Meetings & Events

 

2015 MRS Spring Meeting Logo2015 MRS Spring Meeting & Exhibit

April 6-10, 2015 | San Francisco
Meeting Chairs: Artur Braun, Hongyou Fan, Ken Haenen, Lia Stanciu, Jeremy A. Theil



Symposium QQ : Plasma-Based Materials Science and Engineering

2015-04-07   Show All Abstracts

Symposium Organizers

Cesar Clavero, Intermolecular, Inc.
Raul Gago-Fernandez, Instituto de Ciencia de Materiales de Madrid (CSIC)
David Horwat, Institut Jean Lamour-Universiteacute; de Lorraine
Mohan Sankaran, Case Western Reserve Univ

Symposium Support

U-C Components, Inc.
Kurt J. Lesker Company Ltd
QQ2: Optical and Electrical Properties of Plasma Synthesized and Functionalized Materials
Session Chairs
Jean-Francois Pierson
Lei Wang
Tuesday PM, April 07, 2015
Marriott Marquis, Yerba Buena Level, Salon 4/5

2:30 AM - *QQ2.01
Exploiting the Material-Specific Current-Voltage-Pressure Relationship of the Reactive Magnetron Discharge for the Growth of Transparent Conductive (Al,Ga) Doped ZnO and Nb Doped TiO2 Layers

Steffen Cornelius 1 Mykola Vinnichenko 2

1Helmholtz-Zentrum Dresden-Rossendorf e.V. Dresden Germany2Fraunhofer-Institut fuuml;r Keramische Technologien und Systeme Dresden Germany

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3:00 AM - QQ2.02
High Power Impulse Magnetron Sputtering of Highly Conductive Aluminium Doped Zinc Oxide Films Near Room Temperature

Martin Mickan 1 2 Ulf Helmersson 2 David Horwat 1

1Institut Jean Lamour-Universiteacute; de Lorraine Nancy France2Linkouml;ping University Linkouml;ping Sweden

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3:15 AM - QQ2.03
Nonthermal Plasma Synthesis of Aluminum-Doped Zinc Oxide Nanocyrstals: Doping Efficiency and Dopant Location

Benjamin Greenberg 1 Shreyashi Ganguly 1 Elijah Thimsen 2 Eray S. Aydil 1 Uwe Kortshagen 1

1University of Minnesota Minneapolis United States2Washington University in St. Louis St. Louis United States

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3:30 AM - QQ2.04
Carbide Formation and Optical Properties in Carbon: Transition Metal Nanocomposites Thin Films

Irene Heras 1 Elena Guillen 1 Matthias Krause 3 Ainhoa Pardo 4 Jose L. Endrino 2 Ramon Escobar Galindo 1

1Abengoa Research Sevilla Spain2Cranfield University Cranfield United Kingdom3Helmholtz Zentrum Dresden Rossendorf Dresden Germany4Centre Tecnologic de Manresa Manresa Spain

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3:45 AM -
OPEN DISCUSSION

4:00 AM -
BREAK

4:30 AM - *QQ2.06
Optical Studies on VO2 Thin Films

Ale Lukaszew 1

1College of William and Mary Williamsburg United States

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5:00 AM - QQ2.07
Porous Carbon Sponge with Tunable Absorbability Fabricated Using High Pressure Plasma

Do-Hyun Kim 2 1 Heon Ju Lee 1 Kyu Hwan Oh 2 Myoung-Woon Moon 1 2

1Korea Inst. Sci. Tech. (KIST) Seoul Korea (the Republic of)2Seoul National University Seoul Korea (the Republic of)

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5:15 AM - QQ2.08
Cesium-Ion Irradiated Semiconducting Single-Walled Carbon Nanotube Films for Infrared Solar Cell

Toshiro Kaneko 1 Toshiki Akama 1 Toshiaki Kato 1 Rikizo Hatakeyama 1

1Tohoku University Sendai Japan

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5:30 AM - *QQ2.09
Thermochromic Thin Film as a Smart Absorbent Layer for Solar Collectors

Fabien Capon 1 David Mercs 2 Aurelien Didelot 1 Jean-Francois Pierson 1

1Institut Jean Lamour Nancy France2Viessmann Faulquemont SAS Faulquemont France

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QQ1: Physical Vapor Deposition
Session Chairs
David Horwat
Diederik Depla
Tuesday AM, April 07, 2015
Marriott Marquis, Yerba Buena Level, Salon 4/5

