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2007 MRS Spring Meeting Logo2007 MRS Spring Meeting & Exhibit

April 9-13, 2007
| San Francisco
Meeting Chairs: Timothy J. Bunning, Harold Y. Hwang, Debra Kaiser, Jennifer A. Lewis

Symposium A : Amorphous and Polycrystalline Thin-Film Silicon Science and Technology

2007-04-10   Show All Abstracts
A1: Film Growth I
Session Chairs
Uwe Kortshagen
Tuesday PM, April 10, 2007
Room 3001 (Moscone West)

9:30 AM - **A1.1
Experimental and Numerical Studies on a Large Area Amorphous Silicon Film Deposition Using Capacitively Coupled Very High-frequency Plasma.

Koji Satake 1 , Keisuke Kawamura 2 , Hideo Yamakoshi 1 , Yoshiaki Takeuchi 2
1 Advanced Tec