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2011 MRS Fall Meeting & Exhibit

November 28-December 2, 2011 | Boston

Meeting Chairs: Cammy R. Abernathy, Paul V. Braun, Masashi Kawsaki, Kathyn J. Wahl

Symposium TT : Microelectromechanical Systems--Materials and Devices V

2011-11-28   Show All Abstracts

Symposium Organizers

Christoph Eberl Karlsruhe Institute of Technology
Frank W. DelRio National Institute of Standards and Technology
Maarten P. de Boer Carnegie Mellon University
Chris Keimel GE Global Research
TT1: Devices and Processing: Si and Non-Si
Session Chairs
Frank Del Rio
Monday AM, November 28, 2011
Gardner (Sheraton)

9:30 AM - **TT1.1
Texas Instruments Digital Micro-Mirror Device: A Massively Paralleled Micro-Opto-Electro-Mechanical System (MOEMS) - Materials, Metrology and Reliability Considerations.

Patrick Oden 1
1 DLP(R) Products, Texas Instruments, Inc., Plano, Texas, United States

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10:00 AM - TT1.2
Ultrathin Large Circular Membranes with High Quality Factors.

Vivekananda Adiga 1 , Rob Ilic 1 , Rob Barton 1 , Isaac Storch 2 , Paul McEuen 2 , Jeevak Parpia 2 , Harold Craighead 1
1 applied and engineering physics, Cornell university, Ithaca, New York, United States, 2 Department of Physics, Cornell university, Ithaca, New York, United States

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10:15 AM - TT1.3
Low Profile Packaging for MEMS Aeroacoustic Sensors.

John Burns 1 , Robert White 2 , Joshua Krause 3
1 Mechanical Engineering, Tufts University, Boston, Massachusetts, United States, 2 Mechanical Engineering, Tufts University, Medford, Massachusetts, United States, 3 Mechanical Engineering, Tufts University, Medford, Massachusetts, United States

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10:30 AM - TT1.4
Piezotronic Nanowire Based Resistive Switches as Programmable Electromechanical Memories.

Wenzhuo Wu 1 , Zhong Lin Wang 1
1 School of Material Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States

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10:45 AM - TT1.5
A Detailed Study of a Novel Wafer Separation Method for Surface Sensitive MEMS Wafers.

Karl Malachowski 1 , Simone Severi 1 , Rita van Hoof 1 , Sandeep Sangameswaran 1 , Satoshi Genda 2 , Tomotaka Tabuchi 2 , Naoki Uchiyama 3 , Ann Witvrouw 1
1 , IMEC Belgium, Leuven Belgium, 2 , DISCO Hi-Tec Europe GmbH, Munich Germany, 3 , Hamamatsu Photonics K.K., Shimokanzo Iwata-City Japan

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11:00 AM - *
Break

11:30 AM - **TT1.6
Subtractive Microfabrication Processes for Metal Alloys and Ceramic Materials.

Yogesh Gianchandani 1
1 EECS Department, University of Michigan, Ann Arbor, Michigan, United States

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12:00 PM - TT1.7
Acoustic Energy: A New Tool for MEMS Manufacturing.

Don Dussault 1 , Viorel Dragoi 2
1 , Product Systems Inc., Campbell, California, United States, 2 , EV Group, Sankt Florian/Inn Austria

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12:15 PM - TT1.8
One- and Two-Photons Micro-Structuring of Polymers Containing Photoluminescent-Chromophores and Azobenzene-Moieties.

Antonio Ambrosio 1 , Pasqualino Maddalena 1 , Andrea Camposeo 2 , Marco Polo 2 , Antonio Neves 2 , Dario Pisignano 2 , Antonio Carella 3 , Fabio Borbone 3 , Antonio Roviello 3
1 , CNR-SPIN Napoli and Dipartimento di Scienze Fisiche, Università degli Studi Federico II, Napoli Italy, 2 , NNL, Istituto Nanoscienze-CNR and Dipartimento di Ingegneria dell’Innovazione, Università del Salento, Lecce Italy, 3 , Dipartimento di Chimica, Università degli Studi Federico II, Napoli Italy

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12:30 PM - TT1.9
Patterned Piezoelectric PZT Thin Films Using Non-Lithographic Ink-Jet Printing Method for MEMS Applications.