10:00 AM - QQ1.01
Nucleation and Electrical Resistivity of Ultrathin TiN Films Grown by High Power Impulse Magnetron Sputtering

Fridrik Magnus 2 Seyedmohammad Shayestehaminzadeh 1 Sveinn Olafsson 1 Jon Tomas Gudmundsson 1

1University of Iceland Reykjavik Iceland2Uppsala University Uppsala Sweden

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10:15 AM - QQ1.02
Crystalline Ge Film Deposition Between Au Catalyst Film and Quartz Glass Substrate Using Magnetron Sputtering

Masaharu Shiratani 1 Daiki Ichida 1 Hyunwoong Seo 1 Naho Itagaki 1 Kazunori Koga 1

1Kyushu University Fukuoka Japan

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10:30 AM - *QQ1.03
Texture Development during Thin Film Magnetron Sputter Deposition

Diederik Depla 1 Sigelinde Van Steenberge 1

1Ghent University Ghent Belgium

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11:00 AM -
BREAK

11:30 AM - *QQ1.04
Local Epitaxial Growth in Sputtered Copper Oxide Films

Jean-Francois Pierson 1

1Institut Jean Lamour Nancy France

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12:00 PM -
OPEN DISCUSSION

12:15 PM - QQ1.06
From Solid Solutions to Fully Phase Separated Interconnected Networks in Sputter Deposited Immiscible W-Cu Thin Films

Franz Vuellers 1 Ralph Spolenak 1

1ETH Zuuml;rich Zurich Switzerland

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12:30 PM - QQ1.07
Structure and Properties of Hard Oxidation Resistant Mo-Si-B Coatings Deposited by Magnetron Sputtering of Composite Targets

Philipp Vladimirovich Kiryukhantsev-Korneev 1 Yuriy Sergeevich Pogozhev 1 Evgeny Alexandrovich Levashov 1 Dmitry Vladimirovich Shtansky 1

1National University of Science and Technology MISIS Moscow Russian Federation

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12:45 PM - QQ1.08
Reactive Plasma Synthesis of Superhard, Nanostructured Titanium-Boron-Nitrogen Thin Films

Alexios Spiliotis 1 Spyridon Kassavetis 1 2 Stelios Karamanidis 1 Panos A. Patsalas 1 2 George Vourlias 1 Stergios Logothetidis 1

1Aristotle University of Thessaloniki Thessaloniki Greece2University of Ioannina Ioannina Greece

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2015-04-08   Show All Abstracts

Symposium Organizers

Cesar Clavero, Intermolecular, Inc.
Raul Gago-Fernandez, Instituto de Ciencia de Materiales de Madrid (CSIC)
David Horwat, Institut Jean Lamour-Universiteacute; de Lorraine
Mohan Sankaran, Case Western Reserve Univ

Symposium Support

U-C Components, Inc.
Kurt J. Lesker Company Ltd
QQ4: Plasma Synthesis and Treatment of Nanoparticles and Metal/Dielectric Nanocomposite Films II
Session Chairs
Cesar Clavero
Albano Cavaleiro
Wednesday PM, April 08, 2015
Marriott Marquis, Yerba Buena Level, Salon 4/5

2:30 AM - QQ4.01
Influence of Reactive Sputtering Synthesis Conditions on the Local Chemistry, Microstructure and Plasmon Resonance-Related Properties of Au-ZnO Nanocomposite Films

William Chamorro 1 David Horwat 1

1Institut Jean Lamour-Universiteacute; de Lorraine Nancy France

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2:45 AM - *QQ4.02
Effect of Silver on the Phase Transition of Cathodic-Arc Deposited Titanium Oxide Films

Jose Luis Endrino 1 Adolfo Alfredo Mosquera 2 Violeta Navarro 3 Jose Albella 3

1Cranfield University Cranfield United Kingdom2Consejo Superior de Investigaciones Cientiacute;ficas Madrid Spain3Leiden University Leiden Netherlands

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QQ5: Plasma Surface Functionalization
Session Chairs
Raul Gago-Fernandez
Masaaki Nagatsu
Wednesday PM, April 08, 2015
Marriott Marquis, Yerba Buena Level, Salon 4/5

3:15 AM - QQ5.01
Taming The Polysulfide Shuttle in Li-S Batteries: A Functionalized Separator Obtained by Plasma Induced Graft Copolymerization

