Meetings & Events

 

2015 MRS Spring Meeting Logo2015 MRS Spring Meeting & Exhibit

April 6-10, 2015 | San Francisco
Meeting Chairs: Artur Braun, Hongyou Fan, Ken Haenen, Lia Stanciu, Jeremy A. Theil



Symposium OO : Metal-Assisted Chemical Etching of Silicon and Other Semiconductors

2015-04-07   Show All Abstracts

Symposium Organizers

Owen Hildreth, Arizona State University
Zhipeng Huang, Jiangsu University
Xiuling Li, University of Illinois
Konrad Rykaczewski, Arizona State University
OO1: Fundamentals of Metal-Assisted Chemical Etching I: History, Chemistry, Applications
Session Chairs
Zhipeng Huang
Owen Hildreth
Tuesday PM, April 07, 2015
Moscone West, Level 3, Room 3007

2:30 AM - *OO1.01
The Origin, Basic Principle, Development and Current Status of Metal-Assisted Chemical Etching of Silicon

Kui-Qing Peng 1

1Beijing Normal University Beijing China

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3:00 AM - OO1.02
Stoichiometry and Mechanism of Metal Assisted Etching of Si in V2O5 + HF and HOOH + HF Solutions

Kurt W Kolasinski 4 William B Barclay 1 2 Yu Sun 3 Mark Aindow 3

1West Chester University West Chester United States2University of Maine Orono United States3University of Connecticut Storrs United States4West Chester University West Chester United States

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3:15 AM - *OO1.03
Effects of Etch Chemistry on Metal Assisted Chemical Etching of Silicon Using Patterned Metal Structures

Carl Thompson 1

1Massachusetts Institute of Technology Cambridge United States

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3:45 AM - OO1.04
Catalyst Motion in Metal-Assisted Chemical Etching

Owen Hildreth 1

1Arizona State University Tempe United States

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4:00 AM -
BREAK

OO2: Etching III-V Semiconductor Compounds
Session Chairs
Xiuling Li
Owen Hildreth
Tuesday PM, April 07, 2015
Moscone West, Level 3, Room 3007

4:30 AM - *OO2.01
Chemical Sensing with the Schottky Barrier at the Pt-Gallium Nitride Interface in Porous GaN Formed by Metal-Assisted Chemical Etching

Paul W. Bohn 1

1University of Notre Dame Notre Dame United States

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5:00 AM - OO2.02
Black GaAs

Paola Lova 1 2 Valentina Robbiano 3 Annalisa Bruno 1 2 Franco Cacialli 3 Davide Comoretto 4 Cesare Soci 2

1Nanyang Technological University Singapore Singapore2Nanyang Technological University Singapore Singapore3University College London London United Kingdom4Universitagrave; degli studi di Genova Genova Italy

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5:15 AM - OO2.03
Metal-Assisted Etching of Ge Surfaces in Water: From Pit Formation to Flattening

Kenta Arima 1 Tatsuya Kawase 1 Atsushi Mura 1 Kentaro Kawai 1 Yasuhisa Sano 1 Kazuto Yamauchi 1 Mizuho Morita 1

1Osaka University Osaka Japan

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5:30 AM - OO2.04
Nano- and Micro-Textured Gallium Phosphide by Metal-Assisted Chemical Etching

Jaehoon Kim 1 Seungtaeg Oh 1 Minhyung Cho 1 Jihun Oh 1

1Korea Advanced Institute of Science and Technology (KAIST) Daejeon Korea (the Republic of)

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2015-04-08   Show All Abstracts

Symposium Organizers

Owen Hildreth, Arizona State University
Zhipeng Huang, Jiangsu University
Xiuling Li, University of Illinois
Konrad Rykaczewski, Arizona State University
OO4: Applications and Fabrication II: Nanowires, Photovoltaics/Light-Harvesting, Optics, Sensors
Session Chairs
Owen Hildreth
Xiuling Li
Zhipeng Huang
Wednesday PM, April 08, 2015
Moscone West, Level 2, Room 2008

2:30 AM - *OO4.01
Design Principles for Highly-Efficient Nanostructured Si Solar Cells Made by Metal-Assisted Chemical Etching

Jihun Oh 1 Hao-Chih Yuan 2 Howard M. Branz 2

1Korea Advanced Institute of Technology (KAIST) Daejon Korea (the Republic of)2National Renewable Energy Laboratory Golden United States

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3:00 AM - *OO4.02
Nano Etching via Metal-Assisted Chemical Etching (MaCE) for through Silicon via (TSV) Stacked 3D Integrated Devices( ICs) and 3D Functional Filling Applications

Owen Hildreth 1 L. Li 1 Ching Ping Wong 2

1Georgia Institute of Technology Atlanta United States2The Chinese University of Hong Kong Hong Kong Hong Kong

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3:30 AM - OO4.03
Nanowire Decorated Ultrathin Single-Crystalline Silicon for Photovoltaic Devices

Pantea Aurang 1 2 Wisnu Hadibrata 1 2 Selcuk Yerci 1 2 Rasit Turan 1 2 3 Husnu Emrah Unalan 1 2 4

1Middle East Technical University Ankara Turkey2Middle East Technical University Ankara Turkey3Middle East Technical University Ankara Turkey4Middle East Technical University Ankara Turkey

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3:45 AM - OO4.04
Combining Self-Assembly and Metal Assisted Chemical Etching to Create 3D Metal Structures embedded into silicon

Konrad Rykaczewski 1 Owen Hildreth 1

1ASU Tempe United States

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4:00 AM -
BREAK

OO5: Panel: Outlook and Future of Metal-Assisted Chemical Etching
Session Chairs
Owen Hildreth
Zhipeng Huang
Xiuling Li
Konrad Rykaczewski
Wednesday PM, April 08, 2015
Moscone West, Level 2, Room 2008