Seung-Hyun Kim 1 , Jinkee Lee 1 , Chang Young Koo 2 , Jooho Moon 3 , Angus Kingon 1
1 School of Engineering, Brown University, Providence, Rhode Island, United States, 2 R&D Center, INOSTEK Inc., Ansan, Gyeonggi, Korea (the Republic of), 3 Materials Science and Engineering, Yonsei University, Seoul Korea (the Republic of)

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12:45 PM - TT1.10
Development and Characterization of Ni-Al Superalloys for High Temperature LIGA MEMS Materials.

Devin Burns 1 , Michael Teutsch 2 , Sara Perez-Bergquist 4 , Klaus Bade 3 , Tresa Pollock 5 , Jarir Aktaa 2 , Kevin Hemker 1
1 Mechanical Engineering, Johns Hopkins University, Baltimore, Maryland, United States, 2 Institute for Material Research II (IMF II), Karlsruhe Institute of Technology (KIT), Karlsruhe Germany, 4 , Los Alamos National Laboratory, Los Alamos, New Mexico, United States, 3 Institute for Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Karlsruhe Germany, 5 Material Science, University of California, Santa Barbara, Santa Barbara, California, United States

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TT2: Experimental Techniques and Mechanical Properties
Session Chairs
Maarten de Boer
Monday PM, November 28, 2011
Gardner (Sheraton)

2:30 PM - **TT2.1
In Situ Observation and Mechanical Criterion on Interface Cracking in Nano-Components.

Takayuki Kitamura 1 , Takashi Sumigawa 1
1 Department of Mechanical Engineering & Science, Kyoto University, Kyoto, Kyoto, Japan

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3:00 PM - TT2.2
Deformation and Fracture of Single-Crystal Silicon Theta-like Specimens.

Frank DelRio 1 , Michael Gaither 1 , Richard Gates 1 , Robert Cook 1
1 Ceramics Division, National Institute of Standards and Technology, Gaithersburg, Maryland, United States

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3:15 PM - TT2.3
Fatigue Testing of Al and Cu Thin Films Using a Resonance Cantilever Bending Setup.

Sofie Burger 1 , Christoph Eberl 1 , Alexander Siegel 2 , Alfred Ludwig 2 , Oliver Kraft 1
1 Institute for Applied Materials, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Baden-Wuerttemberg, Germany, 2 Institut für Werkstoffe/Werkstoffe in der Mikrotechnik, Ruhr University of Bochum, Bochum, Nordrhein-Westfalen, Germany

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3:30 PM - TT2.4
Indentation and Scratch Device with In Situ Raman and Optical Capabilities.

Yvonne Gerbig 1 , Chris Michaels 2 , Aaron Forster 3 , Robert Cook 1
1 Ceramics Division, NIST, Gaithersburg, Maryland, United States, 2 Surface and Microanalysis Science, NIST, Gaithersburg, Maryland, United States, 3 Materials and Construction Research Division, NIST, Gaithersburg, Maryland, United States

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3:45 PM - TT2.5
A High Strength Creep Resistant Alloy for MEMS Applications.

Andrew Detor 1 , Leon Beha 1 , Christopher Keimel 1
1 , General Electric Global Research, Niskayuna, New York, United States

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4:00 PM - *
Break

4:30 PM - **TT2.6
A MEMS Stage for Testing Nano to Micro Scale Samples.

Taher Saif 1
1 Mechanical Science and Engineering Department, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States

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5:00 PM - TT2.7
Analysis of Thin-Film Ni-Ti-Hf Shape Memory Alloys by Combinatorial nanoCalorimetry.

Patrick McCluskey 1 , Yahya Motemani 1 2 , Chunwang Zhao 1 3 , Ming Tan 2 , Joost Vlassak 1
1 School of Engineering and Applied Sciences, Harvard University, Cambridge, MA, Massachusetts, United States, 2 School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore Singapore, 3 College of Science, Inner Mongolia University of Technology, Hohhot China

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5:15 PM - TT2.8
Scalable Fabrication of Folded Carbon Nanotube Microstructures by Iteration of CVD Growth and Capillary Densification.

Michael De Volder 1 2 , Sameh Tawfick 1 , Sei Jin Park 1 , A. John Hart 1
1 , University of Michigan, Ann Arbor, Michigan, United States, 2 , IMEC, Leuven Belgium

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5:30 PM - TT2.9
Fabrication of Phonon Transducers on Micromachined Silicon Structures for Investigating Nanoscale Thermal Transport.