Joanna Conder 1 Sigita Urbonaite 1 Daniel Klaus Streich 1 Petr Novak 1 Lorenz Gubler 1

1Paul Scherrer Institute Villigen PSI Switzerland

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3:30 AM - QQ5.02
Plasma-Based Fabrication of Biomolecule Films and 2D Nanostructures

Matthew B. Dickerson 1 Milana C. Vasudev 2 1 Lihi Adler-Abramovich 3 Ehud Gazit 3 Joseph Slocik 1 Patrick B. Dennis 1 Timothy J. Bunning 1 Rajesh Naik 1

1Air Force Research Laboratory Wpafb United States2University of Massachusetts Dartmouth Dartmoth United States3Tel-Aviv University Tel-Aviv Israel

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3:45 AM - QQ5.03
micro;PlasmaPrinting Deposition of Amine-Containing Polymers by Means of 3-Aminopropyl Trimethoxysilane and the Application in Metal-Nanoparticle Immobilization

Jean-Paul Schalken 1 2 Peter Verhoeven 1 Alquin Stevens 1 Mariadriana Creatore 2

1InnoPhysics B.V. Eindhoven Netherlands2Eindhoven University of Technology Eindhoven Netherlands

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4:00 AM -
BREAK

4:30 AM - *QQ5.04
Plasma Surface Functionalization of Nanostructured Materials for Bio-Medical and Environmental Applications

Masaaki Nagatsu 6 7 Mihai Alexandru Ciolan 6 2 Tomy Abuzairi 6 1 Anchu Viswan 6 Akikazu Sakudo 3 Enbo Yang 6 Shubin Yang 6 4 Han Chou 7 Naoya Okada 7 Mitsuru Okada 7 Nji Raden Poespawati 5 Retno Wigajatri 5 Xiangke Wang 4 Dumitru Luca 2

1Universitas Indonesia Dupok Indonesia2Alexandru Ioan Cuza University Iasi Romania3University of the Ryukyu Naha Japan4Institute of Plasma Physics Hefei China5Universitas Indonesia Depok Indonesia6Shizuoka University Hamamatsu Japan7Shizuoka University Hamamatsu Japan

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5:00 AM - QQ5.05
Selective Plasma Functionalization of Silicon Nitride Surface for Bio Sensing Application

Salva Salmani Rezaie 1 2 Manisha Gupta 3 2 Hiofan Hoi 1 2 Carlo Montemagno 1 2 4

1University of Alberta Edmonton Canada2Ingenuity Lab Edmonton Canada3University of Alberta Edmonton Canada4National Institute for Nanotechnology Edmonton Canada

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5:15 AM - QQ5.06
Selective Biomolecules Immobilization onto Carbon Nanotubes for Biochip Sensor Applications Using Capillary Atmospheric Pressure Plasma Jet

Tomy Abuzairi 1 3 Mitsuru Okada 2 Nji Raden Poespawati 3 Retno Wigajatri 3 Masaaki Nagatsu 1 2

1Shizuoka University Hamamatsu Japan2Shizuoka University Hamamatsu Japan3Universitas Indonesia Depok Indonesia

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5:30 AM - QQ5.07
Macro and Microscopic Study of Plasma-Wood Interactions in Dielectric Barrier Discharges at Atmospheric-Pressure

Olivier Levasseur 1 Vincent Pellerin-Boudriau 1 Jacopo Profili 2 Nicolas Gherardi 2 3 Luc Stafford 1

1Universiteacute; de Montreacute;al Montreacute;al Canada2Universiteacute; de Toulouse - LAPLACE Toulouse Cedex 9 France3CNRS, LAPLACE Toulouse Cedex 9 France

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5:45 AM - QQ5.08
Wood Surface Modification by Combining Plasma Coating and Liquid Flame Spray Methods: Temperature-Wetting Properties

Maziar Sedighi Moghaddam 1 4 Golrokh Heydari 2 Mikko Tuominen 1 Matthew Fielden 3 Magnus Walinder 4 Per Claesson 2 Agne Swerin 1

1SP-Technical Research Institute of Sweden Stockholm Sweden2KTH Royal Institute of Technology Stockholm Sweden3KTH Royal Institute of Technology Stockholm Sweden4KTH Royal Institute of Technology Stockholm Sweden

