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2006 MRS Spring Meeting Logo2006 MRS Spring Meeting & Exhibit

April 17-21, 2006
| San Francisco
Meeting Chairs: J. Charles Barbour, Paul S. Drzaic, Gregg S. Higashi, Viola Vogel

Symposium LL : Ion Beams, Thin Films and Laser Annealing

2006-04-20   Show All Abstracts

Symposium Organizers

Williams Jim Australian National University
Eaglesham David Applied Materials, Inc.
LL1: Ion Implantation and Annealing including Thermodynamics
Session Chairs
David Eaglesham
Jim Williams
Thursday PM, April 20, 2006
Room 3000 (Moscone West)

9:00 AM - LL1

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9:15 AM - **LL1.1
John Poate and Bell Labs: A Young Man with a Mission.

Walter Brown 1
1 Whitaker Lab, Lehigh University, Bethlehem, Pennsylvania, United States

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9:45 AM - **LL1.2
Molecular Ion Implantation: The Solution to Low Energy High Dose Implants.

Dale Jacobson 1
1 , SemEquip, Inc., Billerica, Massachusetts, United States

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10:15 AM - **LL1.3
Megavolts and Nanometers.

Sjoerd Roorda 1
1 , University of Montreal, Montreal, Quebec, Canada

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10:45 AM - **LL1.4
Optical Properties of Er Doped Silicon-rich Oxides.

R. G. Elliman 1 , M. Forcales 1 , A. R. Wilkinson 1 , N. J. Smith 1
1 Electronic Materials Engineering Dept., Australian National University, Canberra, Australian Capital Territory, Australia

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11:15 AM - LL1

LL2: Defects, Impurity Effects and Applications
Session Chairs
Greg Olson
Frans Spaepen
Thursday PM, April 20, 2006
Room 3000 (Moscone West)

11:30 AM - **LL2.1
Erbium Ion Implantation: From Planar Amplifiers to Nanophotonics.

Albert Polman 1
1 FOM Institute, AMOLF, Amsterdam Netherlands

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12:00 PM - **LL2.2
Defect and Impurity Engineering in Silicon.

Francesco Priolo 1
1 , University of Catania, Catania Italy

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12:30 PM - **LL2.3
The Tale of the Extra Interstitial.

David Eaglesham 1
1 , Applied Materials, Inc., Santa Clara, California, United States

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LL3: Laser Annealing
Session Chairs
Gregory Clark
Frans Saris
Thursday PM, April 20, 2006
Room 3000 (Moscone West)

2:30 PM - **LL3.1
Renaissance of Laser Annealing in Silicon: Issues for a New Millenium.

Michael Thompson 1
1 , Cornell University, Ithaca, New York, United States

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3:00 PM - **LL3.2
Laser Annealing of GaAs Based Materials.

Michael Aziz 1 , M. R. Pillai 2 , T. Kim 1 , V. Narayanamurti 1
1 Div. of Eng. & App. Sciences, Harvard University, Cambridge, Massachusetts, United States, 2 , Functional Coating Technology, Evanston, Illinois, United States

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3:30 PM - **LL3.3
From Laser Annealing to RTA to SOI and SiO, and LEGO too: Adventures in Materials Science.

G. K. Celler 1
1 , Soitec USA, Peabody, Massachusetts, United States

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4:00 PM - LL3

LL4: Thin Films
Session Chairs
Len Feldman
Julia Phillips
Thursday PM, April 20, 2006
Room 3000 (Moscone West)

4:30 PM - **LL4.1
Atomistic Modeling of the Deposition of Thin Films for Silicon Devices.

George Gilmer 1
1 , Lawrence Livermore National Lab, Livermore, California, United States

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5:00 PM - **LL4.2
Schottky Barrier Height Formation: From Epitaxial Silicide Interfaces to Metal-organic Junctions.

Raymond Tung 1
1 , Brooklyn College, Brooklyn, New York, United States

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5:30 PM - **LL4.3
Mysteries of the Stranski-Krastanov Transition Unravelled.

Tony Cullis 1
1 Dept. of Electronic & Electrical Engineering, University of Sheffield, Sheffield United Kingdom

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