Obafemi Otelaja 1 , Jared Hertzberg 1 , Richard Robinson 1
1 Materials Science and Engineering, Cornell University, Ithaca, New York, United States

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5:45 PM - TT2.10
Photo-Thermal Spectroscopic Imaging of MEMS Structures with Sub Micron Spatial Resolution.

Robert Furstenberg 1 , Christopher Kendziora 1 , Michael Papantonakis 1 , Viet Nguyen 1 , R. McGill 1
1 , NAVAL RESEARCH LABORATORY, WASHINGTON, District of Columbia, United States

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2011-11-29   Show All Abstracts

Symposium Organizers

Christoph Eberl Karlsruhe Institute of Technology
Frank W. DelRio National Institute of Standards and Technology
Maarten P. de Boer Carnegie Mellon University
Chris Keimel GE Global Research
TT5: Poster Session: MEMS
Session Chairs
Keimel Chris
Tuesday PM, November 29, 2011
Exhibition Hall C (Hynes)

1:00 AM - TT5.10
TRANSFERRED TO TT4.2

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TT3: ADL, Complex Lithography and Adhesion
Session Chairs
Chris Eberl
Tuesday AM, November 29, 2011
Gardner (Sheraton)

9:30 AM - **TT3.1
Atomic Layer Deposition for N/MEMS Devices and Systems.

Victor Bright 1
1 Mechanical Engineering, University of Colorado at Boulder, Boulder, Colorado, United States

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10:00 AM - TT3.2
Micro-Assembly Using Elastomeric Surfaces with Switchable Dry Adhesion.

Seok Kim 1 , John Rogers 2
1 Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States, 2 Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States

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10:15 AM - TT3.3
Processing-Structure Relationships for Ultra-Violet Assisted Direct-Write Fabrication Technique and Potential Applications.

Matthew Becker 1 2 , Daniel Therriault 1 2
1 Mechanical Engineering, École Polytechnique de Montréal, Montreal, Quebec, Canada, 2 Center for Applied Research on Polymers and Composites, École Polytechnique de Montréal, Montreal, Quebec, Canada

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10:30 AM - TT3.4
Actuation of Liquid Metal Droplets Using Electrowetting-on-Dielectric (EWOD) for Reconfigurable Antenna Applications.

Engin Cagatay 1 , Yasin Damgaci 2 , Bedri Cetiner 2 , Necmi Biyikli 1
1 UNAM - Institute of Materials Science and Nanotechnology, Bilkent University, Ankara Turkey, 2 Electrical and Computer Engineering, Utah State University, Logan, Utah, United States

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10:45 AM - *
Break

11:15 AM - **TT3.5
Characterizing Adhesion of Micro- and Nano-Scale Contacts.

Kevin Turner 1
1 Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, Pennsylvania, United States

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11:45 AM - TT3.6
Contamination Thresholds of Pt- and RuO2-Coated Microrelays.

Vitali Brand 1 , Michael Baker 2 , Maarten de Boer 1
1 Mechanical Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, United States, 2 MEMS, Sandia National Labs, Albuquerque, New Mexico, United States

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12:00 PM - TT3.7
Study of Electronic Nano-Size Contact Mechanism in Au-Based MEMS Contact Switches.

Yinxuan Yang 1 , Scott Hoffmann 1 , Benjamin Gaddy 2 , Xiaoyin Ji 2 , Christopher Freeze 2 , Douglas Irving 2 , Angus Kingon 1
1 Engineering, Brown University, Providence, Rhode Island, United States, 2 Materials Science & Engineering, North Carolina State University, Raleigh, North Carolina, United States

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12:15 PM - **TT3.8
Probing Interfacial Contact via MEMS-Based Microinstrumentation.

Roya Maboudian 1
1 Chemical & Biomolecular Eng, UC Berkeley, Berkeley, California, United States

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TT4: Contact Mechanics and Active MEMS Materials
Session Chairs
Keimel Chris
Tuesday PM, November 29, 2011
Gardner (Sheraton)

2:30 PM - **TT4.1
Contacts for MEMS and NEMS Switches.

Nicol McGruer 1 2 , George Adams 2 1
1 Electrical and Computer Engineering, Northeastern University, Boston, Massachusetts, United States, 2 Mechanical and Industrial Engineering, Northeastern University, Boston, Massachusetts, United States

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3:00 PM - TT4.2
Simulated Nano-Indentation Testing of Au-Ni Contacts for RF-MEMS Switches.