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QQ3: Plasma Synthesis and Treatment of Nanoparticles and Metal/Dielectric Nanocomposite Films I
Session Chairs
Cesar Clavero
Albano Cavaleiro
Wednesday AM, April 08, 2015
Marriott Marquis, Yerba Buena Level, Salon 4/5

10:00 AM - QQ3.01
Synthesis and N-Doping In Situ of Silicon Nanoparticles by Inductive Coupled Plasma CVD

Rosa Ruggeri 1 Giovanni Mannino 1 Alessandra Alberti 1 Sebania Libertino 1 Filippo Giannazzo 1 Salvatore Francesco Lombardo 1 Agata Pennisi 2 Giuseppe Faraci 2 Antonino La Magna 1

1CNR-IMM Catania Italy2Universitagrave; di Catania Catania Italy

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10:15 AM - QQ3.02
Size Control of Gas Phase Grown Silicon Nanocrystals by Varying the Plasma OFF Time in Silane Pulsed Plasma

Akshatha Mohan 1 Ioannis Poulios 1 Ruud Schropp 2 3 Jatin Rath 1

1Utrecht University Eindhoven Netherlands2Energy Research Center of the Netherlands (ECN) Eindhoven Netherlands3Eindhoven University of Technology Eindhoven Netherlands

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10:30 AM - *QQ3.03
One-Step Generation of Alloyed, Core@Shell and Core@Shell Nanoparticles by Gas Aggregation

Yves Huttel 1

1Instituto de Ciencia de Materiales de Madrid Madrid Spain

Show Abstract

11:00 AM -
BREAK

11:30 AM - *QQ3.04
Plasma Deposition Processes for Synthesis of Nanocrystals In Dielectric Matrices: Fine Control of the Nanocomposite Properties for a Broad Spectrum of Applications

Kremena Makasheva 1

1LAPLACE, University of Toulouse Toulouse France

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12:00 PM - QQ3.05
Plasma-Induced In-Flight Coating of Silicon Nanoparticles with a Polyaniline Shell

Ozgul Yasar-Inceoglu 2 Lanlan Zhong 1 Lorenzo Mangolini 2 1

1University of California, Riverside Riverside United States2University of California, Riverside Riverside United States

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12:15 PM - *QQ3.06
Sputtering as Base Technique for the Production of Noble Metal - Oxide Nanocomposite Coatings

Albano Cavaleiro 1

1University of Coimbra Coimbra Portugal

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12:45 PM - QQ3.07
Single Step Plasma Synthesis of Carbon-Coated, Sub-10-nm Si, 3C-SiC, Ge, and beta;-Sn Nanocrystals

Rohan P Chaukulkar 1 Koen de Peuter 3 Paul Stradins 2 Sumit Agarwal 1

1Colorado School of Mines Golden United States2National Renewable Energy Lab Golden United States3ASML Eindhoven Netherlands

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2015-04-09   Show All Abstracts

Symposium Organizers

Cesar Clavero, Intermolecular, Inc.
Raul Gago-Fernandez, Instituto de Ciencia de Materiales de Madrid (CSIC)
David Horwat, Institut Jean Lamour-Universiteacute; de Lorraine
Mohan Sankaran, Case Western Reserve Univ

Symposium Support

U-C Components, Inc.
Kurt J. Lesker Company Ltd
QQ7: In-Liquid and Atmospheric Plasma
Session Chairs
Mohan Sankaran
Francois Reniers
Thursday PM, April 09, 2015
Marriott Marquis, Yerba Buena Level, Salon 4/5

2:30 AM - QQ7.01
Correlations of In-Line Analytical Investigations of Atmospheric Pressure Plasma Processes with Surface Analysis

Sandra Richter 1 Nico Teuscher 1 Andreas Kiesow 1 Andreas Heilmann 1

1Fraunhofer Institute for Mechanics of Materials Halle (Saale) Germany

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2:45 AM - QQ7.02
Atmospheric Plasma Deposition of Transparent Organosilicate Multifunctional Coatings on Plastics in Air

Siming Dong 1 Zhenlin Zhao 1 Reinhold H. Dauskardt 1

1Stanford University Stanford United States

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3:00 AM - QQ7.03
Electrocatalytic Property and Durability of Pt Nanoparticles-Supported Nanographene Synthesized by In-Liquid Plasma

