Christian Monachon1
Attolight AG1
Cathodoluminescence spectroscopy is a technique consisting in the analysis of the light emitted in the UV-IR range by a material upon its excitation with an electron beam. This technique is particularly useful in semiconductors, where it allows local probing of the material properties such as quantum well properties, dopant concentration, or alloy composition. Another of its exciting prospects is plasmonics, where it allows direct modal probing of nanostructures.<br/><br/>Several new developments and technical improvements make it more flexible than ever, and open the way for unparalleled light injection densities. This contribution will treat the technological choices made at Attolight in order to foster ever better and more consistent results, in particular in terms of mirror architecture vs collection efficiency, as well as field of view. Necessary constraints on the electron microscope will also be reviewed and explained in order to outline the capabilities as well as limits of light injection and collection in a STEM.