Benjamin Gaddy 1 , Yinxuan Yang 2 , Angus Kingon 2 , Douglas Irving 1
1 Materials Science & Engineering, North Carolina State University, Raleigh, North Carolina, United States, 2 Division of Engineering, Brown University, Providence, Rhode Island, United States

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3:15 PM - TT4.3
Effect of Dry Cleaning on Device Characteristics in MLC Nand Flash Memory.

Young-Taek Song 1
1 , Hynix Semoiconductor Inc., Icheon-si Korea (the Republic of)

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3:30 PM - TT4.4
Origin of the Tetragonal Distortion in Fe–Pd Magnetic Shape Memory Alloys.

Ingo Opahle 1 2 3 , Klaus Koepernik 2 , Ulrike Nitzsche 2 , Manuel Richter 2
1 , Goethe-Universität Frankfurt, Frankfurt/Main Germany, 2 , IFW Dresden, Dresden Germany, 3 ICAMS, Ruhr-Universität Bochum, Bochum Germany

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3:45 PM - TT4.5
Non-Stoichiometric Lead Free (K0.5Na0.5)1-xNbxO3 and Its Electromechanical Behaviour.

Maria Costa 1 , Muhammad Rafiq 1 , Paula Vilarinho 1
1 , University of Aveiro, Aveiro Portugal

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4:00 PM - *
Break

4:30 PM - TT4.6
Metal-Oxide-Metal (MOM) Diode Optimization for Heat Energy Recovery.

David Wood 1 , Linzi Dodd 1 , Andrew Gallant 1
1 School of Engineering and Computing Sciences, Durham University, Durham United Kingdom

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4:45 PM - TT4.7
Harmonic Excitation of Surface Acoustic Wave Devices on Gallium Nitride for Chemical Sensor Applications.

J. Justice 1 , K. Lee 1 , O. Mukdadi 2 , D. Korakakis 1
1 Lane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, West Virginia, United States, 2 Department of Mechanical and Aerospace Engineering, West Virginia University, Morgantown, West Virginia, United States

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5:00 PM - TT4.8
Ultrananocrystalline Diamond (UNCD) Films as Fast Charging/Discharging Dielectric Layers to Enable Robust Commercial RF MEMS Capacitive Switches without Dielectric Charging Failure.

Orlando Auciello 1 2 , Charles Goldsmith 3 , Anirudha Sumant 2 , Suresh Sampath 4 , Chris Gudeman 4 , Wei Wang 5 , James Hwang 5 , Hongjun Zeng 6 , John Carlisle 6
1 Materials Science, Argonne National Laboratory, Argonne, Illinois, United States, 2 Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois, United States, 3 , MEMtronics Corporation, Plano, Texas, United States, 4 , Innovative Micro Technology, Goleta, California, United States, 5 Electrical Engineering, Lehigh University, Bethlehem, Pennsylvania, United States, 6 , Advanced Diamond Technology, Romeoville, Illinois, United States

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5:15 PM - TT4.9
Understanding Interfacial Structure of Transient Liquid Phase Bonded Cu Microchannel Devices.

Ke Chen 1 , Wen Meng 1 , Fanghua Mei 2
1 Mechanical Engineering, Louisiana State University, Baton Rouge, Louisiana, United States, 2 , Enervana Technologies LLC, Baton Rouge, Louisiana, United States

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5:30 PM - TT4.10
The Development of BZT-BCT Lead-Free Thin Films for Piezoelectric Applications.

Baris Celtikci 1 , Ahmet Ozenbas 1
1 Metallurgical and Materials Engineering, Middle East Technical University, Ankara Turkey

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5:45 PM - TT4.11
Method for Achieving CMOS MEMS Accelerometers with Excellent Built-in Thermal Stability and Reduced Charge Damage.

Klaus Hsu 1 , Siew Seong Tan 1
1 Institute of Electronics Engineering, National Tsing Hua University, Hsinchu Taiwan

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TT5: Poster Session: MEMS
Session Chairs
Keimel Chris
Tuesday PM, November 29, 2011
Exhibition Hall C (Hynes)

9:00 PM - TT5.1
Large Area Electrodeposited Nickel Single Crystal Substrates for Microelectromechanical Systems.