Masaru Hori 1 Hiroki Kondo 1 Tomoki Amano 1 Kenji Ishikawa 1 Makoto Sekine 1 Masafumi Ito 2 Mineo Hiramatsu 2

1Nagoya University Nagoya Japan2Meijo University Nagoya Japan

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3:15 AM - QQ7.04
Atmospheric Pressure Plasma Enhanced Reduction in Hardness of Single Crystal Sapphire for Precision Polishing

Pavan Anirudh Poosarla 1 Ashraf Bastawros 1 Abhijit Chandra 1

1Iowa State University Ames United States

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3:30 AM - *QQ7.05
Synthesis and Texturization Processes of (Super)hydrophobic Fluorinated Surfaces by Atmospheric Plasma

Francois Reniers 1 N. Vandencasteele 1 J. Mertens 1 J. Hubert 1

1Universite Libre de Bruxelles Brussels Belgium

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4:00 AM -
BREAK

4:30 AM - QQ7.06
Scalable Production of Nanowire Arrays and Powders Using Plasmas

Mahendra K. Sunkara 1 Tu Nguyen 1 2 Maria Carreon 1 Venkat Vendra 1

1University of Louisville Louisville United States2Advanced Energy Materials, LLC Louisville United States

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4:45 AM - QQ7.07
Atmospheric Pressure Plasma Based Fabrication of Paper Sensors

Ramprasad Gandhiraman 1 Dennis Nordlund 2 Vivek Jayan 1 M Meyyappan 1 Jessica E Koehne 1

1NASA Ames Research Center Moffett Field United States2SLAC National Accelerator Laboratory Menlo Park United States

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5:00 AM - QQ7.08
Plasma Electrolytic Oxidation: From Coating Growth to Physics of Plasma in Liquids

Alexandre Nomine 1 2 Julien Martin 2 Gerard Henrion 2 Thierry Belmonte 2 Cedric Noel 2 Jaafar Ghanbaja 2 Sylvie Migot 2 Bill Clyne 3 Nicholas St John Braithwaite 1

1The Open University Milton Keynes United Kingdom2Institut Jean Lamour - CNRS -Universiteacute; de Lorraine Nancy France3University of Cambridge Cambridge United Kingdom

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QQ8: Poster Session: Plasma-Based Materials Science and Engineering
Session Chairs
Thursday PM, April 09, 2015
Marriott Marquis, Yerba Buena Level, Salon 7/8/9

9:00 AM - QQ8.01
Electrical Conductivity and Corrosion Protection Properties of Amorphous Carbon Films Deposited on Stainless Steel

Junho Choi 1

1The University of Tokyo Tokyo Japan

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9:00 AM - QQ8.02
Self-Organization of Plasma and Material Processes in the Carbon Arc Discharge for Nanosynthesis

Yevgeny Raitses 1 Jonathan Ng 1 Yao-Wen Yeh 2 James Mitrani 1 Mikhail Shneider 2 Brent Stratton 1 Bruce E. Koel 2 Nan Yao 2

1Princeton Plasma Physics Laboratory Princeton United States2Princeton University Princeton United States

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9:00 AM - QQ8.03
Electrocatalytic Characteristic of Pt Nanoparticles-Supported Carbon Nanowalls for Fuel Cell Applications

Hiroki Kondo 1 Shun Imai 1 Kenji Ishikawa 1 Makoto Sekine 1 Masaru Hori 1 Mineo Hiramatsu 2

1Nagoya University Nagoya Japan2Meijo University Nagoya Japan

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9:00 AM - QQ8.04
Atmospheric Plasma Synthesis of Platinum NP on Carbon Electrodes for Fuel Cell Applications

Francois Reniers 1

1Universite Libre de Bruxelles Brussels Belgium

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9:00 AM - QQ8.05
Low-Energy Ion Damage Overrides Initial Atomic Structural Disorder in Silicon Nano-Patterning

Ana Moreno-Barrado 3 Raul Gago-Fernandez 1 Andres Redondo-Cubero 2 Luis Vazquez 1 Javier Munoz-Garcia 4 Rodolfo Cuerno 4 Mario Castro 5

1Instituto de Ciencia de Materiales de Madrid (CSIC) Madrid Spain2Universidad Autoacute;noma de Madrid Madrid Spain3Universidad Pontificia Comillas Madrid Spain4Universidad Carlos III de Madrid Madrid Spain5Universidad Pontificia Comillas Madrid Spain

