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2008 MRS Spring Meeting & Exhibit

March 24-28, 2008 | San Francisco
Meeting Chairs: Jeffrey C. Gelpey, Robert J. Hamers, Paul Muralt, Christine A. Orme

Symposium A : Amorphous and Polycrystalline Thin-Film Silicon Science and Technology

2008-03-25   Show All Abstracts

Symposium Support

Asahi Glass Co Ltd
AU Optronics Corp
CYTEK Taiwan Ltd
Fuji Electric Advanced Technology Co Ltd
Industrial Technology Research Institute
Merck Chemicals UK
Trillion Science Inc
ULVAC Technologies Inc
United Solar Ovonic LLC
A1: Film Growth
Session Chairs
Tuesday PM, March 25, 2008
Room 2002 (Moscone West)

9:30 AM - **A1.1
Crystallinity Uniformity of Microcrystalline Silicon Thin Films Deposited in Large Area Radio Frequency Capacitively-coupled Reactors.

Benjamin Strahm 1 , Alan Howling 1 , Christoph Hollenstein 1
1 Centre de Recherches en Physique des Plasmas (CRPP), Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne Switzerland

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10:00 AM - A1.2
High Rate and Low Temperature Silicon Epitaxy via Unique Cluster Enhanced Mesoplasma Chemical Vapor Deposition.

Makoto Kambara 1 , Jose Diaz 1 , Toyonobu Yoshida 1
1 Department of Materials Engineering, The University of Tokyo, Tokyo Japan

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10:15 AM - A1.3
Cone Kinetics Model: New Insights into the Morphologies of Mixed-phase Silicon Film Growth.

Howard Branz 1 , Paul Stradins 1 , Chun-Sheng Jiang 1 , Charles Teplin 1
1 National Center for Photovoltaics, National Renewable Energy Laboratory, Golden, Colorado, United States

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10:30 AM - A1.4
Evolution of Film Crystalline Structure During the Ultrafast Deposition of Crystalline Si Films.

Haijun Jia 1 , Hiroshi Kuraseko 2 , Hiroyuki Fujiwara 1 , Michio Kondo 1
1 Research Center for Photovoltaics, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Japan, 2 , The Furukawa Electric Co., Ltd. , Chiba Japan

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10:45 AM - A1.5
Understanding the Amorphous-crystalline Interface Mobility in Silicon by Means of Atomistic Simulations.

Alessandro Mattoni 1 , Christophe Krzeminski 3 , Evelyne Lampin 3 , Fabrizio Cleri 4 3 , Luciano Colombo 2 1
1 SLACS-INFM Sardinian Laboratory for Computational Materials Science, CNR, Monserrato (CA) Italy, 3 Institute of Electronics, Microelectronics and Nanotechnology , CNRS, Villeneuve d’Ascq France, 4 , University of Science and Technology of Lille, Villeneuve d’Ascq France, 2 Dept of Physics, University of Cagliari, Monserrato (CA) Italy

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11:00 AM - *