Meifang Li 1 , Deepa Vairavapandian 1 , Eric Chason 1
1 Division of Engineering, Brown University, Providence, Rhode Island, United States

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9:00 PM - TT5.11
The Role of Trapped Contaminant Pockets in the Degradation of Ohmic Contact in RF-MEMS Switches.

Christopher Freeze 1 , Yinxuan Yang 2 , Angus Kingon 2 , Douglas Irving 1
1 Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina, United States, 2 , Brown University, Providence, Rhode Island, United States

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9:00 PM - TT5.12
Ferroelectric and Dielectric Response of RF Sputtered Sr3Bi4Ti6O21 Thin Films.

Maria Costa 1 , Venkata Saravanan 1 , Erik Pandiana 1 , Isabel Miranda Salvado 1
1 , University of Aveiro, CICECO, Aveiro Portugal

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9:00 PM - TT5.14
Coarse-Grained Molecular Dynamics Simulation of Epoxy-Based Chemically-Amplified Resist for MEMS Application.

Hiromasa Yagyu 1 , Yoshikazu Hirai 2 , Akio Uesugi 2 , Yoshihide Makino 2 , Koji Sugano 2 , Toshiyuki Tsuchiya 2 , Osamu Tabata 2
1 R&D Division, Mitsuboshi Belting Ltd., Kobe Japan, 2 Department of Micro Engineering, Kyoto University, Kyoto Japan

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9:00 PM - TT5.15
In Situ TEM Observation of AlGaN/GaN HEMT Degradation under Applied DC Bias.

Andrew Lang 1 , Chris Winkler 1 , Jen Sloppy 1 , Craig Johnson 1 , Mitra Taheri 1
1 Materials Science and Engineering, Drexel University, Philadelphia, Pennsylvania, United States

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9:00 PM - TT5.16
Lensless Imaging for Simultaneous Space-Constrained Microfluidic Sperm Sorting.

Xiaohui Zhang 1 , Imran Khimji 1 , Hooman Safaee 1 , Paolo Catalano 1 , Umut Gurkan 1 , Aida Nureddin 1 , Raymond Anchan 2 , Emre Kayaalp 3 , Richard Maas 4 , Utkan Demirci 1 5
1 Center for Bioengineering, Department of Medicin, Brigham and Women’s Hospital, Harvard Medical School, Boston, Massachusetts, United States, 2 Center for Infertility and Reproductive Surgery, Obstetrics Gynecology and Reproductive Biology, Brigham and Women’s Hospital, Harvard Medical School, Boston, Massachusetts, United States, 3 Department of Obstetrics and Gynecology, Jamaica Hospital Medical Center, Queens, Massachusetts, United States, 4 Division of Genetics, Department of Medicine, Brigham and Women’s Hospital, Harvard Medical School, Boston, Massachusetts, United States, 5 Harvard-MIT Health Sciences and Technology, Harvard-MIT Health Sciences and Technology, Cambridge, Massachusetts, United States

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9:00 PM - TT5.17
Fabrication and Performance of Beryllium Copper Micro LGA Contact Array by Cosputtering on Sacrificial Polymer Template, 3D Lithography and Final Thermal Processing.

Gareth Hougham 1 , Gerard McVicker 1 , Frank Libsch 1 , Xiaoxiong Gu 1 , Pavan Samudrala 1 , Jay Pogemiller 1 , Mike Gaynes 1 , Maurice Mason 1 , Peter Sorce 1 , Eugene O'Sullivan 1 , Sung Kang 1 , Robert Meinel 1 , Marinus Hopstaken 1 , Michael Gordon 1 , Michael Gedeon 4 , Jimmy Johnson 4 , Heather Wilkins 3 , Hongwei Xu 3 , Janet Okada 5 , Leah Langsdorf 2 , Chuan Yue 6 , Allison Tripp 6 , Jeffrey Mason 6 , Kurt Swanson 7
1 , IBM, T.J.Watson Research Center, Yorktown Heights, New York, United States, 4 , Materion Brush Performance Alloys, Mayfield Heights, Ohio, United States, 3 , General Atomics, San Diego, California, United States, 5 , Dow Chemical, Marlborough, Massachusetts, United States, 2 , Promerus, Bakelite Sumitomo, Brecksvile, Ohio, United States, 6 , TE Connectivity, Norwood, Massachusetts, United States, 7 , Hutchinson Technology, Hutchinson, Minnesota, United States

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9:00 PM - TT5.2
Characterization and Application of Reactively Sputtered Iron Oxide Thin Films.