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9:00 AM - QQ8.06
N and Cr (co-)Doping of TiO2 Thin Films Prepared by Reactive Magnetron Sputtering

Raul Gago-Fernandez 1 Slawomir Prucnal 3 F.J. Palomares 1 Ignacio Caretti 4 Andres Redondo-Cubero 2 Mykola Vinnichenko 5

1Instituto de Ciencia de Materiales de Madrid (CSIC) Madrid Spain2Universidad Autoacute;noma de Madrid Madrid Spain3Institute of Ion Beam Physics and Materials Research, Helmholtz Zentrum Dresden-Rossendorf Dresden Germany4Universiteit Antwerpen Wilrijk Belgium5Fraunhofer-Institut fuuml;r Keramische Technologien und Systeme (IKTS) Dresden Germany

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9:00 AM - QQ8.07
Morphology of TaN Thin Films Grown on SiO2 by Reactive High Power Impulse Magnetron Sputtering

Jon Tomas Gudmundsson 1 David Orn Thorsteinsson 1

1University of Iceland Reykjavik Iceland

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9:00 AM - QQ8.08
Nanocomposite Wear Resistant TiCrBN Thin Films Produced by Magnetron Sputtering and Pulsed Arc Evaporation of Ceramic SHS-Targets

Philipp Vladimirovich Kiryukhantsev-Korneev 1 Konstantin Kuptsov 1 Alexander Sheveiko 1 Dmitry Vladimirovich Shtansky 1

1National University of Science amp; Technology MISIS Moscow Russian Federation

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9:00 AM - QQ8.09
Tribological Coatings in Cu-B and Cu-C Systems

Philipp Vladimirovich Kiryukhantsev-Korneev 1 Andrey Bondarev 1

1National University of Science amp; Technology MISIS Moscow Russian Federation

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9:00 AM - QQ8.10
A Comparative Analysis of PECVD Passivation Layers for Integrated PZT Thin Film Capacitors

Warda Benhadjala 1 Gwenael Le Rhun 1 Thierry Mourier 1 Nelly Bosio 1 Christel Dieppedale 1 Anne Roule 1 Sandrine Perraudeau 1 Jennifer Guillaume 1 Florence Sonnerat 1 Henri Sibuet 1 Christophe Billard 1

1CEA LETI Grenoble France

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9:00 AM - QQ8.11
Modeling and Characterizing the Optical Properties of Solar Selective Coatings

Irene Heras 1 Gonzalo Rincon 1 Elena Guillen 1 Ramon Escobar Galindo 1

1Abengoa Research Sevilla Spain

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9:00 AM - QQ8.12
Inductively Coupled Plasma-Enhanced Atomic Layer Deposition of Platinum Thin Films for In-Situ Metal-Catalyzed Applications

Wen-Hao Cho 1 Bo-Heng Liu 1 Shih-Hao Chan 2 Chi-Chung Kei 1 Chia-Liang Hsu 3 Wei-Chih Peng 3 Ai-Sen Liu 3 Sheng-Hui Chen 2 Chien-Cheng Kuo 2 4 Fong-Zhi Chen 1

1Instrument Technology Research Center, NARL Hsinchu Taiwan2National Central University Jhongli Taiwan3EPISTAR Corporation Hsinchu Taiwan4National Central University Chung-Li Taiwan

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9:00 AM - QQ8.13
Nanocrystalline 3C-SiC Film as Electrochemical Sensor for Heavy Metal Ion Detection

Shih-Ming Chiu 1 Chi-Young Lee 1 Hsin-Tien Chiu 2 I-Nan Lin 3

1National Tsing Hua University Hsinchu Taiwan2National Chiao Tung Univ Hsinchu Taiwan3Tamkang Univerisity New Taipei City Taiwan

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9:00 AM - QQ8.14
In-Situ Spectroscopic Ellipsometry Study of Oxidation of Ag\Al2O3 Thin Films During Exposure to Oxygen Plasma

Amir Afshar 1 Kaveh Ahadi 1 Kenneth Charles Cadien 1

1University of Alberta Edmonton Canada

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9:00 AM - QQ8.15
Arc Plasma and Laser Processing of Novel CaO Added Mg Alloy

Cheolhee Kim 1

1KITECH Incheonsi Korea (the Republic of)

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9:00 AM - QQ8.16
Numerical Simulations for Feature Profile Formation during Plasma Etching