4:30 AM - OO5.01
Outlook and Opportunities for Future Work in Metal-Assisted Chemical Etching

Owen Hildreth 1 Zhipeng Huang 3 Xiuling Li 2 Konrad Rykaczewski 1

1Arizona State University Tempe United States2University of Illinois Champaign United States3Jiangsu Univ Zhenjiang China

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4:45 AM -
Panel Discussion

OO6: Poster Session: Metal-Assisted Chemical Etching
Session Chairs
Owen Hildreth
Konrad Rykaczewski
Wednesday PM, April 08, 2015
Marriott Marquis, Yerba Buena Level, Salon 7/8/9

9:00 AM - OO6.01
Engineering the Light-Emitting and Light-Harvesting Properties of Nanotextured Doped Silicon

Chia-Yun Chen 1 Yu-Rui Liu 1 Po-Hsuan Hsiao 1

1National Chi Nan University Nantou Taiwan

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9:00 AM - OO6.02
Decoupling the Two-Step Redox Reaction in Metal-Assisted Chemical Etching via Bilayer Structures

Lingyu Kong 1 2 3 Sing Yang Chiam 3 Wai Kin Chim 1

1National University of Singapore Singapore Singapore2NUS Graduate School for Integrative Sciences and Engineering Singapore Singapore3Institute of Materials Research and Engineering Singapore Singapore

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9:00 AM - OO6.03
Towards Scalable Single-Crystalline Thin Silicon Manufacturing via Metal-Assisted Chemical Etching

Thomas Hymel 1 Ruby Lai 1 Vijay Narasimhan 1 Shuang Wang 1 Yi Cui 1

1Stanford University Stanford United States

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9:00 AM - OO6.04
Novel Catalytic Etching Process for Ge Nanowires Fabrication

S.J Rezvani 2 Nicola Pinto 2 Natascia De Leo 1 Diego Chiabrando 1 Luca Drsquo;Ortenzi 1 Angelica Chiodoni 3 Luca Boarino 1

1Istituto Nazionale di Ricerca Metrologica Torino Italy2University of Camerino Camerino Italy3Istituto Italiano di Tecnologia Turin Italy

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9:00 AM - OO6.05
Mechanistic Characteristics of Metal-Assisted Chemical Etching in GaAs

Ho-Yuen Cheung 1 Hao Lin 1 SenPo Yip 1 Guofa Dong 1 Chun-Yuen Wong 1 Johnny Chung Yin Ho 1

1City Univ of Hong Kong Hong Kong Hong Kong

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9:00 AM - OO6.06
Optical, Hydrophobic and Plasmonic Properties of Pure and Ag-Decorated Si Nanowire Arrays of Bimodal Size Distribution

Nikolaos Pliatsikas 1 Dmitrios Kalamakis 3 Spyros Kassavetis 4 Nikolaos Kalfagiannis 2 George Vourlias 3 Eleni Pavlidou 3 Demosthenes Koutsogeorgis 2 Panos A. Patsalas 3

1Aristotle Univ of Thessaloniki Thessaloniki Greece2Nottingham Trent Univ Nottingham United Kingdom3Aristotle University Thessaloniki Greece4University of Ioannina Ioannina Greece

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9:00 AM - OO6.07
Hierarchical Silicon Nanostructured Arrays via Metal-Assisted Chemical Etching

Hao Lin 1 Ming Fang 1 SenPo Yip 1 Guofa Dong 1 Johnny Chung Yin Ho 1

1City Univ of Hong Kong Hong Kong Hong Kong

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OO3: Applications and Fabrication I: Nanowires, Photovoltaics/Light-Harvesting, Optics, Sensors
Session Chairs
Owen Hildreth
Konrad Rykaczewski
Wednesday AM, April 08, 2015
Moscone West, Level 2, Room 2008

11:30 AM - *OO3.01
Metal Assisted Chemical Etching for X-Ray Optics Fabrication

Anne Sakdinawat 1 Chieh Chang 1 Richard C. Tiberio 2 Michael J. Rooks 3 Clifford Knollenberg 2 Elizabeth A. Dobisz 4 Sharon R. Oh 1 Jeongwon Park 1

1SLAC National Accelerator Laboratory Menlo Park United States2Stanford University Stanford United States3Yale University New Haven United States4HGST San Jose United States

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12:00 PM - OO3.02
Chemi-Transistor Sensors Based on Composite Silicon/Gold Nanostructures Prepared by Metal-Assisted Etching

Michela Sainato 1 Lucanos M. Strambini 1 Simona Rella 2 Elisabetta Mazzotta 2 Giuseppe Barillaro 1

1University of Pisa Pisa Italy2Universitagrave; del Salento Lecce Italy

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12:15 PM - *OO3.03
Direct Imprinting of 3D Porous Silicon Nanostructures with Metal-Assisted Chemical Etching

Bruno P Azeredo 1 Kyle Jacobs 1 Arik Avagyan 1 Yu-wei Lin 1 Keng H Hsu 2 Placid M Ferreira 1

1University of Illinois at Urbana-Champaign Urbana United States2Arizona State University Tempe United States

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12:45 PM - OO3.04
Fabrication of Vertical Silicon Nanotube Arrays Using Metal-Assisted Chemical Etching

Hyeonho Jeong 1 Ji Hun Choi 1 JungHyung Lee 2 Cheolkyu Bok 2 Seok-Hee Lee 1 Seunghyup Yoo 1

1Korea Advanced Institute of Science and Technology (KAIST) Daejeon Korea (the Republic of)2SK Hynix Icheon Korea (the Republic of)

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