Xiaoning Wang 1 , Congshun Wang 1 , Stephan Anderson 2 , Xin Zhang 1
1 Mechanical Engineering, Boston Univ, Boston, Massachusetts, United States, 2 Radiology, Boston University, Boston, Massachusetts, United States

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9:00 PM - TT5.3
Evolution of Hole Patterns by Surface Diffusion on Si(001).

Koichi Sudoh 1 , Reiko Hiruta 2 , Hitoshi Kuribayashi 2
1 The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka, Japan, 2 , Fuji Electric Co., Ltd., Matsumoto, Nagano, Japan

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9:00 PM - TT5.4
Fe(III)Porphyrin Functionalized Piezo-Resistive SU-8 Micro-Cantilever as a CO Sensor.

Vijaya Bhaskar Reddy 1 , Mrunal Khaderbad 2 , Sahir Gandhi 2 , Sheetal Patil 2 , Harshil Raval 2 , K. Narasaiah Chetty 3 , K. Govindha Rajalu 3 , P. C. Krishnama Chary 1 , M. Ravikanth 4 , V. Ramgopal Rao 2
1 Department of Mechanical Engieering, Sri Kalahasteeswara Institute of Technology, Chittoor (Dt.), Andhra Pradesh, India, 2 Centre of Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India, 3 Department of Mechanical Engineering, JNTU, Anantapur, Andhra Pradesh, India, 4 Department of Chemistry, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India

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9:00 PM - TT5.5
Digitized Nanobiomedical Device Based on Nanowell Array Electrodes.

Joo-kyung Lee 1 , InRock Hwang 1 , Ah Young Kim 1 , BaeHo Park 1 , HeaYeon Lee 2 1 , Lim Seo Yul 1 , Kim Mi Ran 1
1 Division of Quantum Phases and Devices, Konkuk University, Seoul Korea (the Republic of), 2 The Institute of Scientific and Industrial Research, Osaka University, Osaka Japan

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9:00 PM - TT5.6
Soft to Hard Magnetization Transition in the Heusler Compounds Mn3−xCoxGa.

Vajiheh Alijani Zamani 1 , Juergen Winterlik 1 , Gerhard Fecher 1 , Claudia Felser 1
1 Institute of Inorganic Chemistry and Analytical Chemistry , Johannes Gutenberg University, Mainz, Rhineland-Palatinate, Germany

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9:00 PM - TT5.7
Lead-Free (Na0.5,K0.5)(Nb0.95,Ta0.05)O3-BiFeO3 Piezoelectric Thin Films for MEMS Vibration Energy Harvesting Devices.

Alice Leung 1 , Seung-Hyun Kim 1 , Lindsay Kuhn 1 , Wenyan Jiang 1 , Chang Young Koo 2 , Dong-Joo Kim 3 , Angus Kingon 1
1 School of Engineering, Brown University, Providence, Rhode Island, United States, 2 R&D Center, INOSTEK Inc., Ansan, Gyeonggi, Korea (the Republic of), 3 Materials Research and Education Center, Auburn University, Auburn, Alabama, United States

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9:00 PM - TT5.8
Multi-Scaling Simulation Study of the Influence of Contaminant Films Interaction Strength on Performance of Ohmic RF MEMS.

Xiaoyin Ji 1 , Yinxuan Yang 2 , Angus Kingon 2 , Douglas Irving 1
1 Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina, United States, 2 School of Engineering, Brown University, Providence, Rhode Island, United States

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9:00 PM - TT5.9
The Suitability of Proton Beam Writing as a Tool to Fabricate MEMS Devices in Semiconductors.

Martina Schulte-Borchers 1 , Ulrich Vetter 1 , Hans Hofsaess 1
1 II. Physikalisches Institut, Georg-August-Universitaet Goettingen, Goettingen Germany

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2011-11-30   Show All Abstracts

Symposium Organizers

Christoph Eberl Karlsruhe Institute of Technology
Frank W. DelRio National Institute of Standards and Technology
Maarten P. de Boer Carnegie Mellon University
Chris Keimel GE Global Research
TT6: Bio MEMS and Sensors
Session Chairs
Maarten de Boer
Wednesday AM, November 30, 2011
Gardner (Sheraton)

9:30 AM - **TT6.1
Micromachined CMOS Probes for High-Density Intracortical Recording: Materials and Technologies.