Chang Zhong-Long 1 Kun-Dar Li 1 Jiann-Shing Jeng 1

1National University of Tainan Tainan Taiwan

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9:00 AM - QQ8.18
Toward Uniform Deposition of Zirconium Dioxide Layer by Plasma-Enhanced Chemical Vapor Deposition under Atmospheric Pressure

WooSeok Kang 1 2 Jae-Ok Lee 1 Min Hur 1 Young-Hoon Song 1 2

1Korea Institute of Machinery amp; Materials Daejeon Korea (the Republic of)2Korea University of Science amp; Technology Daejeon Korea (the Republic of)

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9:00 AM - QQ8.19
Effect of Plasma Polymerized Zinc Oxide Interlayer on the Water Vapor Barrier Properties of Polyethylene Naphthalate Film

Jun Yong Song 1 Jung-Yong Kim 1 Hee-Jin Lee 1 Won-Kook Choi 2 Sung Ryong Kim 1

1Korea National University of Transportation Chungju Korea (the Republic of)2Korea Institute of Science and Technology Seoul Korea (the Republic of)

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9:00 AM -
QQ8.17 WITHDRAWN 3-20-15

QQ6: Plasma Surface Interactions
Session Chairs
Stefan Facsko
Richard Mark Bradley
Thursday AM, April 09, 2015
Marriott Marquis, Yerba Buena Level, Salon 4/5

9:30 AM - *QQ6.01
Nanoscale Patterns Produced by Concurrent Deposition and Ion Bombardment

Richard Mark Bradley 1

1Colorado State University Fort Collins United States

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10:00 AM - QQ6.02
Submicronic Etched Features of Silicon with High Aspect Ratio Obtained by Cryogenic Plasma Deep-Etching through Perforated Polymer Thin Films

Alexane Vital 1 2 Mohamed Boufnichel 3 Remi Dussart 2 Nicolas Gosset 2 Philippe Lefaucheux 2 Christophe Sinturel 1 Thomas Tillocher 2 Marylene Vayer 1

1CRMD CNRS/Universiteacute; d'Orleacute;ans Orleacute;ans France2GREMI CNRS/Universiteacute; d'Orleacute;ans Orleacute;ans France3STMicroelectronics Tours France

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10:15 AM - QQ6.03
Novel Approach to Generate Nitrogen-Doped Graphene: Microwave Plasma and Reduction Expansion Synthesis

Pedro J. Arias-Monje 1 2 Sarath Menon 1 Hugo Zea 2 Claudia C. Luhrs 1

1Naval Postgraduate School Monterey United States2Universidad Nacional de Colombia Bogota Colombia

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10:30 AM - *QQ6.04
Nanoripple Patterning under Medium Energy Implantation using Metal Foreign Atoms

Andres Redondo-Cubero 1 Francisco Javier Palomares 3 Katharina Lorenz 2 Arndt Muecklich 4 Rene Huebner 4 Luis Vazquez 3

1Autonomous University of Madrid Madrid Spain2Univ Tecnica-Lisboa Sacavem Portugal3CSIC Madrid Spain4Helmholtz-Zentrum Dresden-Rossendorf Dresden Germany

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11:00 AM -
BREAK

11:30 AM - QQ6.05
Plasma-Reactor Wall Interactions: Bromine-Fluorine Chemistry Duality In An Industrial Dry Etch Process

Maria Rizquez 1 2 Agnes Roussy 1 Benjamin Bortoloti 2 Jacques Pinaton 2 Yoann Goasduff 2

1EMSE-CMP Gardanne France2ST Microelectronics Rousset France

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11:45 AM - QQ6.06
Incorporation of Atoms in Nanomaterials Using the Flowing Afterglow of Microwave Plasmas at Reduced-Pressure

Luc Stafford 1 Leron Vandsburger 1 Richard Leonelli 1 Jason Ferrara 1

1Universiteacute; de Montreacute;al Montreacute;al Canada

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12:00 PM - *QQ6.07
Interaction of Highly Charged Ions with Surfaces and Nanomembranes

Stefan Facsko 2 Richard Wilhelm 2 Elisabeth Gruber 1 Robert Ritter 2 Rene Heller 2 Fritz Aumayr 1

1TU Wien - Vienna University of Technology Vienna Austria2Helmholtz-Zentrum Dresden-Rossendorf Dresden Germany

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