MRS Meetings and Events


EL07.09.28 2023 MRS Fall Meeting

The study of the intense pulsed light sintering process of BaTiO3 nanoparticles added with graphene oxide for the realization of a high-k dielectric layers.

When and Where

Nov 29, 2023
8:00pm - 10:00pm

Hynes, Level 1, Hall A



Seok-hoon Jeong1,Jong-Whi Park1,Hak-Sung Kim1,2

Hanyang University1,Institute of Nano Science and Technology2


Seok-hoon Jeong1,Jong-Whi Park1,Hak-Sung Kim1,2

Hanyang University1,Institute of Nano Science and Technology2
<b>Abstract</b><br/>Conventional photolithography technology is a technology for manufacturing existing devices, and has disadvantages such as complicated process problems, material loss, and expensive equipment. On the other hand, printed electronics technology is attracting attention because it can easily implement patterns through printing and coating processes using ink and solution materials. The material loss could be reduced through exposure and etching processes for patterning. However, high-temperature and long-term annealing and sintering process were required to realize high quality electrode and semiconductor layer. Accordingly, various annealing/sintering methods have been developed. Among the various methods, the thermal annealing process has disadvantages of complicated facilities for maintain the high temperature and long process time. In the case of laser annealing method, the process time could be shortened, but the disadvantage of the expensive equipment and the small annealing area. In addition, the deep-ultraviolet (UV) irradiation method can also reduce damage to the substrate material, but the process time is long and additional facilities such as inert gas was required. On the other hand, the IPL sintering method can sinter the material of a large area in millisecond units at room temperature and normal pressure using a visible ray xenon lamp. The BaTiO<sub>3</sub> has a high dielectric constant but a relatively low band gap. The low band gap has the disadvantage of a large leakage current, so the other materials, which has the adequate band gap, was used for recent industry. In this study, the disadvantages of BaTiO<sub>3</sub> was compensated by adding the graphene oxide. In addition, the hybrid layer composed of BaTiO<sub>3</sub> and graphene oxide was sintered by using IPL irradiation process. Through various analysis, the sintering characteristics, dielectric properties, and crystallinity of this hybrid layer were investigated.<br/><br/><b>Acknowledgment</b><br/>This work was supported by Korea Institute of Energy Technology Evaluation and Planning(KETEP) grant funded by the Korea government(MOTIE)(20212020800090, Development and Demonstration of Energy-Efficiency Enhanced Technology for Temperature-Controlled Transportation and Logistics Center) and this work was supported by the Korea Institute of Energy Technology Evaluation and Planning(KETEP) and the Ministry of Trade, Industry & Energy(MOTIE) of the Republic of Korea (No. 20206910100160).


composite | graphene

Symposium Organizers

Gabriela Borin Barin, Empa
Shengxi Huang, Rice University
Yuxuan Cosmi Lin, TSMC Technology Inc
Lain-Jong Li, The University of Hong Kong

Symposium Support

Montana Instruments

Oxford Instruments WITec
Raith America, Inc.

Session Chairs

Gabriela Borin Barin
Yuxuan Cosmi Lin

In this Session

Large-Area, Pulsed Laser Deposition of MoS2/a-BN Heterostructures for Back-Gate Field Effect Transistors Applications

A Study of Transport and Optical Properties of Liquid Nitrogen-Assisted Deposition of Titanium Oxynitride Thin Films

High-Performance Electromechanical Power Generation of Lithography-Free Large-Scale MoS2 Monolayer Film Harvesters

An Investigation of Lithium and Cobalt Intercalation Method in 2D Transition Metal Dichalcogenides

Effect of Hot-Wire Oxidization and Sulfur Annealing on Layered p-MoS2 for TFT Application

Photoelectrochemical Polymerization (PEP) of EDOT for Formation of Pattered PEDOT at Specific Arbitrary Regions on Hematite (α-Fe2O3)

Spatially Resolved and In Situ Electrochemical Imaging on Two-Dimensional Materials using Scanning ElectroChemical Cell Microscopy (SECCM)

Nanowire-Based Sensor Platform for Breath Analysis

Sensitive Microwave Spectroscopy of Van der Waals Materials with Coplanar Waveguides

Ultratrace PFAS Detection using Amplifying Fluorescent Polymers

View More »

Publishing Alliance

MRS publishes with Springer Nature