Biomedical Engineering, Florida International University, Miami, Florida, United States, 2 Mechanical and Materials Engineering, Florida International University, Miami, Florida, United States

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9:00 PM - DD5.12
A Novel Impedance Sensing Technique for Monitoring Spreading of Somatic Stem Cells.

Yiling Qiu 1 , Xin Zhang 1
1 Mechanical Engineering, Boston University, Boston, Massachusetts, United States

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9:00 PM - DD5.13
Electrodeposition of Fe-rich, FeNiCo Microcomponents for Recurve Micro-Bimorphs.

Elizabeth Podlaha 1 , Hana Kim 1 , Robert Simmons 2 , Michael Murphy 2
1 Chemical Engineering, Northeastern University, Boston, Massachusetts, United States, 2 Mechanical Engineering, Louisiana State University, Baton Rouge, Louisiana, United States

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9:00 PM - DD5.14
Package-level Multilayered Piezoelectric Micropumps for Lab-on-Chip.

Wenli Zhang 1 , Richard Eitel 1
1 Chemical and Materials Engineering Department, University of Kentucky, Lexington, Kentucky, United States

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9:00 PM - DD5.15
Liquid Encapsulation by Bonding-in-Liquid Technique.

Yoshiyuki Okayama 1 , Takeshi Ninomiya 1 , Yasuyuki Matsumoto 1 , Norihisa Miki 1
1 Mechanical Engineering, Keio University, Kanagawa Japan

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9:00 PM - DD5.16
Deposition Profile Control of Carbon Films on Patterned Substrates using a Hydrogen-assited Plasma CVD Method.

Takuya Nomura 1 , Kazunori Koga 1 4 , Masaharu Shiratani 1 4 , Yuichi Setsuhara 2 4 , Makoto Sekine 3 4 , Masaru Hori 3 4
1 Department of Electronics, Kyushu University, Fukuoka Japan, 4 , JST CREST, Tokyo Japan, 2 JWRI, Osaka University, Ibaraki, Osaka, Japan, 3 Dept. of Electrical Engineering and Computer Science, Nagoya University, Nagoya, Aichi, Japan

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9:00 PM - DD5.17
Fabrication of Multilayered Metal Oxide Hybrid Films by Layer-By-Layer Deposition of Inorganic Nanosheets.

Min-Sun Song 1 , Myong A Woo 1 , Tae Woo Kim 1 , Seong-Ju Hwang 1
1 Department of Chemistry and Nano Sciences, Center for Intelligent Nano-Bio Materials (CINBM), Ewha Womans University, Seoul Korea (the Republic of)

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9:00 PM - DD5.18
Cholesterol Sensor Based on 3-Dimensional Porous Carbon Microelectrodes Fabricated by C-MEMS Technique.

Varun Penmatsa 1 , Jung-Hoon Yang 1 , Chunlei Wang 1
1 , Florida International University, Miami, Florida, United States

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9:00 PM - DD5.19
Formation of Nanoparticle-Containing Multilayers in Nanochannels via Layer-by-Layer Assembly.

Jun Young Kim 1 , Jonathan DeRocher 2 , Pan Mao 3 , Michael Rubner 1 , Robert Cohen 2 , Jongyoon Han 4
1 Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States, 2 Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States, 3 Department of Mechanical Engneering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States, 4 Department of Electrical Engineering and Computer Science and Department of Biological Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

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9:00 PM - DD5.2
Characterization and Modeling of Electroporation Parameters of a Micro-Electroporation Biochip.

Aeraj Haque 1 4 , Mahvash Zuberi 1 3 4 , Ruben Diaz-Rivera 5 2 , David Porterfield 1 2 4
1 Agricultural and Biological Engineering, Purdue University, West Lafayette, Indiana, United States, 4 Bindley Bioscience Center, Purdue University, West Lafayette, Indiana, United States, 3 Center for Paralysis Research, Purdue University, West Lafayette, Indiana, United States, 5 Mechanical Engineering, University of Puerto Rico at Mayagüez, Mayaguez, Puerto Rico, United States, 2 Weldon School of Biomedical Engineering, Purdue University, West Lafayette, Indiana, United States

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9:00 PM - DD5.20
Control and Operation Schemes for Micro-Thermal Conductivity Detectors in Gas Chromatography.

Bradley Kaanta 1 , Hua Chen 2 , Xin Zhang 1
1 , Boston University, Boston, Massachusetts, United States, 2 , Schlumberger Doll Research, Cambridge, Massachusetts, United States

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9:00 PM - DD5.21
Defining Fine Pitch through-via Structures on Flexible Dielectric Substrates using a Laser Ablation Technique.

Pavan Samudrala 2 , Aparna Prabhakar 1 , Robert Trzcinski 1
2 , L J Gonzers Associates, Cranford, New Jersey, United States, 1 , IBM, Yorktown Heights, New York, United States

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9:00 PM - DD5.24
Fabrication of Microfluidic Hybridisation Applicator in Thermalplastic Elastomeric Materials for DNA Detection on BioFET Array.

Kebin Li 1 , Matthias Geissler 1 , Liviu Clime 1 , Emmanuel Roy 1 , Teodor Veres 1
1 , Industrial Materials Institute, Boucherville, Quebec, Canada

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9:00 PM - DD5.25
Characterization of Direct Functionalization on 3D Pyrolyzed Carbon for DNA Detecti