2019 MRS Fall Meeting & Exhibit

Symposium MT05-Emerging Prospects and Capabilities in Focused Ion-Beam Technologies and Applications

Focused ion-beam (FIB) based tools have become invaluable in materials science and engineering for their capabilities in micro-/nanofabrication, imaging and spectroscopy. Source types include Liquid Metal Ion Sources (LMIS), Gas Field Ionization Sources (GFIS), plasma ion sources and laser-cooled sources, offering an ever increasing choice of focused ion species for a wide range of applications. Modification of materials by direct-write nanofabrication using milling, deposition and implantation is employed extensively in both industry and academia. Novel in-situ combinatorial techniques present new routes for exploring and quantifying materials at the nanoscale, for example through coupling to Secondary Ion Mass Spectrometry (SIMS); and through correlative imaging using ion, electron, light and x-ray based techniques, culminating in truly interdisciplinary work. This symposium aims to provide a forum for exchange on a variety of emerging technologies and applications in this area.

A broad range of topics will be addressed, with particular focus on recent technological advancements, concepts for novel ion sources, frontiers in nanofabrication, direct-write atomic and chemical disordering, in-situ platforms (e.g. heating, environmental cells), in-situ multimodal analysis, slice-and-image tomography and correlative microscopy, advances in computational techniques for data analysis, and novel simulation codes. Reflecting the interdisciplinary nature of this field, results pertaining to a wide variety of materials, including 2D materials, semiconductors, superconductors, ferroelectric and magnetic materials, polymers, and biological samples will be presented and discussed.

Topics will include:

  • Frontiers in nanofabrication
  • Localized property engineering and irradiation effects
  • FIB-based analytics: Correlative imaging and multimodal analysis
  • FIB-based solutions for biological materials
  • FIB applications in electronics
  • In-situ FIB platforms
  • Novel ion sources
  • Computational techniques
  • A tutorial complementing this symposium is tentatively planned.

Invited Speakers:

  • Ed Bielejec (Sandia National Laboratories, USA)
  • Rosa Córdoba (University of Valencia, Spain)
  • Anne Delobbe (Orsay Physics, France)
  • Jason Fowlkes (Oak Ridge National Laboratory, USA)
  • Jacques Gierak (University of Paris-Saclay, France)
  • Christelle Guillermier (Carl Zeiss, USA)
  • Songkil Kim (Pusan National University, Republic of Korea)
  • Lasse Kling (Helmholtz Zentrum Berlin for Materials and Energy, Germany)
  • Arkady Krasheninnikov (Helmholtz-Zentrum Dresden-Rossendorf, Germany)
  • Hao Li (University of California, Riverside, USA)
  • Lane Martin (University of California, Berkeley, USA)
  • Paul Mazarov (Raith, Germany)
  • Johann Michler (Swiss Federal Laboratories for Materials Science and Technology, Switzerland)
  • Olga Ovchinnikova (Oak Ridge National Laboratory, USA)
  • Mike Phaneuf (Fibics Inc., Canada)
  • Miroslava Schaffer (Max Planck Institute of Biochemistry, Germany)
  • Keana Scott (National Institute of Standards and Technology, USA)
  • Andrew Smith (Kleindiek, Germany)
  • John Thong (National University of Singapore, Singapore)
  • Tom Wirtz (Luxembourg Institute of Science and Technology, Luxembourg)
  • Hongzhou Zhang (Trinity College Dublin, Ireland)

Symposium Organizers

Frances Allen
University of California, Berkeley

Alex Belianinov
Oak Ridge National Laboratory

Silke Christiansen
Helmholtz Zentrum Berlin für Materialien und Energie

Shane Cybart
University of California, Riverside

Publishing Alliance

MRS publishes with Springer Nature