Oliver Paul 1 , Patrick Ruther 1 , Hercules Neves 2
1 IMTEK, University of Freiburg, Freiburg Germany, 2 , IMEC, Leuven Belgium

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10:00 AM - TT6.2
Controlled Release of Selectively Captured Label-Free Cells in Thermoresponsive Microfluidic Channels.

Umut Gurkan 1 , Tarini Anand 1 , David Elkan 1 , Altug Akay 1 , Hasan Keles 1 , Utkan Demirci 1
1 Center for Biomedical Engineering, Brigham and Women’s Hospital, Harvard Medical School, Harvard-MIT Health Sciences and Technology, Cambridge, Massachusetts, United States

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10:15 AM - TT6.3
Rapid, Label-Free Sample Preparation Microchip for Sorting Blood Components at the POC.

Shuqi Wang 1 , Dusan Sarenac 1 , Francoise Giguel 2 , Daniel Kuritzkes 3 , Utkan Demirci 1
1 Harvard-MIT Health Sciences and Technology, Harvard-MIT Health Sciences and Technology, Cambridge, Massachusetts, United States, 2 Infectious Diseases Unit, Massachusetts General Hospital, Boston, Massachusetts, United States, 3 Harvard Medical School, Harvard University, Cambridge, Massachusetts, United States

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10:30 AM - TT6.4
A Novel High Yield Microfabrication Process and Porphyrin SAM Functionalization for Polymeric Piezoresistive Microcantilevers for Biochemical Sensing.

V. Seena 1 , Prasenjit Ray 1 , Rohit Pandharipande 1 , Prakash Apte 1 , Ramgopal Rao 1
1 Centre for Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India

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10:45 AM - TT6.5
PVDF Microbelt for Harvesting Energy from Respiration.

Chengliang Sun 1 , Jian Shi 1 , Matthew Starr 1 , Xudong Wang 1
1 , University of Wisconsin - Madison, Madison, Wisconsin, United States

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11:00 AM - *
Break

11:30 AM - TT6.6
Novel Integration of Nanofluidic and Nanophotonics for Single Molecule Detection.

Mehrsa Raeiszadeh 1 , Ehsan Shah Hosseini 2 , Ali Adibi 2 , Paul Kohl 1
1 Chemical and Biomolecular Engineering, Georgia Institute of Technolog, Atlanta, Georgia, United States, 2 Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States

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11:45 AM - TT6.7
Electrowetting on Dielectric for Poro-Vascular Composite Skins with Active Surface Morphology.

Marriner Merrill 1 , Kristin Metkus 2 , James Thomas 1
1 Multifunctional Materials, Code 6350, Naval Research Laboratory, Washington, District of Columbia, United States, 2 , NOVA Research, Inc., Alexandria, Virginia, United States

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12:00 PM - TT6.8
Simulation of Surface Effects in the Dissipative Dynamics of Silicon Nanoresonators.

Behrouz Shiari 1
1 EECS, University of Michigan, Ann Arbor, Michigan, United States

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12:15 PM - TT6.9
Low Power Consumption MEMS Microhotplates for the Integration of Sensing Nanowires.

Roman Jimenez-Diaz 1 , Jordi Sama 1 , J. Daniel Prades 1 , Albert Romano-Rodriguez 1 , Francisco Hernandez-Ramirez 2 , Joaquin Santander 3 , Carlos Calaza 3 , Luis Fonseca 3 , Carles Cane 3
1 , University of Barcelona, Barcelona Spain, 2 , IREC, Catalonia Institute for Energy Research, Barcelona Spain, 3 , Instituto de Microelectronica de Barcelona, IMB-CNM-CSIC, Bellaterra Spain

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12:30 PM - TT6.10
Size Effect of Flexible Proof Mass on the Mechanical Behavior of MEMS-Scale Cantilevers for Energy Harvesting Applications.

Miso Kim 1 2 , Seungbum Hong 2 , Dean Miller 2 , John Dugundji 1 , Brian Wardle 1
1 , MIT, Cambridge, Massachusetts, United States, 2 Materials Science Divsion, Argonne National Laboratory, Lemont, Illinois, United States

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